CN101587357A - Temperature control method and temperature control system thereof - Google Patents

Abstract

This invention provides a temperature control method, which includes the following steps: setting expected temperature value of circulating cooling temperature of temperature control system's output; according to the deviation between the current temperature in the circulating cooling liquid export and the expected value, adjusting power outputs of heating module and cooling module, and controlling the variation of temperature; dividing the change process of controlled temperature into three stages, the three stages are M1, M2 and M3, wherein, the M1 stage is used for improving response speed of the temperature control system, and approaching the expected the temperature value rapidly; the M2 stage is used for controlling slope of temperature change; the M3 stage is used for stabling system current temperature at the expected temperature. This invention provides a temperature control method and temperature control system thereof which divides the change process of controlled temperature into several stages, thereby causing the circulating cooling temperature up to the set point rapidly and improving the precision of control temperature.

Description

Temperature-controlled process and temperature control system thereof

Technical field

The present invention relates to a kind of temperature-controlled process and temperature control system thereof, relate in particular to a kind of temperature-controlled process and temperature control system thereof that is used for litho machine.

Background technology

Litho machine has strict restriction, the especially temperature fluctuation of litho machine inner projection object lens to the temperature fluctuation of its inside key components and parts, will directly cause the distortion of image quality.Require its temperature fluctuation range at ± 0.02 ℃ during the projection lens of lithography machine operate as normal, when adopting circulating cooling liquid that the litho machine temperature inside is controlled, generally require circulating cooling liquid body control accuracy of temperature reach ± 0.04 ℃.This just requires to provide the high-precision circulating cooling liquid of controlled temperature system to reach the purpose of stablizing the litho machine internal temperature to litho machine inside.

Method commonly used is the PID control method in the temperature control.PID is meant ratio, integration and differential control, and wherein proportional control is that control output is directly proportional with the margin of error, and the big more then control of deviation output is big more; Integration control is to be used to eliminate steady-state error; Differential control is in order to suppress error in advance.But existing known PID control technology often is difficult to reach fast the phenomenon of set temperature value and don't generation overshoot.

A kind of temperature of temperature-controlled process control projection objective of segmentation has been proposed in 2008 19 volumes of mechanical engineering journal the 10th phase " temperature control algorithm of the projection lens of lithography machine " literary composition, each stage is all adopted the PI control mode in this temperature-controlled process, i.e. ratio and integration control mode.Because segmentation is more, the more complicated of adjusting of parameter, it is longer to make temperature control the time that reaches stabilization process.

The patent No. is 02108085.2 Chinese patent, mentions a kind of inertia temperature-controlled process, is used to make idiosome to change between two temperature spots, the idiosome temperature is smoothly reached near the design temperature point, and do not produce overshoot.This method in temperature controlled whole process all with slope control as the main control target, and with design temperature point as less important controlled target, in the time of near finally reaching set point, temperature control precision is not high enough.

Summary of the invention

The invention provides a kind of temperature-controlled process and temperature control system thereof, to improve temperature control precision and to shorten response time in the temperature controlled processes.

For addressing the above problem, the invention provides a kind of temperature-controlled process, to carry out by a temperature control system, this temperature control system includes heating module and refrigeration module, said method comprising the steps of:

Set the desired temperature value of the circulating cooling liquid that this temperature control system will export;

According to the deviation between circulating cooling liquid outlet current temperature value and the desired temperature value, adjust the output of heating module and refrigeration module power, the control variation of temperature;

To control the variation of temperature process and be divided into three phases at least, each is realized different targets in stage, makes the temperature of circulating cooling liquid reach the desired temperature value of setting, and described three phases is M1, M2, M3, wherein,

The M1 stage is in order to improve the response speed of temperature control system, fast near the desired temperature value;

The M2 stage is in order to the slope of control temperature variation;

The M3 stage is used so that the current temperature value of system is stabilized in desired temperature value place.

Further, the step in described M1 stage is:

Set the desired temperature value of circulating cooling liquid;

Start heating module or refrigeration module to operate at full capacity, make current temperature value near described desired temperature value.

Further, the step in described M2 stage is:

Set an expectation rate temperature change;

Adjust the output power ratio of heating module and refrigeration module, make that the rate temperature change of circulating cooling liquid is consistent with the preferred temperature rate of change.

Further, the step in described M3 stage is:

Regulate heating module and refrigeration module simultaneously, circulating cooling liquid outlet current temperature value is stabilized near the setting value rapidly, and reaches anticipate accuracy;

The size of the increment of restriction heating module and refrigeration module temperature variation prevents that the increment of temperature variation is excessive.

The present invention also provides a kind of temperature control system that adopts the said temperature control method, and described temperature control system comprises temperature collect module, controller module, heating module, refrigeration module and water tank, wherein,

The input end of temperature collect module is connected with the output port of water tank, and output terminal is connected with controller module, in order to gather circulating cooling liquid outlet Current Temperatures;

The input end of controller module is connected with the output terminal of temperature collect module, output terminal is connected with the phasing degree controller with solid-state relay respectively, in order to the temperature data of described temperature collect module collection is handled, and heating module and refrigeration module are sent control signal;

The input end of heating module is connected with controller module, and output terminal is arranged in water tank, in order to control signal according to controller module, and the output power of control heating;

The input end of refrigeration module is connected with the phasing degree controller output end, and output terminal is connected with the input port of water tank, in order to control signal according to controller module, and the output power of control refrigeration;

The input end of water tank is connected with the output terminal of refrigeration module and heating module respectively, in order to the circulating cooling liquid of even mixing after heating and refrigeration;

Further, described temperature collect module comprises driving source, temperature sensor, A/D modular converter and digital filter,

The output terminal of driving source is connected with the input end of temperature sensor, in order to produce pumping signal to temperature sensor;

The input end of temperature sensor is connected with the output terminal of driving source, and output terminal is connected with the input end of A/D modular converter, in order to gather circulating cooling liquid outlet Current Temperatures and to offer A/D converter;

The input end of A/D converter is connected with the output terminal of temperature sensor, and output terminal is connected with the input end of digital filter, becomes digital signal in order to the analog signal conversion with described temperature sensor collection;

The input end of described digital filter is connected with the output terminal of A/D converter, and output terminal is connected in controller module, in order to will being converted into the measurement temperature value behind the described digital signal filter, and will measuring temperature value and pass to controller module.

Further, described driving source is constant current source or constant pressure source.

Further, described heating module comprises solid-state relay and well heater, wherein,

The input end of solid-state relay is connected with the output terminal of controller module, and output terminal is connected with the input end of well heater, in order to receive the control signal of controller module, the power output of control heater;

Well heater is arranged in water tank, in order to heating.

Further, described refrigeration module comprises phasing degree controller and semiconductor cooler, wherein,

The input end of phasing degree controller is connected with the output terminal of controller module, and output terminal is connected with semiconductor cooler, in order to receive the control signal of controller module, the power output of control semiconductor cooler;

The semiconductor cooler output terminal is connected with the input port of water tank, in order to the circulating cooling liquid after the refrigeration to be provided.

Further, described controller module comprises data storage cell, calculation processing unit and D/A converting unit, wherein,

The input end of data storage cell is connected with the output terminal of digital filter, and output terminal is connected with the input end of calculation processing unit, in order to data and the control program of using in the measurement temperature value of storage digital filter output and the computation process;

The input end of calculation processing unit is connected with the output terminal of data storage cell, and output terminal is connected with the input end of D/A converting unit, in order to data and the control program stored in the data storage unit are handled;

The input end of D/A converting unit is connected with the output terminal of calculation processing unit, and output terminal is connected with refrigeration module with heating module respectively, is simulating signal in order to calculation processing unit is handled the data conversion that obtains, and drives described heating module and refrigeration module.

Further, described temperature control system also comprises water pump, and the input end of described water pump is connected with the output port of water tank, flows between temperature control system and outside Be Controlled object in order to drive circulating cooling liquid.

Compare with existing temperature-controlled process and temperature control system thereof, temperature-controlled process provided by the invention and temperature control system thereof are by the deviation between comparison loop cooling liquid outlet current temperature value and the desired temperature value, adjust the output of heating module and refrigeration module power, to control the variation of temperature process and be divided into some stages, make the temperature of circulating cooling liquid reach the design temperature point fast, and improved the precision of control temperature.

Description of drawings

Below in conjunction with the drawings and specific embodiments temperature-controlled process of the present invention and temperature control system thereof are described in further detail.

Fig. 1 is the circulating cooling liquid pipe connection system synoptic diagram of temperature control equipment in the embodiment of the invention;

Fig. 2 is a temperature control system synoptic diagram in the embodiment of the invention;

Fig. 3 is the overall flow figure of temperature-controlled process in the embodiment of the invention;

Fig. 4 is a temperature control M1 stage control program process flow diagram in the embodiment of the invention;

Fig. 5 is a temperature control M2 stage control program process flow diagram in the embodiment of the invention;

Fig. 6 is a temperature control M3 stage control program process flow diagram in the embodiment of the invention;

Fig. 7 is temperature-controlled process and a conventional PID temperature-controlled process simulation curve comparison synoptic diagram in the embodiment of the invention;

Fig. 8 is temperature control system and conventional its heating module of PID temperature control system and a refrigeration module output emulation comparison synoptic diagram in the embodiment of the invention.

Embodiment

For technical characterictic of the present invention is become apparent, below in conjunction with accompanying drawing and embodiment, the present invention will be further described.

See also Fig. 1, Fig. 1 is the circulating cooling liquid pipe connection system synoptic diagram of temperature control equipment in the embodiment of the invention, this liquid coolant pipeline connected system comprises temperature collect module 2, controller module 1, heating module 3 and refrigeration module 4, water pump 5, pressure transducer 6, flow sensor 7, solenoid valve 8, hand valve 9, solenoid valve 13 and water tank 14, circulating cooling liquid is driven by water pump 5, flow into external units via solenoid valve 8, with external unit generation heat interchange after flow into the temperature control equipment inside by solenoid valve 13.The circulating cooling liquid of semiconductor cooler 41 and 31 pairs of inflow temperature control equipments of well heater inside in water tank 14 inner fully mixing, reaches evenly the circulating cooling liquid temperature through behind the heating and cooling, by water pump 5 drivings, flows into external unit and carries out heat interchange once more.Wherein solenoid valve 13 can be regulated the size that flows into external unit circulating cooling liquid flow, and pressure transducer 6 is used to monitor the pressure of circulating cooling liquid.In the present embodiment, described circulating cooling liquid is a water.

See also as shown in Figure 2, Fig. 2 is a temperature control system synoptic diagram in the embodiment of the invention, see also Fig. 2 and combination with reference to Fig. 1, the temperature control system that present embodiment provides is the part of above-mentioned liquid coolant pipeline connected system, the outlet temperature that is used for the Control Circulation liquid coolant, mainly be made up of temperature collect module 2, controller module 1, heating module 3 and refrigeration module 4, described temperature collect module 2 comprises driving source 20, temperature sensor 21, A/D converting unit 22 and digital filter 23; Described driving source 20 can be constant pressure source or constant current source, adopts constant current source in the present embodiment.Described temperature sensor 21 can be thermistor or platinum resistance, adopts the pt100 platinum resistance in the present embodiment.

Described driving source 20 is in order to produce pumping signal to temperature sensor; Described temperature sensor 21 is promptly gathered from the temperature of 5 mouthfuls of circulating cooling liquids that come out of water pump in order to gather circulating cooling liquid outlet Current Temperatures, and offers A/D converter 22; A/D converter 22 becomes digital signal in order to the analog signal conversion that described temperature sensor 21 is gathered; Described digital filter 23 is in order to will being converted into the measurement temperature value behind the described digital signal filter, and will measure temperature value and pass to controller module 1.

Described controller module 1 is made up of data storage unit 10, calculation processing unit 11 and D/A converting unit 12; Data and the control program of data storage unit 10 in order to use in the measurement temperature value of storage digital filter output and the computation process; Calculation processing unit 11 is used for deal with data, implements Fig. 3 to program circuit shown in Figure 6 (concrete processing procedure is narrated after holding again); It is simulating signal that D/A converting unit 12 is handled the data conversion that obtains with calculation processing unit 11, drives heating module 3 and refrigeration module 4 respectively.

Described data storage cell 10 can be made up of DSP or single-chip microcomputer with calculation processing unit 11.

Heating module 3 is made up of solid-state relay 30 and well heater 31, and solid-state relay 30 receives the simulating signal of controller module 1 output, the power output of control heater 31, and well heater 31 is arranged in water tank 14, in order to circulating cooling liquid is heated.Well heater 31 power are 2500W in the present embodiment.

Refrigeration module 4 is made up of phasing degree controller 40 and semiconductor cooler 41, and phasing degree controller 40 receives the simulating signal of controller module 1 output, the power output of control semiconductor cooler 41, and the power of semiconductor cooler 41 is 3000W in the present embodiment.

See also Fig. 3, Fig. 3 is the overall flow figure of temperature-controlled process in the embodiment of the invention, the steps include: to set the desired temperature value of circulating cooling liquid; According to the deviation between circulating cooling liquid outlet current temperature value and the desired temperature value, adjust heating module 3 and the output of refrigeration module 4 power, the control variation of temperature; To control the variation of temperature process and be divided into some stages, each stage is realized different targets, makes the temperature of circulating cooling liquid reach the design temperature point.In the present embodiment, be divided into and be M1, M2, M3 three phases, please as follows referring to concrete steps in conjunction with process flow diagram shown in Figure 3:

Overall flow starts from step S30, i.e. temperature control beginning enters step S31, each parameter value of initialization then:

T _S: the control algolithm sampling time is 5s in the present embodiment;

A1, a2: each stage separation, obtain by parameter tuning or empirical value, in the present embodiment for getting a1=0.8, a2=0.3.

K1, k2:M2 stage scale-up factor is obtained by parameter tuning or empirical value, selects k1=2, k2=2.4 in the present embodiment.

Lim1, lim2:M2 stage heating module 3 and refrigeration module 4 increment amplitude limits are obtained by parameter tuning or empirical value; Select lim1=10 in the present embodiment, lim2=9.

P1, P2, I1, I2:M3 stage heating module 3 and refrigeration module 4 ratios, integral coefficient are obtained by parameter tuning or experience, select P1=1.2 in the present embodiment, P2=0.8, I1=0.012, I2=0.01.

Lim3, lim4:M3 stage heating module 3 and refrigeration module 4 increment amplitude limits are selected lim3=5, lim4=4.5 in the present embodiment.

V ': the speed that the expectation water temperature changes, set by experience;

In step S33, the data that controller module 1 receives from temperature collect module 2, process are relatively set deviation err=setting value-initial water temperature value, calculate deviate, and step S34 controls the stage of temperature according to following formula decision:

If the absolute value of err more than or equal to a1, then enters step S35, i.e. the M1 stage; Otherwise enter step S36, step S36 judges that the absolute value of working as err greater than a2, less than a1, then enters the M2 stage, otherwise enters the M3 stage.

Draw the stage of control temperature according to above-mentioned formula after, the processing that can select to enter certain concrete stage is introduced respectively below:

See also Fig. 4, Fig. 4 is a temperature control M1 stage control program process flow diagram in the inventive embodiments.It is the response speed of raising system that the M1 stage mainly acts on.The steps include: to set the desired temperature value of the circulating cooling liquid that this temperature control system will export; According to the deviation between circulating cooling liquid outlet current temperature value and the desired temperature value, startup heating module 3 or refrigeration module 4 to be to operate at full capacity, and current temperature value is risen rapidly or descends, with rapidly near set temperature value.

Concrete condition please is divided into 2 kinds of situations in conjunction with process flow diagram shown in Figure 4:

Step S40, if judge err greater than a1 (err＞a1), enter step S41, setting value is high more a lot of than initial water temperature value, for making the water temperature fast rise, heating module 3 power output number percent is 100%, the power output number percent of refrigeration module 4 is 0; When err less than the negative value of a1 (err＜-a1) time, enter step S42, setting value is more much lower than initial water temperature, descends fast for making water temperature, heating module 3 power output number percent is 0, refrigeration module 4 power output number percent is 100%, computing formula is as follows:

$\mathrm{yh}\left(k\right)=\left\{\begin{array}{cc}1& \mathrm{err}>a1\\ 0& \mathrm{err}<-a1\end{array}\right.$

$\mathrm{yc}\left(k\right)=\left\{\begin{array}{cc}0& \mathrm{err}>a1\\ 1& \mathrm{err}<-a1\end{array}\right.$

Wherein, yh (k): heating module output number percent, the ratio of heating module real output and rated power,

Yc (k): refrigeration module output number percent, the ratio of refrigeration module real output and rated power.

See also Fig. 5, Fig. 5 is a temperature control M2 stage control program process flow diagram in the embodiment of the invention.It is the slope of regulating temperature variation by certain temperature control algorithm that the M2 stage mainly acts on.The steps include: to set an expectation rate temperature change V '; Adjust the output power ratio of heating module 3 and refrigeration module 4, make that the rate temperature change of circulating cooling liquid is consistent with the preferred temperature rate of change.Bigger for temperature control system inertia, when the slope of temperature variation is big, be easy to produce bigger overshoot, and make near actual temperature value continuous vibration setting value.Therefore the M2 stage makes it carry out the transition to the M3 stage more stably by the slope of control temperature variation, finally reaches the purpose that reduces overshoot.

Because heating module 3 exists simultaneously with refrigeration module 4 in the system, when regulating the temperature variation slope, both can realize also can realizing, guarantee by certain control algolithm that selected adjusting approach was to save the energy most in this process by heating module 3 by refrigeration module 4.As when the temperature rate of rise is excessive, can reduces the slope that temperature rises by the output that reduces the output of heating module 3 power or increase refrigeration module 4 power, but can reduce efficiency of energy utilization during the output that increases refrigeration module 4.

Enter M2 during the stage, the relation between situation of change, setting value and the current water temperature value of water temperature and the output power number percent of heating module and refrigeration module are made a strategic decision, produce optimum regulative mode, both save the energy to reach, can regulate the purpose of water temperature rate of change again, specifically can be divided into following four kinds of situations:

Step S50 judge when err during greater than a2, less than a1 (a2＜err＜a1), then enter step S51 and continue judgement: when the water temperature climbing speed smaller or equal to 0.03; Whether the output quantity yc (k-1) that judges refrigeration module 4 is 0, if be 0, enters step S52, if be not 0, enters step S53, and it calculates referring to following formula:

$\mathrm{\&Delta;yh}\left(k\right)=\left\{\begin{array}{cc}-\mathrm{<figure-callout\; id="1"\; label="k"\; filenames="A2009100510570018H1.png,A2009100510570019H1.png"\; state="\{\{state\}\}">k</figure-callout>}1*(v-v^{\&prime;})& \mathrm{yc}(k-1)==0\\ 0& \mathrm{yc}(k-1)>0\end{array}\right.$

$\mathrm{\&Delta;yc}\left(k\right)=\left\{\begin{array}{cc}\mathrm{<figure-callout\; id="2"\; label="k"\; filenames="A2009100510570018H1.png,A2009100510570018H2.png"\; state="\{\{state\}\}">k</figure-callout>}2*(v-v^{\&prime;})& \mathrm{yc}(k-1)>0\\ 0& \mathrm{yc}(k-1)==0\end{array}\right.$

Wherein,

V: water temperature rate of change, v=|e _n-e _N-1|;

e _n: current deviate;

e _N-1: last deviate;

Δ yh (k): add the thermal output percent increments;

Δ yc (k): refrigeration output percent increments;

2. work as a2＜err＜a1, and the water temperature climbing speed was greater than 0.03 o'clock; Judge whether be 0, when the output quantity of heating module 3 is 0, enter step S53 if adding heat output, be not 0, then enters step S52, then reduces the speed that water temperature rises by refrigeration module, it calculates referring to following formula:

$\mathrm{\&Delta;yh}\left(k\right)=\left\{\begin{array}{cc}-\mathrm{<figure-callout\; id="1"\; label="k"\; filenames="A2009100510570018H1.png,A2009100510570019H1.png"\; state="\{\{state\}\}">k</figure-callout>}1*(v-v^{\&prime;})& \mathrm{yh}(k-1)>0\\ 0& \mathrm{yh}(k-1)==0\end{array}\right.$

$\mathrm{\&Delta;yc}\left(k\right)=\left\{\begin{array}{cc}\mathrm{<figure-callout\; id="2"\; label="k"\; filenames="A2009100510570018H1.png,A2009100510570018H2.png"\; state="\{\{state\}\}">k</figure-callout>}2*(v-v^{\&prime;})& \mathrm{yh}(k-1)==0\\ 0& \mathrm{yh}(k-1)>0\end{array}\right.$

3. enter step S54, when-a2＞=err＞=-during a1, and the speed that water temperature descends judges smaller or equal to 0.03 o'clock whether the output of heating is 0, if be not 0, enters step S56, reduces the power output of heating module, increases the speed that water temperature descends; If be 0, enter step S55, increase the power output of refrigeration module, increase the speed that water temperature descends, it calculates referring to following formula:

$\mathrm{\&Delta;yh}\left(k\right)=\left\{\begin{array}{cc}\mathrm{<figure-callout\; id="1"\; label="k"\; filenames="A2009100510570018H1.png,A2009100510570019H1.png"\; state="\{\{state\}\}">k</figure-callout>}1*(v-v^{\&prime;})& \mathrm{yh}(k-1)>0\\ 0& \mathrm{yh}(k-1)==0\end{array}\right.$

$\mathrm{\&Delta;yc}\left(k\right)=\left\{\begin{array}{cc}-\mathrm{<figure-callout\; id="2"\; label="k"\; filenames="A2009100510570018H1.png,A2009100510570018H2.png"\; state="\{\{state\}\}">k</figure-callout>}2*(v-v^{\&prime;})& \mathrm{yh}(k-1)==0\\ 0& \mathrm{yh}(k-1)>0\end{array}\right.$

When-a2＞=err＞=-during a1, and the speed that water temperature descends judges greater than 0.03 o'clock whether the output of refrigeration module is 0, if be not 0, enters step S55, reduces the power output of refrigeration module, reduces the speed of water temperature decline; If be 0, enter step S56, increase the power output of heating module, reduce the speed that water temperature descends, it calculates referring to following formula:

$\mathrm{\&Delta;yh}\left(k\right)=\left\{\begin{array}{cc}\mathrm{<figure-callout\; id="1"\; label="k"\; filenames="A2009100510570018H1.png,A2009100510570019H1.png"\; state="\{\{state\}\}">k</figure-callout>}1*(v-v^{\&prime;})& \mathrm{yc}(k-1)==0\\ 0& \mathrm{yc}(k-1)>0\end{array}\right.$

$\mathrm{\&Delta;yc}\left(k\right)=\left\{\begin{array}{cc}-\mathrm{<figure-callout\; id="2"\; label="k"\; filenames="A2009100510570018H1.png,A2009100510570018H2.png"\; state="\{\{state\}\}">k</figure-callout>}2*(v-v^{\&prime;})& \mathrm{yc}(k-1)>0\\ 0& \mathrm{yc}(k-1)==0\end{array}\right.$

Finish after the judgement of above four kinds of situations, calculate the increment size, enter step S57, the increment size is limited, judge | Δ yh (k) | whether more than or equal to lim1, if, then enter step S58, the size of Δ yh (k) is carried out amplitude limit, if not, then enter step S59, judge | Δ yc (k) | whether more than or equal to lim2, if then enter step S510, size to Δ yc (k) is carried out amplitude limit, and enter step S39, calculate the size of h (k) and yc (k), then execution in step S310; If not, then directly enter step S39, calculate the size of h (k) and yc (k), then execution in step S310.

See also Fig. 6, Fig. 6 is a temperature control M3 stage control program process flow diagram in the embodiment of the invention.The M3 stage is used the increment amplitude limit PI control method of two increment types, and step S60 adjusts the output power of heating module and refrigeration module simultaneously, and the system current temperature value of making is stabilized in the set temperature value place rapidly, and is stabilized in 0.01 ℃.Employed formula is as follows:

Δyh(k)＝P1*(e _n-e _n-1)+I1*e _n*T _s

Δyc(k)＝-P2*(e _n-e _n-1)-I2*e _n*T _s

Similar with the M2 stage, excessive for preventing increment, near actual temperature value frequent fluctuation measured value limits the increment size.Step S61 judges Δ yh (k), if its absolute value more than or equal to lim3, then enters step S62, increment is limited.Otherwise enter step S63 the size of Δ yc (k) is carried out,, the size of Δ yc (k) is limited if the absolute value of Δ yc (k) then enters step S64 more than or equal to lim4.Its judgment formula is:

$\mathrm{\&Delta;yh}\left(k\right)=\left\{\begin{array}{cc}\mathrm{<figure-callout\; id="3"\; label="lim"\; filenames="A2009100510570018H2.png,A2009100510570019H1.png"\; state="\{\{state\}\}">lim</figure-callout>}3& \mathrm{\&Delta;yh}\left(k\right)>\mathrm{<figure-callout\; id="3"\; label="lim"\; filenames="A2009100510570018H2.png,A2009100510570019H1.png"\; state="\{\{state\}\}">lim</figure-callout>}3\\ \mathrm{\&Delta;yh}\left(k\right)& \left|\mathrm{\&Delta;yh}\left(k\right)\right|=<\lim 3\\ -\mathrm{<figure-callout\; id="3"\; label="lim"\; filenames="A2009100510570018H2.png,A2009100510570019H1.png"\; state="\{\{state\}\}">lim</figure-callout>}3& \mathrm{\&Delta;yh}\left(k\right)<-\mathrm{<figure-callout\; id="3"\; label="lim"\; filenames="A2009100510570018H2.png,A2009100510570019H1.png"\; state="\{\{state\}\}">lim</figure-callout>}3\end{array}\right.$

$\mathrm{\&Delta;yc}\left(k\right)=\left\{\begin{array}{cc}\lim 4& \mathrm{\&Delta;yc}\left(k\right)>\lim 4\\ \mathrm{\&Delta;yc}\left(k\right)& \left|\mathrm{\&Delta;yc}\left(k\right)\right|=<\lim 4\\ -\lim 4& \mathrm{\&Delta;yc}\left(k\right)<-\lim 4\end{array}\right.$

yh(k)＝yh(k-1)+Δyh(k)

yc(k)＝yc(k-1)+Δyc(k)

Actual heating module 3 be [0,1] with the power output percentage range of refrigeration module 4, therefore herein the power number percent of heating module 3 and refrigeration module 4 is carried out amplitude limit, and its amplitude limit condition is referring to following formula:

Obtain after the output number percent of heating module 3 and refrigeration module 4, i.e. step S39 as shown in Figure 3, calculate yh (k), yc (k), enter step S310, yh (k) and yc (k) are converted into corresponding big or small simulating signal and send solid-state relay 30 and phasing degree controller 40 to, with control solid-state relay 30 and phasing degree controller 40.It is the simulating signal of 0～10V that solid-state relay 30 receives control signal, and it is the simulating signal of 4～20mA that phasing degree controller 40 receives control signal, and therefore by the A/D conversion, the simulating signal of giving solid-state relay and phasing degree controller at last is respectively: Y _Gu=10*yh (k), Y _Phase=16*yc (k)+4.In this programme, sampling time Ts=5 second.Step S311 enters step S312 for wait for 5 seconds behind the number percent that calculates heating and refrigeration output power, upgrades e _nAnd e _N-1, promptly again to e _nAnd e _N-1Carry out assignment, calculate the output of next group heating module and refrigeration module:

e _n-1＝e _n

e _n＝SV-PV

Wherein, SV: water temperature setting value;

PV: water temperature currency.

See also Fig. 7 and Fig. 8, Fig. 7 is temperature-controlled process and a conventional PID temperature-controlled process simulation curve comparison synoptic diagram in the embodiment of the invention; Synoptic diagram is compared in temperature-controlled process and conventional its heating module of PID temperature-controlled process and refrigeration module output emulation in this embodiment of the invention of Fig. 8.

As can be seen from Figure 7, adopt the overshoot that control method produces described in the present embodiment to be significantly less than conventional PID control method, and stabilization time is shorter.

As can be seen from Figure 8, behind system stability, the output quantity of temperature-controlled process heating module described herein and refrigeration module is significantly less than conventional PID temperature-controlled process, can reach purpose of energy saving.

More than show and described ultimate principle of the present invention, principal character and advantage of the present invention.The technician of the industry should understand; the present invention is not restricted to the described embodiments; that describes in the foregoing description and the instructions just illustrates principle of the present invention; the present invention also has various changes and modifications without departing from the spirit and scope of the present invention, and these changes and improvements all fall in the claimed scope of the invention.The claimed scope of the present invention is defined by appending claims and equivalent thereof.

Claims (11)

1. a temperature-controlled process is carried out by a temperature control system, and this temperature control system includes heating module and refrigeration module, it is characterized in that, said method comprising the steps of:

Set the desired temperature value of the circulating cooling liquid that this temperature control system will export;

According to the deviation between circulating cooling liquid outlet current temperature value and the desired temperature value, adjust the output of heating module and refrigeration module power, the control variation of temperature;

To control the variation of temperature process and be divided into three phases at least, each is realized different targets in stage, makes the temperature of circulating cooling liquid reach the desired temperature value of setting, and described three phases is M1, M2, M3, wherein,

The M1 stage is in order to improve the response speed of temperature control system, fast near the desired temperature value;

The M2 stage is in order to the slope of control temperature variation;

The M3 stage is used so that the current temperature value of system is stabilized in desired temperature value place.

2. temperature-controlled process according to claim 1, it is characterized in that: the step in described M1 stage is:

Set the desired temperature value of circulating cooling liquid;

Start heating module or refrigeration module to operate at full capacity, make current temperature value near described desired temperature value.

3. temperature-controlled process according to claim 1, it is characterized in that: the step in described M2 stage is:

Set an expectation rate temperature change;

Adjust the output power ratio of heating module and refrigeration module, make that the rate temperature change of circulating cooling liquid is consistent with the preferred temperature rate of change.

4. temperature-controlled process as claimed in claim 1 is characterized in that: the step in described M3 stage is:

Regulate heating module and refrigeration module simultaneously, circulating cooling liquid outlet current temperature value is stabilized near the setting value rapidly, and reaches anticipate accuracy;

The size of the increment of restriction heating module and refrigeration module temperature variation prevents that the increment of temperature variation is excessive.

5. temperature control system is characterized in that: adopt as each described temperature-controlled process in the claim 1 to 4, described temperature control system comprises temperature collect module, controller module, heating module, refrigeration module and water tank, wherein,

The input end of temperature collect module is connected with the output port of water tank, and output terminal is connected with controller module, in order to gather circulating cooling liquid outlet Current Temperatures;

The input end of controller module is connected with the output terminal of temperature collect module, output terminal is connected with the phasing degree controller with solid-state relay respectively, in order to the temperature data of described temperature collect module collection is handled, and heating module and refrigeration module are sent control signal;

The input end of heating module is connected with controller module, and output terminal is arranged in water tank, in order to control signal according to controller module, and the output power of control heating;

The input end of refrigeration module is connected with the phasing degree controller output end, and output terminal is connected with the input port of water tank, in order to control signal according to controller module, and the output power of control refrigeration;

The input end of water tank is connected with the output terminal of refrigeration module and heating module respectively, in order to the circulating cooling liquid of even mixing after heating and refrigeration.

6. as temperature control system as described in the claim 5, it is characterized in that: described temperature collect module comprises driving source, temperature sensor, A/D modular converter and digital filter,

The output terminal of driving source is connected with the input end of temperature sensor, in order to produce pumping signal to temperature sensor;

The input end of temperature sensor is connected with the output terminal of driving source, and output terminal is connected with the input end of A/D modular converter, in order to gather circulating cooling liquid outlet Current Temperatures and to offer A/D converter;

The input end of A/D converter is connected with the output terminal of temperature sensor, and output terminal is connected with the input end of digital filter, becomes digital signal in order to the analog signal conversion with described temperature sensor collection;

The input end of described digital filter is connected with the output terminal of A/D converter, and output terminal is connected in controller module, in order to will being converted into the measurement temperature value behind the described digital signal filter, and will measuring temperature value and pass to controller module.

7. as temperature control system as described in the claim 6, it is characterized in that: described driving source is constant current source or constant pressure source.

8. as temperature control system as described in the claim 5, it is characterized in that: described heating module comprises solid-state relay and well heater, wherein,

The input end of solid-state relay is connected with the output terminal of controller module, and output terminal is connected with the input end of well heater, in order to receive the control signal of controller module, the power output of control heater;

Well heater is arranged in water tank, in order to heating.

9. as temperature control system as described in the claim 5, it is characterized in that: described refrigeration module comprises phasing degree controller and semiconductor cooler, wherein,

The input end of phasing degree controller is connected with the output terminal of controller module, and output terminal is connected with semiconductor cooler, in order to receive the control signal of controller module, the power output of control semiconductor cooler;

The semiconductor cooler output terminal is connected with the input port of water tank, in order to the circulating cooling liquid after the refrigeration to be provided.

10. as temperature control system as described in the claim 5, it is characterized in that: described controller module comprises data storage cell, calculation processing unit and D/A converting unit, wherein,

The input end of data storage cell is connected with the output terminal of digital filter, and output terminal is connected with the input end of calculation processing unit, in order to data and the control program of using in the measurement temperature value of storage digital filter output and the computation process;

The input end of calculation processing unit is connected with the output terminal of data storage cell, and output terminal is connected with the input end of D/A converting unit, in order to data and the control program stored in the data storage unit are handled;

The input end of D/A converting unit is connected with the output terminal of calculation processing unit, and output terminal is connected with refrigeration module with heating module respectively, is simulating signal in order to calculation processing unit is handled the data conversion that obtains, and drives described heating module and refrigeration module.

11. as temperature control system as described in the claim 5, it is characterized in that: described temperature control system also comprises water pump, the input end of described water pump is connected with the output port of water tank, flows between temperature control system and outside Be Controlled object in order to drive circulating cooling liquid.

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