CN101566583A - Defect detection system of panel component - Google Patents
Defect detection system of panel component Download PDFInfo
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- CN101566583A CN101566583A CNA200810095457XA CN200810095457A CN101566583A CN 101566583 A CN101566583 A CN 101566583A CN A200810095457X A CNA200810095457X A CN A200810095457XA CN 200810095457 A CN200810095457 A CN 200810095457A CN 101566583 A CN101566583 A CN 101566583A
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Abstract
The invention discloses a defect detection system of a component, which comprises a component to be detected, a platform carrying the component to be detected, a power supply unit and a light source device, wherein the light source device is controlled by the power supply unit to supply detection light to the component to be detected for defect detection; the light source device comprises a cathode structure, an anode structure, a fluorescent layer and a low-pressure gas layer; the fluorescent layer is positioned between the cathode structure and the anode structure; and the low-pressure gas layer is filled between the cathode structure and the anode structure, has the function of inducing the cathode structure to uniformly emit electrons and is provided with an electron mean free path where at least enough number of electrons are allowed to directly collide with the fluorescent layer at operating voltage.
Description
Technical field
The present invention relates to a kind of element defect detecting system, for example the defective that optics can observe on the detection faces panel element.
Background technology
The defects detection of element can reduce a necessary process that causes final product usefulness defective.For example for the element or the transparent element of display panel, when manufacture process, may be at surface or inner defectiveness.This defective for example is again to stick to the defective that the foreign particle on surface or defective such as alligatoring or all light of inner defectives such as foreign particle, hole or slight crack are checked out, and it for example is again the defective of pin hole, foreign matter or white point or the like.These defectives can by the light that passes element or the light that is reflected by component side detects.
Figure 1A and Figure 1B illustrate traditional a kind of element testing schematic diagram of mechanism.Consult Figure 1A, produce by light source 100 and detect light.Detect light by transparent or translucent element 102 to be detected, check purposes, for example observe the variation that penetrates light, to determine whether defectiveness by tester 104 as product defects.Consult Figure 1B, whether its testing mechanism is to want the detecting element surface by defective.
At present the white lamp box of product defects inspection on the market mainly is the lamp box that utilizes fluorescent light to form, and its principle is to utilize light to see through the effect that has scattering and vision expansion behind the aperture, and defective seems to understand bigger than physical size.Utilize such characteristic can check out for example defective of pin hole, foreign matter or white point or the like of product surface.On the factory products production line in a lot of fields important Quality Detection instrument, for example subsides of LCD and or the QC that all needs to carry out this respect such as colored mating plate detects.
The lamp box shortcoming of utilizing fluorescent tube to make be the thickness of lamp box with bulky, translucent diffusion sheet of needs and reflecting mechanism make light be able to uniform planeization.Yet adopt the diffusion sheet design can make the light intensity decay, so fluorescent tube must improve brightness and compensate, relatively power consumption also allows user's production cost raising.Physical characteristics owing to fluorescent light makes its light intensity can only accomplish the multistage light modulation in addition, the photochromic scopes such as white light and daylight that are limited to that produced, and setting range is limited.
Summary of the invention
The invention provides a kind of element defect detecting system, use improved light supply apparatus, with the usefulness of lift elements defects detection at least.
The invention provides a kind of element defect detecting system, comprising: element to be detected, power supply unit and light supply apparatus.Light supply apparatus carrying this element to be detected, and accept the control of this power supply unit, with provide detection light to this element to be detected whether to detect defectiveness.Wherein light supply apparatus comprises cathode construction, cathode construction, fluorescence coating, low-pressure gas layer.Fluorescence coating is between this cathode construction and this anode construction.The low-pressure gas layer, be filled between this cathode construction and this anode construction, the effect of inducing the even emitting electrons of negative electrode is arranged, and wherein this low-pressure gas layer has an electronics mean free path, and allow at least the electronics of sufficient amount directly clashes into this fluorescence coating under an operating voltage.
The invention provides a kind of element defect detecting system, comprise element to be detected; This element to be detected of platform bearer; Power supply unit; And light supply apparatus.This light supply apparatus is accepted the control of this power supply unit, with provide detect light to this element to be detected whether to detect defectiveness.Light supply apparatus comprises cathode construction, cathode construction, fluorescence coating, low-pressure gas layer.Fluorescence coating is between this cathode construction and this anode construction.The low-pressure gas layer, be filled between this cathode construction and this anode construction, the effect of inducing the even emitting electrons of negative electrode is arranged, and wherein this low-pressure gas layer has an electronics mean free path, and allow at least the electronics of sufficient amount directly clashes into this fluorescence coating under an operating voltage.
For above-mentioned and other purposes, feature and advantage of the present invention can be become apparent, preferred embodiment cited below particularly, and conjunction with figs. are described in detail below.
Description of drawings
Figure 1A and 1B are the synoptic diagram that illustrates traditional a kind of element testing mechanism.
Fig. 2 is the diagrammatic cross-section that illustrates according to the luminous mechanism of the embodiment of the invention.
Fig. 3 is the diagrammatic cross-section that illustrates according to the sheet light emitting apparatus of the embodiment of the invention.
Fig. 4 A and 4B are the diagrammatic cross-section that illustrates according to the sheet light emitting apparatus of other embodiment of the present invention.
Fig. 5 is the diagrammatic cross-section that illustrates according to the sheet light emitting apparatus of another embodiment of the present invention.
Fig. 6 A and 6B are the diagrammatic cross-section that illustrates according to the sheet light emitting apparatus of other embodiment of the present invention.
Fig. 7 is the synoptic diagram that illustrates according to the element defect detecting system of the embodiment of the invention.
Fig. 8 A and 8B illustrate according to the light supply apparatus of the embodiment of the invention and the shape synoptic diagram of power supply unit.
Fig. 9 A, 9B and 9C are the synoptic diagram that illustrates according to the element defect detecting system of the embodiment of the invention.
Description of reference numerals
100: light source 102: element 104 to be detected: tester
200,240,254,276,286: the cathode construction layer
202,246,252,272,282: the anode construction layer
204,244,258,274,284: fluorescence coating
206: hyaline layer 208: low-pressure gas
210: penetrate light 242,256: the limit wall construction
250,270,278,280,288: substrate 283: sunk area
285: anode construction layer 289: reflection horizon
300: power supply unit 302: light supply apparatus
304: element 308 to be detected: light
310: foreign particle 312: hole
400: light supply apparatus 402: element to be detected
404,408: platform 406: capturing element
Embodiment
The present invention for example can be applicable to product detection plane light source required on the production line.The present invention is for the Lights section that detects lamp box, and (Flat electron emissionlamp is FEEL) as detection light source to propose the electron emitting-type planar light source.In this, planar light source is meant planar light source, and it can be curved surface (curving surface) or tabular surface (planar surface) according to need.
Detect the light source of lamp box and use the electron emitting-type planar light source instead,, also just do not need to use diffusion sheet, also therefore can reduce light loss because itself be exactly planar light source.In addition, light supply apparatus of the present invention can be produced the light source of different size and shape according to needs, and for example rectangle or circle are as shown in Figure 8.Reflecting mechanism only needs the reflecting surface on plane, and whole detection equipment can develop towards slimming, and whole system has bigger elasticity for the items of equipment configuration or the environment that cooperate production line, as shown in Figure 9.
The employed light supply apparatus of element defect detecting system of the present invention as following for some embodiment shown in, but the present invention is not subject to the enforcement of being lifted, and lifted some also do between implementing suitable to changing.
Fig. 2 is the diagrammatic cross-section that illustrates according to the luminous mechanism of the embodiment of the invention.Consult Fig. 2, the embodiment of light supply apparatus comprises cathode construction layer 200 and anode construction layer 202.In this, the cathode construction layer 200 and the anode construction layer 202 of light supply apparatus for example can comprise the electrode layer on substrate and the substrate basically, and its practical structures can change according to actual design.In addition about other for example the control circuit etc. of power supply be that those skilled in the art understand, change according to actual design, will not describe in detail in this.With regard to the structure of cathode construction layer 200 and anode construction layer 202, this embodiment is that planar structure is an example.Because luminous mechanism of the present invention cooperates the design of electrode structure easily, can reach large-area luminous efficacy, and the intensity of light source is comparatively even, helps being used as the detection light source of element.
Be noted that the gas of being inserted is the usefulness that is used for inducing the even emitting electrons of negative electrode, the gas of therefore selecting for use to be being preferable by free gas more easily, yet also can be other kinds gas.The gas that uses is atmosphere (atmospheric air), N for example
2, O
2, He, Ne, Ar, Kr, Xe, H
2, CO
2Or the like.Because the gas of inserting is medium vacuum, so its average electronics free path is still enough big, makes the electronics of sufficient amount be accelerated to enough energy by electric field, on the material with bump fluorescence coating 204, to send desired light.
In other words, the present invention utilizes secondary electron and the free electron of the mechanism of gas discharge with even generation q.s, utilizes a mechanism of emission again, allows electron impact fluorescence coating 204, to produce desired light.Light wavelength can have difference with the material difference of fluorescence coating 204.Again, fluorescence coating 204 also is not limited in single layer structure or monochromatic light.For example fluorescence coating 204 can be the rhythmo structure of sandwich construction or mix layer structure, the coloured light that different fluorescence coatings send can be mixed into another coloured light.Again or the mutual level of the fluorescence coating of different color light contiguous, and need not lamination also be its variation.It changes all in the category of the variation design of fluorescence coating.
Fig. 3 is the sheet light emitting apparatus diagrammatic cross-section that illustrates according to the embodiment of the invention.Consulting Fig. 3, is example with the sheet light emitting apparatus, and it comprises cathode construction 240, anode construction 246.Fluorescence coating 244 is arranged between cathode construction 240 and the anode construction 246, is preferably on the one side of anode construction 246.Limit wall construction 242 is isolated a distance with cathode construction 240 and anode construction 246, also seals out a space simultaneously, to insert low-pressure gas 208.Utilize aforesaid mechanism, when anticathode structure 240 and anode construction 246 apply suitable operating voltage to produce desired electric field, so that electronics is quickened and bump fluorescence coating 244.Therefore, desired light source 210 penetrates from anode construction 246.Generally speaking, low-pressure gas 208 is under the air pressure of setting, and the relation in the intensity of light source and the operating voltage range for example is proportional relation haply.
Again, the surface of cathode construction can be a metal, and nano-carbon material, zinc paste etc. benefit the material of discharge.The anode material of anode construction for example is a transparent conductive material, for example materials such as ITO, FTO, TCO.
Again, on the surface of the cathode construction of light supply apparatus, also more the secondary electron source material can be set, to increase the generation of electronics.The secondary electron source material for example is MgO, SiO
2, Tb
2O
3, La
2O
3, CeO
2Deng material.Fluorescent material can send the visible light of required wavelength according to different materials in addition.
Fig. 4 A is the diagrammatic cross-section that illustrates according to the sheet light emitting apparatus of another embodiment of the present invention.Consult Fig. 4 A,, utilize substrate 250 up and down, and limit wall construction 256 can constitute enclosure space, to insert desired low-pressure gas according to identical principle of design.Yet, all be arranged on the infrabasal plate 250 in anode construction 252 and the cathode construction 254 of this embodiment, to form horizontal electric field.In this structure, fluorescence coating 258 also is arranged on the infrabasal plate 250 in zone between anode construction 252 and the cathode construction 254.Fluorescence coating 258 for example is designed to the monomer adjacent contact that ball is planar or cylinder is planar, is distributed on the infrabasal plate 250 between anode construction 252 and the cathode construction 254.For the luminous energy that makes generation penetrates to single limit, for example infrabasal plate 250 also can be designed to have function of reflecting again.
For example according to the structure of Fig. 4 A, can do some and further change design again.Fig. 4 B is the diagrammatic cross-section that illustrates according to the sheet light emitting apparatus of another embodiment of the present invention.Consult Fig. 4 B,, can constitute a plurality of light zone by of the setting of a plurality of anode constructions 252 with cathode construction 254.These light-emitting zones need according to practical design, can send the light of same frequency range, for example, ultraviolet light, infrared light, white light or other monochromatic light.Again or, these light-emitting zones send the light of different frequency scope, to be mixed into desired light.Anode construction 252 and the cathode construction 254 of Fig. 4 B for example is the exchange configuration, and cathode construction 254 allows and two anode construction 252 shared formations two zones.But anode construction 252 also can be indivedual a pair of settings with cathode construction 254, defines light-emitting zone respectively.
Fig. 5 is the diagrammatic cross-section that illustrates according to the sheet light emitting apparatus of another embodiment of the present invention.Consult Fig. 5, sheet light emitting apparatus comprises infrabasal plate 270 and upper substrate 278 in order to constitute enclosure space, and this substrate can be glass or quartz.Being cathode construction in the design of this embodiment puts differently with anode construction row, and fundamental mechanism is still constant.Surface, inside at infrabasal plate 270 can be provided with one or more chases, its transverse section be shaped as curve, and be preferably circular arc.Be provided with anode construction layer 272 and fluorescence coating 274 on the chase surface.Cathode construction 276 for example is that the wire correspondence is positioned at the chase top, for example is positioned at the circle centre position of circular arc.The material of cathode construction 276 for example is an easily discharge material such as metal, CNT, nano-sized carbon wall, nano carbon material or zinc paste.Anode construction for example is a transparent conductive material.Anode construction layer 272 also has catoptrical function.So, planar light source can be made of with cathode construction 276 a plurality of anode construction layers 272.
Again, if anode construction layer 272 for example is a metal, then itself just has reflection function.If anode construction layer 272 for example is a conductive transparent material, other variations are arranged also then.For example, if the voltage of negative electrode is negative potential, then anode can be at positive potential, and for example earth potential of relative negative voltage, so infrabasal plate 270 is exactly a metal level of integrating one with anode construction layer 272, also has conduction and has reflection function.In this, keeping its needed relative voltage difference under the needed current field condition, if negative electrode is to be in enough big negative potential, then anode can be under the small voltage value and operate, more for example may operate in aforesaid ground voltage (0V), be in high positive voltage operation and need not to be.So, even the structural design of anode also can be in response to changing simplification.
Again,, also can the reflection horizon be set, again or at infrabasal plate 270 outside surfaces (that is the lower surface of figure) comprehensive reflection horizon be set at the chase face if infrabasal plate 270 is transparent materials with anode construction layer 272.Other multiple variation is not enumerated one by one in this.As for being provided with of upper substrate 278 can be transparent material or light reflecting material.When upper substrate 278 and infrabasal plate 270 driving fits, can keep low-pressure gas again.The mode that depends on sealing, low-pressure gas can be shared or be sealed in respectively in other chase.The design variation of its thin portion be not subject to for embodiment.
In this, fluorescence coating can be outside single layer structure or the sandwich construction as described above, because a plurality of luminescence units are the positions of separating, it also can be the setting of array, sends similar and different coloured light respectively, then is mixed into light source again.
Fig. 6 A is the diagrammatic cross-section that illustrates according to the sheet light emitting apparatus of another embodiment of the present invention.Consult Fig. 6 A, this embodiment utilizes the cathode construction 286 of wire identical with previous description.Yet anode construction layer 282 is tabulars, is arranged on the substrate 280.Preferably, anode construction layer 282 is the sunk areas 283 at substrate 280.Fluorescence coating 284 is arranged on anode construction layer 282.Aforesaid gaseous conductor for example is to be closed in the space by substrate 288 and substrate 280.The anode construction layer 282 of this embodiment constitutes the plane, constitutes planar light source but a plurality of cathode constructions 286 are arranged at anode construction layer 282 top.
In this, according to needed light emission direction, for example anode construction layer 282 can have the sheet metal of reflection function structure, and the light that produces is reflected toward cathode construction 286.In addition, if anode construction layer 282 is transparent conductive materials, then substrate 280 can have function of reflecting, or increases the reflection horizon at the another side of anode construction layer 282.In this design, substrate 288 is that the transparent material that light penetrates forms exiting surface.In addition, if substrate 280 is transparent materials, then substrate 288 is designed to have the substrate of reflection function, for example is reflecting plate or the substrate with reflection horizon, and then exiting surface is at substrate 280.Change and talk about, according to identical luminous mechanism, its cathode construction can be the design of wire, and exiting surface then determines according to needs.The structure of reflection function can be incorporated the appropriate location in the light-emitting device into, according to desired direction reflection.
Again, cooperate the setting of electrode structure, the edge of substrate 288 and substrate 280, for example by the outstanding direct driving fit of part, with the space of formation sealing, and limit wall construction that need not be other.The outstanding part of substrate can for example be arranged on two substrates, 280,288 one or both.
The anode construction layer 282 of the embodiment of above-mentioned Fig. 6 A cooperates substrate 280, is to be designed to have the light function of reflecting, and a part of fluorescence that therefore shoots to anode construction layer 282 direction can be reflected.That so, is sent only penetrates toward substrate 288.Yet Fig. 6 A also can have other design variation.For example, Fig. 6 B is the diagrammatic cross-section that illustrates according to the sheet light emitting apparatus of another embodiment of the present invention.Consult Fig. 6 B, anode construction layer 285 and substrate 280 all adopt the material of printing opacity, and wherein anode construction layer 285 for example is a transparent conductive oxide.Be provided with reflection horizon 289 at substrate 288.So, can be from a part of light that fluorescence coating 284 is sent via the reflection in reflection horizon 289, the direction of photosynthetic and past substrate 280 penetrates with another part.Above-mentioned only is some embodiment wherein of possible design variation.
Again, be to present curved surface if element for example to be detected is a structure, then above-mentioned light supply apparatus also can design by curved substrate surface, produces the light source of curved surface, and this also is the variation of some actual design.
In the operation of light supply apparatus, the glorious degrees of light supply apparatus and operating voltage are linear haply, therefore can carry out continuous light modulation.The needed brightness of the convenient adjustment of user Ke Yi product performance.And regulate and control to show different photochromic by the ratio of fluorescent powder, can make the demand that more can cooperate the different product characteristic that detects.
Fig. 7 is the synoptic diagram that illustrates according to the element defect detecting system of the embodiment of the invention.Consult Fig. 7, the basic framework of element defect detecting system of the present invention comprises power supply unit 300, light supply apparatus 302 and element to be detected 304, and wherein light supply apparatus 302 is to produce detection light by the previous embodiment light supply apparatus.In this embodiment, light supply apparatus 302 carrying element 304 to be detected for example, and accept the control of power supply unit 300, with provide detect light to element 304 to be detected whether to detect defectiveness.In this, defective for example is in the foreign particle 310 on element to be detected 304 surfaces or element to be detected 304 inside holes 312.After the light 308 that is produced by light supply apparatus 302 passed element 304 to be detected, the place had Strength Changes at defectiveness, detects defective thus.
The thin portion structure of light supply apparatus 302 for example mainly comprises cathode construction, cathode construction, fluorescence coating, low-pressure gas layer as described above.Fluorescence coating is between this cathode construction and this anode construction.The low-pressure gas layer, be filled between this cathode construction and this anode construction, the effect of inducing the even emitting electrons of negative electrode is arranged, and wherein this low-pressure gas layer has an electronics mean free path, and allow at least the electronics of sufficient amount directly clashes into this fluorescence coating under an operating voltage.
Fig. 8 A and 8B illustrate according to the light supply apparatus of the embodiment of the invention and the shape synoptic diagram of power supply unit.Consult Fig. 8 A, light supply apparatus 302 cooperates power supply unit 300 with the substrate manufacture of circle, can obtain circular light supply apparatus, produces the detection light of face.Consult Fig. 8 B, light supply apparatus 302 cooperates power supply unit 300 with tetragonal substrate manufacture, can obtain tetragonal detection light source.The shape that other can be arranged according to actual needs certainly.
Fig. 9 A, 9B and 9C are the synoptic diagram that illustrates according to the element defect detecting system of the embodiment of the invention.Consult Fig. 9 A to Fig. 9 C,, more kinds of different arrangements can be arranged also except the mode of Fig. 7 for the detection mode of element 402 to be detected.Fig. 9 A for example, light supply apparatus 400 provides fixing light source.Element 402 to be detected is set at movably platform 404, for example is the mechanism of mechanical arm.Move element 402 to be detected by mechanical arm.On the other hand, observe the filming image element 406 that detects light, for example charge coupled cell (CCD) is observed the image that passes element 402 to be detected in the position of correspondence.
Consult Fig. 9 B again, it is again another kind of arrangement.If detect the reflected image of element 402 to be detected, then light supply apparatus 400 provides detection light from the side, and filming image element 406 is at the image of counterparty to detection of reflected in addition.Element 402 to be detected is seated in movably on the platform 408.Move element 402 to be detected by platform 408.
Consult Fig. 9 C again, it is again another kind of arrangement.The mode of itself and Fig. 9 B is similar, but light supply apparatus 400 is that detection light is provided from the front.Filming image element 406 is at the image of side counterparty to detection of reflected.Element 402 to be detected is seated in movably on the platform 408.Move element 402 to be detected by platform 408.
Though the present invention discloses as above with preferred embodiment; right its is not in order to limit the present invention; those skilled in the art without departing from the spirit and scope of the present invention, when can doing a little change and retouching, so protection scope of the present invention is when looking appended being as the criterion that claim defined.
Claims (22)
1. element defect detecting system comprises:
Element to be detected;
Power supply unit; And
Light supply apparatus carries this element to be detected, and accepts the control of this power supply unit, with provide detect light to this element to be detected whether to detect defectiveness, wherein this light supply apparatus comprises:
Cathode construction;
Anode construction;
Fluorescence coating is between this cathode construction and this anode construction; And
The low-pressure gas layer, be filled between this cathode construction and this anode construction, the effect of inducing the even emitting electrons of negative electrode is arranged, and wherein this low-pressure gas layer has an electronics mean free path, and allow at least the electronics of sufficient amount directly clashes into this fluorescence coating under an operating voltage.
2. element defect detecting system as claimed in claim 1, wherein this cathode construction and this anode construction are respectively planar structures and are parallel to each other, so that this planar detection light to be provided.
3. element defect detecting system as claimed in claim 1, wherein the air pressure of this low-pressure gas layer is 10～10
-3In the scope of torr.
4. element defect detecting system comprises:
Element to be detected;
Platform carries this element to be detected;
Power supply unit; And
Light supply apparatus is accepted the control of this power supply unit, with provide detect light to this element to be detected whether to detect defectiveness, wherein this light supply apparatus comprises:
Cathode construction;
Anode construction;
Fluorescence coating is between this cathode construction and this anode construction; And
The low-pressure gas layer, be filled between this cathode construction and this anode construction, the effect of inducing the even emitting electrons of negative electrode is arranged, and wherein this low-pressure gas layer has an electronics mean free path, and allow at least the electronics of sufficient amount directly clashes into this fluorescence coating under an operating voltage.
5. element defect detecting system as claimed in claim 4, wherein this cathode construction and this anode construction are respectively planar structures and are parallel to each other, so that this planar detection light to be provided.
6. element defect detecting system as claimed in claim 4, wherein the air pressure of this low-pressure gas layer is 10～10
-3In the scope of torr.
7. element defect detecting system as claimed in claim 4 also comprises the limit wall construction, in order to this cathode construction and this anode construction are separated, and constitutes confined space to constitute this low-pressure gas layer.
8. element defect detecting system as claimed in claim 4, wherein this fluorescence coating is positioned at the surface of this anode construction.
9. element defect detecting system as claimed in claim 4, wherein this element to be detected is a display panel.
10. element defect detecting system as claimed in claim 4, wherein platform can move this element to be detected.
11. element defect detecting system as claimed in claim 4 also comprises photographic element, takes this element to be detected.
12. element defect detecting system as claimed in claim 4, wherein this cathode construction of this light supply apparatus and the surface of this anode construction also comprise easy discharge material layer.
13. element defect detecting system as claimed in claim 4, wherein the surface of this cathode construction of this light supply apparatus also comprises the secondary electron source material.
14. element defect detecting system as claimed in claim 4, wherein the gas of this low-pressure gas layer comprises blunt gas or atmosphere.
15. element defect detecting system as claimed in claim 4, wherein the gas of this low-pressure gas layer comprises O
2, H
2Or CO
2
16. element defect detecting system as claimed in claim 4, wherein this light supply apparatus this fluorescence coating on this anode construction can send required visible light according to the selection material.
17. element defect detecting system as claimed in claim 4, wherein this anode construction of this light supply apparatus is planar structure.
18. element defect detecting system as claimed in claim 4, wherein this cathode construction of this light supply apparatus is planar structure, and this fluorescence coating, is positioned on the surface of this anode construction, towards this cathode construction.
19. element defect detecting system as claimed in claim 4, wherein this cathode construction of this light supply apparatus comprises at least one filamentary cathode.
20. element defect detecting system as claimed in claim 4, wherein this light supply apparatus also comprises board structure, has at least one curved surface chase, and wherein this cathode construction is at least one filamentary cathode, extend above this curved surface chase respectively, this anode construction is on the recessed surface of this curved surface chase.
21. element defect detecting system as claimed in claim 4, wherein this light supply apparatus also comprises:
First substrate; And
Second substrate, with this first substrate in order to constituting enclosure space,
Wherein this anode construction and this cathode construction are seated on this first substrate in this enclosure space,
This fluorescence coating is made up of a plurality of monomers, and the position is on this first substrate and between this cathode construction and this anode construction, constituting at least one light-emitting zone,
This low-pressure gas layer is filled in this enclosure space, and the effect of inducing the even emitting electrons of negative electrode is arranged.
22. element defect detecting system as claimed in claim 4, wherein this element to be detected comprises image display panel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810095457XA CN101566583B (en) | 2008-04-23 | 2008-04-23 | Defect detection system of panel component |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810095457XA CN101566583B (en) | 2008-04-23 | 2008-04-23 | Defect detection system of panel component |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101566583A true CN101566583A (en) | 2009-10-28 |
| CN101566583B CN101566583B (en) | 2011-04-13 |
Family
ID=41282843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200810095457XA Expired - Fee Related CN101566583B (en) | 2008-04-23 | 2008-04-23 | Defect detection system of panel component |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101566583B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110178010A (en) * | 2017-01-13 | 2019-08-27 | 日本电产三协株式会社 | Panel checks system |
| CN111834244A (en) * | 2020-07-24 | 2020-10-27 | 昆山国显光电有限公司 | Display panel mother board and preparation method |
| CN112599707A (en) * | 2020-12-15 | 2021-04-02 | 云谷（固安）科技有限公司 | Light-emitting module and display device |
| CN115343293A (en) * | 2022-08-10 | 2022-11-15 | 北京东土科技股份有限公司 | Negative plate detection control system and production line based on machine vision |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10057036C2 (en) * | 2000-11-17 | 2002-12-12 | Basler Ag | Inspection system for flat glasses in display production |
| SE523574C2 (en) * | 2001-12-11 | 2004-04-27 | Lightlab Ab | Device and method for emission of light |
-
2008
- 2008-04-23 CN CN200810095457XA patent/CN101566583B/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110178010A (en) * | 2017-01-13 | 2019-08-27 | 日本电产三协株式会社 | Panel checks system |
| CN111834244A (en) * | 2020-07-24 | 2020-10-27 | 昆山国显光电有限公司 | Display panel mother board and preparation method |
| WO2022016988A1 (en) * | 2020-07-24 | 2022-01-27 | 昆山国显光电有限公司 | Display panel motherboard and preparation method |
| CN112599707A (en) * | 2020-12-15 | 2021-04-02 | 云谷（固安）科技有限公司 | Light-emitting module and display device |
| CN115343293A (en) * | 2022-08-10 | 2022-11-15 | 北京东土科技股份有限公司 | Negative plate detection control system and production line based on machine vision |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101566583B (en) | 2011-04-13 |
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