CN101598586B - 一种基于mems技术的微液量计量装置及其方法 - Google Patents
一种基于mems技术的微液量计量装置及其方法 Download PDFInfo
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- CN101598586B CN101598586B CN2009101316462A CN200910131646A CN101598586B CN 101598586 B CN101598586 B CN 101598586B CN 2009101316462 A CN2009101316462 A CN 2009101316462A CN 200910131646 A CN200910131646 A CN 200910131646A CN 101598586 B CN101598586 B CN 101598586B
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CN2009101316462A CN101598586B (zh) | 2009-04-13 | 2009-04-13 | 一种基于mems技术的微液量计量装置及其方法 |
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CN101598586A CN101598586A (zh) | 2009-12-09 |
CN101598586B true CN101598586B (zh) | 2011-03-09 |
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Families Citing this family (2)
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US9522380B2 (en) | 2013-06-20 | 2016-12-20 | Cem Corporation | Control apparatus for dispensing small precise amounts of liquid reagents |
DE102015101112B4 (de) * | 2015-01-27 | 2018-05-09 | Tdk Corporation | Sensor |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB541745A (en) * | 1939-03-10 | 1941-12-10 | Soc Fr Regulateurs Arca | Improvements in measuring the delivery of fluids |
CN1267819A (zh) * | 1999-03-23 | 2000-09-27 | 财团法人工业技术研究院 | 墨水容量测量方法及其装置 |
WO2006062574A2 (en) * | 2004-12-08 | 2006-06-15 | Li-Cor, Inc. | Pressure vent, leak detection, and kinetic volume determination methods and systems |
CN1952622A (zh) * | 2005-10-18 | 2007-04-25 | 旺宏电子股份有限公司 | 溶液体积测量装置 |
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2009
- 2009-04-13 CN CN2009101316462A patent/CN101598586B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB541745A (en) * | 1939-03-10 | 1941-12-10 | Soc Fr Regulateurs Arca | Improvements in measuring the delivery of fluids |
CN1267819A (zh) * | 1999-03-23 | 2000-09-27 | 财团法人工业技术研究院 | 墨水容量测量方法及其装置 |
WO2006062574A2 (en) * | 2004-12-08 | 2006-06-15 | Li-Cor, Inc. | Pressure vent, leak detection, and kinetic volume determination methods and systems |
CN1952622A (zh) * | 2005-10-18 | 2007-04-25 | 旺宏电子股份有限公司 | 溶液体积测量装置 |
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Address after: 510730 Guangzhou economic and Technological Development Zone, Guangdong City, South Road, No. three, No. 12 Patentee after: Yiwen Environmental Science Technology Co., Ltd. Address before: 3 building, B building, No. 885 Shenzhou Road, Guangzhou Science City, Guangdong, Guangzhou, Luogang District 510335, China Patentee before: Yiwen Environmental Science Technology Co., Ltd. |
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Denomination of invention: MEMS technology based micro liquid level metering device and method thereof Effective date of registration: 20181123 Granted publication date: 20110309 Pledgee: Guangzhou Branch of Guangzhou Bank Co., Ltd. Pledgor: Yiwen Environmental Science Technology Co., Ltd. Registration number: 2018440000333 |
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Date of cancellation: 20191209 Granted publication date: 20110309 Pledgee: Guangzhou Branch of Guangzhou Bank Co., Ltd. Pledgor: Yiwen Environmental Science Technology Co., Ltd. Registration number: 2018440000333 |