CN101563302A - Temperable, infrared reflecting layer system and method for the production thereof - Google Patents

Temperable, infrared reflecting layer system and method for the production thereof Download PDF

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Publication number
CN101563302A
CN101563302A CNA2007800295805A CN200780029580A CN101563302A CN 101563302 A CN101563302 A CN 101563302A CN A2007800295805 A CNA2007800295805 A CN A2007800295805A CN 200780029580 A CN200780029580 A CN 200780029580A CN 101563302 A CN101563302 A CN 101563302A
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layer
coating systems
substrate
refractory power
specific refractory
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克里斯多佛·科克尔特
霍尔格·普勒尔
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VON ADNA EQUIPMENT AG
Von Ardenne Anlagentechnik GmbH
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VON ADNA EQUIPMENT AG
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3618Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3626Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3652Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the coating stack containing at least one sacrificial layer to protect the metal from oxidation
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3657Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
    • C03C17/366Low-emissivity or solar control coatings
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3681Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating being used in glazing, e.g. windows or windscreens
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3694Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer having a composition gradient through its thickness
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/70Properties of coatings
    • C03C2217/73Anti-reflective coatings with specific characteristics
    • C03C2217/734Anti-reflective coatings with specific characteristics comprising an alternation of high and low refractive indexes

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Laminated Bodies (AREA)

Abstract

The invention relates to an infrared reflecting layer system on a transparent substrate and a method for the production of the layer system. The task on which the invention is based, to produce a layer system and a method for the production thereof, providing sufficient quality at demanding climate conditions with a heat treatment of the substrate and/or undefined condition with the glass substrate, particularly an adjustable transmission of approximately 10 to 80 % in the visible range as well as providing a low emitability and at the same time a substantial stability of the color location of the layer system, is achieved by a temperable, infrared-reflecting and visible light in the range of visible light adjustable absorbing layer system for layering of dielectric substrates (S0), having on the substrate (S0) in the following sequence: a transparent, highly retractive dielectric layer S2, an absorber- or blocker layer S3 on the substrate side, a functional metallic reflection layer S4, an upper absorber- and blocker layer S5 and a transparent high braking dielectric layer S6. The layer system according to the invention, allows for the combination of properties of a temperable IR-reflecting layer system (Low radiation) on glass substrates with those of a temperable solarcontrol-system with adjustable transmission of approximately 10% to approximately 80% in the visible range of light.

Description

Can tempered, the coating systems of reflected infra-red radiation and prepare the method for this coating systems
Technical field
The present invention relates to a kind of based on coating systems transparent substrates, temperable, that ir radiation is reflected, and this coating systems has and puts on sequence of layer suprabasil, that ir radiation is reflected, and the method that the invention still further relates to this coating systems of preparation.This sequence of layer comprises at least one selectivity function layer.
The invention still further relates to the method for the such coating systems of preparation, in described method, rely on appropriate means, will the sequence of layer that ir radiation reflects be applied on the transparent substrates.
Background technology
Normally, the coating systems that ir radiation is reflected (low radiation-coating systems) by functional layer, improve the adhering bottom of functional layer and go reflective coating to form, wherein, each in the coating systems layer can repeat.Usually by the functional layer of the alloy composition of precious metal (be mostly silver) or precious metal under the very little situation of layer thickness, just had optionally reflection potential good in region of ultra-red.If only arrange a functional layer in coating systems, then this coating systems is commonly called " single low radiation (Single-Low-E) ".
Except go reflective, described coating also is used in particular for improving machinery and chemical stability.Coating is made up of high refractive, siliceous dielectric materials usually.In order to improve the transmissivity of coating systems in the visible region, with described go reflector layer be arranged in the top of selectivity function layer and/or below.
For the sclerosis and/or the distortion of substrate, this transparent coating systems that ir radiation is reflected also will experience tempering process.In this case, this coating systems has the sequence of layer that possesses as lower floor's characteristic, and promptly described layer characteristic allows that the substrate that this coating systems is carried stands heat treatment process and remains in the limit of qualification in this variation with the optical characteristics, mechanical characteristics and the chemical property that are occurred.According to the application of applied substrate, stand different weather condition in the tempering process of the coating systems of substrate under different temporal modes.
Because the different temperature load of the coating systems that has applied, in the process of the position subsequently of prepared layer system layer thereon and in the tempering process process, the reflection potential of the functional layer that can change and change the various processes of the transmissivity of coating systems, the diffusion of components that particularly makes reflector layer are in functional layer or conversely.For fear of this diffusion process, going to insert the blocking layer between reflector layer and the functional layer, this blocking layer is used as the buffer layer of diffustivity component.These blocking layers are corresponding to the temperature load ground structure and the layout that are occurred, and this blocking layer is protected to avoid the influence of adjacent layers very thin one or more functional layers sensitivity and common.By inserting one or more blocking layers, can reduce especially because the gamut of the coating systems that tempering process causes and the increase of coating systems square resistance.
Be well known that particularly NiCr-or NiCrOx-layer are as the blocking layer of energy tempered coating systems.So in DE 03543178 and EP 1174379, described blocking layer encases one or more silver layers or this blocking layer is protected in a side at least.But described blocking layer causes the transmissibility of these one or more silver layers to descend.If deposit silver layer that square resistance is about 5 ohm-sq rice and this silver layer is inserted in two NiCrOx-layers, then this insertion process can cause that square resistance is improved about 1.5 ohm-sq rice and reaches 6.5 ohm-sq rice.
Introduced a kind of following coating systems in EP 0999192B1, this coating systems contains the silver layer as the selectivity function layer, and this selectivity function layer is provided with the blocking layer of forming with by nickel or nickel chromium triangle in both sides.At this, by in the functional silver layer that the NiCrOx-layer is inserted, this coating systems is able to stabilization in the time of thermal treatment when list hangs down radiation (Single-Low-E).Shortcoming is, all to be necessary for about 7-8nm thick for two stratified each individual layers of silver in this coating systems, so that avoid forming silver-colored stratified isolated island.The formation of described isolated island causes the low transmissivity of coating systems.In addition, in EP 0999192B1, also introduced the use of the low stoichiometric TiOx-layer between blocking layer and silver layer.This TiOx-layer can reduce the formation of so-called mist, that is changes the optical characteristics of functional layer owing to the diffusion process that enters functional layer.But, this absorbefacient TiOx-layer generation oxidation when thermal treatment, and cause the remarkable change of transmissivity and cause the passing of the color position of pre-setting.
In EP 1238950A2, introduced a kind of can tempered coating systems, this coating systems is provided with the NiCrOx-layer as the blocking layer in the both sides as the silver layer of sensitive layer.In addition, in this coating systems, be provided with the interfacial layer of dielectric, this interfacial layer be positioned in all cases under the blocking layer and the blocking layer on.Layer like this plays the effect of different stabilizations to this coating systems and play the effect of diffusion barrier equally in tempering process.
In addition, in EP 1238950, introduced and when making heat treatable coating systems stabilization, used gradient layer.At this, shortcoming is that the SiNx-layer is positioned under the blocking layer, and square resistance can not reduce and then the emittance of coating systems can not reduce thus.In this solution, also be provided with a plurality of sequence of layer of forming by the silver layer of the susceptibility that has lower floor and two blocking layers that encase each silver layer are set respectively.
Be well known that equally by DE 10046810, can apply metal barrier, this metal barrier forms gradient layer in the transitional region of silver between two layers of functional layer.Similarly, go reflector layer to form by a plurality of metal oxide layers and gradient layer between metal oxide layer, that constitute by two adjacent individual layers.
Because using the utilization with the metal oxide that removes reflector layer is not best solution, so in DE 10131932, go reflector layer to form by a plurality of individual layers of different metal nitride, wherein, Ceng metal share from initial 100% reduce to 0% and the material share of adjacent individual layer on amount, then be elevated to 100% from 0%.But verified, this coating systems can not guarantee desired transmissivity.
Show, although these dissimilar layer structures have different measures, but too responsive and only can adapt to specific tempering process for weather condition still, thereby they are in that require can not be with enough qualities or productive rate manufacturing under the harsh or totally different weather condition.
Similarly, for the raw glass with the original state of not limiting, that is have the raw glass that the glass chemistry of fluctuation (particularly aspect its sodium share) is formed, these coating systems also show quality problems in preparation.In addition, other glass influence (such as the impression or the corrosion of the suction pipe that is used to handle glass, these glass influences normally can not be found by visual monitor and the cleaning by routine can not be eliminated) can cause the change that the coating systems characteristic is not expected.To the influence of such glass, especially disadvantageously, they for the characteristic of coating systems act on tempering process after just can discover.
Summary of the invention
Therefore, task of the present invention is, a kind of coating systems is provided and prepares the method for this coating systems, described coating systems is under the weather condition of the requirement harshness that substrate is heat-treated and/or under the situation that state does not limit in substrate of glass, guarantee enough quality, particularly adjustable in the visible region, be about 10 to 80% transmissivity and low-launch-rate, and make the maximum stability in color position of coating systems become possibility simultaneously.
The coating systems of the feature of this task by having claim 1 and the method with feature of claim 23 are solved.Favourable structural scheme of the present invention is the theme of dependent claims.
Temperable, infrared reflectivity and in the visible region, can absorb targetedly with regulating, ground has the absorption of at least one high refractive transparent dielectric layer S2, base side or blocking layer S3, functional metallic reflector S4 in the following order, goes up and absorb or blocking layer S5 and high refractive transparent dielectric layer S6 in substrate (S0) according to the present invention in order to the coating systems of coating dielectric substrate (S0).
Coating systems according to the present invention makes in the visible region adjustable transmissivity about 10% to about 80% situation, the characteristic of temperable infrared rays (the IR)-reflective layer system on the substrate of glass (low radiation) and the characteristic of the temperable daylight hierarchy of control be combined into possibility.
Described layer S4 advantageously is made up of silver or silver alloys.
A structural scheme according to the present invention is set to, and is the light of 550nm for wavelength, and the specific refractory power of at least one among layer S2 and the S6 is between 2.0 and 2.5.
At this, layer S2 can be made up of the oxide compound or the nitride of metal, semi-conductive or semiconductor alloy.In addition, can be set to, layer S6 contains silicon.
In another structural scheme of the present invention, at least one among layer S3 and the S5 is by metal, metal oxide, metal nitride or alloy composition.
Can be set to, at least one among layer S3 and the S5 contains chromium or chromium cpd for this reason.For example can be set to, at least one among layer S3 and the S5 contains CrNx.
According to improvement project of the present invention, layer S3 has identical stoichiometry and layer thickness (symmetrical system) with S5 under the situation of using same material.
Also can be set to alternatively, layer S3 has different stoichiometries and/or layer thickness (asymmetric system) with S5 under the situation of using same material.
In structural scheme of the present invention, at least one among layer S3 and the S5 is made up of the SiOxNy with 1.5<n<2.1, NiCr or NiCr-compound (NiCrNx or NiCrNx).
According to improvement project of the present invention, between substrate S0 and layer S2, arrange transparent, medium barrier layer and/or the adhesion layer S1 that refracts to low refractive, dielectric.
According to another scheme of the present invention, on layer S6, arrange transparent, medium barrier layer and/or the adhesion layer S7 that refracts to low refractive, dielectric.
Advantageously can be set to, the specific refractory power of layer S1 is less than the specific refractory power of layer S2.
Advantageously can be set in addition, the specific refractory power of layer S7 is less than the specific refractory power of layer S6.
Particularly advantageously being, is the light of 550nm for wavelength, and the specific refractory power of at least one among layer S1 and the S7 is between 1.60 and 1.75.
Can be set in addition, the material of at least one among selection layer S1 and the S7 makes its specific refractory power approach the specific refractory power of substrate S0 in this wise.
Can be set to, at least one among layer S1 and the S7 contains the oxynitride of metal, semi-conductive or semiconductor alloy for this reason.Among layer S1 and the S7 at least one advantageously contains silicon oxynitride.
Particularly advantageously be, the optical thickness of S1 (n*d) is less than λ/4 (LAMBDA/4), and wherein λ (LAMBDA) is the spectral centroid of transparent SPECTRAL REGION
Figure A20078002958000111
Another improvement project according to the present invention is set to, and is furnished with the reflecting layer of another metal at least between layer S1 and S7.
At least silver is advantageously contained in the reflecting layer of another metal.
Be used to prepare this coating systems, the method according to this invention is characterised in that at least one layer applies by sputter, preferably applies by direct current (DC)-magnetron sputtering or intermediate frequency (MF)-magnetron sputtering.
Advantageously, at least one among layer S1 and the S7 applies by chemical vapor deposition (CVD)-technology or the auxiliary CVD technology of plasma body.
Among layer S1 and the S7 at least one preferably in containing oxygen and/or nitrogen containing atmosphere the reactive magnetron sputtering by silicon or silumin apply.
Among layer S1 and the S7 at least one particularly preferably in containing oxygen and/or nitrogenous argon atmospher the reactive magnetron sputtering by silicon or silicon-aluminum alloy apply.
In addition, ground can be set to according to the present invention, is containing oxygen and/or nitrogenous and/or contain that the reactive magnetron sputtering by silicon or silicon-aluminum alloy applies in the atmosphere of argon as the layer S1 of the gradient layer with different chemical metering and among the S7 at least one.
Feasible, according to the example of coating systems of the present invention be:
S0/S1/Si3N4/CrNx/Ag/CrNx/Si3N4/S7
S0/S1/Si3N4/NiCrNx/Ag/CrNx/Si3N4/S7
S0/S1/Si3N4/CrNx/Ag/NiCrNx/Si3N4/S7
S0/S1/Si3N4/SiOxNy/Ag/CrNx/Si3N4/S7
Layer S3 and S5 work as absorptivity and reflective layer, can adjust the transmissivity of coating systems via the thickness of this absorptivity and reflective layer.Cr by using different thickness or CrNX-compound can keep the color transfer after the tempering very little in order to realize for the desired transmissivity of at least one absorption layer.Cr or CrNx are the good baffle elements that is used to protect the Ag layer.If Cr or CrNx-layer just are applied on the side of silver, then on other side, must use other thin blocking layer (for example SiOxNy, NiCrNx ...) be used for protecting the Ag layer.Use Cr or CrNx-compound to replace another advantage of typical NiCr or NiCr-compound (NiCrOx) to be that the afterwards very little mist degree of tempering forms, this mist degree forming process causes owing to nickel diffuses in the adjacent layer in addition in other cases.
Optionally layer S1 is following barrier layer, and this barrier layer can hinder Na+ and diffuse into the glass influence that also hinders in the coating systems layer characteristic, for example corrosion or suction pipe impression from substrate of glass.In addition, by the deposition of layer S1, will get rid of from substrate by the water that substrate of glass is brought in the coating apparatus.
Optionally layer S7 relates to the lower specific refractory power of coating S6 commonly used and shows as reflector layer with it, and this goes the transmissivity of reflector layer more obvious this coating systems of raising under expectation high-transmission rate situation.

Claims (28)

1. can tempered, reflected infrared and that can absorb targetedly with adjusting, in order to the coating systems of the substrate (S0) of coating dielectric, described coating systems in described substrate (S0), have in the following order at least one high refractive transparent dielectric layer S2, base side absorption or blocking layer S3, functional metallic reflector S4, go up and absorb or blocking layer S5 and high refractive transparent dielectric layer S6.
2. the described coating systems of one of claim as described above is characterized in that, described layer S4 is made up of silver or silver alloys.
3. the described coating systems of one of claim as described above is characterized in that, is the light of 550nm for wavelength, and the specific refractory power of at least one among described layer S2 and the S6 is between 2.0 and 2.5.
4. the described coating systems of one of claim as described above is characterized in that, described layer S2 is made up of the oxide compound or the nitride of metal, semi-conductive or semiconductor alloy.
5. the described coating systems of one of claim as described above is characterized in that, described layer S6 contains Si.
6. the described coating systems of one of claim as described above is characterized in that, at least one among described layer S3 and the S5 is by metal, metal oxide, metal nitride or alloy composition.
7. the described coating systems of one of claim as described above is characterized in that, at least one among described layer S3 and the S5 contains chromium or chromium cpd.
8. the described coating systems of one of claim as described above is characterized in that, at least one among described layer S3 and the S5 contains CrNx.
9. the described coating systems of one of claim as described above is characterized in that, described layer S3 has identical stoichiometry and layer thickness (symmetrical system) with S5 when using identical materials.
10. the described coating systems of one of claim as described above is characterized in that, described layer S3 has different stoichiometries and/or layer thickness (asymmetric system) with S5 under the situation of using same material.
11. the described coating systems of one of claim is characterized in that as described above, at least one among described layer S3 and the S5 is made up of the SiOxNy with 1.5<n<2.1, NiCr or NiCr-compound (NiCrNx or NiCrNx).
12. coating systems as claimed in claim 1 is characterized in that, is furnished with transparent, medium barrier layer and/or the adhesion layer S1 that refracts to low refractive, dielectric between described substrate S0 and described layer S2.
13. coating systems as claimed in claim 1 or 2 is characterized in that, is furnished with transparent, medium barrier layer and/or the adhesion layer S7 that refracts to low refractive, dielectric on described layer S6.
14. the described coating systems of one of claim is characterized in that as described above, the specific refractory power of described layer S1 is less than the specific refractory power of described layer S2.
15. the described coating systems of one of claim is characterized in that as described above, the specific refractory power of described layer S7 is less than the specific refractory power of described layer S6.
16. the described coating systems of one of claim is characterized in that as described above, is the light of 550nm for wavelength, the specific refractory power of at least one among described layer S1 and the S7 is between 1.60 and 1.75.
17. the described coating systems of one of claim is characterized in that as described above, so selects at least one the material among described layer S1 and the S7, makes at least one the specific refractory power among described layer S1 and the S7 approach the specific refractory power of substrate S0.
18. the described coating systems of one of claim is characterized in that as described above, at least one among described layer S1 and the S7 contains the oxynitride of metal, semi-conductive or semiconductor alloy.
19. the described coating systems of one of claim is characterized in that as described above, at least one among described layer S1 and the S7 contains silicon oxynitride.
20. the described coating systems of one of claim is characterized in that as described above, the optical thickness of S1 (n*d) is less than λ/4, and wherein, λ is the spectral centroid of transparent SPECTRAL REGION.
21. the described coating systems of one of claim is characterized in that as described above, is furnished with the reflecting layer of another metal at least between described layer S1 and S7.
22. the described coating systems of one of claim is characterized in that as described above, silver is contained in the reflecting layer of another metal at least.
23. be used for preparing the method for the described coating systems of claim 1-22 as described above, it is characterized in that, at least one layer is applied by sputter.
24. method as claimed in claim 23 is characterized in that, at least one layer is applied by DC magnetron sputtering or MF magnetron sputtering.
25. as claim 23 or 24 described methods, it is characterized in that, among described layer S1 and the S7 at least one applied by CVD technology or the auxiliary CVD technology of plasma body.
26. as the described method of one of claim 23 to 25, it is characterized in that, at least one the reactive magnetron sputtering by silicon or silumin in containing oxygen and/or nitrogen containing atmosphere among described layer S1 and the S7 applied.
27. as the described method of one of claim 23 to 26, it is characterized in that, at least one the reactive magnetron sputtering by silicon or silicon-aluminum alloy in containing oxygen and/or nitrogenous argon atmospher among described layer S1 and the S7 applied.
28. as the described method of one of claim 23-27, it is characterized in that, will contain oxygen and/or nitrogenous and/or contain that the reactive magnetron sputtering by silicon or silicon-aluminum alloy applies in the atmosphere of argon as the described layer S1 of gradient layer and among the S7 at least one with different chemical metering.
CNA2007800295805A 2006-08-11 2007-08-10 Temperable, infrared reflecting layer system and method for the production thereof Pending CN101563302A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200610037909 DE102006037909A1 (en) 2006-08-11 2006-08-11 Temperable, infrared radiation reflective layer system and method for its preparation
DE102006037909.8 2006-08-11

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