CN101630893A - Vacuum magnetic transmission mechanism - Google Patents
Vacuum magnetic transmission mechanism Download PDFInfo
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- CN101630893A CN101630893A CN200910041642A CN200910041642A CN101630893A CN 101630893 A CN101630893 A CN 101630893A CN 200910041642 A CN200910041642 A CN 200910041642A CN 200910041642 A CN200910041642 A CN 200910041642A CN 101630893 A CN101630893 A CN 101630893A
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- magnetic
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- vacuum chamber
- drive
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- 230000005540 biological transmission Effects 0.000 title claims abstract description 90
- 239000011553 magnetic fluid Substances 0.000 claims abstract description 24
- 239000000696 magnetic material Substances 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims description 5
- 238000005265 energy consumption Methods 0.000 abstract description 6
- 238000009434 installation Methods 0.000 abstract description 5
- 230000003749 cleanliness Effects 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000000843 powder Substances 0.000 description 6
- 230000002950 deficient Effects 0.000 description 4
- 230000003993 interaction Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000011368 organic material Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005469 granulation Methods 0.000 description 1
- 230000003179 granulation Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Abstract
The invention discloses a vacuum magnetic transmission mechanism which is suitable for driving a mechanical mechanism in a vacuum chamber to rotate, comprising a driving device, a driving shaft, a driven shaft, a magnetic fluid transmission device, a gear transmission device and a magnetic force transmission device, wherein, the magnetic fluid transmission device is positioned outside the vacuum chamber; the driving shaft passes through the magnetic fluid transmission device and extends into the vacuum chamber to be connected with the gear transmission device which is connected with the magnetic force transmission device; the magnetic force transmission device is fixedly connected with the driven shaft which is connected with the mechanical mechanism in the vacuum chamber; the gear transmission device is composed of a plurality of adjacent gears which are mutually meshed; the driving device drives the gear of the gear transmission device to rotate, the rotation of the gear drives a magnetic force driving wheel to rotate, and the magnetic force driving wheel drives the mechanical mechanism to rotate. The invention has small driving energy consumption, high clean degree, super silence, convenient installation and simple and compact structure.
Description
Technical field
The present invention relates to a kind ofly, relate in particular to a kind of vacuum magnetic transmission mechanism that mechanical mechanism in the vacuum chamber on the Organic Light Emitting Diode production line is provided rotary power carrying out the transmission mechanism that power transmits in the vacuum environment industry.
Background technology
Along with constant development of economy, the continuous progress of science and technology and the minimizing day by day of world energy sources, people more and more pay attention to the saving and the utilization ratio of the energy aborning, make the harmony between man and nature development to satisfy the novel industrialization road requirement of China.
For example, vacuum environment is required in the display industry of high digital product, enterprise for energy savings, reduce production costs, all strengthens and invests R﹠D intensity, constantly pursue energy-conservation new product.Wherein, the OLED display screen is exactly a kind of new product in the digital product, OLED is Organic Light Emitting Diode (OrganicLight-Emitting Diode), be called organic electric laser again and show (Organic ElectroluminesenceDisplay, OELD), because possess frivolous, characteristics such as power saving, therefore on the display screen of digital product, obtained extensive use, and has bigger market potential, at present all focus on the flat-panel monitor to the application of OLED in the world, because OLED be unique on using can and the TFT-LCD technology of mentioning in the same breath, and be in present all Display Techniques, unique large scale of making, high brightness, the Display Technique of the soft screen of high-resolution can be made the thickness the same with paper; But the OLED display screen is also different with traditional TFT-LCD display screen, it need not backlight, adopt extremely thin coating of organic material and glass substrate, when electric current passes through, these organic materials will be luminous, and the OLED display screen can do lighter and thinnerly, and visible angle is bigger, and can significantly save electric energy; Correspondingly, all devices of manufacturing OLED display screen must guarantee the required precision of OLED display screen.Therefore, as raw-material quality of Organic Light Emitting Diode OLED and precision, the automaticity of transmission mechanism in the transmission course, cleannes, and low noise is particularly important.
Existing a kind of transmission mechanism that is used for the mechanical mechanism in the vacuum chamber is provided rotary power, mechanical mechanism links to each other with power transmission shaft, power transmission shaft links to each other with gear drive, gear drive links to each other with driving arrangements such as motors by driving shaft, power transmission shaft can obtain revolving force from driving shaft, promptly when driving arrangements such as motor started, this power transmission shaft just can drive the mechanical structure rotation.Above-mentioned load mode causes mechanical wear easily owing to mostly adopt the kind of drive of the intermeshing direct contact of gear in the process of transmission, cause the transmission energy consumption; Simultaneously, because each motion assembly in the transmission, gear for example, the contact of power transmission shaft, driving shaft etc., make easily between each motion assembly of transmission mechanism because friction and granulation, produce dust and enter in the vacuum chamber with mechanical mechanism, influenced the cleannes of product, and produced bigger noise in the transmission process; In addition, the friction between each motion assembly makes transmission mechanism useful life shorten.
Therefore, be badly in need of a kind of transmission less energy consumption, high cleanliness, the transmission mechanism that the mechanical mechanism in the vacuum chamber is provided rotary power that is applicable to super-silent, easy for installation, simple and compact for structure.
Summary of the invention
The object of the present invention is to provide a kind of transmission less energy consumption, high cleanliness, super-silent, easy for installation, simple and compact for structure be applicable to the mechanical mechanism in the vacuum chamber provide rotary power vacuum magnetic transmission mechanism.
To achieve these goals, the technical scheme of invention is: a kind of vacuum magnetic transmission mechanism is provided, be applicable to the mechanical mechanism rotation that drives in the vacuum chamber, wherein, described vacuum magnetic transmission mechanism comprises drive unit, driving shaft, driven shaft, the magnetic fluid transmission device, gear drive and magnetic drive device, described magnetic fluid transmission device is installed on the locular wall of described vacuum chamber and is positioned at outside the described vacuum chamber, one end of described driving shaft is fixedlyed connected with described drive unit, the other end of described driving shaft passes described magnetic fluid transmission device and extends in the vacuum chamber and with an end of described gear drive and is connected, the other end of described gear drive is connected with an end of described magnetic drive device, the other end of described magnetic drive device is fixedlyed connected with described driven shaft, mechanical mechanism in described driven shaft and the vacuum chamber is connected, described loading drive gear is changed to adjacent intermeshing a plurality of gears and forms, described magnetic drive device is that a plurality of magnetic drives wheels with magnetic of adjacent mutual the action of a magnetic field are formed, described drive unit drives the gear rotation of described gear drive, the rotation of described gear drives the rotation of described magnetic drives wheel, and described magnetic drives wheel drives described mechanical mechanism rotation.
Preferably, described magnetic fluid transmission device comprises the magnetic fluid assembly of support housing and permanent magnetic material, described magnetic fluid assembly is placed in the described support housing, offer installing hole on the locular wall of described vacuum chamber, described support housing sealing and fixing is installed on the described installing hole, and described driving shaft and described support housing articulate.Described magnetic fluid transmission device is applicable to the steady safe operation of driving shaft of carrying out back and forth or rotating simultaneously, and has effectively guaranteed sealing property, has solved the seal leakage problem of drive unit outputting power.
Preferably, adjacent intermeshing a plurality of gears of described gear drive are respectively first gear and second gear, described first gear is fixedlyed connected with described driving shaft, described second gear has power transmission shaft, and described power transmission shaft articulates with the locular wall of described vacuum chamber and fixedlys connected with described magnetic drive device.Described drive unit outputting power passes to gear drive by the driving shaft that passes described vacuum-chamber wall, make that described second gear of described first gear driven is more steady, the layout of structure is compact and reasonable more, avoided playing the effect of deceleration simultaneously because of rotation does not steadily cause whole vacuum magnetic transmission mechanism to vibrate.
Preferably, a plurality of magnetic drives wheels with magnetic of the adjacent mutual the action of a magnetic field of described magnetic drive device are respectively first magnetic drives wheel and second magnetic drives wheel of permanent magnetic material, described first magnetic drives wheel is fixedlyed connected with described power transmission shaft, described second magnetic drives wheel is fixedlyed connected with described driven shaft, described power transmission shaft drives the rotation of described first magnetic drives wheel, and the magnetic field of passing through of first magnetic drives wheel of described rotation drives the rotation of second magnetic drives wheel.Described first magnetic drives wheel is made for permanent magnetic material with described second magnetic drives wheel; make win magnetic drives wheel and second magnetic drives wheel magnetic field interaction each other; and by the magnetic field interaction between first magnetic drives wheel and second magnetic drives wheel; make first magnetic drives wheel drive the rotation of second magnetic drives wheel by magnetic field; the noise of having avoided direct contact to bring by the kind of drive of friction or engagement reaches the defective that parts is caused wearing and tearing greatly; simultaneously because the present invention adopts first magnetic drives wheel to drive this non-contacting kind of drive of second magnetic drives wheel rotation by magnetic force in vacuum chamber; effectively avoided the granulated powder that the kind of drive produced of vacuum chamber internal cause, thereby improved the cleanliness factor in the vacuum chamber greatly by the direct contact of friction or engagement.
Compared with prior art, because the mechanical structure that is used in the vacuum magnetic transmission mechanism of the present invention the gear drive of power is provided and be used to transmit the magnetic drive device of gear drive outputting power and be used for operation all is placed in the described vacuum chamber, the noise that makes gear drive, magnetic drive device and mechanical structure send spreads out of the external world and has reduced greatly, the tiny particle powder that also makes simultaneously the drive unit generation has improved cleannes greatly because the locular wall of vacuum chamber hinders and can't enter in the vacuum environment; Take turns the magnetic drive device of composition as transmission mechanism by a plurality of magnetic drives with magnetic of adjacent mutual the action of a magnetic field at the vacuum chamber internally-powered, the noise of having avoided direct contact to bring by the kind of drive of friction or engagement reaches the defective that parts is caused wearing and tearing greatly, simultaneously because the present invention adopts magnetic drive device to utilize this non-contacting kind of drive of magnetic field transmission in vacuum chamber, effectively avoided the granulated powder that the kind of drive produced of vacuum chamber internal cause, thereby improved the cleanliness factor in the vacuum chamber greatly by the direct contact of friction or engagement; Described loading drive gear is changed to adjacent intermeshing a plurality of gears compositions in addition, can effectively play the effect of deceleration by described gear drive, make when transmitting power more steady by being meshing with each other between the gear, and the layout of structure is compact and reasonable more, has avoided steadily not causing whole vacuum magnetic transmission mechanism to vibrate because of rotation; Because vacuum magnetic transmission mechanism transmission less energy consumption of the present invention, high cleanliness, super-silent, easy for installation, simple and compact for structure, therefore be applicable to that relatively the mechanical mechanism to production on-line operation in the vacuum environment industry provides rotary power, especially the mechanical mechanism in the vacuum chamber on the Organic Light Emitting Diode production line provided the vacuum magnetic transmission mechanism of rotary power.
Description of drawings
Fig. 1 is the structural representation of vacuum magnetic transmission mechanism of the present invention.
Embodiment
As shown in Figure 1, vacuum magnetic transmission mechanism 100 of the present invention, comprise drive unit 1, driving shaft 7a, power transmission shaft 4c, driven shaft 7b, magnetic fluid transmission device 2, gear drive 4 and magnetic drive device 5, the locular wall 3a that described magnetic fluid transmission device 2 is installed on described vacuum chamber 3 goes up and is positioned at outside the described vacuum chamber 3, the end of described driving shaft 7a is fixedlyed connected with described drive unit 1, the other end of described driving shaft 7a passes described magnetic fluid transmission device 2 and extends in the vacuum chamber 3 and with an end of described gear drive 4 and is connected, the other end of described gear drive 4 is connected with an end of described magnetic drive device 5, the other end of described magnetic drive device 5 is fixedlyed connected with described driven shaft 7b, described driven shaft 7b is connected with described mechanical mechanism 6, described gear drive 4 is that adjacent intermeshing a plurality of gears are formed, described magnetic drive device 5 is that a plurality of magnetic drives wheels of adjacent mutual the action of a magnetic field are formed, described drive unit 1 drives the gear rotation of described gear drive 4, the rotation of described gear drives the rotation of described magnetic drives wheel, and described magnetic drives wheel drives described mechanical mechanism 6 rotations.
The preferably, described magnetic fluid transmission device 2 comprises the magnetic fluid assembly (not shown) of support housing 2a and permanent magnetic material, described magnetic fluid assembly is placed in the described support housing 2a, offer installing hole 3b on the locular wall 3a of described vacuum chamber 3, described support housing 2a sealing and fixing is installed on the described installing hole 3b, and described driving shaft 7a and described support housing 2a articulate.Described magnetic fluid transmission device 2 is applicable to the steady safe operation of driving shaft 7a of carrying out back and forth or rotating simultaneously, and has effectively guaranteed sealing property, has solved the seal leakage problem of drive unit 1 outputting power.
The preferably, adjacent intermeshing a plurality of gears of described gear drive 4 are respectively the first gear 4a and the second gear 4b, the described first gear 4a is fixedlyed connected with described driving shaft 7a, the described second gear 4b has power transmission shaft 4c, and described power transmission shaft 4c articulates with the locular wall 3a of described vacuum chamber 3 and fixedlys connected with described magnetic drive device 5.Described drive unit 1 outputting power passes to gear drive 4 by the driving shaft 7a that passes described vacuum-chamber wall 3a, it is more steady to make that the described first gear 4a drives the described second gear 4b, the layout of structure is compact and reasonable more, has avoided steadily not causing whole vacuum magnetic transmission mechanism 100 to vibrate because of rotation.
The preferably, a plurality of magnetic drives wheels with magnetic of the adjacent mutual the action of a magnetic field of described magnetic drive device 5 are respectively first magnetic drives wheel 5a and second magnetic drives wheel 5b of permanent magnetic material, described first magnetic drives wheel 5a is fixedlyed connected with described power transmission shaft 4c, described second magnetic drives wheel 5b is fixedlyed connected with described driven shaft 7b, described power transmission shaft 4c drives described first magnetic drives wheel 5a rotation, and first magnetic drives wheel 5a of described rotation drives second magnetic drives wheel 5b rotation by magnetic field.Described first magnetic drives wheel 5a and described second magnetic drives wheel 5b are that permanent magnetic material is made; make win magnetic drives wheel 5a and second magnetic drives wheel 5b magnetic field interaction each other; and by the magnetic field interaction between first magnetic drives wheel 5a and second magnetic drives wheel 5b; make first magnetic drives wheel 5a drive second magnetic drives wheel 5b rotation by magnetic field; the noise of having avoided direct contact to bring by the kind of drive of friction or engagement reaches the defective that parts is caused wearing and tearing greatly; simultaneously because the present invention adopts first magnetic drives wheel 5a to drive this non-contacting kind of drive of second magnetic drives wheel 5b rotation by magnetic force in vacuum chamber 3; effectively avoided the granulated powder that the kind of drive produced of vacuum chamber 3 internal causes, thereby improved the cleanliness factor in the vacuum chamber 3 greatly by the direct contact of friction or engagement.
In conjunction with Fig. 1 the operation principle that vacuum magnetic transmission mechanism 100 of the present invention drives mechanical structure 6 is done a detailed explanation:
In vacuum magnetic transmission mechanism of the present invention, described drive unit 1 drives the first gear 4a rotation of described gear drive 4 by driving shaft 7a, first gear 4a engagement drives the second gear 4b, the second gear 4b drives first magnetic drives wheel 5a rotation of magnetic drive device 5 by power transmission shaft 4c, described first magnetic drives wheel 5a drives second magnetic drives wheel 5b rotation by magnetic field, described second magnetic drives wheel 5b drives described mechanical mechanism 6 rotations then by driven shaft 7b, thereby realizes that vacuum magnetic transmission mechanism 100 of the present invention provides the purpose of rotary power for the mechanical mechanism in the vacuum chamber.Because the magnetic drive device 5 that is used to provide the gear drive 4 of power and is used to transmit gear drive 4 outputting powers all is placed in the described vacuum chamber, the noise that makes gear drive 4, magnetic drive device 5 send spreads out of the external world and has reduced greatly, the tiny particle powder that also makes simultaneously drive unit 1 generation has improved cleannes greatly because the locular wall 3a of vacuum chamber 3 hinders and can't enter in the vacuum environment; Take turns the magnetic drive device 5 of composition as transmission mechanism 6 by a plurality of magnetic drives with magnetic of adjacent mutual the action of a magnetic field at vacuum chamber 3 internally-powereds, the noise of having avoided direct contact to bring by the kind of drive of friction or engagement reaches the defective that parts is caused wearing and tearing greatly, simultaneously because the present invention adopts magnetic drive device 5 to utilize this non-contacting kind of drive of magnetic field transmission in vacuum chamber 3, effectively avoided the granulated powder that the kind of drive produced of vacuum chamber 3 internal causes, thereby improved the cleanliness factor in the vacuum chamber 3 greatly by the direct contact of friction or engagement; Described gear drive 4 is that adjacent intermeshing a plurality of gears are formed in addition, can effectively play the effect of deceleration by described gear drive 4, make when transmitting power more steady by being meshing with each other between the gear, and the layout of structure is compact and reasonable more, has avoided steadily not causing whole vacuum magnetic transmission mechanism 100 to vibrate because of rotation; Because vacuum magnetic transmission mechanism 100 transmission less energy consumptions of the present invention, high cleanliness, super-silent, easy for installation, simple and compact for structure, therefore be applicable to that relatively the mechanical mechanism to production on-line operation in the vacuum environment industry provides rotary power, especially the mechanical mechanism in the vacuum chamber on the Organic Light Emitting Diode production line provided the vacuum magnetic transmission mechanism of rotary power.
The magnetic fluid transmission device 2 that vacuum magnetic transmission mechanism of the present invention 100 is related and the operation principle of magnetic drive device 5 are well known to those of ordinary skill in the art, no longer are described in detail at this.
Above disclosed only is the preferred embodiments of the present invention, can not limit the present invention's interest field certainly with this, and therefore the equivalent variations of being done according to the present patent application claim still belongs to the scope that the present invention is contained.
Claims (4)
1, a kind of vacuum magnetic transmission mechanism, be applicable to the mechanical mechanism rotation that drives in the vacuum chamber, it is characterized in that: described vacuum magnetic transmission mechanism comprises drive unit, driving shaft, driven shaft, the magnetic fluid transmission device, gear drive and magnetic drive device, described magnetic fluid transmission device is installed on the locular wall of described vacuum chamber and is positioned at outside the described vacuum chamber, one end of described driving shaft is fixedlyed connected with described drive unit, the other end of described driving shaft passes described magnetic fluid transmission device and extends in the vacuum chamber and with an end of described gear drive and is connected, the other end of described gear drive tumbler is connected with an end of described magnetic drive device, the other end of described magnetic drive device is fixedlyed connected with described driven shaft, mechanical mechanism in described driven shaft and the vacuum chamber is connected, described loading drive gear is changed to adjacent intermeshing a plurality of gears and forms, described magnetic drive device is that a plurality of magnetic drives wheels with magnetic of adjacent mutual the action of a magnetic field are formed, described drive unit drives the gear rotation of described gear drive, the rotation of described gear drives the rotation of described magnetic drives wheel, and described magnetic drives wheel drives described mechanical mechanism rotation.
2, vacuum magnetic transmission mechanism as claimed in claim 1, it is characterized in that: described magnetic fluid transmission device comprises the magnetic fluid assembly of support housing and permanent magnetic material, described magnetic fluid assembly is placed in the described support housing, offer installing hole on the locular wall of described vacuum chamber, described support housing sealing and fixing is installed on the described installing hole, and described driving shaft and described support housing articulate.
3, vacuum magnetic transmission mechanism as claimed in claim 1, it is characterized in that: adjacent intermeshing a plurality of gears of described gear drive are respectively first gear and second gear, described first gear is fixedlyed connected with described driving shaft, described second gear has power transmission shaft, and described power transmission shaft articulates with the locular wall of described vacuum chamber and fixedlys connected with described magnetic drive device.
4, vacuum magnetic transmission mechanism as claimed in claim 3, it is characterized in that: a plurality of magnetic drives wheels with magnetic of the adjacent mutual the action of a magnetic field of described magnetic drive device are respectively first magnetic drives wheel and second magnetic drives wheel of permanent magnetic material, described first magnetic drives wheel is fixedlyed connected with described power transmission shaft, described second magnetic drives wheel is fixedlyed connected with described driven shaft, described power transmission shaft drives the rotation of described first magnetic drives wheel, and the magnetic field of passing through of first magnetic drives wheel of described rotation drives the rotation of described second magnetic drives wheel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100416425A CN101630893B (en) | 2009-08-04 | 2009-08-04 | Vacuum magnetic transmission mechanism |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100416425A CN101630893B (en) | 2009-08-04 | 2009-08-04 | Vacuum magnetic transmission mechanism |
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| CN101630893A true CN101630893A (en) | 2010-01-20 |
| CN101630893B CN101630893B (en) | 2011-08-31 |
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| CN2009100416425A Expired - Fee Related CN101630893B (en) | 2009-08-04 | 2009-08-04 | Vacuum magnetic transmission mechanism |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011137693A1 (en) * | 2010-05-06 | 2011-11-10 | 东莞宏威数码机械有限公司 | Dustless vacuum power transmission device |
| CN105385842A (en) * | 2015-12-16 | 2016-03-09 | 上海交通大学 | Residual stress releasing process device and stress releasing method for manufacturing process of large thin-walled components |
| CN107269794A (en) * | 2017-07-31 | 2017-10-20 | 深圳市川晶科技有限公司 | A kind of high vacuum power conversion mechanism |
| CN108470518A (en) * | 2018-05-04 | 2018-08-31 | 深圳双十科技有限公司 | Full-automatic polarizer sheet sticking system and its attachment process |
| CN109302043A (en) * | 2018-03-02 | 2019-02-01 | 广东汇四方精密磁材有限公司 | A kind of parallel type non-contact magnetically force actuators |
| CN114221516A (en) * | 2021-11-03 | 2022-03-22 | 上海贤日测控科技有限公司 | Magnetic transmission mechanism of vacuum box |
-
2009
- 2009-08-04 CN CN2009100416425A patent/CN101630893B/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011137693A1 (en) * | 2010-05-06 | 2011-11-10 | 东莞宏威数码机械有限公司 | Dustless vacuum power transmission device |
| CN105385842A (en) * | 2015-12-16 | 2016-03-09 | 上海交通大学 | Residual stress releasing process device and stress releasing method for manufacturing process of large thin-walled components |
| CN107269794A (en) * | 2017-07-31 | 2017-10-20 | 深圳市川晶科技有限公司 | A kind of high vacuum power conversion mechanism |
| CN109302043A (en) * | 2018-03-02 | 2019-02-01 | 广东汇四方精密磁材有限公司 | A kind of parallel type non-contact magnetically force actuators |
| CN108470518A (en) * | 2018-05-04 | 2018-08-31 | 深圳双十科技有限公司 | Full-automatic polarizer sheet sticking system and its attachment process |
| CN114221516A (en) * | 2021-11-03 | 2022-03-22 | 上海贤日测控科技有限公司 | Magnetic transmission mechanism of vacuum box |
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| Publication number | Publication date |
|---|---|
| CN101630893B (en) | 2011-08-31 |
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