The multiteeth indexing table device of not lifting of table top
Technical field:
The present invention is relevant with the high precision angle measurement unit, and is relevant with the wide-angle measurement mechanism of laser angle interferometer and multiteeth indexing table combination especially.
Background technology:
Utilize the combination of high precision multiteeth indexing table and laser angle interferometer, can carry out high-acruracy survey the bearing accuracy of NC rotary table.At present, external such advanced main flow laser surveying instrument, because the lifting of the multiteeth indexing table table top of laser target mirror is installed, it is serious to cause laser intensity to lose, and produces to measure fault unstable even that interruption is measured.The present invention promptly invents out the multiteeth indexing table measurement mechanism of not lifting of table top at this problem, preferably resolve accuracy and integrity problem that laser angle interferometer is measured the NC rotary table bearing accuracy.
Multiteeth indexing table is to utilize the upper and lower a pair of number of teeth contrate gear identical with modulus to realize the calibration function with the different engagement of position, angle, location, is widely used in fields such as Precision Machining and precision measurement.
Fig. 1 is the existing multiteeth indexing table structural representation that is used for laser measurement NC rotary table bearing accuracy, and last fluted disc 2 is stable positioning states with lower tooth disk 1 engagement.The use of multiteeth indexing table is divided into three steps: 1. motor 13 drive transmission devices 14 rise fluted disc 2, break away from engagement; 2. lower tooth disk 1 drives the angle that inserts to requirement by NC rotary table, and the transposition while, motor 3 drive transmission devices 4 make fluted disc 2 turn round the angle of requirement synchronously to the reverse direction of lower tooth disk 1 rotation; 3. motor 13 drive transmission devices 14 fall fluted disc 2, with lower tooth disk 1 stable engagement once more.
Laser angle interferometer and multiteeth indexing table shown in Figure 1 are used in combination, and can constitute a cover wide-angle measuring system, as shown in Figure 2.Target mirror 23 is installed on the table top of fluted disc 2, and the laser beam that laser head 35 sends is by angle interference mirror 34 directive Ba Mirror 23.During measurement, last fluted disc 2 at first rises, measured body 26 (together with lower tooth disk 1) is desired the angle measurement degree with respect to last fluted disc 2 (together with Ba Mirror 23) rotation one, rotation simultaneously, last fluted disc 2 (together with target mirror 23) turns round synchronously to lower tooth disk 1 rotating reverse direction desires the angle measurement degree, left alone without help steady after, last fluted disc 2 (together with target mirror 23) falls, with lower tooth disk 1 stable engagement, laser angle interferometer shows measured body 26 rotating angular error values.Last fluted disc 2 rises again, and measured body 26 rotates one again and desires the angle measurement degree, and work above repeating can record measured body 26 next rotating angular error; So repeat, can record the angle of revolution error of NC rotary table complete cycle.Measured body 26 reverse rotations are worked above repeating, and can record the angular error of measured body 26 reversed turnings.Can measure big angle arbitrarily with this measuring method.
In above-mentioned measuring method, the rise of last fluted disc 2 and fall light beam (energy) loss that action can cause the target mirror to return produces and measures unstablely, even interrupts measuring, as shown in Figure 3.A is a normal condition among the figure, returns entrance pupil 25 by the laser beam that emergent pupil 24 penetrates fully after target Mirror 23 reflections.B is the situation that last fluted disc rises among the figure, owing to rise distance h, the laser beam of returning can not enter entrance pupil 25 fully, and the measurement data instability is to such an extent as to when the excessive laser angle interferometer of light beam loss can not normally receive, measure failure.
The wide-angle measuring system of laser angle interferometer and multiteeth indexing table combination, the measurement range is big, precision is high, easily is automated, and is very useful measuring system.But, because the lifting action of fluted disc on the multiteeth indexing table causes the light beam loss, causing and measure instability, even make the measurement failure, this is the major defect of this measuring method.
Summary of the invention:
The purpose of this invention is to provide a kind of simple in structurely, measure the multiteeth indexing table device of stable not lifting of table top.
The present invention is achieved in that
The multiteeth indexing table device of not lifting of table top of the present invention, lower tooth disk 1 is connected with pedestal 5, last fluted disc 2 lower ends and lower tooth disk 1 engagement, there is the circumferential gearing 4 of axial jacking gear 14 and level to be in transmission connection on the pedestal 5 with last fluted disc 2, last fluted disc 2 is connected by the coaxial table top 10 of diaphragm 8 and last fluted disc, table top 10 is rotatably assorted with pedestal 5, and axle center and table top that target mirror 23 is positioned at table top 10 are connected.
The coaxial connector 9 of the upper surface of last fluted disc 2 and last fluted disc is connected, connector 9 is fixed with diaphragm 8 inner rings, the outer ring of diaphragm 8 is connected with table top 10, and the above and below of the periphery of table top 10 is rotatably assorted with the limiting plate 6 that is connected with pedestal 5 with pedestal 5 by ball collar 7 respectively.
Described diaphragm 8 is the disk or the annulus in a jagged or hole.
Described diaphragm 8 is a several piece, arranges along the circumferentially even of last fluted disc 2.
The present invention is used for accurate measurement of angle, the wide-angle measuring system that is particularly useful for the combination of laser angle interferometer and multiteeth indexing table, because not lifting of table top has been avoided the laser beam energy loss to cause and has been measured instability even make the fault of measuring failure, has improved the measurement reliability.
Description of drawings:
Fig. 1 is traditional multiteeth indexing table structural representation that is used for laser measurement NC rotary table bearing accuracy
Fig. 2 is the measuring method synoptic diagram that multiteeth indexing table combines with laser angle interferometer
The light beam loss synoptic diagram that Fig. 3 causes for last fluted disc lifting.
Fig. 4 is for adopting the structural drawing of the present invention of annular diaphragm.
Fig. 5 is incomplete annular diaphragm structure figure.
Fig. 6 is the combination assumption diagram of several piece flexible sheet.
Fig. 7 is the A-A cut-open view of Fig. 1.
Embodiment:
See Fig. 4, lower tooth disk 1 is fixing with pedestal 5, last fluted disc 2 is fixed by connector 9 and circular film 8 inner rings, the outer ring of circular film 8 is connected with table top 10, and ball 7 is two rings, is distributed in the upper and lower surface of table top 10, spacing by pedestal 5 with the limiting plate 6 that is fixed on the pedestal 5, laser target mirror 23 is installed on the table top 10, is fixed with fixed head 12 on the pedestal 5, so that be connected with NC rotary table.After circular film 8 connects with connector 9 and table top 10, have very high rigidity, so connector 9 can be considered with table top 10 and is rigidly connected in the tangential direction of circumference.
Before the measurement, the multiteeth indexing table mechanism of not lifting of table top is installed on the NC rotary table center with pressing plate, laser target mirror 23 is installed in the centre of gyration of multiteeth indexing table, the laser beam alignment targets mirror 23 that laser head penetrates.During measurement, by motor 13 drive transmission devices 14 fluted disc 2 is at first risen, lower tooth disk 1 breaks away from engagement with last fluted disc 2, though the web joint 9 that is connected with last fluted disc 2 table tops has risen, but the equilibrium activity of 8 pairs of axial displacements of diaphragm and the position-limiting action of spacing ball 7, table top 10 keeps original position can not rise system's confining force equilibrium state; The angle measurement degree is desired in NC rotary table rotation one, rotation simultaneously, motor 3 drive transmission devices 4 make fluted disc 2 rotate this desire angle measurement degree synchronously to the opposite direction of NC rotary table rotation, because diaphragm 8 has very high rigidity in the tangential direction of circumference, connector 9 can be considered with table top 10 and is rigidly connected, and table top 10 and last fluted disc 2 are synchronous; After rotation was come to a complete stop, motor 13 drive transmission devices 14 fell fluted disc 2, and with lower tooth disk 1 stable engagement, multiteeth indexing table returns to stable positioning states, and same table top 10 does not produce drop movements; Laser angle interferometer shows the rotating angular error of NC rotary table.Motor 13 drive transmission devices 14 rise fluted disc 2, repeat above work, finish until measurement.The NC rotary table counter-rotating, work above repeating, the bearing accuracy in the time of can measuring the NC rotary table counter-rotating.
Circular film 8 also can substitute with the part that is similar to iris action.Fig. 5 (a) and (b) be incomplete circular film structure is that the diametric(al) at circular film cuts a part, become two flaps, three flaps, pintongs shape ...., inner ring is still fixing with connector 9, imperfect outer ring still is connected with table top 10.Fig. 6 is the structure of flap part combination, the structure that figure (a) is made up of three lobe flap parts, and figure (b) is the A-A sectional view of figure (a); This is fixing with connector 9 respectively with several parts, is connected with table top 10, forms the radial structure of equal portions in the center of circle.
The circumferential gearing 4 of level is the vertical gear of the gear ring engagement on the face of cylinder with last fluted disc 2, and vertical gear and motor 3 are in transmission connection.Axially jacking gear 14 have axle 28 be supported on lower tooth disk 1 wall and with its movingly, have eccentric wheel 27 to contact on the axle 28 with the bottom of last fluted disc 2.There is the gearing mesh on gear and motor 13 output shafts axle 28 outer ends.The bottom of last fluted disc 2 is the inner chamber hollow cylinder movingly with last fluted disc 1.