CN101577519A - Linear motor driver - Google Patents
Linear motor driver Download PDFInfo
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- CN101577519A CN101577519A CNA2009100530134A CN200910053013A CN101577519A CN 101577519 A CN101577519 A CN 101577519A CN A2009100530134 A CNA2009100530134 A CN A2009100530134A CN 200910053013 A CN200910053013 A CN 200910053013A CN 101577519 A CN101577519 A CN 101577519A
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Abstract
The invention provides a linear motor driver which comprises a current feedback loop module, a power module, a detecting module, and a state analysis and control module. The motor driver is characterized in that the current feedback loop module comprises a preposing input stage module, an adder module, a low pass filter module, a power amplification feedback module, a loading module, a current sampling amplification module and a gain adjustment module which are connected in sequence; and the output signal of the gain adjustment module is connected on the input end of the adder module finally, thus forming a loop. The linear motor driver has the characteristics of high linearity, wide bandwidth, good stability, small interference to outside, and strong capacity of resisting disturbance, and is small in volume and low in cost. As the temperature coefficient of the drain-source resistance of the power amplifier is positive, when the temperature of the power amplifier rises, the current is limited, therefore, no thermal breakdown occurs, and consequently, no secondary breakdown occurs.
Description
Technical field
The present invention relates to linear electric motors device field, particularly a kind of high-power linear motor driver.
Background technology
In mask aligner, linear motor driver is used to drive linear electric motors, drives work stage, mask platform motion.As the drive unit of motor, motor driver must satisfy requirements such as high linearity, high-resolution, high-power, broadband, could guarantee the positioning accuracy of motor, and then satisfy the requirement of lithographic accuracy.
Existing linear motor driver mainly contains two kinds, is respectively linear power amplification driver and pulse width modulation drivers.OTL complementary push-pull circuit or OCL complementary push-pull circuit that the linear power amplification driver adopts a plurality of power tubes to be formed in parallel.Its advantage mainly is bandwidth (usually more than 10KHZ), and the linearity is good, externally disturb little, good in anti-interference performance.But its shortcoming in application is also quite obvious, as poor heat stability (existing temperature to float), has the power tube secondary-breakdown phenomenon, and in-fighting is big, and power output is lower, is difficult to provide high-power output.Pulse width modulation drivers adopts the IGBT pipe to drive, relative linear system, and inner energy consumption is low, the conversion efficiency height; Circuit design is simple, compact conformation.But variable duration impulse system adopts high frequency modulated, disturbs bigger to external circuit; And the pass band of system is subjected to the restriction of modulating frequency, not as the bandwidth of linear system.The advantage of above-mentioned two kinds of drivers be difficult to get both and cost of manufacture all than higher.
Summary of the invention
The technical problem to be solved in the present invention provides a kind of linear motor driver, and low to solve existing linear motor driver power, power amplifier easily produces the problem of secondary-breakdown phenomenon.
For solving the problems of the technologies described above, the invention provides a kind of linear motor driver, comprise the current feedback loop module, power module, detection module, state analysis and control module, described power module provides power supply for described current feedback loop module, described current feedback loop module output current is directly proportional with input voltage, described detection module connects in the described current feedback loop module through the current signal behind the power amplifier, described state analysis and control module are carried out analyzing and processing to the testing result of described detection module, it is characterized in that, described current feedback loop module comprises preposition input stage module, adder Module, low pass filter blocks, the power amplification feedback module, load blocks, current sample amplification module and gain adjustment module, aforementioned each module connects successively, the output signal of described gain adjustment module connects the input of described adder Module, forms the loop.
Optionally, described preposition input stage module comprises: passive filter, the difference mode signal in the input signal is carried out low-pass filtering, and common-mode signal is decayed; The differential mode amplifier suppresses common-mode signal, amplifies difference mode signal; Analog switch is made mistakes or is removed input signal when turn-offing; And anti-overshoot electric capacity, remove analog switch in the overshoot of opening or producing when closed.
Optionally, described differential mode amplifier adopts instrument amplifier.
Optionally, described adder adopts high speed operation amplifier, three high speed diodes of positive-negative input end series connection of described high speed operation amplifier, each one group of both forward and reverse directions.
Optionally, described low pass filter blocks adopts operational amplifier to realize the single order low-pass filtering.
Optionally, described power amplification feedback module comprises power amplifier module and low-voltage amplification module.
Optionally, the input of described power amplifier feedback module connects the maximum input bias current of current-limiting resistance limiting power amplifier.
Optionally, described power amplifier module adopts linear power to amplify integrated chip.
Optionally, described current sample amplification module adopts instrument amplifier that the voltage of described load blocks is carried out the difference amplification, and suppressing common-mode signal also provides gain.
Optionally, described gain adjustment module comprises one-level amplification module and secondary amplification module, and described one-level amplification module adopts programmable gain instrumentation amplifier chip, and described secondary amplification module adopts operational amplifier to realize.
The current feedback loop of high-power linear motor driver provided by the invention has adopted big current mode linear power amplifier, have advantages such as operating voltage height, output current is big, switching rate is high, distortion is low, and since the drain-source resistance temperature coefficient of this power amplifier for just, when the power amplification actuator temperature rises, electric current is restricted, so do not have thermal breakdown, thereby second breakdown can not occur.Adopted the linear motor driver of this power amplifier to have linearity height, bandwidth, good stability, externally disturb the characteristic little, that antijamming capability is strong, and volume is little, cost is low.
Description of drawings
Fig. 1 is a linear motor driver structural representation of the present invention;
Fig. 2 is a linear motor driver current feedback loop modular structure schematic diagram of the present invention;
Fig. 3 is the preposition input stage modular circuit structural representation of current feedback loop of the present invention;
Fig. 4 is the adder Module electrical block diagram of current feedback loop of the present invention;
Fig. 5 is the low pass filter blocks electrical block diagram of current feedback loop of the present invention;
Fig. 6 is the power amplification feedback module electrical block diagram of current feedback loop of the present invention;
Fig. 7 is the current sample amplification module electrical block diagram of current feedback loop of the present invention;
Fig. 8 is that the modular circuit structural representation is selected in the gain of current feedback loop of the present invention.
Embodiment
For above-mentioned purpose of the present invention, feature and advantage can be become apparent more, the specific embodiment of the present invention is described in detail below in conjunction with accompanying drawing.
High-power linear motor driver of the present invention can be widely applied in the multiple motor driving apparatus; be to be illustrated below by preferred embodiment; certainly the present invention is not limited to this specific embodiment, and the known general replacement of one of ordinary skilled in the art is encompassed in protection scope of the present invention far and away.
Secondly, the present invention utilizes schematic diagram to describe in detail, and when the embodiment of the invention was described in detail in detail, for convenience of explanation, schematic diagram was disobeyed the local amplification of general ratio, should be with this as limitation of the invention.
Please at first referring to Fig. 1, Fig. 1 is a linear motor driver structural representation of the present invention.As shown in Figure 1, linear motor driver of the present invention comprises current feedback loop module 1, power module 2, detection module 3, state analysis and control module 4.Current feedback loop module 1 is the main body of driver, realizes that the electric current of output is directly proportional with input voltage; Power module 2 comprises that for the power amplifier in the current feedback loop module 1 provides power supply power amplifier strengthens power supply and emergency switch to the processing section of outside input power supply; Detection module 3 connects in the current feedback loop module 1 through the current signal behind the power amplifier, detect the power dissipation on the magnitude of voltage, power amplifier output current, power amplifier of power supply and the temperature of power amplifier fin, and testing result is delivered to state analysis and control module 4; After 4 pairs of testing results of state analysis and control module are handled and are analyzed; control LED shows corresponding status signal; in case of emergency cut off the power supply of the power amplifier in the current feedback loop module 1, thereby power amplifier is shielded by the emergency switch in the control power module 2.
Please referring to Fig. 2, Fig. 2 is a linear motor driver current feedback loop modular structure schematic diagram of the present invention.As shown in Figure 2, linear motor driver current feedback loop module of the present invention comprises preposition input stage module 5, adder Module 6, low pass filter blocks 7, power amplification feedback module 13, load blocks 10, current sample amplification module 11 and gain adjustment module 12, aforementioned modules connects successively, the output signal of gain adjustment module 12 finally is connected on the input of adder Module 6, forms the loop.
In current feedback loop structure shown in Figure 2, after the preposition input stage module 5 of differential analog signal process from front end power amplifier control board, pass through adder Module 6 additions with feedback signal from gain adjustment module 12, the output signal of adder Module 6 is through after the low pass filter blocks 7, be input to the low-voltage amplification module 8 and the power amplifier 9 of power amplification feedback module 13, the output signal of power amplifier 9 links to each other with load blocks 10, be the series connection of inductance and resistance with load blocks 10 equivalences among Fig. 2, voltage on the current sense resistance R m1 in 11 pairs of load blocks 10 of current sample amplification module carries out difference and amplifies, and process gain adjustment module 12 feeds back to the input of adder Module 6, the formation electric current loop.
Please referring to Fig. 3, Fig. 3 is the preposition input stage modular circuit structural representation of current feedback loop of the present invention.As shown in Figure 3, preposition input stage module 5 comprises passive filter 14, differential mode amplifier 15, analog switch 16 and anti-overshoot electric capacity 17.The input signal of preposition input stage module 5 is a differential signal, 14 pairs of difference mode signals of passive filter carry out low-pass filtering, and common-mode signal is decayed, and the cut-off frequency of low-pass filtering is 80kHz, the corner frequency of common mode attenuation is at 300kHz, and the common-mode rejection ratio of 300kHz is higher than-40dB; Differential mode amplifier 15 adopts instrument amplifiers, suppresses common-mode signals by differential mode amplifier 15, amplifies difference mode signal, and its gain is set to+and 1, the common-mode rejection ratio of low-frequency range is 80dB; When makeing mistakes or turn-off, remove input signal by analog switch 16; Therefore opening or closed meeting generation overshoot of analog switch 16 use anti-overshoot electric capacity 17 to remove overshoots; Anti-overshoot electric capacity 17 and R7, R8, R9 constitutes low pass filter, and cut-off frequency is 40kHz.
Please referring to Fig. 4, Fig. 4 is the adder Module electrical block diagram of current feedback loop of the present invention.The effect of adder Module 6 is to select the feedback signal of module to carry out addition to the output signal of preposition input stage module and gain.As shown in Figure 4, the addition of signal realizes by the amplifier high speed operation amplifier, adder Module 6 positive-negative input ends three high speed diodes of having connected, each one group of both forward and reverse directions, difference mode signal maximum in order to restriction amplifier input is no more than 18V, and the response time is less than 20ns.The voltage follow structure is adopted in the output of the feedback signal voltage of the output signal voltage of preposition input stage module 5 and gain adjustment module 12, can increase input impedance like this, reduces output impedance, and input and output are played certain cushioning effect.
Please referring to Fig. 5, Fig. 5 is the low pass filter blocks electrical block diagram of current feedback loop of the present invention.Low pass filter blocks 7 adopts operational amplifier to realize the single order low-pass filtering.
Please referring to Fig. 6, Fig. 6 is the power amplification feedback module electrical block diagram of current feedback loop of the present invention.As shown in Figure 6, power amplification feedback module 13 comprises power amplifier module 9 and low-voltage amplification module 8.Linear motor driver is had relatively high expectations to the linearity of output current and input signal and signal to noise ratio etc., thereby power amplifier module of the present invention 9 adopts linear powers to amplify integrated chips.Operational amplifier and peripheral circuit constitute low-voltage amplification module 8, and low-voltage is amplified.The differential-mode input voltage scope that linear power amplifies integrated chip be ± 20V, so also added the maximum that high speed diode is used for limiting difference mode signal at the input of operational amplifier.In addition, the input of power amplifier feedback module 13 also passes through the maximum input bias current of resistance R 15, R17 limiting power amplifier.Power amplifier feedback module 13 adopts compound feedback arrangement, to increase the bandwidth of power amplifier, eliminates low-frequency pole.The whole inverted structure that is fed back to, low-voltage is enlarged into same phase structure.
The output voltage range that described linear power amplifies integrated chip is ± 100V peak current 20A; Adopt the output stage of MOS structure to make the linearity of power amplifier better, the output current restriction is provided.The pin that linear power amplifies integrated chip also has phase compensation end COMP1 and COMP2, positive-negative power end ± SUPPLY, positive and negative enhancing power end ± VBOOST, sleep state control end SLEEP, electric current restriction end CURRLIM1 and CURRLIM2 except input/output terminal.Therefore the gain of power amplification feedback module 9 selects C13 and C14 between the phase compensation end to be 200pF greater than 10, and R22 is 120 Ω; Linear power amplifies integrated chip and adopts ± 48 power supply; VBOOST provides the power supply of the enhancing about 15V for linear power amplifies integrated chip, thereby improves the output voltage swing of linear amplifier, and maximum output that linear power amplifies integrated chip is brought up to ± 44V from ± 40V; The SLEEP state does not use, and the SLEEP end is unsettled.Connect current-limiting resistance R23 between the output of power amplifier 9 and the load and carry out the electric current restriction.
Fig. 7 is the current sample amplification module electrical block diagram of current feedback loop of the present invention.As shown in Figure 7, current sample amplification module 11 adopts instrument amplifier that the voltage on the current sense resistance R m1 of load blocks 10 is carried out the difference amplification, suppresses common-mode signal, and 10 multiplication benefits are provided simultaneously.
Fig. 8 is the gain adjustment module electrical block diagram of current feedback loop of the present invention.As shown in Figure 8, gain adjustment module 12 is divided into two-stage: one-level amplification module 18 and secondary amplification module 19.One-level amplification module 18 is regulated the gain of current sample amplification modules 11, and secondary amplification module 19 is used to adjust the gain of whole feedback, and to make feedback voltage be negative.One-level amplification module 18 adopts programmable gain instrumentation amplifier chip to carry out the modulation of 1,2,4,8 multiplication benefits, and gain selects the signal A1, the A0 that produced by state analysis and control module to control.The FEEDBACK end of programmable gain instrumentation amplifier chip directly links to each other with output VO and is used for the feedback of difference channel.Reference voltage is 0, so REF end ground connection.Secondary amplification module 19 adopts operational amplifier to realize that anode adds resistance R30 and reduces offset voltage.The output signal Vg of gain adjustment module 12 finally feeds back to the input of adder Module 6.
Obviously, those skilled in the art can carry out various changes and modification to the present invention and not break away from the spirit and scope of the present invention.Like this, if of the present invention these are revised and modification belongs within the scope of claim of the present invention and equivalent technologies thereof, then the present invention also is intended to comprise these changes and modification interior.
Claims (10)
1, a kind of linear motor driver, comprise the current feedback loop module, power module, detection module, state analysis and control module, described power module provides power supply for described current feedback loop module, described current feedback loop module output current is directly proportional with input voltage, described detection module connects in the described current feedback loop module through the current signal behind the power amplifier, described state analysis and control module are carried out analyzing and processing to the testing result of described detection module, it is characterized in that, described current feedback loop module comprises preposition input stage module, adder Module, low pass filter blocks, the power amplification feedback module, load blocks, current sample amplification module and gain adjustment module, aforementioned each module connects successively, the output signal of described gain adjustment module connects the input of described adder Module, forms the loop.
2, linear motor driver as claimed in claim 1 is characterized in that, described preposition input stage module comprises: passive filter, the difference mode signal in the input signal is carried out low-pass filtering, and common-mode signal is decayed; The differential mode amplifier suppresses common-mode signal, amplifies difference mode signal; Analog switch is made mistakes or is removed input signal when turn-offing; And anti-overshoot electric capacity, remove analog switch in the overshoot of opening or producing when closed.
3, linear motor driver as claimed in claim 2 is characterized in that, described differential mode amplifier adopts instrument amplifier.
4, linear motor driver as claimed in claim 1 is characterized in that, described adder adopts high speed operation amplifier, three high speed diodes of positive-negative input end series connection of described high speed operation amplifier, each one group of both forward and reverse directions.
5, linear motor driver as claimed in claim 1 is characterized in that, described low pass filter blocks adopts operational amplifier to realize the single order low-pass filtering.
6, linear motor driver as claimed in claim 1 is characterized in that, described power amplification feedback module comprises power amplifier module and low-voltage amplification module.
7, linear motor driver as claimed in claim 6 is characterized in that, the input of described power amplifier feedback module connects the maximum input bias current of current-limiting resistance limiting power amplifier.
8, linear motor driver as claimed in claim 6 is characterized in that, described power amplifier module adopts linear power to amplify integrated chip.
9, linear motor driver as claimed in claim 1 is characterized in that, described current sample amplification module adopts instrument amplifier that the voltage of described load blocks is carried out the difference amplification, and suppressing common-mode signal also provides gain.
10, linear motor driver as claimed in claim 1, it is characterized in that, described gain adjustment module comprises one-level amplification module and secondary amplification module, and described one-level amplification module adopts programmable gain instrumentation amplifier chip, and described secondary amplification module adopts operational amplifier to realize.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2009100530134A CN101577519A (en) | 2009-06-12 | 2009-06-12 | Linear motor driver |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2009100530134A CN101577519A (en) | 2009-06-12 | 2009-06-12 | Linear motor driver |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102751702A (en) * | 2012-06-18 | 2012-10-24 | 广东美的制冷设备有限公司 | Current sampling circuit for intelligent power module |
| CN103018696A (en) * | 2011-09-28 | 2013-04-03 | 南京丹迪克科技开发有限公司 | Three-phase power harmonic standard source |
| CN103457558A (en) * | 2013-06-17 | 2013-12-18 | 马鞍山恒瑞测量设备有限公司 | Variable gain low current picking and amplifying circuit |
| CN103688460A (en) * | 2011-03-14 | 2014-03-26 | 提爱思科技股份有限公司 | Ripple extraction device, motor control apparatus, vehicle seat, and ripple extraction method |
| CN104639077A (en) * | 2014-12-05 | 2015-05-20 | 魅族科技（中国）有限公司 | Passive filtering and amplifying circuit |
| CN104887415A (en) * | 2015-06-03 | 2015-09-09 | 泰山医学院 | Double-control wheelchair and utilization method thereof |
| CN104978298A (en) * | 2015-06-24 | 2015-10-14 | 浪潮电子信息产业股份有限公司 | High-speed internet terminal matching design method |
| CN108173476A (en) * | 2017-12-26 | 2018-06-15 | 浙江禾川科技股份有限公司 | A kind of motor driver electric current loop processing method and circuit |
| CN114977971A (en) * | 2022-05-30 | 2022-08-30 | 哈尔滨工业大学 | Linear driver circuit of motor |
| EP4113824A4 (en) * | 2020-02-24 | 2023-08-23 | Hangzhou Hikvision Digital Technology Co., Ltd. | Monitoring device and camera |
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2009
- 2009-06-12 CN CNA2009100530134A patent/CN101577519A/en active Pending
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103688460A (en) * | 2011-03-14 | 2014-03-26 | 提爱思科技股份有限公司 | Ripple extraction device, motor control apparatus, vehicle seat, and ripple extraction method |
| CN103018696A (en) * | 2011-09-28 | 2013-04-03 | 南京丹迪克科技开发有限公司 | Three-phase power harmonic standard source |
| CN102751702B (en) * | 2012-06-18 | 2015-10-28 | 广东美的制冷设备有限公司 | A kind of current sampling circuit for Intelligent Power Module |
| CN102751702A (en) * | 2012-06-18 | 2012-10-24 | 广东美的制冷设备有限公司 | Current sampling circuit for intelligent power module |
| CN103457558A (en) * | 2013-06-17 | 2013-12-18 | 马鞍山恒瑞测量设备有限公司 | Variable gain low current picking and amplifying circuit |
| CN103457558B (en) * | 2013-06-17 | 2016-09-14 | 马鞍山恒瑞测量设备有限公司 | A kind of variable gain small area analysis pickup amplifying circuit |
| CN104639077B (en) * | 2014-12-05 | 2017-11-07 | 魅族科技（中国）有限公司 | A kind of passive filtering amplifying circuit |
| CN104639077A (en) * | 2014-12-05 | 2015-05-20 | 魅族科技（中国）有限公司 | Passive filtering and amplifying circuit |
| CN104887415A (en) * | 2015-06-03 | 2015-09-09 | 泰山医学院 | Double-control wheelchair and utilization method thereof |
| CN104978298A (en) * | 2015-06-24 | 2015-10-14 | 浪潮电子信息产业股份有限公司 | High-speed internet terminal matching design method |
| CN108173476A (en) * | 2017-12-26 | 2018-06-15 | 浙江禾川科技股份有限公司 | A kind of motor driver electric current loop processing method and circuit |
| CN108173476B (en) * | 2017-12-26 | 2020-08-21 | 浙江禾川科技股份有限公司 | Motor driver current loop processing method and circuit |
| EP4113824A4 (en) * | 2020-02-24 | 2023-08-23 | Hangzhou Hikvision Digital Technology Co., Ltd. | Monitoring device and camera |
| CN114977971A (en) * | 2022-05-30 | 2022-08-30 | 哈尔滨工业大学 | Linear driver circuit of motor |
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