CN101556170A - Capacitance measuring sensor device in absolute position - Google Patents
Capacitance measuring sensor device in absolute position Download PDFInfo
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- CN101556170A CN101556170A CNA2009101140817A CN200910114081A CN101556170A CN 101556170 A CN101556170 A CN 101556170A CN A2009101140817 A CNA2009101140817 A CN A2009101140817A CN 200910114081 A CN200910114081 A CN 200910114081A CN 101556170 A CN101556170 A CN 101556170A
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Abstract
The invention discloses a capacitance measuring sensor device in an absolute position, which comprises a capacitive grating sensor, a measurement signal processor, a data processor and a display, wherein the capacitive grating sensor comprises a one-grade or multi-grade calibration sensor and a measurement sensor and a memory electronic element is used for memorizing a phase value and a phase difference of the calibration sensor and the measurement sensor so as to determine a counting zero of the measurement; the calibration sensor has absolute measurement function in an effective working range and the pitch score of the measurement sensor is larger than or equal to the pitch score of the calibration sensor. As for measurement in an absolute circumferential position, the capacitive grating sensor is a round capacitive grating sensor comprising a one-grade or multi-grade calibration sensor and the measurement sensor; as for measurement in an absolute angle (arc) position, the capacitive grating sensor comprises a one-grade round grating calibration sensor and a flexible hinge grating measurement sensor; as for measurement in an absolute linear position, the capacitive grating sensor comprises a one-grade or multi-grade calibration sensor and a linear measurement sensor.
Description
(1) technical field:
The invention belongs to measurement mechanism, specifically is a kind of capacitance measuring sensor device that the position is carried out absolute measurement.
(2) background technology:
The digital display measuring equipment of tradition digital display calliper is a capacitive transducer, and it partly is made up of moving grid and fixed grid two, and fixed, the moving grid of digital display calliper are installed in respectively on blade and the chi frame.The sensor that is made of moving grid and fixed grid is the increment measurement sensor, and along with chi frame moving on blade, moving grid and fixed grid relative induction go out mobile distance, and show by LCDs.This sensor has the absolute measurement characteristic in a pitch, the measurement range of general measurer is often greater than 1 pitch holding grid, so it is measured and the locus is not absolute measurement one to one, but can only adopt the relative measurement of increment measurement.
For realizing absolute measurement, application number has proposed a kind of absolute angle measured sensor scheme for 200710050658.3 patent provides a kind of " the absolute type circle capacitor grid transducer measurement mechanism that is used for Absolute position measurement ".By analysis, above-mentioned patent has following problem:
1, problem is " circle holds grid and contains a rough segmentation sensor and a segmentation sensor; segmentation sensor pitch score value is greater than two resolution of rough segmentation sensor " of proposition in its claim 1, the pitch numerical value that does not have clear and definite rough segmentation sensor, when the pitch number of rough segmentation sensor greater than for the moment, said apparatus will lose the absolute measurement function when 360 ° of work.
2, be problematic in that " thick, segmentation sensor has common leading zero's " that its claim 1 proposes, on sensor production, be difficult to realize, especially when segmentation sensor pitch quantity is big, to more be difficult to make, the consistance of technical target of the product when more being difficult to guarantee batch making, product are difficult to produce in batches.In addition present incremental capacitance displacement transducer application-specific integrated circuit (microprocessor), because its receiving pole signal adopts the asymmetric of differential operational amplifier, " even thick, segmentation sensor has common leading zero's ", make physical location align, the phase data that is drawn can not be zero yet, therefore being that actual zero point just can't realize herein.The rough segmentation sensor can't carry out location position to the pitch series of segmentation sensor in other words.
3, be problematic in that " between measuring-signal handling part partial volume grid IC that has only a measuring-signal treatment circuit and circle capacitor grid transducer, pair rough segmentation received signal being arranged; the segmentation received signal is carried out gating and is sent to the on-off circuit of signal processing part partial volume grid IC " that its claim 5 proposes, because holding the received signal of grid circuit is the micro voltage signal, wherein common on-off circuit will be introduced powerful undesired signal, to cause the said apparatus can't operate as normal, as adopt high-quality on-off circuit, the price height, the corresponding raising of the cost of manufacture of this device does not reach the purpose that reduces cost.
In sum, the patent of invention of " the absolute type circle capacitor grid transducer measurement mechanism that is used for Absolute position measurement " can't be implemented basically.
(3) summary of the invention:
At the above-mentioned weak point that is used for the absolute type circle capacitor grid transducer measurement mechanism of Absolute position measurement, the objective of the invention is to design a kind of circumference to object, angle (arc) degree, the capacitance measuring sensor device of high-acruracy survey is carried out in the absolute position of straight line.
Can realize the capacitance measuring sensor device of the absolute position of above-mentioned purpose, be based on traditional incremental capacitance sensor, introduce microprocessor technology, comprise capacitor grid transducer, the measuring-signal processor, data processor and display, employing has the capacitor grid transducer of the operation interval of absolute measurement function and makes calibration sensor (for containing the sensor of one or more levels demarcation, the sensor of demarcating also can adopt other to have the sensor of absolute measurement function, as resistance scale etc.), common increment capacitor grid transducer is made the survey sensor (score value of survey sensor pitch is more than or equal to calibration sensor) of position measurement, and with the memory electronic component phase value and the phase differential of calibration sensor and survey sensor are remembered, be used for determining the counting zero point of measurement, the operation interval that has the absolute measurement function with calibration sensor is demarcated the pitch sequence location of survey sensor and is made it also have the Absolute position measurement function, and with microprocessor the measurement data of device is revised, obtain high precision measuring data.
According to the principle of work of incremental capacitance sensor, in a pitch of sensor, have object space absolute measurement function, promptly there is relation one to one the geometric position of its measurement data and object.But survey sensor is made up of a plurality of pitches, wants to make the data of whole measurement range all with the geometric position corresponding relation to be arranged, and just must know the numbering of each pitch of survey sensor.The present invention just utilizes one to be operated in calibration sensor in the pitch or other has the sensor of absolute measurement function, as resistance scale etc., another pitch sequence location as the survey sensor of object position measurement is demarcated one to one, so this survey sensor just has the absolute measurement function of gamut.
In order to realize the staking-out work of calibration sensor, at first to determine the reference position of calibration sensor and survey sensor and the alternate position spike between them to survey sensor pitch sequence.We take out the sensor output ISN of calibration sensor to the survey sensor reference position respectively with microprocessor for this reason, and with the memory electronic component it is remembered, calculate their phase value and phase differential again by microprocessor, determine the initial zero-bit of position measurement.
The output data that the object absolute position has been arranged, by microprocessor error amount is revised one by one with normal data, just can obtain high-precision measurement data, its measuring accuracy is only relevant with variation in the indicating value with the resolution of the measuring accuracy of standard utensil, survey sensor.
Can't carry out timing signal to the pitch sequence of survey sensor to the specific coding data of a calibration sensor greatly at the work range, can adopt multistage calibration sensor that it is demarcated successively.Because the output data surplus capacity of a pitch is very big, the measuring error of calibration sensor and middle mechanical drive error can be eliminated by the data processing of microprocessor, can not influence measuring accuracy.
According to the object circumference, angle (arc) degree, the measurement purposes difference of straight line, the capacitance measuring sensor device structure of absolute position of the present invention is different:
1, as the present invention of absolute circumference position measurement, described capacitor grid transducer contains one or more levels calibration sensor and a survey sensor for circle capacitor grid transducer, circle capacitor grid transducer; When survey sensor and calibration sensor all have only a pitch in 360 degree, during therebetween with the mechanical component connection of a rated transformation ratio, can form the counting assembly of a specific coding.
2, as the present invention of absolute angle (arc) degree position measurement, described capacitor grid transducer contains an one-level circle and holds grid calibration sensor and a flexible hinge appearance grid survey sensor.
Described circle appearance grid calibration sensor is installed in flexible hinge to be held on the rotating shaft concentric position of grid survey sensor.
3, the present invention who measures as absolute linear position, described capacitor grid transducer contains one or more levels an appearance grid calibration sensor and a line measurement sensor.
Described appearance grid calibration sensor can adopt circle to hold the grid calibration sensor, and circle holds the grid calibration sensor and adopts gear to be connected with kinds of drive such as tooth bar, traction rope, steel band or friction pulleys with the line measurement sensor.
In the capacitance measuring sensor device of absolute position of the present invention, used round capacitor grid transducer can adopt two reflective structures that contain two sensors, be to have on the fixed grid plate, be provided with demarcation repeller, measurement repeller, screening electrode with the corresponding projected position of emitter, receiving pole on the moving grid plate with plate concentric the demarcation emitter corresponding and demarcation receiving pole and measurement emitter and the measurement receiving pole corresponding with survey sensor with calibration sensor.
Or the circle capacitor grid transducer is three transmission-type structures that contain two sensors, be to have on the emitter with the concentric calibration sensor corresponding of plate to launch grid and the survey sensor emission grid corresponding with survey sensor with calibration sensor, the projected position corresponding with emitter is provided with calibration sensor and receives grid and survey sensor reception grid on the dash receiver, offers on the shielded partitions and calibration sensor reception grid and survey sensor reception corresponding calibration sensor transmission window of grid and survey sensor transmission window.
Eight tunnel actuator electrical signals of calibration sensor described in the present invention and survey sensor are provided by same appearance grid IC, the receiving pole signal Processing can be included among the described appearance grid IC or in different appearance grid IC, but the oscillation frequency of these different appearance grid IC is synchronous.
The measuring error of described sensor is handled by the single-chip microcomputer finishing, to reach high measurement accuracy.
The phase error of calibration sensor and survey sensor is handled by single-chip microcomputer, to determine the detection zero point of sensor.
Can't carry out timing signal to the pitch sequence of survey sensor to the specific coding data of a calibration sensor greatly at the work range, can adopt multistage calibration sensor that it is demarcated successively.Therefore when wide range is worked, can increase calibration sensor quantity, demarcate the pitch sequence location of the calibration sensor of upper level successively, and send its data to data processor.Because the output data surplus capacity of a pitch is very big, the measuring error of calibration sensor and middle mechanical drive error can be eliminated by the data processing of microprocessor, can not influence measuring accuracy.
When wide range was worked, calibration sensor was as adopting round capacitor grid transducer, and then round capacitor grid transducer is done multi-turn work, should dispose the metering circle and hold the device that the grid calibration sensor is rotated the number of turns and its data sent to data processor.
Data processor among the present invention contains I/O, RAM, ROM, the microprocessor of CPU, the pitch sequence absolute position that is used to handle the output data of demarcation, survey sensor and accurately calibrates survey sensor with calibration sensor, and the data error of survey sensor revised, carry out the high-acruracy survey of position.
Advantage of the present invention:
1, has absolute measurement function to object space.
2, improved the antijamming capability of sensor.
3, sensor can interruptedly supplying power, reduces energy consumption.
4, can revise the measuring error of sensor, improve measuring accuracy.
(4) description of drawings:
Fig. 1 is the principle of work synoptic diagram of circle capacitor grid transducer in one embodiment of the present invention.
Fig. 2 is the structural representation of circle capacitor grid transducer in Fig. 1 embodiment.
Fig. 3 is an A-A cut-away view among Fig. 2.
Fig. 4 is the structural representation of another embodiment of the present invention.
Fig. 5 is the left view of Fig. 4 embodiment.
Fig. 6 is a B-B cut-away view in Fig. 4 embodiment.
Fig. 7 is the structural representation of the third embodiment of the present invention.
Fig. 8 is the vertical view of Fig. 7 embodiment.
Fig. 9 is a C-C cut-away view in Fig. 7 embodiment.
Figure 10 is the structural representation of the 4th kind of embodiment of the present invention.
Figure 11 is a circuit diagram of the present invention.
Figure 12 is a circuit diagram of the present invention.
Figure 13 is a circuit diagram of the present invention.
Figure 14 is a circuit diagram of the present invention.
Figure number sign: 1, justify capacitor grid transducer; 2, circle holds the grid calibration sensor; 3, flexible hinge holds the grid survey sensor; 4, emitter; 5, calibration sensor emission grid; 6, survey sensor emission grid; 7, receiving pole; 8, calibration sensor receives grid; 9, survey sensor receives grid; 10, shielded partitions; 11, calibration sensor transmission window; 12, axis; 13, survey sensor transmission window; 14, chuck; 15, center bolt; 16, nut; 17, rotating shaft; 18, shell fragment; 19, tooth bar; 20, water meter shell; 21, moving grid; 22, fixed grid; 23, magnetic coupling spindle.
(5) embodiment:
The capacitance measuring sensor device of absolute position of the present invention comprises capacitor grid transducer, the measuring-signal processor, data processor and display, capacitor grid transducer is to justify capacitor grid transducer 1, the calibration sensor that to include one 360 degree circumference be a pitch and pitch numerical value are greater than 1 survey sensor, and circle capacitor grid transducer 1 is an optimised form with three transmission-type structures:
As shown in Figure 1, circle capacitor grid transducer 1 is by parallel, coaxial annular emission level 4, circular receiving pole 7 and circular screen fraud dividing plate 10 constitute, emitter 4, receiving pole 7 fixedly installs, screen fraud dividing plate 10 is in emitter 4, drive rotation by axis 12 between the receiving pole 7, be provided with two kinds of emission grids on the emitter 4 with one heart, the calibration sensor of center is launched grid 5 and is launched grid 6 around the survey sensor of calibration sensor emission grid 5,360 degree circumference of calibration sensor emission grid 5 are a pitch, the score value of the pitch of survey sensor emission grid 6 is greater than calibration sensor emission grid 5, the calibration sensor corresponding with calibration sensor emission grid 5 and survey sensor emission grid 6 is set with one heart on the receiving pole 7 receives grid 8 and survey sensor reception grid 9, offer calibration sensor transmission window 11 and survey sensor transmission window 13 on the screen fraud dividing plate 10, respectively corresponding calibration sensor emission, receive grid 5,8 and survey sensor emission, receive grid 6,9, calibration sensor transmission window 11 is offered by a pitch requirement, and survey sensor transmission window 13 is offered by the pitch of survey sensor emission grid.Circle capacitor grid transducer 1 usefulness memory electronic component is remembered the phase value and the phase differential of calibration sensor and survey sensor, is used for determining the counting zero point of measurement.
Above-mentioned round capacitor grid transducer 1 (containing calibration sensor and survey sensor) can directly apply to measure on the interior bevel protractor of 360 ° of scopes, but at the measurement that surpasses a circumference, the round capacitor grid transducer 1 of above-mentioned three transmission-type structures also need dispose the secondary calibration sensor that a memory prime calibration sensor is rotated the number of turns, and the secondary calibration sensor adopts the straight line capacitor grid transducer that has absolute measurement in the pitch.Its unitized construction such as Fig. 2, shown in Figure 3: emitter 4 is relative with receiving pole 7, keep gap and fixing between emitter 4 and the receiving pole 7 by center bolt 15, two chucks 14 are from emitter 4 and the relative coaxial package in receiving pole 7 outsides, clamping in the gap of screen fraud dividing plate 10 between emitter 4 and receiving pole 7 of two chucks 14 in conjunction with end face, two chucks 14 can rotate around emitter 4 and receiving pole 7, drive screen fraud dividing plate 10 and rotate between emitter 4 and receiving pole 7.Calculate screen fraud dividing plate 10 and rotate the secondary calibration sensor of the number of turns by screw mandrel (being center bolt 15), nut 16 transmissions are connected with screen fraud dividing plate 10, nut 16 is followed a side chuck 14 and is rotated synchronously and can move axially on center bolt 15, axial moving grid 21 is connected on the nut 16, corresponding with moving grid 21 positions, in these side chuck 14 internal fixation axial fixed grid 22 is set, because the axial internal clearance of nut 16 is little, therefore the secondary calibration sensor of described moving grid 21 and fixed grid 22 compositions can be made into the function with absolute measurement, thereby the rotation number of turns of screen fraud dividing plate 10 is demarcated.
When survey sensor and calibration sensor in the circle capacitor grid transducer 1 all have only a pitch in 360 degree, connect and compose the counting assembly of a specific coding therebetween with the mechanical component of a rated transformation ratio.
For example long-range water meter counting assembly, as shown in figure 10, the counter wheel that the input shaft of long-range water meter counting assembly passes water meter shell 20 and water meter is connected, and is connected with a round capacitor grid transducer 1 by two groups of gears, the no-load voltage ratio of every group of gear is 1: 10, and two groups no-load voltage ratio was 1: 100; Next stage also is 1: 100 successively, connects a round capacitor grid transducer 1 again, and the two-stage no-load voltage ratio forms the counter of 1: 10000 no-load voltage ratio.If input shaft is connected on one ton of counter wheel of water meter, above-mentioned long-range water meter counting assembly can measure 10,000 tons of water.This long-range water meter counting assembly is exported specific coding data, is beneficial to the remote transmission of data of water meter.
Described input shaft can use magnetic coupling spindle 23, is convenient to counter and realizes sealing fully.
Measurement for the small sway amount of low-angle (radian), the calibration sensor of capacitor grid transducer of the present invention is that the circle of absolute measurement holds grid calibration sensor 2 and a flexible hinge appearance grid survey sensor 3 in the pitch, as Fig. 4, Fig. 5, shown in Figure 6: flexible hinge holds the rotating shaft 17 of grid survey sensor 3 to be supported by at least two shell fragments arranged in a crossed manner 18, shell fragment 16 is arranged at the opening part of fixed frame, the centre of gyration of rotating shaft 17 is the intersection point of intersection shell fragment 18, the swing arm that connects in the rotating shaft 17 is stretched in the framework, the swing arm end is provided with moving grid 21, the fixed grid 22 corresponding with moving grid 21 is fixed on the framework, described moving grid 21 and fixed grid 22 form the survey sensor that countershaft 17 oscillating quantities are measured, and the circle that this survey sensor is demarcated holds the then coaxial side that is installed in rotating shaft 17 of grid calibration sensor 2 (three chip architectures that only contain one group of sensor).
Absolute measurement for big stroke straight-line displacement, the capacitance measuring sensor device of absolute position of the present invention comprises a straight line and holds the grid survey sensor, circle appearance grid calibration sensor 2 and the straight line that the circle appearance grid calibration sensor 2 rotation number of turns are demarcated hold the grid calibration sensor, as Fig. 7, Fig. 8, shown in Figure 9: a movable body is engaged on the rod member, the whole process of rod member is provided with fixed grid 22, with fixed grid 22 corresponding positions moving grid 21 is set on the movable body, described fixed grid 22 and moving grid 21 constitute straight line and hold the grid survey sensor, circle holds grid calibration sensor 2 (three chip architectures that only contain one group of sensor) and is located in the movable body, hold the grid survey sensor by tooth bar 19 with straight line, gear pair connects, tooth bar 19 is set on the whole process of rod member, be located on the movable body with tooth bar 19 meshed gears, circle holds 2 of grid calibration sensor and the coaxial setting of gear (shielded partitions 10 that circle holds grid calibration sensor 2 is connected with gear shaft is coaxial); Straight line holds the grid calibration sensor and holds grid calibration sensor 2 by center bolt 15 (coaxial with gear shaft), 16 secondary connections of nut with circle, nut 16 rotates extremely synchronously and moves axially on screw mandrel with the moving grid that circle holds grid calibration sensor 2, straight line holds the moving grid 21 of grid calibration sensor to be located on the nut 16, holds the fixed grid 22 (shielded partitions 10 of holding grid calibration sensor 2 with circle is rotated synchronously) of grid calibration sensor with straight line and does relative motion to detect the number of turns that the round shielded partitions 10 of holding grid calibration sensor 2 is rotated.
Eight tunnel actuator electrical signals of described calibration sensor and survey sensor are provided by same appearance grid IC, accept utmost point signal Processing and can be included among the described appearance grid IC or in different appearance grid IC, but the oscillation frequency of these different appearance grid IC is synchronous.
The measuring error of described calibration sensor and survey sensor is handled by the single-chip microcomputer finishing, to reach high measurement accuracy; The phase error of calibration sensor and survey sensor is handled by single-chip microcomputer, to determine the detection zero point of sensor.
Data processor contains I/O, RAM, ROM, the microprocessor of CPU, be used for handling and demarcate, the output data of survey sensor also accurately calibrates the pitch sequence absolute position of survey sensor with calibration sensor, and the data error of survey sensor is revised, and carries out the high-acruracy survey of position.
The circuit that the present invention relates to:
As shown in figure 11, this circuit is for realizing calibration sensor and survey sensor processing capacity with a chip, and it comprises one eight road drive circuit and two-way receiving pole treatment circuit.
As shown in figure 12, this circuit is that two chips are realized calibration sensor and survey sensor processing capacity, two chip oscillate frequencies are supplied with by an outside oscillation source, guarantee synchronously, shared one of them eight road drive circuit of calibration sensor and survey sensor, two-way receiving pole are accepted by two IC circuit respectively.
As shown in figure 13, this circuit is that two chips are independently realized calibration sensor and survey sensor processing capacity.
As shown in figure 14, this circuit is for there being the two-stage Calibration Circuit.
Claims (16)
1, the capacitance measuring sensor device of absolute position, comprise capacitor grid transducer, the measuring-signal processor, data processor and display, it is characterized in that: capacitor grid transducer contains one or more levels calibration sensor and a survey sensor, and with the memory electronic component phase value and the phase differential of calibration sensor and survey sensor are remembered, be used for the counting zero point of determine measuring; Described calibration sensor has the absolute measurement function or other has the sensor of absolute measurement function at effective operation interval, and as resistance scale etc., the score value of survey sensor pitch is more than or equal to calibration sensor.
2, the capacitance measuring sensor device of absolute position according to claim 1, it is characterized in that measurement mechanism for absolute circumference position measurement, described capacitor grid transducer is circle capacitor grid transducer (1), and circle capacitor grid transducer (1) contains one or more levels calibration sensor and a survey sensor; When survey sensor and calibration sensor all have only a pitch in 360 degree, connect and compose the counting assembly of a specific coding therebetween with the mechanical component of a rated transformation ratio.
3, the capacitance measuring sensor device of absolute position according to claim 1, it is characterized in that the measurement mechanism for the position measurement of absolute angle (arc) degree, described capacitor grid transducer contains an one-level circle and holds grid calibration sensor (2) and flexible hinge appearance grid survey sensors (3).
4, the capacitance measuring sensor device of absolute position according to claim 3 is characterized in that: it is concentric with the rotating shaft that flexible hinge holds grid survey sensors (3) that described circle holds grid calibration sensor (2).
5, the capacitance measuring sensor device of absolute position according to claim 1 is characterized in that the measurement mechanism for absolute linear position measurement, and described capacitor grid transducer contains one or more levels an appearance grid calibration sensor and a line measurement sensor.
6, the capacitance measuring sensor device of absolute position according to claim 5, it is characterized in that: described appearance grid calibration sensor is held grid calibration sensor (2) for circle, and it adopts gear to be connected with kinds of drive such as tooth bar, traction rope, steel band or friction pulleys with the line measurement sensor.
7, according to the capacitance measuring sensor device of any described absolute position in the claim 1～6, it is characterized in that: eight tunnel actuator electrical signals of described calibration sensor and survey sensor are provided by same appearance grid IC, accept utmost point signal Processing and can be included among the described appearance grid IC or in different appearance grid IC, but the oscillation frequency of these different appearance grid IC is synchronous.
8, according to the capacitance measuring sensor device of any described absolute position in the claim 1～6, it is characterized in that: the measuring error of described calibration sensor and survey sensor is handled by the single-chip microcomputer finishing, to reach high measurement accuracy.
9, according to the capacitance measuring sensor device of any described absolute position in the claim 1～6, it is characterized in that: the phase error of calibration sensor and survey sensor is handled by single-chip microcomputer, to determine the detection zero point of sensor.
10, according to the capacitance measuring sensor device of the described absolute position of claim 2 claim 6, it is characterized in that: described round capacitor grid transducer (1) is two reflective structures.
11, the capacitance measuring sensor device of absolute position according to claim 10, it is characterized in that described two reflective round capacitor grid transducer structures are: have with the concentric demarcation emitter corresponding of plate on the fixed grid plate and demarcate receiving pole and with the corresponding measurement emitter of survey sensor with measure receiving pole, be provided with emitter, projected position that receiving pole is corresponding on the moving grid plate and demarcate repeller, measurement repeller, screening electrode with calibration sensor.
12, the capacitance measuring sensor device of absolute position according to claim 2 is characterized in that: described round capacitor grid transducer (1) is three transmission-type structures.
13, the capacitance measuring sensor device of absolute position according to claim 12, it is characterized in that described three transmission-types circle capacitor grid transducer (1) structure is: have on the emitter (4) with the concentric calibration sensor corresponding of plate and launch grid (5) and the survey sensor emission grid (6) corresponding with survey sensor with calibration sensor, receiver stage (7) is gone up the projected position corresponding with emitter (4) and is provided with calibration sensor reception grid (8) and survey sensor reception grid (9), offers on the shielded partitions (10) and calibration sensor emission grid (5) and survey sensor emission grid (6) corresponding calibration sensor transmission windows (11) and survey sensor transmission window (13).
14, the capacitance measuring sensor device of absolute position according to claim 1, it is characterized in that: when wide range is worked, can increase calibration sensor quantity, demarcate the pitch sequence location of the calibration sensor of upper level successively, and send its data to data processor.
15, the capacitance measuring sensor device of absolute position according to claim 2, it is characterized in that: when multi-turn work and wide range work, circle capacitor grid transducer (1) has the metering circle to hold the device that grid calibration sensor (2) are rotated the number of turns and its data sent to the data device.
16, according to the capacitance measuring sensor device of any described absolute position in the claim 1～6, it is characterized in that: data processor contains I/O, RAM, ROM, the microprocessor of CPU is used for handle demarcating, and the output data of survey sensor also accurately calibrates the pitch sequence absolute position of survey sensor with calibration sensor, and the data error of survey sensor revised, carry out the high-acruracy survey of position.
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| CNA2009101140817A CN101556170A (en) | 2009-05-18 | 2009-05-18 | Capacitance measuring sensor device in absolute position |
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| CNA2009101140817A CN101556170A (en) | 2009-05-18 | 2009-05-18 | Capacitance measuring sensor device in absolute position |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101839727A (en) * | 2010-05-21 | 2010-09-22 | 钟胜 | Absolute position measuring digital display calliper |
| CN101881586A (en) * | 2010-06-04 | 2010-11-10 | 钟胜 | Absolute position measurement digital display micrometer |
| CN102853755A (en) * | 2012-09-29 | 2013-01-02 | 钟胜 | Absolute measurement linear micrometer produced by adopting capacitance sensor |
| CN108362206A (en) * | 2018-02-13 | 2018-08-03 | 江门市银象科技有限公司 | A kind of non-contact displacement transducer based on capacitive grating |
| WO2018205260A1 (en) * | 2017-05-12 | 2018-11-15 | Texas Instruments Incorporated | Capacitive-sensing rotary encoders and methods |
| US11060889B2 (en) | 2017-05-12 | 2021-07-13 | Texas Instruments Incorporated | Methods and apparatus to determine a position of a rotatable shaft of a motor |
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2009
- 2009-05-18 CN CNA2009101140817A patent/CN101556170A/en active Pending
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101839727A (en) * | 2010-05-21 | 2010-09-22 | 钟胜 | Absolute position measuring digital display calliper |
| CN101881586A (en) * | 2010-06-04 | 2010-11-10 | 钟胜 | Absolute position measurement digital display micrometer |
| CN102853755A (en) * | 2012-09-29 | 2013-01-02 | 钟胜 | Absolute measurement linear micrometer produced by adopting capacitance sensor |
| CN102853755B (en) * | 2012-09-29 | 2016-03-16 | 桂林市晶准测控技术有限公司 | Adopt the absolute measurement straight line micrometer that capacitor grid transducer makes |
| WO2018205260A1 (en) * | 2017-05-12 | 2018-11-15 | Texas Instruments Incorporated | Capacitive-sensing rotary encoders and methods |
| US10684143B2 (en) | 2017-05-12 | 2020-06-16 | Texas Instruments Incorporated | Capacitive-sensing rotary encoders and methods |
| US11060889B2 (en) | 2017-05-12 | 2021-07-13 | Texas Instruments Incorporated | Methods and apparatus to determine a position of a rotatable shaft of a motor |
| US11519755B2 (en) | 2017-05-12 | 2022-12-06 | Texas Instruments Incorporated | Capacitive-sensing rotary encoders and methods |
| US11933645B2 (en) | 2017-05-12 | 2024-03-19 | Texas Instruments Incorporated | Methods and apparatus to determine a position of a rotatable shaft of a motor |
| CN108362206A (en) * | 2018-02-13 | 2018-08-03 | 江门市银象科技有限公司 | A kind of non-contact displacement transducer based on capacitive grating |
| CN108362206B (en) * | 2018-02-13 | 2024-04-09 | 哈工科讯(沈阳)工业技术研究院有限公司 | Non-contact displacement sensor based on capacitive grating |
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