CN101609511B - Imaging device and detection method for exposure image - Google Patents

Imaging device and detection method for exposure image Download PDF

Info

Publication number
CN101609511B
CN101609511B CN2008100677986A CN200810067798A CN101609511B CN 101609511 B CN101609511 B CN 101609511B CN 2008100677986 A CN2008100677986 A CN 2008100677986A CN 200810067798 A CN200810067798 A CN 200810067798A CN 101609511 B CN101609511 B CN 101609511B
Authority
CN
China
Prior art keywords
image
exposure
imaging
imaging device
exposure module
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN2008100677986A
Other languages
Chinese (zh)
Other versions
CN101609511A (en
Inventor
孙海翔
高云峰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Han s Laser Technology Industry Group Co Ltd
Original Assignee
Shenzhen Hans Laser Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen Hans Laser Technology Co Ltd filed Critical Shenzhen Hans Laser Technology Co Ltd
Priority to CN2008100677986A priority Critical patent/CN101609511B/en
Publication of CN101609511A publication Critical patent/CN101609511A/en
Application granted granted Critical
Publication of CN101609511B publication Critical patent/CN101609511B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Studio Devices (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

The invention provides an imaging device and a detection method for exposure images. The imaging device comprises an imaging surface and a plurality of linkage exposure modules for carrying out exposure for the imaging surface; the imaging device also comprises a motion mechanism and an image detecting device; the motion mechanism bears the image detecting device to move so that the image detecting device detects the exposure images of the exposure modules at the respective assigned position on the imaging surface respectively to obtain the actual exposure position of each exposure module at the respective assigned position. The embodiment of the detection method for the exposure images can improve the accuracy for detecting the positions of the exposure images.

Description

The detection method of imaging device and exposed image
[technical field]
The present invention relates to the detection method of imaging device and exposed image.
[background technology]
In Computer To Plate (CTP, Computer To Plate) system, platemaking equipment generally adopts computer-controlled laser scanning or array exposure image.
At present, the scanning type exposure technology adopts laser instrument as light source usually, comprises several laser imaging devices (being generally 16 to 128) in the exposure device.Owing to processing and the restriction of assembling and the reasons such as error of system, can not guarantee fully that the light beam that all laser instruments send reaches design ideal position just, skew can appear, in the scanning imagery process, can after imaging, can occur the defective of striated even distortion like this in the middle of the image, have a strong impact on image quality.
U.S. Pat 005717451 discloses a kind of formation method and device, device has comprised a position detecting device and a position correction circuit, described position detecting device detects the X of all exposed images and the position of Y direction simultaneously, by described position correction circuit imaging system is proofreaied and correct then.
A kind of formation method and device are disclosed in the U.S. Pat 4978976, in this scheme, actual exposure image position to image device detects earlier, image device is proofreaied and correct with respect to the side-play amount of theoretical exposed image position according to the actual exposure image position of image device then.In this scheme, when detecting the actual exposure image position of image device, adopted the position of the different exposed image of some bundle rayed on photosensitive material of two sensor wavelength of stationkeeping, one of them sensor be the linear synchronous sensor be the position of directions X, the another one sensor be the one-dimensional array sensor be the position of Y direction.In the above-mentioned prior art, when detecting the position of actual exposure image, adopt the sensor of two stationkeeping to detect all exposed images simultaneously, the error of Jian Ceing is bigger like this, and then also can influence the accuracy that image device is proofreaied and correct.
[summary of the invention]
The technical problem to be solved in the present invention provides the detection method of imaging device and exposed image, improves the accuracy when detecting exposed image.
A kind of imaging device comprises the exposure module of a plurality of interlocks that imaging surface and being used for exposes to described imaging surface; Described imaging device also comprises motion and image detection device, described motion carries described image detection device and moves, described image detection device is detected described a plurality of exposure module separately exposed image at assigned position place on described imaging surface respectively, obtain the actual exposure image of each exposure module at separately assigned position place.
A kind of detection method of exposed image comprises:
The exposure module of a plurality of interlocks respectively on imaging surface separately assigned position place expose;
By the movable image pick-up unit, described image detection device is detected described a plurality of exposure module separately exposed image at assigned position place on described imaging surface respectively, obtain the actual exposure image of each exposure module at described assigned position place separately.
In the embodiment of the invention, can pass through the movable image pick-up unit, image detection device can be respectively detected the exposed image of each exposure module, detect the exposed image of all exposure module with the sensor of available technology adopting stationkeeping simultaneously and compare, can improve the accuracy of detection.
[description of drawings]
Fig. 1 is the structured flowchart of imaging device embodiment one of the present invention;
Fig. 2 is the three-dimensional structure diagram of imaging device embodiment two of the present invention;
Fig. 3 is the floor map of imaging device embodiment two of the present invention;
Fig. 4 is the exposed image exemplary plot of each exposure module among the imaging device embodiment two of the present invention.
[embodiment]
Be elaborated below in conjunction with the preferred embodiment of accompanying drawing to the detection method of imaging device of the present invention and exposed image.
Imaging device embodiment one of the present invention:
Present embodiment provides the basic structure of imaging device of the present invention.With reference to figure 1, the imaging device of present embodiment comprises the exposure module 120 of imaging surface 110 and a plurality of interlocks that are used for imaging surface 110 is exposed; Described imaging device also comprises motion 130 and image detection device 140, motion 130 carrying image detection devices 140 move, image detection device 140 is detected a plurality of exposure module 120 separately exposed image at assigned position place on imaging surface 110 respectively, obtain the actual exposure image of each exposure module 120 at separately assigned position place.
Wherein, comprise guide rail, drive disk assembly, drive motor and position transducer in the described motion.
Wherein, comprise image device in the described exposure module, the type of described image device can be that laser imaging device, digital light are handled (DLP) image device, raster brightness valve (GLV) image device or liquid crystal display (LCD) image device.
Below specifically be that the laser imaging device is an example with the type of image device, imaging device embodiment two of the present invention is described:
Referring to figs. 2 and 3, the imaging device of present embodiment comprises:
Right cylinder imaging drum 201, place the imaging surface that is covered with photosensitive material 202 on right cylinder imaging drum 201 outside surfaces, be used for driving the motor of right cylinder imaging drum 201 along its axis 203 rotations (figure represents with Y), and the rotary encoder that is used to obtain the anglec of rotation of right cylinder imaging drum 201.
Exposure device 211 and being used for carries first motion 212 that exposure device 211 moves along figure directions X (paralleling with the axis 203 of right cylinder imaging drum 201); Wherein, exposure device 211 comprises that laser instrument, the optics as light source splits the exposure module 215 of beam system and one group of interlock, and exposure module 215 comprises laser imaging device 217 and imaging eyeglass 218, and each exposure module 215 can be equidistant distribution; First motion 212 comprises two linear slide rails 218, ball screw 219, servo motor 220 and grating chi 221.
The image detection device 231 and second motion 232; Second motion 232 is used to carry image detection device 231 and moves, image detection device 231 is detected each exposure module 215 separately exposed image at assigned position place on imaging surface 202 respectively, obtain the actual exposure image of each exposure module 215 at separately assigned position place.Wherein, image detection device 231 comprises image sensor 233, catoptron 234 and lens 235; Image detection device 231 is in the process that moves, catoptron 234 enters respectively in the light path of each exposure module 215, reflection ray arrives image sensor 233 through lens 235, image sensor 233 can detect image, comes the actual exposure image of calculation exposure module 215 on right cylinder imaging drum 201 by detecting this image.Second motion 232 comprises two linear slide rails 236, ball screw 237, servo motor 238 and grating chi 239.Wherein, the type of image sensor 233 can be CCD, CMOS etc.
The imaging device of present embodiment also comprises control module, and control module comprises image processing module and output interface; Wherein image processing module be used to produce be used to control the exposure of laser imaging device branch as subimage, output interface is used for exporting the exposure control signal of determining as subimage according to branch separately in real time to each laser imaging device.
Referring to figs. 2 to Fig. 4, describe the image-forming principle of the imaging device of present embodiment: image processing module will treat that image carries out the branch picture processing on the directions X, form a plurality of branches as subimage ( subregion 11,12,13,14 as shown in Figure 4), formed a plurality of branch is related one by one as the continuous exposure module on the position of subimage and respective numbers, make each exposure module finish the exposure image of associated pixel region respectively.In exposure device, optics splits beam system single bundle original laser that laser instrument produces is split into multi beam, multiple laser after the division is corresponding one by one with above-mentioned exposure module continuous on the position, wherein each laser imaging device waits to expose the exposure control signal of pixel according to the output of the output interface of control module, the laser beam that is input to this exposure module is modulated, the feature such as bright dark of the energy/intensity that makes the laser beam after the modulation and the described pixel of waiting to expose conforms to, laser beam after the modulation focuses on the back along the direction perpendicular to the bulging axis of right cylinder imaging through the imaging eyeglass again, shine on the imaging surface, finish single exposure.Drive rotatablely move (in the figure Y direction) of imaging surface by right cylinder imaging drum along its axis, in conjunction with the rectilinear motion of above-mentioned exposure device along directions X, finish exposure to all pixels in the pixel region behind minute picture, the exposed image that each exposure device forms on imaging surface is stitched together, and forms the described complete exposed image for the treatment of image.
As shown in Figure 4, in the actual imaging process, because the influence of process and assemble and systematic error, the actual exposure image that exposure device forms on imaging surface locational deviation or difference in shape may occur with respect to the ideal exposure image, and (for example hot spot ideally is for circular, and because the error of focal length, the shape of hot spot becomes ellipse under the actual conditions).In Fig. 4, a1, a2, a3, a4 are respectively the desirable initial exposure positions of a plurality of exposure devices, and a1 ', a2 ', a3 ', a4 ' are respectively the actual initial exposure positions of each exposure device, as can be seen, because the exposure position deviation of exposure device 12,13, defectives such as the white space that can cause going out as shown in Figure 4 in the image after the imaging, dislocation zone, overlapping region.For the above-mentioned defective in the image after the imaging is proofreaied and correct, need the actual exposure image of exposure device be detected usually.In embodiments of the present invention, for the actual exposure image to each exposure module detects, can stipulate a position (for example can be the initial position of exposure module) earlier, make each exposure module on imaging surface, carry out single exposure respectively in initial position, be provided with the image detection device 231 and second motion 232 in the imaging device, second motion carrying image detection device 231 moves along directions X among the figure, make image detection device 231 move to the desirable initial position of each exposure module successively, exposed image to this place detects, and obtains the actual exposure image of corresponding exposure module at this place.In the embodiment of the invention, can pass through the movable image pick-up unit, image detection device can be respectively detected the exposed image of each exposure module, detect the exposed image of all exposure module with the sensor of available technology adopting stationkeeping simultaneously and compare, can improve the accuracy of detection.
In the more embodiment of the present invention, also can use half transmitting, half-reflecting mirror to replace the catoptron in the image detection device, perhaps, can have at least one hole on the minute surface of the catoptron in the image detection device.
In the more embodiment of the present invention, drum type or plane imaging drum in imaging device also can adopt.
In the more embodiment of the present invention, imaging device can also comprise display module, after image detection device detects the actual exposure position of exposure module, can show the information of this actual exposure position on display module.
In the more embodiment of the present invention, can increase catoptron 234 in the light path of each exposure module 215, image detection device receives each reflection ray through moving, reflection ray arrives image sensor 233 through lens 235, image sensor 233 can detect image, by detecting the position that this image comes the exposed image of calculation exposure module 215 on right cylinder imaging drum 201.
In the more embodiment of the present invention, image detection device 231 and being used for carries the below that second straight-line motion mechanism 232 that image detection device 231 moves along the figure directions X also can be positioned at exposure device 211.
The present invention also provides the embodiment of the detection method of exposed image in a kind of imaging device, and this method comprises:
The exposure module of a plurality of interlocks respectively on imaging surface separately assigned position place expose; And,
By the movable image pick-up unit, described image detection device is detected described a plurality of exposure module separately exposed image at assigned position place on described imaging surface respectively, obtain the actual exposure position of each exposure module at described assigned position place separately.
In imaging device of the present invention among the embodiment of the detection method of exposed image, exposure module, imaging surface, image detection device etc. can have the feature among each embodiment of imaging device of the present invention.
More than the preferred embodiment of the detection method of exposed image in imaging device that the embodiment of the invention provided and the imaging device is described in detail, used specific case herein principle of the present invention and embodiment are set forth, the explanation of above embodiment just is used for helping to understand method of the present invention and core concept thereof; Simultaneously, for one of ordinary skill in the art, according to thought of the present invention, the part that all can change in specific embodiments and applications, in sum, this description should not be construed as limitation of the present invention.

Claims (9)

1. an imaging device is characterized in that, comprises the exposure module of imaging surface and a plurality of interlocks that are used for described imaging surface is exposed; Described imaging device also comprises motion and image detection device, described motion carries described image detection device and moves, described image detection device is detected described a plurality of exposure module separately exposed image at assigned position place on described imaging surface respectively, obtain the actual exposure image of each exposure module at separately assigned position place.
2. imaging device as claimed in claim 1 is characterized in that: described motion comprises guide rail, drive disk assembly, drive motor and position transducer.
3. imaging device as claimed in claim 1 is characterized in that: described image detection device comprises image sensor, and the type of described image sensor is CCD or CMOS.
4. imaging device as claimed in claim 1 is characterized in that: described image detection device comprises lens.
5. imaging device as claimed in claim 1 is characterized in that: described image detection device comprises a catoptron.
6. imaging device as claimed in claim 5 is characterized in that: have at least one hole on the minute surface of described catoptron.
7. imaging device as claimed in claim 1, it is characterized in that: described exposure module comprises image device, and the type of described image device specifically is that laser imaging device, digital light are handled DLP image device, raster brightness valve GLV image device or liquid crystal display LCD image device.
8. the detection method of an exposed image is characterized in that, comprising:
The exposure module of a plurality of interlocks respectively on imaging surface separately assigned position place expose;
By the movable image pick-up unit, described image detection device is detected described a plurality of exposure module separately exposed image at assigned position place on described imaging surface respectively, obtain the actual exposure image of each exposure module at described assigned position place separately.
9. method as claimed in claim 8 is characterized in that: described exposure module comprises image device, and described image device specifically is laser imaging device, DLP image device, GLV image device or LCD image device.
CN2008100677986A 2008-06-17 2008-06-17 Imaging device and detection method for exposure image Active CN101609511B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2008100677986A CN101609511B (en) 2008-06-17 2008-06-17 Imaging device and detection method for exposure image

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2008100677986A CN101609511B (en) 2008-06-17 2008-06-17 Imaging device and detection method for exposure image

Publications (2)

Publication Number Publication Date
CN101609511A CN101609511A (en) 2009-12-23
CN101609511B true CN101609511B (en) 2011-09-28

Family

ID=41483262

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2008100677986A Active CN101609511B (en) 2008-06-17 2008-06-17 Imaging device and detection method for exposure image

Country Status (1)

Country Link
CN (1) CN101609511B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104406774B (en) * 2014-12-07 2017-01-25 矽卓光电技术(天津)有限公司 CTP full-automatic calibration aging system and implementation method thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4978976A (en) * 1987-09-25 1990-12-18 Fuji Photo Film Co., Ltd. Image recorder with plural beam scan synchronization
US5717451A (en) * 1994-09-08 1998-02-10 Matsushita Graphic Communication Systems, Inc. Positioning system for multihead type image recording apparatus
CN1573414A (en) * 2003-06-10 2005-02-02 富士胶片株式会社 Pixel position specifying method, method of correcting image offset, and image forming device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4978976A (en) * 1987-09-25 1990-12-18 Fuji Photo Film Co., Ltd. Image recorder with plural beam scan synchronization
US5717451A (en) * 1994-09-08 1998-02-10 Matsushita Graphic Communication Systems, Inc. Positioning system for multihead type image recording apparatus
CN1573414A (en) * 2003-06-10 2005-02-02 富士胶片株式会社 Pixel position specifying method, method of correcting image offset, and image forming device

Also Published As

Publication number Publication date
CN101609511A (en) 2009-12-23

Similar Documents

Publication Publication Date Title
KR101141345B1 (en) Three-dimensional shape measuring device, three-dimensional shape measuring method, three-dimensional shape measuring program, and recording medium
JP2006349945A (en) Exposure apparatus
JP2012138891A (en) Imaging apparatus
JP2006201586A (en) Exposure apparatus
KR20040111029A (en) Method of specifying image position, method of correcting image deviation, and apparatus for forming image
CN102884395B (en) Height measurement method and height measuring device
KR102243867B1 (en) Mark position detecting apparatus, writing apparatus and mark position detecting method
US9435982B2 (en) Focus position changing apparatus and confocal optical apparatus using the same
CN101609511B (en) Imaging device and detection method for exposure image
CN101480880B (en) Image forming apparatus and exposure image deviation correcting method
CN101609284B (en) Method for calibrating bias of exposure image and imaging device
US10477057B2 (en) Scanner and scanner data generating method
CN101408737B (en) Platform-type exposure image detection method
KR20070001251A (en) Exposure pattern forming method
CN101620398B (en) Imaging device and method for detecting exposed image deviation of exposure head
KR100340012B1 (en) Method of checking products and computer vision system using rotating mirror
US20090033952A1 (en) Image plotting apparatus and image plotting method
KR101098729B1 (en) Apparatus for and method of exposure patterns
US10587771B2 (en) Scanner and scanner data generating method
CN101620389A (en) Imaging device, and method and device for detecting installation of component thereof
KR20200044803A (en) Exposure equipment
CN101408716B (en) Auxiliary correcting device of exposure image partial difference
US7684025B2 (en) Auto-adjust of imaging module mechanical setup
JP2008076590A (en) Method and device for measuring drawing position
JPH01274283A (en) Pattern reader

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CP03 Change of name, title or address
CP03 Change of name, title or address

Address after: 518055 Dazu laser building, 9 new West Road, North Nanshan District high tech park, Shenzhen, Guangdong

Patentee after: HANS LASER TECHNOLOGY INDUSTRY GROUP CO., LTD.

Address before: No. 5 road 518057 in Guangdong province Shenzhen city Nanshan District high tech park of Pine Hill Factory District No. 8

Patentee before: Dazu Laser Sci. & Tech. Co., Ltd., Shenzhen