CN101635430A - Method for manufacturing laminated LD fiber light guide vertebra pumping fiber laser - Google Patents

Method for manufacturing laminated LD fiber light guide vertebra pumping fiber laser Download PDF

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Publication number
CN101635430A
CN101635430A CN200810117072A CN200810117072A CN101635430A CN 101635430 A CN101635430 A CN 101635430A CN 200810117072 A CN200810117072 A CN 200810117072A CN 200810117072 A CN200810117072 A CN 200810117072A CN 101635430 A CN101635430 A CN 101635430A
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vertebra
fiber
light guide
photoconduction
pumping
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CN101635430B (en
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王大拯
冯小明
王勇刚
刘素平
马骁
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Institute of Semiconductors of CAS
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Institute of Semiconductors of CAS
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Abstract

The invention discloses a method for manufacturing a laminated LD fiber light guide vertebra pumping fiber laser, which is characterized by comprising the following steps: step 1, machining and manufacturing a light guide vertebra on a quartz or special glass material by adopting an optical micromachining process, wherein the light guide vertebra is of a strip hexahedron, the section of one longitudinal end of the light guide vertebra is inclined and manufactured with a fiber groove, and the section of the other longitudinal end of the light guide vertebra is a bar side face; step 2, fixedly connecting a plurality of clad fibers to the fiber groove of the light guide vertebra side by side in turn; step 3, sticking a copper sheet to the outside of the clad fiber of the outermost side; step 4, plating a high-reflectance gold film on the copper sheet; and step 5, totally plating the high-reflectance gold film on the rest four faces of the strip hexahedral light guide vertebra except the fiber groove and the bar side face.

Description

The manufacture method of laminated LD fiber light guide vertebra pumping fiber laser
Technical field
The present invention relates to the manufacture method of semiconductor pumped fiber laser, particularly a kind of laminated LD fiber light guide vertebra pumping fiber laser.
Background technology
The pumping coupling technique is as one of core technology of high-capacity optical fiber laser and fiber amplifier, purpose is to be coupled into the doubly clad optical fiber inner cladding that diameter has only hundreds of microns to the LD pumping light power of tens watts even hundreds of watts, to obtain high pump power.In the evolution of high-capacity optical fiber laser, the end pumping coupling technique is comparatively simple mode.The pump light that this mode is normally earlier sent LD is coupled into multimode fiber, or directly with lenticule to the collimating of LD than Vernonia parishii Hook angle pump light, and then the scioptics system focuses on pump light and is coupled into doubly clad optical fiber by fiber end face.Fiber end face is used to carry out the end pumping coupling, therefore, can't fuse to be used for fiber amplifier with other optical fiber.In addition, this mode need adopt high-precision multidimensional optical fiber regulating system, the stability of a system problem of also having brought the drift because of regulating system to cause.In view of this, the optical fiber side-pumping coupling technique is used for pump light is coupled into the also expansion gradually of research of doubly clad optical fiber inner cladding.The characteristics that are directed to doubly clad optical fiber have successively developed multiple profile pump coupling technique, comprise: coupler side, v type groove side coupling technique, pyrometric cone profile pump coupling technique, fiber angle grinding and polishing side coupling technique, the side coupling technique of embedded prism, utilize metal grating to carry out the profile pump coupling technique, utilize tapered planar waveguide to carry out profile pump coupling technique etc.
Summary of the invention
The object of the present invention is to provide a kind of manufacture method of laminated LD fiber light guide vertebra pumping fiber laser, to solve the problem that can't adopt the directly efficient pumping double-clad optical fiber laser of lamination LD at present, for the profile pump mode of studying and design double-clad optical fiber laser and amplifier provides a kind of new manufacture method.
For achieving the above object, the invention provides a kind of manufacture method of laminated LD fiber light guide vertebra pumping fiber laser, it is characterized in that, comprise the steps:
Step 1: adopt optics micro fabrication processing and fabricating photoconduction vertebra on quartz or special glass material, this photoconduction vertebra is the hexahedron of strip, and the section of its vertical end is oblique, and is manufactured with fiber grooves, and vertically the section of the other end is a bar bar face;
Step 2: on the fiber grooves of photoconduction vertebra, be connected with a plurality of cladded fibers successively side by side;
Step 3: at outer side bonds one copper sheet of outermost cladded fiber;
Step 4: plating high reflectance gold film on copper sheet;
Step 5: except that fiber grooves and bar bar face, all the other four sides are plating high reflectance gold film all with the hexahedral photoconduction vertebra of strip.
Wherein the bar bar face of the hexahedral photoconduction vertebra of strip is that the one side on trapezoidal, trapezoidal bar bar face base is the hexahedral long side of strip, and the plane on this base is trapezoidal, and the another side relative with the plane also is trapezoidal, and two plane parallel.
The long 6cm of the groove of photoconduction vertebra wherein, its radius of curvature is 200um, is complementary with cladded fiber.
Wherein the length of side of the minor face of the bar bar face of photoconduction vertebra is 1cm, and the length of side of hypotenuse is 3cm.
Wherein the axial angle of two of the photoconduction vertebra parallel planes and fiber grooves is 10 degree, and the length of side of the long side on these two parallel planes is respectively 6cm and 15cm.
Wherein the size that the copper sheet length and width are high is respectively 150mm * 5mm * 0.1mm.
Description of drawings
Below, further specify structure of the present invention, characteristics in conjunction with the drawings to the detailed description of specific embodiment, wherein:
Fig. 1 is a 3 D stereo schematic diagram of the present invention.
Embodiment.
Laminated LD fiber light guide vertebra pumping fiber laser technology of the present invention, adopt chemical corrosion, the little processing of precision optical machinery, the little processing of precision optics, the light refractive index coupling is gluing and etc. kinds of processes, under super stationary ring border, finish.
See also shown in Figure 1ly, the invention provides a kind of manufacture method of laminated LD fiber light guide vertebra pumping fiber laser, comprise the steps:
Step 1: adopt optics micro fabrication processing and fabricating photoconduction vertebra 2 on quartz or special glass material, this photoconduction vertebra 2 is the hexahedron of strip, the section of its vertical end is oblique, and be manufactured with fiber grooves 3, purpose is that the doubly clad optical fiber inner cladding can be bonded together with the photoconduction vertebra with mating.Vertically the section of the other end is a bar bar face 4; This bar bar face 4 is trapezoidal, the one side on trapezoidal bar bar face 4 bases is the hexahedral long side of strip, one plane 5 on this base is trapezoidal, the another side relative with plane 5 also is trapezoidal, and two planes 5 are parallel, be mainly used in divergent beams reflection, make it under satisfying the situation of Brewster angle, to enter in the doubly clad optical fiber inner cladding lamination LD slow-axis direction;
Step 2: on the fiber grooves 3 of photoconduction vertebra 2, be connected with a plurality of doubly clad optical fibers 1 successively side by side; The long 6cm of the groove of this photoconduction vertebra 2, its radius of curvature is 200um, is complementary with cladded fiber 1; The length of side of the minor face 6 of the bar bar face 4 of this photoconduction vertebra 2 is 1cm, the length of side of hypotenuse 7 is 3cm, and such dimensional parameters can make the long bar bar of 1cm along hypotenuse 7 parallel arrangements, forms laminated construction, calculate according to bar stripe pitch 1.8mm, can make the LD pump light of 16 laminations enter the photoconduction vertebra; Two parallel planes 5 of photoconduction vertebra 2 and fiber grooves 3 axial angles are 10 degree, and this angle can be done slightly inching according to the size of the Brewster angle of interior surrounding layer, but must make the Brewster angle of this angle less than interior surrounding layer.The length of side on two parallel planes 5 is respectively 6cm and 15cm;
Step 3: at outer side bonds one copper sheet 8 of outermost cladded fiber 1, the high size of these copper sheet 8 length and width is respectively 150mm * 5mm * 0.1mm;
Step 4: plating high reflectance gold film or 10 degree angles are to the high anacamptics film of pump light on copper sheet 8, and purpose is that reflected back is wherein once more for the pump light that will transmit from inner cladding;
Step 5: with the hexahedral photoconduction vertebra 2 of strip except that fiber grooves 3 and bar bar face 4, all the other four sides are plating high reflectance gold film all, purpose is that pump light all is limited in the photoconduction vertebra, and pump light can not gone out with regard to transmission before entering the doubly clad optical fiber inner cladding.
Embodiment
Please consult Fig. 1 again, at first, be wrapped in one section very long doubly clad optical fiber 1 precision on the cylinder abreast, take out cylinder, get long parallel double cladded fiber 1 part of one section 5cm, as shown in Figure 1, the overlay and the surrounding layer of this each root doubly clad optical fiber 1 of part are respectively removed 5cm, expose inner cladding by the chemical corrosion means.
Then, go out photoconduction vertebra 2 as shown in the figure by the optics software design, the curvature of fiber grooves 3 is identical with 400um doubly clad optical fiber 1 inner cladding, and the degree of depth is 200um.Fiber grooves 3 axial angles with two parallel planes 5 are 10 degree.Bar bar face 4 is vertical with two parallel planes 5, a narrowest length of side 1cm, two the longest length of side 3cm.The minor face of two parallel planes 5 is 6cm, and long limit is 15cm.Adopt the precision optics micro fabrication on the silica glass material of high permeability, to process this photoconduction vertebra 2.Totally six of this photoconduction vertebras 2, except that fiber grooves 4 and bar bar face, all the other four sides are plating high reflectance gold film all.Be close to the bar bar face 4 of photoconduction vertebra 2 behind the laminated semiconductor laser array process beam shaping (fast axial compression is contracted) and place, and make bar bar direction parallel with 1cm limit 6 directions.
At last, the doubly clad optical fiber of removing surrounding layer handled well with optics refractive index match glue 9 parallel handles 1 parallel closely sticking and, outside sense organ makes that light refractive index coupling glue 9 is smooth in each contact position seam, combine together, reinforce refractive index match glue more than 9 three ten seconds with uviol lamp, make its curing.Divest the doubly clad optical fiber 1 usefulness optics refractive index match glue 9 of surrounding layer sticking with becomes optical fiber to arrange after, outermost optical fiber is inserted in the fiber grooves 3 of photoconduction vertebra 2.Process the copper sheet 8 that the length and width height is respectively 150mm*5mm*0.1mm by the precision optical machinery processing technology, and plating high reflectance gold film, place optical fiber row's opposite side.Light the lamination laser, the repeatedly reflection that laser beam is bored 2 inboard high reflectance gold films through leaded light finally enters doubly clad optical fiber 1, carry out the side face pumping, the light that spills from doubly clad optical fiber row carries out pumping once more through the copper sheet 8 reflected back doubly clad optical fibers row of gold-plated film.

Claims (6)

1, a kind of manufacture method of laminated LD fiber light guide vertebra pumping fiber laser is characterized in that, comprises the steps:
Step 1: adopt optics micro fabrication processing and fabricating photoconduction vertebra on quartz or special glass material, this photoconduction vertebra is the hexahedron of strip, and the section of its vertical end is oblique, and is manufactured with fiber grooves, and vertically the section of the other end is a bar bar face;
Step 2: on the fiber grooves of photoconduction vertebra, be connected with a plurality of cladded fibers successively side by side;
Step 3: at outer side bonds one copper sheet of outermost cladded fiber;
Step 4: plating high reflectance gold film on copper sheet;
Step 5: except that fiber grooves and bar bar face, all the other four sides are plating high reflectance gold film all with the hexahedral photoconduction vertebra of strip.
2, the manufacture method of laminated LD fiber light guide vertebra pumping fiber laser according to claim 1, it is characterized in that, wherein the bar bar face of the hexahedral photoconduction vertebra of strip is trapezoidal, the one side on trapezoidal bar bar face base is the hexahedral long side of strip, the plane on this base is trapezoidal, the another side relative with the plane also is trapezoidal, and two plane parallel.
3, the manufacture method of laminated LD fiber light guide vertebra pumping fiber laser according to claim 1 is characterized in that, the long 6cm of the groove of photoconduction vertebra wherein, and its radius of curvature is 200um, is complementary with cladded fiber.
4, the manufacture method of laminated LD fiber light guide vertebra pumping fiber laser according to claim 1 is characterized in that, wherein the length of side of the minor face of the bar bar face of photoconduction vertebra is 1cm, and the length of side of hypotenuse is 3cm.
5, the manufacture method of laminated LD fiber light guide vertebra pumping fiber laser according to claim 1, it is characterized in that, wherein the axial angle of two of the photoconduction vertebra parallel planes and fiber grooves is 10 degree, and the length of side of the long side on these two parallel planes is respectively 6cm and 15cm.
6, the manufacture method of laminated LD fiber light guide vertebra pumping fiber laser according to claim 1 is characterized in that, wherein the size that the copper sheet length and width are high is respectively 150mm * 5mm * 0.1mm.
CN2008101170729A 2008-07-23 2008-07-23 Method for manufacturing laminated LD fiber light guide vertebra pumping fiber laser Expired - Fee Related CN101635430B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103050882A (en) * 2012-12-07 2013-04-17 中国科学院西安光学精密机械研究所 Solid laser beam amplifier using side pumping of optical fiber light guide and laser

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1186650C (en) * 2002-09-26 2005-01-26 中国科学院半导体研究所 Method for making optical fiber beam bunching array

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103050882A (en) * 2012-12-07 2013-04-17 中国科学院西安光学精密机械研究所 Solid laser beam amplifier using side pumping of optical fiber light guide and laser
CN103050882B (en) * 2012-12-07 2016-03-02 中国科学院西安光学精密机械研究所 Adopt solid laser amplifier and the laser of optical fiber light-guiding laser diode-side-pumped

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