CN101576084A - Vacuum pump with abnormity early warning and emergency protection device - Google Patents
Vacuum pump with abnormity early warning and emergency protection device Download PDFInfo
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- CN101576084A CN101576084A CNA2008101006391A CN200810100639A CN101576084A CN 101576084 A CN101576084 A CN 101576084A CN A2008101006391 A CNA2008101006391 A CN A2008101006391A CN 200810100639 A CN200810100639 A CN 200810100639A CN 101576084 A CN101576084 A CN 101576084A
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- vacuum pump
- bypass
- early warning
- valve
- abnormity early
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Abstract
The invention discloses a vacuum pump with an abnormity early warning and emergency protection device, comprising a control processor, a pressure signal sensor, an electromagnetic valve, a bypass, a compressed and dried air supply source, an amplifier and a state displayer. The bypass consists of a spherical one-way valve and an air-operated valve; the electromagnetic valve is connected with and controlled by the control processor; the pressure value in a pipe of a low-vacuum pump pipe is detected through a pressure signal and then is sent into the control processor to be compared with the preset normal pressure value; the electromagnetic valve and the bypass are opened and closed in accordance with the comparison result; and an emergency channel used in the condition that the low-vacuum pump stops working because the spherical one-way valve is blocked is formed. Due to the application of the design scheme, the working state of the spherical one-way valve can be prejudged in accordance with the detection result of the pressure signal sensor, and the bypass can be opened and closed under the driving of the control processor to be used as an emergency channel, thus the sudden stop of the low-vacuum pump due to the blockage of the spherical one-way valve is effectively prevented, and the hidden danger of product rejection is avoided.
Description
Technical field
The present invention relates to the rotary piston pump field, relate in particular to the vacuum pump that has the self-protection function when a kind of abnormal conditions take place.
Background technique
Vacuum technique is extensive application all in industrial, civilian, scientific research field.For example semi-conductor processing equipment, vacuum cleaner etc., industrial most typical application are the uses of various high and low vacuum pumps in semiconductor production is made.Usually known to, very high to the equipment availability environment requirement in each flow process that semiconductor is made, adhere to specification fully and higher rate of good product for guaranteeing the semiconductor product resistance, so process apparatus mostly forms vacuum environment in portion's working space within it.Be with, the working stability of vacuum pump has very important influence to this.If in the equipment operation process, vacuum pump quits work suddenly, and the consequence that causes is quite serious, and vacuum pump may self damage, and product may be scrapped.
The structural representation of conventional art vacuum pump apparatus as shown in Figure 1 as seen, this vacuum pump apparatus includes: manufacture process cavity 1, high vacuum pump 2, main line pneumatic valve 3, Roughing pump 4, main line ball valve 5 and waste treatment device 14.By the synergy of high vacuum pump 2 and Roughing pump 4, the air pump in the manufacture process cavity 1 is evacuated in the waste treatment device 14, a manufacture process cavity 1 that meets environmental requirement fully is provided.Yet no matter be not difficult to find is high vacuum pump or Roughing pump, and it all is to arrive waste treatment device 14 by unique pipeline connection, and comes unimpeded, the sealing of pilot line therebetween by set main line ball valve 5.So, in case main line ball valve 5 breaks down, certainly will cause the vacuum pump can't continuous firing, large-tonnage product causes to decrease to be scrapped, thereby causes tremendous loss.
Summary of the invention
At the defective of the existence of above-mentioned prior art, purpose of the present invention aims to provide a kind of vacuum pump with abnormity early warning and emergency protecting equipment, avoids Roughing pump to quit work suddenly because of ball valve stops up, and makes product rejection.
For reaching above-mentioned purpose, the technological scheme that the present invention proposes is:
Have the vacuum pump of abnormity early warning and emergency protecting equipment, comprising: bypass, compression drying air supplies, an amplifier and a status displays that a control processing device, a pressure signal sensor, a solenoid valve, a ball valve and pneumatic valve constitute; The bypass that early warning protector forms is arranged in parallel in Roughing pump and connects on the passage of emission-control equipment by the main line ball valve; solenoid valve wherein connects and is controlled by processor; by the force value in the pressure signal sensor detecting rough vacuum pump line; and be sent in the control processing device with default normality value and compare; solenoid valve and bypass are opened, are closed in control according to comparison result, are formed for preventing that Roughing pump from stopping up unexpected out-of-work escape truck because of ball valve.
Further, the position of described pneumatic valve is detected after signal amplifier shows in after amplifying by two position transducers, and alert device staff carries out housekeeping operation to ball valve.
Further, described pressure transducer adopts statistics processing procedure means that force value is monitored.
The present invention has the vacuum pump of abnormity early warning and emergency protecting equipment; its beneficial effect that has is: from the detecting result of pressure transducer can the anticipation ball valve working state; and drive by the control processing device and to open, to close bypass as escape truck; thereby effectively avoided vacuum pump to quit work suddenly, stopped the hidden danger of product rejection because of ball valve stops up.
Description of drawings
Fig. 1 is the structural representation of prior art vacuum pump apparatus;
Fig. 2 is the structural representation of vacuum pump apparatus of the present invention.
Each reference character implication is:
1 manufacture process cavity, 2 high vacuum pumps
3 main line pneumatic valves, 4 Roughing pumps
5 main line ball valves, 6 bypass ball valves
7 side line pneumatic valves, 8 solenoid valves
9 compression drying air supplies, 10 control processing devices
11 pressure signal sensors, 12 amplifiers
13 status displayses, 14 emission-control equipments
15 position transducers, 16 position transducers
Embodiment
For making the above-mentioned purpose of the present invention, feature and advantage can more obvious easy understanding, below special in conjunction with one embodiment of the present invention, be described in detail below:
The structural representation of vacuum pump apparatus of the present invention as shown in Figure 2 can the obvious improvement that it is done at existing vacuum pump apparatus.This vacuum pump apparatus is except that comprising manufacture process cavity 1, high vacuum pump 2, main line pneumatic valve 3, Roughing pump 4, main line ball valve 5 and the waste treatment device 14 that has earlier, and improved early warning protector feature also comprises: bypass, compression drying air supplies 9, an amplifier 12 and a status displays 13 that control processing device 10, pressure signal sensor 11, solenoid valve 8, a bypass ball valve 6 and branch line pneumatic valve 7 constitute.The bypass that early warning protector forms is arranged in parallel in Roughing pump 4 and connects on the passage of emission-control equipment 14 by main line ball valve 5; Pressure signal sensor 11 is arranged between Roughing pump 4 and the main line ball valve 5, and is connected in the input end of control processing device 10; Solenoid valve 8 two ends that direct controlled processor 10 drives then are connected to branch line pneumatic valve 7 and compression drying air supplies 9; Be equipped with two position transducers 15,16 on side line pneumatic valve 7 in addition, its monitored result signal transfers to status displays 13 via amplifier 12.
The formation of manufacture process cavity 1 interior vacuum is by high vacuum pump 2 (as turbine pump) air pump in the cavity to be evacuated to main line pneumatic valve 3 under the normality, is disposed to emission-control equipment 14 by main line ball valve 5 again after Roughing pump 4 (as dry pump) pumps.Yet in the actual job process, main line ball valve 5 truly has blocking phenomenon, causes vacuum pump paralysis and quits work the serious consequence of product rejection.And after vacuum pump apparatus increased early warning protector; when main line ball valve 5 approaching obstructions; force value will raise between Roughing pump 4 and the main line ball valve 5, be detected and will be sent to control processing device 10 by pressure transducer 11 and compare with predefined force value.For the situation that surpasses CLV ceiling limit value, control processing device 10 can drive solenoid valve 8 in the mode of electrical signal and open, can make side line pneumatic valve 7 under the punching press of compression drying air 9, open, the bypass conducting has guaranteed that thus vacuum pump can not quit work owing to the obstruction of main line ball valve 5.And, the location status of side line pneumatic valve 7 by two position transducers 15,16 detecting, signal after amplifier 12 amplifies, finally be shown in status displays 13 (man-machine interface), make the engineer understand the open and close state of side line pneumatic valve 7 at any time, and then follow the trail of the state of grasping main line ball valve 5, so that as early as possible this ball valve 5 is handled.In addition, also can adopt statistics processing procedure means that force value is monitored in real time, improve the unusual anticipation ability of vacuum pump apparatus running the monitor value of above-mentioned pressure transducer 11.
After the vacuum pump that the present invention has abnormity early warning and an emergency protecting equipment is applied; from the detecting result of pressure transducer can anticipation main line ball valve working state; and drive by the control processing device and to open, to close bypass as escape truck; thereby effectively avoided vacuum pump to quit work suddenly because of ball valve stops up; stopped the hidden danger of product rejection, it is a kind of effective and have a far-reaching scheme that the application that the against vacuum technology is made the field in semiconductor production provides.
To sum up for the detailed description of embodiment's feature, being intended to deepen the present invention is had the understanding of the vacuum pump of abnormity early warning and emergency protecting equipment, is not scope and the polytrope that limits this patent application implementation with this.So every with respect to the above embodiment of the present invention equivalence or approximate structure conversion, can realize the design proposal of the object of the invention, all should be regarded as belonging to the category of patent protection of the present invention.
Claims (4)
1. have the vacuum pump of abnormity early warning and emergency protecting equipment, comprising: bypass, compression drying air supplies, an amplifier and a status displays that a control processing device, a pressure signal sensor, a solenoid valve, a ball valve and pneumatic valve constitute; The bypass that early warning protector forms is arranged in parallel in Roughing pump and connects on the passage of emission-control equipment by the main line ball valve; solenoid valve wherein connects and is controlled by processor; by the force value in the pressure signal sensor detecting rough vacuum pump line; and be sent in the control processing device with default normality value and compare; solenoid valve and bypass are opened, are closed in control according to comparison result, are formed for preventing that Roughing pump from stopping up unexpected out-of-work escape truck because of ball valve.
2. the vacuum pump with abnormity early warning and emergency protecting equipment according to claim 1 is characterized in that: described solenoid valve is arranged between compressed air supplies and the pneumatic valve, and under the driving of control processing device, bypass is opened, closed in control.
3. the vacuum pump with abnormity early warning and emergency protecting equipment according to claim 1 is characterized in that: the position of described pneumatic valve is detected after signal amplifier shows in after amplifying by two position transducers.
4. the vacuum pump with abnormity early warning and emergency protecting equipment according to claim 1 is characterized in that: described pressure transducer adopts statistics processing procedure means that force value is monitored in real time.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2008101006391A CN101576084A (en) | 2008-05-09 | 2008-05-09 | Vacuum pump with abnormity early warning and emergency protection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2008101006391A CN101576084A (en) | 2008-05-09 | 2008-05-09 | Vacuum pump with abnormity early warning and emergency protection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101576084A true CN101576084A (en) | 2009-11-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2008101006391A Pending CN101576084A (en) | 2008-05-09 | 2008-05-09 | Vacuum pump with abnormity early warning and emergency protection device |
Country Status (1)
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| CN (1) | CN101576084A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102330666A (en) * | 2011-09-08 | 2012-01-25 | 洛阳兰迪玻璃机器股份有限公司 | Vacuum system protective device, method and vacuum glass vacuum-pumping system |
| CN103026073A (en) * | 2011-05-27 | 2013-04-03 | 富士电机株式会社 | Water supply system |
| CN106644617A (en) * | 2016-12-30 | 2017-05-10 | 华测检测认证集团股份有限公司 | Chimney smoke sampling device |
| CN107737674A (en) * | 2017-08-04 | 2018-02-27 | 魏建华 | One kind is used for the solid eddy flow trap of industrial anti-clogging liquid |
-
2008
- 2008-05-09 CN CNA2008101006391A patent/CN101576084A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103026073A (en) * | 2011-05-27 | 2013-04-03 | 富士电机株式会社 | Water supply system |
| CN103026073B (en) * | 2011-05-27 | 2015-04-15 | 富士电机株式会社 | Water supply system |
| CN102330666A (en) * | 2011-09-08 | 2012-01-25 | 洛阳兰迪玻璃机器股份有限公司 | Vacuum system protective device, method and vacuum glass vacuum-pumping system |
| CN102330666B (en) * | 2011-09-08 | 2017-03-15 | 洛阳兰迪玻璃机器股份有限公司 | Vacuum system protection device, method and vacuum glass pumped vacuum systems |
| CN106644617A (en) * | 2016-12-30 | 2017-05-10 | 华测检测认证集团股份有限公司 | Chimney smoke sampling device |
| CN107737674A (en) * | 2017-08-04 | 2018-02-27 | 魏建华 | One kind is used for the solid eddy flow trap of industrial anti-clogging liquid |
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| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20091111 |