CN101614867B - Laser confocal microscope system - Google Patents
Laser confocal microscope system Download PDFInfo
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- CN101614867B CN101614867B CN2008100680315A CN200810068031A CN101614867B CN 101614867 B CN101614867 B CN 101614867B CN 2008100680315 A CN2008100680315 A CN 2008100680315A CN 200810068031 A CN200810068031 A CN 200810068031A CN 101614867 B CN101614867 B CN 101614867B
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- 230000003287 optical effect Effects 0.000 claims abstract description 49
- 238000003384 imaging method Methods 0.000 claims abstract description 26
- 230000008878 coupling Effects 0.000 claims description 10
- 238000010168 coupling process Methods 0.000 claims description 10
- 238000005859 coupling reaction Methods 0.000 claims description 10
- 238000005286 illumination Methods 0.000 claims description 6
- 230000005855 radiation Effects 0.000 claims description 2
- 230000001105 regulatory effect Effects 0.000 claims description 2
- 238000005459 micromachining Methods 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000007306 turnover Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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Abstract
The invention provides a laser confocal microscope system, which comprises a microscopic imaging part and a laser lead-in part, wherein the microscopic imaging part is provided with a first optical axis, and the laser lead-in part is provided with a second optical axis; the first optical axis and the second optical axis are parallel; the second optical axis is provided with a first reflecting mirror, and the first optical axis is provided with a beam combiner; and the second optical axis is converged with the first optical axis through the first reflecting mirror and the beam combiner. The first optical axis of the microscopic imaging part is arranged parallel to the second optical axis; compared with the coaxial arrangement in the prior art, the parallel arrangement can ensure the length of the optical axes of the laser confocal microscope system is shortened greatly, and can ensure the structure of the system is more compact and stable so as to improve the micro-machining accuracy.
Description
Technical field
The present invention relates to a kind of laser confocal microscope system.
Background technology
Laser confocal microscope system is microexamination and the alignment system that the laser fine process equipment is used.This system can also and focus on the indicating area with laser shaping.The prior art laser confocal microscope system adopts laser to introduce optical axis and observes the coaxial light path of microcobjective, the optical path length of its total system is longer, greater than observing microscopic system length, center of gravity is higher, causes the trace of extraneous and moving component to shake the precision that is very easy to make the laser beam axis generation deviation of introducing and has influenced microfabrication.
Summary of the invention
The technical problem to be solved in the present invention is, a kind of laser confocal microscope system is provided, and can improve the precision of laser fine processing.
In order to solve the problems of the technologies described above, the invention provides a kind of laser confocal microscope system, comprise microscopic imaging part and laser introducing part, described microscopic imaging part has primary optic axis, and described laser is introduced part and is had second optical axis.Described primary optic axis is parallel with second optical axis, is provided with first catoptron in described second optical axis, is provided with light combination mirror in described primary optic axis, and described second optical axis converges by described first catoptron and described light combination mirror and described primary optic axis; Described microscopic imaging part comprises the microcobjective that is used to observe micro-object plane, and described microcobjective and described light combination mirror are with the optical axis setting; Described microscopic imaging part also comprise first knot that is used for light focusing as mirror, be used for second catoptron of focused ray reflection and be used to receive the imaging surface of reflection ray and imaging, described microcobjective, described light combination mirror, described first knot as mirror and second catoptron successively with the optical axis setting; Described laser is introduced part and is comprised and be used to receive the coupling mirror of introducing laser, be used for first catoptron of the laser-bounce after regulating and second knot that is used for reflector laser is focused on as mirror, the described coupling mirror and first catoptron be successively with the optical axis setting, described first catoptron, second knot as mirror and light combination mirror successively with the optical axis setting.
After the microscopic imaging part primary optic axis and second optical axis be arranged in parallel, compare with the coaxial setting of prior art, the optical axis length of laser confocal microscope system is shortened greatly, and can make the structure of this system compact more and stable, thereby improve the precision of microfabrication.
Description of drawings
Fig. 1 is that the master of the laser confocal microscope system that provides of the embodiment of the invention looks synoptic diagram;
Fig. 2 is the microscope imaging schematic side view partly that the embodiment of the invention provides;
Fig. 3 is that the laser that the embodiment of the invention provides is introduced schematic side view partly.
Embodiment
In order to make the technical problem to be solved in the present invention, technical scheme and beneficial effect clearer,, the present invention is further elaborated below in conjunction with drawings and Examples.Should be appreciated that specific embodiment described herein only in order to explanation the present invention, and be not used in qualification the present invention.
See also Fig. 1 and Fig. 2, the embodiment of the invention provides a kind of laser confocal microscope system, comprises microscopic imaging part 1 and laser introducing part 2, and microscopic imaging part 1 has primary optic axis 10, laser is introduced part 2 and is had second optical axis 20, and primary optic axis 10 is parallel with second optical axis 20.Be provided with first catoptron 21 in second optical axis 20, be provided with light combination mirror 12, the second optical axises 20 in primary optic axis 10 and converge with primary optic axis 10 by first catoptron 21 and light combination mirror 12.
Particularly, above-mentioned microscopic imaging part 1 comprises that successively the microcobjective 11 that is provided with optical axis, light combination mirror 12, first knot are as mirror 13, second catoptron 14 and imaging surface 15.After the light of the belongings surface information on the observed micro-object plane 3 enters microcobjective 11, pass light combination mirror 12, focused on as mirror 13 by first knot, reflex to imaging surface 15 through 14 turnovers of second catoptron, the user can observe micro-object plane from imaging surface 15.
Please in conjunction with Fig. 1 and Fig. 3, laser is introduced part 2 and is comprised that coupling mirror 22, variable gap 23, first catoptron 21 and second knot are as mirror 24, wherein, coupling mirror 22, variable gap 23 and first catoptron 21 are connected with optical axis successively, after first catoptron 21 changes the light path angles, first catoptron 21, second knot as mirror 24 and light combination mirror 12 also successively with the optical axis setting.After the laser of introducing passes coupling mirror 22, process variable gap 23 is to regulate the laser radiation width, and by the 21 turnover reflections of first catoptron, reflection ray is after second knot focuses on as mirror 24, its second optical axis 20 converges at light combination mirror 12 places and primary optic axis 10, thereby laser is introduced the light of part 2 after light combination mirror 12 reflections, enters microcobjective 11, arrives micro-object plane 3.
In addition, first knot in microscopic imaging part 1 is used to introduce indirect illumination part 4 as the 3rd catoptron 16 that is provided with between mirror 13 and the light combination mirror 12 with optical axis.This indirect illumination part 4 comprises reflection source 41, first lens 42, the 4th catoptron 43 and second lens 44 that set gradually.Reflection source 41 passes first lens 42 and focuses on, and after 43 reflections of the 4th catoptron, is focused on by second lens 44, and the irradiate light after the focusing is on the 3rd catoptron 16.Like this, indirect illumination part 4 is introduced microscopic imaging part 1 with reflection source 41, forms coaxial indirect illumination by microcobjective 11 again, in order to micro-object plane 3 is thrown light on.
Coupling mirror 22 places that introduce part 2 in laser have also introduced hot spot indicating section 5, and this hot spot indicating section 5 comprises indication light source 51, the 3rd lens 52, first spherical mirror 53 and second spherical mirror 54 that is provided with optical axis successively.The light that indication light source 51 sends focuses on through the 3rd lens 52, first spherical mirror 53 and second spherical mirror, 54 backs, and is coupled mirror 22 reflections, makes the optical axis of hot spot indicating section 5 and the optical axis coincidence that laser is introduced part 2.Like this, the light that laser is introduced part 2 also has the hot spot pilot light except having comprised laser, can utilize the accurate locating laser active position of hot spot pilot light thereby mix light on micro-object plane 3.
The opposite side of relative microcobjective 11 also comprises transillumination part 6 on the micro-object plane 3, and this transillumination part 6 comprises transmitted light source 61, non-spherical lens 62, first spherical mirror 63, second spherical mirror 64, the 5th catoptron 65 and the focus lamp 66 that sets gradually.Transmitted light source 61 shines behind non-spherical lens 62, pass first spherical mirror 63, second spherical mirror 64 is focused and shine in the 5th catoptron 65, irradiate light focuses in focus lamp 66 after 65 reflections of the 5th catoptron, and the micro-object plane 3 that throws light on equably at last provides transillumination to microscopic system.
Above-mentioned reflection source 41, indication light source 51, transmitted light source 61 all can adopt the short ultraviolet light of wavelength, with the more high-resolution micro-image of acquisition, thereby further improve the precision of laser fine processing.
After microscopic imaging part 1 primary optic axis 10 and second optical axis 20 be arranged in parallel, compare with the coaxial setting of prior art, the optical axis length of laser confocal microscope system is shortened greatly, and can make the structure of this system compact more and stable, thereby improve the precision of microfabrication.
The above only is preferred embodiment of the present invention, not in order to restriction the present invention, all any modifications of being done within the spirit and principles in the present invention, is equal to and replaces and improvement etc., all should be included within protection scope of the present invention.
Claims (8)
1. laser confocal microscope system, comprise microscopic imaging part and laser introducing part, described microscopic imaging part has primary optic axis, described laser is introduced part and is had second optical axis, it is characterized in that: described primary optic axis is parallel with second optical axis, be provided with first catoptron in described second optical axis, be provided with light combination mirror in described primary optic axis, described second optical axis converges by described first catoptron and described light combination mirror and described primary optic axis; Described microscopic imaging part comprises the microcobjective that is used to observe micro-object plane, and described microcobjective and described light combination mirror are with the optical axis setting; Described microscopic imaging part also comprise first knot that is used for light focusing as mirror, be used for second catoptron of focused ray reflection and be used to receive the imaging surface of reflection ray and imaging, described microcobjective, described light combination mirror, described first knot as mirror and second catoptron successively with the optical axis setting; Described laser is introduced part and is comprised and be used to receive the coupling mirror of introducing laser, be used for first catoptron of the laser-bounce after regulating and second knot that is used for reflector laser is focused on as mirror, the described coupling mirror and first catoptron be successively with the optical axis setting, described first catoptron, second knot as mirror and light combination mirror successively with the optical axis setting.
2. laser confocal microscope system as claimed in claim 1, it is characterized in that: described laser confocal microscope system also comprises the indirect illumination part, first lens that described indirect illumination partly comprises the reflection source that sets gradually, focus on reflection ray, with the 4th catoptron of focused ray reflection and second lens that reflection ray is focused on, be provided with the 3rd catoptron that is used to receive the focused ray that passes described second lens between described first knot is as mirror and light combination mirror, described the 3rd catoptron is positioned on the described primary optic axis.
3. laser confocal microscope system as claimed in claim 2 is characterized in that: described reflection source is a ultraviolet light.
4. laser confocal microscope system as claimed in claim 1 is characterized in that: described laser is introduced part and is also comprised the variable gap that is used to regulate the laser radiation width, and described coupling mirror, variable gap and first catoptron are successively with the optical axis setting.
5. laser confocal microscope system as claimed in claim 4, it is characterized in that: described laser is introduced part and is also comprised the hot spot indicating section, described hot spot indicating section comprises indication light source, the 3rd lens, first spherical mirror and second spherical mirror that receive guidance light and guidance light is assembled, described indication light source, the 3rd lens, first spherical mirror, second spherical mirror and also can be used for the guidance light after focusing on is reflexed to the described coupling mirror of described second optical axis successively with the optical axis setting.
6. laser confocal microscope system as claimed in claim 5 is characterized in that: described indication light source is a ultraviolet light.
7. laser confocal microscope system as claimed in claim 1, it is characterized in that: the opposite side of described relatively microcobjective also comprises the transillumination part on the described micro-object plane, described transillumination partly comprises transmitted light source, receive described transmitted light source and with the non-spherical lens of light focusing, first spherical mirror, second spherical mirror, be used for the 5th catoptron and the focus lamp that is used for reflection ray is focused on the focused ray reflection, described transmitted light source, non-spherical lens, first spherical mirror, second spherical mirror, the 5th catoptron is with the optical axis setting, described the 5th catoptron and focus lamp are arranged on the described primary optic axis, and are positioned at the downside of described micro-object plane.
8. laser confocal microscope system as claimed in claim 7 is characterized in that: described transmitted light source is a ultraviolet light.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100680315A CN101614867B (en) | 2008-06-25 | 2008-06-25 | Laser confocal microscope system |
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| CN2008100680315A CN101614867B (en) | 2008-06-25 | 2008-06-25 | Laser confocal microscope system |
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| CN101614867A CN101614867A (en) | 2009-12-30 |
| CN101614867B true CN101614867B (en) | 2011-10-05 |
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| CN104535296B (en) * | 2014-12-03 | 2017-04-05 | 中国科学院苏州生物医学工程技术研究所 | A kind of multiple beam is with shaft detection and method of adjustment |
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