CN101614871A - The large-area piezoelectricity-driven microscope of integrated angle sensor - Google Patents
The large-area piezoelectricity-driven microscope of integrated angle sensor Download PDFInfo
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Abstract
The present invention proposes a kind of Piezoelectric Driving scanning micro-mirror of integrated angle sensor, and it comprises MOEMS micro mirror mirror surface, MOEMS micro mirror driver, MOEMS micro mirror angular transducer three parts that are integrated on the same substrate material.The micro mirror driver is made of many piezoelectric beam parallel connections, and the micro mirror driver is symmetrically distributed in the both sides of MOEMS micro mirror mirror surface, and the girder construction and the MOEMS micro mirror mirror surface that form by substrate material fuse, and the micro mirror minute surface drives and supports; The micro mirror angular transducer is at micro mirror mirror surface and micro mirror driver link position place, and and the electrode layer of micro mirror driver between leave the electrical isolation gap.The present invention adopts the Piezoelectric Driving mode, realizes big corner deflection under lower driving voltage condition; Adopt integrated angular transducer design, system bulk is little, and the higher angular detection precision of tool, can be used for the portable instrument of online detection.
Description
Technical Field
The invention belongs to the technical field of micro-opto-electro-mechanical systems, and particularly relates to a piezoelectric driving scanning micro-mirror of an integrated angle sensor based on MOEMS.
Background
Micro-Optical-Electro-Mechanical systems (MOEMS) mainly comprises a Micro mechanism, a Micro sensor, a Micro actuator, a corresponding processing circuit and the like, and is a high-tech leading-edge subject developed on the basis of fusing various Micro processing technologies and applying the latest results of modern information technologies. The demand of micro optical signal control devices in related fields such as scanning display imaging, micro mirror adjustable attenuators, optical add-drop multiplexers, gain balancers, dispersion compensators, projection display, diffraction MOEMS devices, resonators, photonic crystals and the like is continuously increased, and the common characteristics of the applications are that the MOEMS micro mirror and other devices are used for controlling optical transmission, so that the MOEMS micro mirror becomes the core of a plurality of novel instruments, and the MOEMS micro mirror with high performance and low cost becomes a hotspot of worldwide disputed research.
Generally, driving methods of the micromirror are classified into electrostatic driving, piezoelectric driving, magnetic driving, thermal driving, and the like.
The electrostatic driving micro-mirror mainly utilizes the electrostatic attraction between charged conductors to realize the deflection of the driving micro-mirror, and comprises a flat capacitor structure, a comb-shaped interdigital structure, a rotating electrostatic structure and the like, and the electrostatic force in the vertical direction and the parallel direction is respectively utilized. The electrostatically driven micromirror has advantages of high control precision for small-sized mirrors (1-10 μm). However, for a large micromirror, a high driving voltage (tens to hundreds of volts) is required, and the compatibility of the process and the IC circuit is poor, which is not favorable for the integration of the structure and the circuit. In order to realize large driving displacement, special actuating mechanisms, such as a flexible actuating mechanism and the like, need to be designed. The large-area micromirror adopting the driving mode mainly represents an electrostatic micromirror developed by university of division Munich in Germany, the driving voltage of the large-area micromirror is up to hundreds of volts, and a non-integrated optical angle detection mechanism is adopted, so that the volume of a micromirror system is larger.
The piezoelectric driving micromirror utilizes inverse piezoelectric effect to realize mirror surface motion, the driver mechanism of the piezoelectric micromirror generally adopts a composite structure composed of substrate materials (such as silicon, silicon dioxide and the like) and piezoelectric films, and the upper surface and the lower surface of each piezoelectric film are respectively provided with a metal electrode to form a sandwich structure. The miniaturization and integration of the manufacturing method is the main development direction of the micro-mirror. The piezoelectric micromirror with piezoresistive angle sensor developed by the precision instrument system of Qinghua university in China can realize the functions of large-angle deflection and real-time angle monitoring, but the micromirror system is manufactured by adopting a method of secondary integration of a driver and a micromirror mirror surface, and the volume of the micromirror system is larger.
The magnetically driven micromirror drives the micromirror using a magnetic field force generated by an electromagnet or a permanent magnet. The structure of the magnetic driving micro-mirror actuator is divided into a cantilever beam structure (output bending) and a torsion beam structure (output torsion), the direction of output displacement can be in-plane or out-of-plane, and the magnet can be divided into a permanent magnet and an electromagnet. The magnetically driven micromirror is a current control device, usually the driving current is more than a few milliamperes, and the driving voltage can be lower than 1V. The electromagnetic scanning micromirror, invented by LG electronic corporation of korea, can perform a rotating operation to achieve modulation of the reflected beam path. But this invention does not mention the use of an angle sensor. The magnetically actuated micromirror has a disadvantage in that the magnetic field force is related to the volume of the magnet, and as the dimension of the magnet is reduced, the current density is reduced and the driving force is sharply reduced. And the driver process is poorly compatible with the IC process.
Disclosure of Invention
The invention aims to provide a high-integration MOEMS piezoelectric driving micro-mirror system which can be applied to miniaturized optical analysis and display instruments such as spectrometers, scanning displays, bar code scanners and the like and optical switching devices, adopts a brand-new driving structure, integrates an angle detection sensor, has the advantages of small volume, low power consumption and the like, and can greatly improve the product portability taking the MOEMS piezoelectric driving micro-mirror as a core.
The invention is realized by the following technical scheme:
a piezoelectric driving scanning micro mirror of an integrated angle sensor based on an MOEMS manufacturing process comprises an MOEMS micro mirror reflecting mirror surface, an MOEMS micro mirror driver and an MOEMS micro mirror angle sensor which are integrated on the same substrate material, wherein the substrate material is used as the common bottom layer of the MOEMS micro mirror reflecting mirror surface, the MOEMS micro mirror driver and the MOEMS micro mirror angle sensor. Wherein,
the MOEMS micro-mirror reflection mirror surface part comprises a substrate material of a base and a coating layer which is manufactured on the substrate material by adopting the MOEMS process. The thickness of the substrate material and the material of the coating layer of the MOEMS micro mirror can be determined according to different optical resolutions and working wavelengths thereof.
The MOEMS micromirror driver is formed by connecting a plurality of piezoelectric beams in parallel, a single piezoelectric beam consists of a substrate material at the bottom layer and an electric insulating layer, a lower electrode layer, a piezoelectric layer and an upper electrode layer (such as Ti/Pt/PZT/Pt) which are sequentially deposited on the substrate material from bottom to top by adopting an MOEMS process, and the end heads of the adjacent piezoelectric beams are connected by a transverse substrate material; the MOEMS micro-mirror drivers are symmetrically distributed on two sides of the MOEMS micro-mirror reflection mirror surface, and are connected with the MOEMS micro-mirror reflection mirror surface into a whole through a beam structure formed by a substrate material to drive and support the MOEMS micro-mirror surface. By changing the length, width and height of a single piezoelectric beam and the distance between adjacent piezoelectric beams, the natural frequency of the system micromirror can be changed to meet the requirements on the working frequency in different systems. Meanwhile, when the MOEMS micro-mirror reflector has a certain deflection angle and no external torque, the MOEMS micro-mirror driver can also generate a restoring torque.
The MOEMS micro-mirror angle sensor is formed by sequentially manufacturing an electric insulating layer, a lower electrode layer, a piezoelectric layer and an upper electrode layer on a beam structure of a substrate material at the connecting position of a MOEMS micro-mirror reflecting mirror surface and an MOEMS micro-mirror driver, and indirectly detecting the deflection angle of a micro-mirror by detecting the stress change at the connecting position. Finally, the deflection angle of the MOEMS micro mirror is determined by detecting the voltage output of the piezoelectric plate. The electrode of the MOEMS micro-mirror angle sensor is required to be electrically isolated from the electrode of the MOEMS micro-mirror driver, so that the electrode of the MOEMS micro-mirror driver is prevented from adversely affecting the detection of the MOEMS micro-mirror angle sensor. Therefore, an electrical isolation groove is left between the electrode layer of the MOEMS micromirror angle sensor and the electrode layer of the MOEMS micromirror driver.
And electric signals of the MOEMS micro-mirror driver and the MOEMS micro-mirror angle sensor are led in and out through the upper electrode layer and the lower electrode layer.
The invention adopts a piezoelectric driving mode to drive the micro-mirror, and can realize large-corner deflection under the condition of lower driving voltage compared with other large-area micro-mirrors; the design of the integrated angle sensor is adopted, an additional angle detection device is not needed, so that the system structure is simplified, the system volume is reduced, the angle detection precision is high, the integrated angle sensor can be used for a portable instrument for online detection, and the integrated angle sensor is particularly suitable for MOEMS micro-mirror spectrometers, medical images, bar code reading and other instruments.
Drawings
Fig. 1 is a schematic diagram (front view) of the MOEMS micromirror structure of the present invention.
In fig. 1, 1 denotes a MOEMS micromirror driver, 2 denotes a MOEMS micromirror reflective mirror, 3 denotes a MOEMS micromirror angle sensor, and 11 denotes an isolation trench.
Fig. 2 is a sectional view taken along line a-a in fig. 1.
In fig. 2, 4 is an upper electrode, 5 is a piezoelectric layer, 6 is a lower electrode, 7 is a material layer related to nucleation and growth of the piezoelectric layer film, 8 is an electric insulating layer, 9 is a substrate material, and 10 is a mirror coating layer.
Fig. 3 is a B-B sectional view in fig. 1 (the dotted line in the figure is not a structural line of the product, and is a partial description of the figure to assist understanding).
Fig. 4 a, b, c are schematic diagrams of three alternative fixing methods of the MOEMS micromirror respectively.
Detailed Description
Referring to fig. 1, the micromirror comprises a MOEMS micromirror driver 1, a MOEMS micromirror reflective mirror 2, and a MOEMS micromirror angle sensor 3, which are integrated on the same substrate material, i.e. have a common bottom layer. Two edges of the MOEMS micro-mirror reflection mirror surface 2 are respectively and symmetrically distributed with MOEMS micro-mirror drivers 1, and the MOEMS micro-mirror drivers 1 are connected with the MOEMS micro-mirror surface through MOEMS micro-mirror angle sensors 3, so as to drive and support the MOEMS micro-mirror surface. The electrode and piezoelectric layer structure of the MOEMS micro-mirror angle sensor 3 is positioned on the beam structure of the substrate material at the connecting position of the MOEMS micro-mirror reflecting mirror surface 2 and the MOEMS micro-mirror driver 1, and the angle is measured by detecting the stress between the MOEMS micro-mirror reflecting mirror surface 2 and the MOEMS micro-mirror driver 1 when the MOEMS micro-mirror reflecting mirror surface 2 deflects. Electric signals of the MOEMS micromirror driver 1 and the MOEMS micromirror angle sensor 3 are introduced and extracted through the upper and lower electrodes.
Referring to fig. 2, the structure of the MOEMS micromirror driver 1 will be mainly described herein. The driver of the MOEMS micro-mirror adopts a plurality of piezoelectric beams which are connected in parallel for use so as to increase the output torque. The specific structure of the piezoelectric beam is composed of a substrate material 9 of a bottom layer, an electric insulating layer 8 deposited on the substrate material from bottom to top by adopting an MOEMS process, a related material layer 7 for promoting the nucleation and growth of a piezoelectric layer film (the layer can be selectively used in some piezoelectric structures), a lower electrode layer 6, a piezoelectric layer 5 and an upper electrode layer 4 (such as Ti/Pt/PZT/Pt). The ends of adjacent piezoelectric beams are connected by a transverse substrate material 9. The MOEMS micro-mirror drivers 1 are symmetrically distributed on two sides of the MOEMS micro-mirror reflection mirror surface 2, and are connected with the MOEMS micro-mirror reflection mirror surface 2 into a whole through a beam structure formed by a substrate material (the two structures are also the bottom layer of the MOEMS micro-mirror angle sensor 3) to drive and support the MOEMS micro-mirror surface.
The detailed structure of the MOEMS micromirror mirror 2 is: a substrate material 9 integrated with the MOEMS micro-mirror driver 1 is used as a base, a coating layer 10 is manufactured on the substrate material 9 by adopting the MOEMS process, and an electric insulating layer 8 can be selectively used between the substrate material 9 and the coating layer 10.
Fig. 3 is a cross-sectional view showing a single piezoelectric beam of the actuator of the MOEMS micromirror and the MOEMS micromirror angle sensor 3, the structure of the single piezoelectric beam of the actuator of the MOEMS micromirror is the same as that of the aforementioned fig. 2, and the MOEMS micromirror angle sensor 3 is formed by sequentially fabricating an electrical insulating layer 8, a lower electrode layer 6, a piezoelectric layer 5 and an upper electrode layer 4 on the beam structure of the substrate material at the connecting position of the MOEMS micromirror mirror surface 2 and the MOEMS micromirror actuator 1. An electrical isolation groove 11 is left between the electrode layer of the MOEMS micromirror angle sensor 3 and the electrode layer of the MOEMS micromirror driver 1 for electrical isolation to prevent interference and crosstalk. When an electric field in the thickness direction is applied to the piezoelectric layer, the piezoelectric beam is subjected to bending deformation due to the constraint of the piezoelectric layer 5 by the base material 9, and a moment is output to the outside. The MOEMS micro-mirror driver with the upper and lower symmetrical structures applies force couple to the MOEMS micro-mirror surface through the beam structure of the substrate material in the MOEMS micro-mirror angle sensor, so that the MOEMS micro-mirror reflection mirror surface 2 deflects; meanwhile, as the beam structure of the substrate material in the MOEMS micromirror angle sensor deforms, stress is generated on the piezoelectric layer 5 in the transverse direction, potential difference is generated on the upper surface and the lower surface of the piezoelectric layer, and the stress of the beam structure of the substrate material in the MOEMS micromirror angle sensor is obtained through detecting the potential difference, so that the deflection angle of the MOEMS micromirror reflecting mirror surface 2 is indirectly measured.
Referring to fig. 3, the MOEMS micromirror driver at the bottom left corner of fig. 1 is shown, and three views a, b, and c respectively show the three ways of fixing the micromirror, and the shaded portion represents the fixing position of the MOEMS micromirror piezoelectric driver.
The working mode is as follows: the MOEMS micro-mirror driver outputs torque under the action of an external voltage; the MOEMS micro-mirror reflection mirror surface 2 realizes deflection under the action of output torque of the MOEMS micro-mirror driver; meanwhile, the MOEMS micro-mirror angle sensor monitors the deflection angle of the MOEMS micro-mirror reflection mirror surface 2.
Claims (2)
1. A piezoelectric drive scanning micro mirror integrated with an angle sensor is characterized by comprising an MOEMS micro mirror reflecting mirror surface, an MOEMS micro mirror driver and an MOEMS micro mirror angle sensor which are integrated on the same substrate material, wherein the substrate material is used as the common bottom layer of the MOEMS micro mirror reflecting mirror surface, the MOEMS micro mirror driver and the MOEMS micro mirror angle sensor;
the MOEMS micro-mirror reflection mirror surface part comprises the substrate material and a coating layer which is manufactured on the substrate material by adopting an MOEMS process;
the MOEMS micromirror driver is formed by connecting a plurality of piezoelectric beams in parallel, a single piezoelectric beam is formed by the substrate material and an electric insulating layer, a lower electrode layer, a piezoelectric layer and an upper electrode layer which are sequentially manufactured on the substrate material from bottom to top by adopting an MOEMS process, and the end heads of the adjacent piezoelectric beams are connected by the transverse substrate material; the MOEMS micro-mirror drivers are symmetrically distributed on two sides of the MOEMS micro-mirror reflection mirror surface, and are connected with the MOEMS micro-mirror reflection mirror surface into a whole through a beam structure formed by a substrate material to drive and support the MOEMS micro-mirror surface;
the MOEMS micro-mirror angle sensor is formed by sequentially manufacturing an electric insulating layer, a lower electrode layer, a piezoelectric layer and an upper electrode layer on a beam structure of a substrate material at the connecting position of the MOEMS micro-mirror reflecting mirror surface and the MOEMS micro-mirror driver, and an electric isolation gap is reserved between the electrode layer of the MOEMS micro-mirror angle sensor and the electrode layer of the MOEMS micro-mirror driver;
and electric signals of the MOEMS micro-mirror driver and the MOEMS micro-mirror angle sensor are led in and out through the upper electrode layer and the lower electrode layer.
2. The piezoelectric-driven scanning micromirror integrated angle sensor of claim 1, wherein a layer of material that facilitates nucleation and growth of piezoelectric layer thin film is further provided on the electrically insulating layer and the lower electrode layer.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101778325A (en) * | 2010-01-28 | 2010-07-14 | 无锡职业技术学院 | Silicon-based capacitance microphone-based micro-electromechanical mirror motion feedback control system |
| CN101852917A (en) * | 2010-03-31 | 2010-10-06 | 重庆大学 | Large turn angle piezoelectric scanning micromirror |
| CN102692705A (en) * | 2011-06-16 | 2012-09-26 | 重庆大学 | MOEMS (Micro Optoelectro Mechanical System)-process-based micro scanning raster based on of integrating angle sensor |
| CN105301764A (en) * | 2015-12-09 | 2016-02-03 | 重庆大学 | MOEMS scanning raster micromirror system |
| CN108063102A (en) * | 2017-12-19 | 2018-05-22 | 厦门大学 | A kind of method of the monitoring micro mirror based on four-quadrant photo detector |
-
2009
- 2009-07-22 CN CN200910104403A patent/CN101614871A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101778325A (en) * | 2010-01-28 | 2010-07-14 | 无锡职业技术学院 | Silicon-based capacitance microphone-based micro-electromechanical mirror motion feedback control system |
| CN101852917A (en) * | 2010-03-31 | 2010-10-06 | 重庆大学 | Large turn angle piezoelectric scanning micromirror |
| CN101852917B (en) * | 2010-03-31 | 2012-02-22 | 重庆大学 | Large turn angle piezoelectric scanning micromirror |
| CN102692705A (en) * | 2011-06-16 | 2012-09-26 | 重庆大学 | MOEMS (Micro Optoelectro Mechanical System)-process-based micro scanning raster based on of integrating angle sensor |
| CN102692705B (en) * | 2011-06-16 | 2014-05-14 | 重庆大学 | MOEMS (Micro Optoelectro Mechanical System)-process-based micro scanning raster based on of integrating angle sensor |
| CN105301764A (en) * | 2015-12-09 | 2016-02-03 | 重庆大学 | MOEMS scanning raster micromirror system |
| CN105301764B (en) * | 2015-12-09 | 2017-06-23 | 重庆大学 | MOEMS raster micromirror systems |
| CN108063102A (en) * | 2017-12-19 | 2018-05-22 | 厦门大学 | A kind of method of the monitoring micro mirror based on four-quadrant photo detector |
| CN108063102B (en) * | 2017-12-19 | 2020-02-14 | 厦门大学 | Method for monitoring micro-mirror based on four-quadrant photoelectric detector |
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