CN101586626A - Ultraprecise electrohydraulic servo-controlled dynamic-static pressure bearing and feed mechanism - Google Patents
Ultraprecise electrohydraulic servo-controlled dynamic-static pressure bearing and feed mechanism Download PDFInfo
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- CN101586626A CN101586626A CNA2009100696500A CN200910069650A CN101586626A CN 101586626 A CN101586626 A CN 101586626A CN A2009100696500 A CNA2009100696500 A CN A2009100696500A CN 200910069650 A CN200910069650 A CN 200910069650A CN 101586626 A CN101586626 A CN 101586626A
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Abstract
An ultraprecise electrohydraulic servo-controlled dynamic-static pressure bearing and a feed mechanism are provided with the following components: a first oil supplying system which supplies oil to a main shaft mechanism through an orifice restrictor; and a second oil supplying system which supplies oil to a front centering static pressure bearing through an electrohydraulic servo valve. A main shaft structure is composed of a centering dynamic static pressure bearing sleeve which is sleeved at the front end of the main shaft, a dynamic static pressure bearing which is sleeved at the back end of the main shaft, and a static pressure thrust bearing and a flange which are provided at the front end of the main shaft. The inner circumferential surfaces of the centering dynamic static pressure bearing sleeve and the dynamic static pressure bearing sleeve are provided with a pressure bearing groove and an oil return groove. The pressure bearing groove of the dynamic static pressure bearing sleeve is supplied with oil by the fist oil supplying system. The pressure bearing groove in the vertical direction of the centering dynamic static pressure bearing sleeve is supplied with oil by the first oil supplying system through the restrictor. The pressure bearing groove in the horizontal direction is supplied with oil by the second oil supplying system through the electrohydraulic servo valve. The oil return groove of the centering dynamic static pressure bearing sleeve and the oil return groove of the dynamic static pressure bearing sleeve are communicated with the oil tank. The static pressure thrust bearing sleeve is supplied with oil by the first oil supplying system through the orifice restrictor. The ultraprecise electrohydraulic servo-controlled dynamic-static pressure bearing and the feed mechanism of the invention have the advantages of high rotation accuracy, higher rigidity and better vibration resistance.
Description
Technical field
The invention belongs to a kind of dynamic and hydrostatic bearing, particularly relate to a kind of servo-controlled dynamic and hydrostatic bearing of Ultraprecise electrohydraulic and feed mechanism that can improve the rotation precision of main shaft.
Background technique
Dynamic and hydrostatic bearing is little owing to having frictional force, long service life, resistance to shock is good, precision is than characteristics such as height, on machine tool chief axis, obtains to use widely, but along with the development of industrial technology, the development of particularly national defense industry, aviation industry, running accuracy requirement to main shaft is more and more higher, and conventional dynamic and hydrostatic bearing can not be satisfied the demand, therefore needs higher dynamic and hydrostatic bearing (the main shaft circular runout 0.0001～0.000001mm) of research and development running accuracy.In ultraprecise processing, need the fine feeding of 0.0001～0.000001mm simultaneously, and this can't finish by present existing conventional feed mechanism.
Fig. 1 is traditional constant pressure oil supply dynamic and hydrostatic bearing schematic diagram, this constant pressure oil supply dynamic and hydrostatic bearing is by oil supply system 1, orifice restriction device 2 and bearing 3 three parts are formed, its working principle is as follows: when the oil pump of oil supply system does not start as yet, do not have pressure oil in the bearing oil pocket, main shaft 4 is pressed in the bottom of bearing housing owing to gravity.Behind the pump start, pressure oil enters corresponding loading ability of bearing chamber by flow controller.If ignore the weight of main shaft 4, then main shaft 4 can be floated to the bearing housing central position by oil pressure, and main shaft 4 this moment gap everywhere equates that each bearing cavity pressure equates that main shaft 4 is in state of liquid friction, and main shaft 4 can start.
When main shaft 4 is subjected to time spent of doing of external load, can under the effect of external force F, produce a micro-displacement e (see figure 2), the gap that makes lower oil cavitie 7 is from h
0Diminish and be h
0-e, oily resistance on the oil sealing surface increases, thereby the pressure of lower oil cavitie 7 is risen, the pressure of the upper oil cavitie 9 on corresponding opposite can descend, thereby a differential pressure action is arranged on main shaft 4, when this pressure reduction arrived to a certain degree greatly, when the reaction force of its generation and external force F balance, main shaft 4 just stopped at a new position.The working principle of Here it is hydrostatic spindle, it tells us, and the work of this main shaft is to be based upon on an amount of the moving of main shaft, does not have this to move, and it just can't be worked.In the hydrostatic bearing of reality, this amount of movement has only several microns, and this has been enough to most use occasion precision.But along with the development of national defense industry, the particularly development of Aero-Space cause need be brought up to the rotation precision of main shaft highlyer, makes its rotating accuracy reach 0.00001mm or higher.
Summary of the invention
The present invention provides a kind of servo-controlled dynamic and hydrostatic bearing of Ultraprecise electrohydraulic and feed mechanism that can improve the rotation precision of main shaft for solving the technical problem that exists in the known technology.
The technological scheme that the present invention takes for the technical problem that exists in the solution known technology is: servo-controlled dynamic and hydrostatic bearing of a kind of Ultraprecise electrohydraulic and feed mechanism, include and pass through first oil supply system of 8 orifice restriction devices respectively, also be provided with second oil supply system of holding fuel feeding by the calm last item of the predetermination of electrohydraulic control in main shaft structure to the mainshaft mechanism fuel feeding; Described main shaft structure is to be made of main shaft, the centering dynamic and hydrostatic bearing sleeve that is enclosed within front-end of spindle, static pressure thrust bearing cover and the flange that is enclosed within the dynamic and hydrostatic bearing sleeve of rear-end of spindle and is arranged on front-end of spindle; All be provided with uniform four pressure tanks and four oil-return grooves on the inner peripheral surface of described centering dynamic and hydrostatic bearing sleeve and dynamic and hydrostatic bearing sleeve, four pressure tanks of dynamic and hydrostatic bearing sleeve pass through four flow controller fuel feeding by described first oil supply system, two pressure tanks of the Vertical direction of described centering dynamic and hydrostatic bearing sleeve by described first oil supply system by the flow controller fuel feeding, and two pressure tanks of substantially horizontal by electrohydraulic control by the second oil supply system fuel feeding; Four oil-return grooves of centering dynamic and hydrostatic bearing sleeve and dynamic and hydrostatic bearing sleeve all communicate with fuel tank; The static pressure thrust bearing cover via the orifice restriction device by the first oil supply system fuel feeding.
The described centering dynamic and hydrostatic bearing that is positioned at front-end of spindle puts corresponding to the oil-feed tank place by the electrohydraulic control fuel feeding and is provided with a capacitance displacement sensor, described capacitance displacement sensor is connected with electrohydraulic control with second amplifier by first amplifier, comparator successively, and described comparator also receives the command signal that being used for of having set compares for transmitted number with capacitance displacement sensor.
Described main oil supply system is identical with the second oil supply system structure.
Another technological scheme of the present invention is: servo-controlled dynamic and hydrostatic bearing of a kind of Ultraprecise electrohydraulic and feed mechanism, include and pass through first oil supply system of 8 orifice restriction devices respectively, also be provided with second oil supply system of holding fuel feeding by the calm last item of the predetermination of electrohydraulic control in main shaft structure to the mainshaft mechanism fuel feeding; Described main shaft structure is to be made of main shaft, the centering dynamic and hydrostatic bearing sleeve that is enclosed within front-end of spindle, static pressure thrust bearing cover and the flange that is enclosed within the dynamic and hydrostatic bearing sleeve of rear-end of spindle and is arranged on the front-end of spindle appropriate location; The inner peripheral surface of described centering dynamic and hydrostatic bearing sleeve is provided with 3 pairs of 6 uniform pressure tanks and six oil-return grooves, every pair of pressure tank is by an electrohydraulic control control fuel feeding, have three electrohydraulic controls and respectively three pairs of pressure tanks are carried out fuel feeding control, three electrohydraulic controls are by the second oil supply system fuel feeding, three electrohydraulic control structural parameter are identical, and six oil-return grooves all communicate with fuel tank; The static pressure thrust bearing cover via the orifice restriction device by the first oil supply system fuel feeding.
On 3 pairs of pressure tanks of described centering dynamic and hydrostatic bearing sleeve 1 capacitance displacement sensor is set respectively, described 3 capacitance displacement sensors are connected with electrohydraulic control by first amplifier corresponding with this capacitance displacement sensor, comparator and second amplifier respectively successively, and described comparator also receives the command signal that being used for of having set compares for transmitted number with capacitance displacement sensor.
Servo-controlled dynamic and hydrostatic bearing of Ultraprecise electrohydraulic of the present invention and feed mechanism have the following advantages:
1. running accuracy height, main shaft circular runout≤10nm;
2. rigidity is higher, good anti-vibration;
3. the present invention can utilize the control of servovalve, by changing the thickness of oil film, make main shaft produce a corresponding micro-displacement be used for finishing super in the superfinish progress greatly to, i.e. the present invention can be used as the ultraprecise feed mechanism and uses;
4. the present invention can not use dynamic poise device just can realize the highi degree of accuracy rotation, and in other words, the closed loop position control system of this employing electrohydraulic control control also can be used as high-accuracy dynamic poise device and uses;
5. if needed, two other oil pocket of fore bearing also can use electrohydraulic control control, and same rear bearing and thrust-bearing can adopt electrohydraulic control control too, are that such cost also can improve greatly.
Description of drawings
Fig. 1 is the dynamic and hydrostatic bearing of prior art and the structural representation of feed mechanism;
Fig. 2 is the structural representation of doing the time spent that main shaft is subjected to external load among Fig. 1;
Fig. 3 is the structural representation of dynamic and hydrostatic bearing of the present invention and feed mechanism;
Fig. 4 is another embodiment's of dynamic and hydrostatic bearing of the present invention and feed mechanism a structural representation.
Label among the figure is respectively:
1-first oil supply system; 2-orifice restriction device; The 3-main shaft structure; The 4-main shaft; The 5-flange; 6-static pressure thrust bearing cover; The 7-lower oil cavitie; 8,8 '-centering dynamic and hydrostatic bearing sleeve; The 9-upper oil cavitie; 10-second amplifier; 11-dynamic and hydrostatic bearing sleeve; The 12-pressure tank; The 13-oil-return groove; The 14-fuel tank; The 15-electrohydraulic control; 16-second oil supply system; The 17-capacitance displacement sensor; 18-first amplifier; The 19-comparator; The 20-pressure relay; The 21-fuel tank; 22-oil suction coarse filtration; The 23-motor; The 24-oil pump; The 25-pressure gauge; The 26-relief valve; The thick oil purifier of 27-; The 28-high precision oil filter; The 29-accumulator; The 30-one-way valve; The 31-pressure gauge; The A-static pressure thrust bearing; The calm last item of B, B '-predetermination holds; The hydrostatic bearing of feeling relieved behind the C-.
Embodiment
For further understanding summary of the invention of the present invention, characteristics and effect, exemplify following examples now, and conjunction with figs. describes the servo-controlled dynamic and hydrostatic bearing of Ultraprecise electrohydraulic of the present invention in detail and feed mechanism is as follows:
As shown in Figure 3, servo-controlled dynamic and hydrostatic bearing of Ultraprecise electrohydraulic of the present invention and feed mechanism include respectively by first oil supply system 1 of 8 orifice restriction devices 2 to mainshaft mechanism 3 fuel feeding; Hold second oil supply system 16 of B fuel feeding by the calm last item of the predetermination of electrohydraulic control 15 in main shaft structure 3; Described main shaft structure 3 is to be made of main shaft 4, the centering dynamic and hydrostatic bearing sleeve 8 that is enclosed within main shaft 4 front ends, static pressure thrust bearing cover 6 and the flange 5 that is enclosed within the dynamic and hydrostatic bearing sleeve 11 of main shaft 4 rear ends and is arranged on main shaft 4 front end appropriate locations; All be provided with uniform four pressure tanks 12 of the same size and four oil-return grooves 13 on the inner peripheral surface of described centering dynamic and hydrostatic bearing sleeve 8 and dynamic and hydrostatic bearing sleeve 11, four pressure tanks 12 of dynamic and hydrostatic bearing sleeve 11 pass through four flow controller 2 fuel feeding by described first oil supply system 1, two pressure tanks 12 of the Vertical direction of described centering dynamic and hydrostatic bearing sleeve 8 pass through flow controller 2 fuel feeding by described first oil supply system 1, and two pressure tanks 12 of substantially horizontal pass through electrohydraulic control 15 by second oil supply system, 16 fuel feeding; Four oil-return grooves 13 of centering dynamic and hydrostatic bearing sleeve 8 and dynamic and hydrostatic bearing sleeve 11 all communicate with fuel tank 14; By first oil supply system, 1 fuel feeding, described first oil supply system 1 is identical with second oil supply system, 16 structural principles via orifice restriction device 2 for static pressure thrust bearing cover 6.
One of on the described centering dynamic and hydrostatic bearing sleeve 8 that is arranged in main shaft 4 front ends two pressure tanks 12 by electrohydraulic control 15 fuel feeding is provided with a capacitance displacement sensor 17, described capacitance displacement sensor 17 is connected with electrohydraulic control 15 with second amplifier 10 by first amplifier 18, comparator 19 successively, described comparator 19 also receives the command signal that being used for of having set compares for 17 transmitted numbers with capacitance displacement sensor, thereby forms the control of full cut-off ring.
Figure 4 shows that servo-controlled dynamic and hydrostatic bearing of Ultraprecise electrohydraulic and feed mechanism second embodiment, this embodiment's rear axle bearing sleeve 11 and static pressure thrust bearing cover 6 are identical with embodiment 1, expression (can with reference to figure 3) in Fig. 4 has only shown the front axle bearing sleeve 8 different with embodiment 1 among Fig. 4.Servo-controlled dynamic and hydrostatic bearing of second embodiment's Ultraprecise electrohydraulic and feed mechanism include respectively by first oil supply system 1 of 8 orifice restriction devices 2 to mainshaft mechanism 3 fuel feeding; Hold second oil supply system 16 of B ' fuel feeding by the calm last item of the predetermination of electrohydraulic control 15 in main shaft structure 3; Described main shaft structure 3 be by main shaft 4, be enclosed within the centering dynamic and hydrostatic bearing sleeve 8 of main shaft 4 front ends ', the static pressure thrust bearing cover 6 and the flange 5 that are enclosed within the dynamic and hydrostatic bearing sleeve 11 of main shaft 4 rear ends and are arranged on main shaft 4 front end appropriate locations constitute; The inner peripheral surface of described centering dynamic and hydrostatic bearing sleeve 8 is provided with 3 pairs 6 uniform pressure tanks 12 and six oil-return grooves 13, every pair of pressure tank 12 is by an electrohydraulic control 15 control fuel feeding, have three electrohydraulic controls and respectively three pairs of pressure tanks 12 are carried out fuel feeding control, three electrohydraulic controls are by second oil supply system, 16 fuel feeding, three electrohydraulic control structural parameter are identical, and six oil-return grooves 13 all communicate with fuel tank 14; Static pressure thrust bearing cover 6 via orifice restriction device 2 by first oil supply system, 1 fuel feeding.
Described centering dynamic and hydrostatic bearing sleeve 8 ' 3 pairs of pressure tanks 12 on 1 capacitance displacement sensor 17 respectively is set, described 3 capacitance displacement sensors 17 are connected with electrohydraulic control 15 by first amplifier 18, comparator 19 and second amplifier 10 corresponding with this capacitance displacement sensor 17 respectively successively, and described comparator 19 also receives the command signal that being used for of having set compares for 17 transmitted numbers with capacitance displacement sensor.
The resolution of capacitance displacement sensor 17 used in the present invention can be up to 1nm.In the main shaft structure 3 that has used electrohydraulic control, when external force acts on the main shaft 4, moving when having only 1nm of main shaft 4 just measured by capacitance displacement sensor 17, and sends the Displacement Feedback signal, and electrohydraulic control 15 is poor with the corresponding oil pressure that this signal conversion is enlarged into oil pocket.This oil pressure difference and outer equilibrium of forces, making main shaft 4 only move very little displacement (1nm) just stops, and the eccentric amount e of this moment, little more a lot of than structure shown in Figure 2, as long as the electrohydraulic control of selecting for use 15 frequency responses are enough fast, resolution as the capacitance displacement sensor 17 of feedback elements is enough high, and just the displacement that can make main shaft 4 is less than 10nm, and promptly its running accuracy can reach 10nm.
Claims (5)
1. servo-controlled dynamic and hydrostatic bearing of Ultraprecise electrohydraulic and feed mechanism, include respectively by first oil supply system (1) of 8 orifice restriction devices (2) to mainshaft mechanism (3) fuel feeding, it is characterized in that, also be provided with second oil supply system (16) of holding (B) fuel feeding by the calm last item of predetermination of electrohydraulic control (15) in main shaft structure (3); Described main shaft structure (3) be by main shaft (4), be enclosed within main shaft (4) front end centering dynamic and hydrostatic bearing sleeve (8), be enclosed within the dynamic and hydrostatic bearing sleeve (11) of main shaft (4) rear end and be arranged on the static pressure thrust bearing cover (6) of main shaft (4) front end and flange (5) constitutes; All be provided with uniform four pressure tanks (12) and four oil-return grooves (13) on the inner peripheral surface of described centering dynamic and hydrostatic bearing sleeve (8) and dynamic and hydrostatic bearing sleeve (11), four pressure tanks (12) of dynamic and hydrostatic bearing sleeve (11) pass through four flow controllers (2) fuel feeding by described first oil supply system (1), two pressure tanks (12) of the Vertical direction of described centering dynamic and hydrostatic bearing sleeve (8) pass through flow controller (2) fuel feeding by described first oil supply system (1), and two pressure tanks (12) of substantially horizontal pass through electrohydraulic control (15) by second oil supply system (16) fuel feeding; Four oil-return grooves (13) of centering dynamic and hydrostatic bearing sleeve (8) and dynamic and hydrostatic bearing sleeve (11) all communicate with fuel tank (14); Static pressure thrust bearing cover (6) via orifice restriction device (2) by first oil supply system (1) fuel feeding.
2. servo-controlled dynamic and hydrostatic bearing of Ultraprecise electrohydraulic according to claim 1 and feed mechanism, it is characterized in that: the described centering dynamic and hydrostatic bearing sleeve (8) that is positioned at main shaft (4) front end is gone up corresponding to locating to be provided with a capacitance displacement sensor (17) by the oil-feed tank (12) of electrohydraulic control (15) fuel feeding, described capacitance displacement sensor (17) is successively by first amplifier (18), comparator (19) is connected with electrohydraulic control (15) with second amplifier (10), and described comparator (19) also receives the command signal that being used for of having set and capacitance displacement sensor (17) compare for transmitted number.
3. servo-controlled dynamic and hydrostatic bearing of Ultraprecise electrohydraulic according to claim 1 and feed mechanism is characterized in that: described main oil supply system (1) is identical with second oil supply system (16) structure.
4. servo-controlled dynamic and hydrostatic bearing of Ultraprecise electrohydraulic and feed mechanism, include respectively by first oil supply system (1) of 8 orifice restriction devices (2) to mainshaft mechanism (3) fuel feeding, it is characterized in that also be provided with second oil supply system (16) of holding (B ') fuel feeding by the calm last item of predetermination of electrohydraulic control (15) in main shaft structure (3): described main shaft structure (3) is by main shaft (4), be enclosed within the centering dynamic and hydrostatic bearing sleeve (8 ') of main shaft (4) front end, be enclosed within the dynamic and hydrostatic bearing sleeve (11) of main shaft (4) rear end and be arranged on the static pressure thrust bearing cover (6) of main shaft (4) front end appropriate location and flange (5) constitutes; The inner peripheral surface of described centering dynamic and hydrostatic bearing sleeve (8 ') is provided with 3 pairs 6 uniform pressure tanks (12) and six oil-return grooves (13), every pair of pressure tank (12) is by an electrohydraulic control (15) control fuel feeding, have three electrohydraulic controls and respectively three pairs of pressure tanks (12) are carried out fuel feeding control, three electrohydraulic controls are by second oil supply system (16) fuel feeding, three electrohydraulic control structural parameter are identical, and six oil-return grooves (13) all communicate with fuel tank (14); Static pressure thrust bearing cover (6) via orifice restriction device (2) by first oil supply system (1) fuel feeding.
5. servo-controlled dynamic and hydrostatic bearing of Ultraprecise electrohydraulic according to claim 4 and feed mechanism, it is characterized in that: on 3 pairs of pressure tanks (12) of described centering dynamic and hydrostatic bearing sleeve (8 ') 1 capacitance displacement sensor (17) is set respectively, described 3 capacitance displacement sensors (17) are respectively successively by first amplifier (18) corresponding with this capacitance displacement sensor (17), comparator (19) is connected with electrohydraulic control (15) with second amplifier (10), and described comparator (19) also receives the command signal that being used for of having set and capacitance displacement sensor (17) compare for transmitted number.
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| CN101865211A (en) * | 2010-06-08 | 2010-10-20 | 潘旭华 | Hybrid bearing |
| CN101985958A (en) * | 2010-11-04 | 2011-03-16 | 路文忠 | Digital electro-hydraulic servo pump-controlled ultra-precision hybrid bearing and ultramicro feeding mechanism |
| CN101985958B (en) * | 2010-11-04 | 2012-11-28 | 路文忠 | Digital electro-hydraulic servo pump-controlled ultra-precision hybrid bearing and ultramicro feeding mechanism |
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| CN102128205A (en) * | 2010-12-24 | 2011-07-20 | 东莞市尚正机电科技有限公司 | Hydraulic support suspension system for mechanical movement of cylinder with high bearing capacity |
| CN102042328B (en) * | 2010-12-24 | 2013-07-17 | 东莞市尚正机电科技有限公司 | Cylindrical mechanical motion hydraulic support suspension system with high bearing capacity |
| CN102266951A (en) * | 2011-04-27 | 2011-12-07 | 天津大学 | Precise type dynamic and static pressure ceramic main shaft device |
| CN103862070A (en) * | 2014-03-06 | 2014-06-18 | 浙江工业大学 | Small-sized hydraulic vibrating main shaft structure |
| CN104154120A (en) * | 2014-07-23 | 2014-11-19 | 宁波中德高隆精密机械有限公司 | Dynamic pressure and static pressure combined bearing bush device |
| CN104265763A (en) * | 2014-09-17 | 2015-01-07 | 西安交通大学 | Servo control type nanoparticle mixed liquid hydrostatic bearing |
| CN104265763B (en) * | 2014-09-17 | 2016-08-24 | 西安交通大学 | A kind of servo controlled type nano-particle mixing hydrodynamic journal liquid polymers |
| CN104533952A (en) * | 2014-12-10 | 2015-04-22 | 马继刚 | Self-regulating hydraulic suspension method |
| CN105805158A (en) * | 2016-04-18 | 2016-07-27 | 奇瑞汽车股份有限公司 | Hydrostatic pressure lubrication bearing |
| CN108971528A (en) * | 2018-07-23 | 2018-12-11 | 安徽工程大学 | A kind of machine tool chief axis utilizes the self centering method and device thereof of sliding bearing |
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Effective date of registration: 20190510 Address after: 101599 Shuangjing Industrial Park, Shilibao, Miyun District, Beijing Patentee after: Beijing Heprison Ultra Precision Technology Co., Ltd. Address before: 300409 No. 38 Jingli Road, Dongbeichen Science and Technology Park, Tianjin Jinwei Highway Patentee before: Lu Wenzhong |