CN101552551B - Radio frequency ion power supply - Google Patents
Radio frequency ion power supply Download PDFInfo
- Publication number
- CN101552551B CN101552551B CN2009101432656A CN200910143265A CN101552551B CN 101552551 B CN101552551 B CN 101552551B CN 2009101432656 A CN2009101432656 A CN 2009101432656A CN 200910143265 A CN200910143265 A CN 200910143265A CN 101552551 B CN101552551 B CN 101552551B
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- Prior art keywords
- circuit
- power supply
- self
- high frequency
- radio frequency
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Abstract
The invention relates to power supply technical field, concretely a radio frequency ion power supply. The invention includes tunable electric power circuit, push-pull amplification self-excited oscillation circuit and lotus-combined output circuit. The aforementioned tunable electric power circuit with a charger unit cleaner jointed at the lead-out takes adjustment on power and electric tension, and the other end of the charger unit cleaner jointed with the push-pull amplification self-excited oscillation circuit through voltage-stabilizing wave filter circuit, the other end of the aforementioned push-pull amplification self-excited oscillation circuit combines with the lotus-combined output circuit whose other end connects with equipment load. The semaphore generated from the equipment load feeds back to the self-excited oscillation circuit. The push-pull amplification self-excited oscillation circuit implements impedance match between the power supply and equipment, the radio frequency of power supply is high, the invention starts to working without ignition device, and the accessorial charger unit cleaner totally eliminates the adhesion caused by the static during the work.
Description
Technical field:
The present invention relates to a kind of power technique fields, a kind of specifically radio frequency ion power supply.
Background technology:
Existing radio-frequency power supply technology adopts the frequency stabilization of independent-excited quartz crystal, and cermet tetrode FU-100F is adopted in power output.Adopt matching network between electron tube and the cable.Between cable and the load, realize coupling by matching box.Because it is to finish coupling between the load by installing matching box between power supply and the load additional fully that the work of power supply is connected with the coupling of load.The performance quality of coupling directly have influence on plated film in the production quality, since in the equipment electrode parameter constantly change and cause matching performance restive, operative employee's operation easier is increased, product quality also is difficult to be guaranteed simultaneously.
Summary of the invention:
Purpose of the present invention is intended to improve the deficiency of background technology and a kind of Automatic Control is provided, and can effectively improve the radio frequency ion power supply of coupling certainly of product processing quality.
The present invention adopts following technical scheme:
A kind of radio frequency ion power supply, comprise the regulated power supply circuit, recommend the amplification self-maintained circuit, filter circuit of pressure-stabilizing, lotus root is closed output circuit, described regulated power supply circuit is to power, voltage is regulated, the output of this regulated power supply circuit is connected with electrostatic precipitator, the other end of this electrostatic precipitator amplifies self-maintained circuit and is connected with recommending by filter circuit of pressure-stabilizing, this other end of recommending the amplification self-maintained circuit closes output circuit with lotus root and is connected, this lotus root is closed another termination apparatus of load of output circuit, and the signal feedback that this apparatus of load sends is given and recommended the amplification self-maintained circuit.
The present invention who adopts technique scheme compared with prior art, the set amplification self-maintained circuit of recommending provides positive feedback signal by electric capacity, and carries out power amplification by electron tube, realizes the impedance matching of power supply and equipment room; The radio frequency crest voltage height of this power supply, work beginning do not need igniter, and can bombard under the higher vacuum degree and under high power, and the sticking wafer of coating clamp improves a lot to the plated film efficient of high frequency wafer; The electrostatic precipitator of setting up is eliminated in the course of work fully because the adhesion that the influence of static causes.
As the further improvement of technical solution of the present invention, described lotus root is closed and exports high-frequency signal in the output circuit, its output winding (L
2) and apparatus of load between produce frequency-selective network, realize the impedance matching of power supply and equipment.
As the further improvement of technical solution of the present invention, amplify self-maintained circuit and be connected with recommending again after described electrostatic precipitator and the regulated power supply parallel connection.
As the further improvement of technical solution of the present invention, described recommending in the amplification self-maintained circuit is provided with two high frequency power electron tubes, is respectively the first high frequency power electron tube (Q
1) and the second high frequency power electron tube (Q
2), the described first high frequency power electron tube (Q
1) and the second high frequency power electron tube (Q
2) anode between be serially connected with inductance coil (L
1), this inductance coil (L
1) respectively with electric capacity (C
1) and electric capacity (C
2) an end parallel connection, this electric capacity (C
1) other end and inductance (L
3) and meet the back and the first high frequency power electron tube (Q
1) grid connect described electric capacity (C
2) the other end and inductance (L
4) and meet the back and the second high frequency power electron tube (Q
2) grid connect.
Description of drawings:
Fig. 1 is a circuit block diagram of the present invention.
Fig. 2 is circuit theory diagrams of the present invention.
Embodiment:
Below in conjunction with drawings and Examples in detail the present invention is described in detail:
A kind of radio frequency ion power supply referring to accompanying drawing 1 and accompanying drawing 2, by regulated power supply circuit 1, is recommended and is amplified self-maintained circuit 2, and lotus root is closed output circuit 3, apparatus of load 4, and electrostatic precipitator 5, filter circuit of pressure-stabilizing 6, output cable 7, electric current indicating circuit 8 is formed.
Regulated power supply circuit 1 pair of power, voltage are regulated, the output of regulated power supply circuit 1 is connected with electrostatic precipitator 5 and electric current indicating circuit 8, the other end of electrostatic precipitator 5 amplifies self-maintained circuit 2 and is connected with recommending, recommend the other end that amplifies self-maintained circuit 2 by filter circuit of pressure-stabilizing 6 with recommend amplification self-maintained circuit 2 and be connected, the other end that lotus root is closed output circuit 3 connects the top electrode of apparatus of load 4 by output cable 7, and the signal feedback that apparatus of load 4 sends is given to recommend and amplified self-maintained circuit 3.
Lotus root is closed in the output circuit 3 and exports high-frequency signal, its output winding L
2And produce frequency-selective network between the apparatus of load 4, realize the impedance matching of power supply and equipment.
Capacitor C in the electrostatic precipitator 5
7With amplify self-maintained circuit 2 and be connected with recommending again after 1 parallel connection of regulated power supply circuit.
Recommend in the amplification self-maintained circuit 2 and be provided with two high frequency power electron tubes, be respectively the first high frequency power electron tube Q
1With the second high frequency power electron tube Q
2, the first high frequency power electron tube Q
1With the second high frequency power electron tube Q
2Anode between be serially connected with inductance coil L
1, inductance coil L
1Respectively with capacitor C
1And capacitor C
2An end parallel connection, capacitor C
1The other end and inductance L
3And connect the back with the first high frequency power electron tube Q
1Grid connect capacitor C
2The other end and inductance L
4And connect the back with the second high frequency power electron tube Q
2Grid connect.
Recommend and amplify self-maintained circuit 2, by capacitor C
1And C
2Positive feedback signal is provided, and by the first high frequency power electron tube Q
1With the second high frequency power electron tube Q
2Carry out power amplification, realize the impedance matching of power supply and equipment room; The radio frequency crest voltage height of this power supply, work beginning do not need igniter, and can bombard under the higher vacuum degree and under high power, and the sticking wafer of coating clamp improves a lot to the plated film efficient of high frequency wafer; The electrostatic precipitator 5 of setting up is eliminated in the course of work fully because the adhesion that the influence of static causes.
This enforcement embodiment fitting operation is simple, easy to use, connect power supply (220V), with power output private cable this acc power output socket and load are connected, (the external control semaphore request is one group of normally opened contact by external control signal input jack input control signal in work control, closure is started working, disconnection quits work), power of electromagnetic valve line and gas supply electromagnetic valve (～220V) connect, then mains switch is placed the position of ON, functional switch places automatically, power adjustments treats that can adjust power adjustments knob to appropriate location according to actual needs again after external control input service signal is started working gets final product to the 150V.
Present embodiment is provided with manual test button, promptly presses hand push button and start working when functional switch places manual position, unclamps then to quit work, and this button only uses when maintenance is tested as the maintenance personal; The present embodiment running current is 0-320mA (ammeter indication), generally should not surpass 340mA, otherwise will influence the working life of equipment.
Claims (4)
1. radio frequency ion power supply, comprise the regulated power supply circuit, recommend the amplification self-maintained circuit, filter circuit of pressure-stabilizing, the coupling output circuit, it is characterized in that: described regulated power supply circuit is to power, voltage is regulated, the output of this regulated power supply circuit is connected with electrostatic precipitator, the other end of this electrostatic precipitator amplifies self-maintained circuit and is connected with recommending by filter circuit of pressure-stabilizing, this is recommended the other end that amplifies self-maintained circuit and is connected with the coupling output circuit, another termination apparatus of load of this coupling output circuit, the signal feedback that this apparatus of load sends are given and are recommended the amplification self-maintained circuit.
2. radio frequency ion power supply according to claim 1 is characterized in that: export high-frequency signal in the described coupling output circuit, its output winding (L
2) and apparatus of load between produce frequency-selective network, realize the impedance matching of power supply and equipment.
3. radio frequency ion power supply according to claim 1 is characterized in that: amplify self-maintained circuit and be connected with recommending again after the electric capacity in the described electrostatic precipitator and the parallel connection of regulated power supply circuit.
4. radio frequency ion power supply according to claim 1 is characterized in that: described recommending in the amplification self-maintained circuit is provided with two high frequency power electron tubes, is respectively the first high frequency power electron tube (Q
1) and the second high frequency power electron tube (Q
2), the described first high frequency power electron tube (Q
1) and the second high frequency power electron tube (Q
2) anode between be serially connected with the first inductance coil (L
1), this first inductance coil (L
1) respectively with the first electric capacity (C
1) and the second electric capacity (C
2) an end connect this first electric capacity (C
1) other end and the 5th inductance (L
5) and the second high frequency power electron tube (Q
2) grid connect the described second electric capacity (C
2) the other end and the 4th inductance (L
4) and the first high frequency power electron tube (Q
1) grid connect.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101432656A CN101552551B (en) | 2009-05-22 | 2009-05-22 | Radio frequency ion power supply |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101432656A CN101552551B (en) | 2009-05-22 | 2009-05-22 | Radio frequency ion power supply |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101552551A CN101552551A (en) | 2009-10-07 |
| CN101552551B true CN101552551B (en) | 2011-02-02 |
Family
ID=41156583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009101432656A Expired - Fee Related CN101552551B (en) | 2009-05-22 | 2009-05-22 | Radio frequency ion power supply |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101552551B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105577022A (en) * | 2014-10-10 | 2016-05-11 | 深圳市陶驰科技有限公司 | Power supply circuit of gas ionization tube |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7498571B2 (en) * | 2004-06-21 | 2009-03-03 | Thermo Finnigan Llc | RF power supply for a mass spectrometer |
| CN101383218A (en) * | 2008-06-26 | 2009-03-11 | 复旦大学 | Radio frequency electric power for generating four-pole electric field |
| CN201414070Y (en) * | 2009-05-22 | 2010-02-24 | 唐山海通电子有限公司 | Radio frequency ion power supply |
-
2009
- 2009-05-22 CN CN2009101432656A patent/CN101552551B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7498571B2 (en) * | 2004-06-21 | 2009-03-03 | Thermo Finnigan Llc | RF power supply for a mass spectrometer |
| CN101383218A (en) * | 2008-06-26 | 2009-03-11 | 复旦大学 | Radio frequency electric power for generating four-pole electric field |
| CN201414070Y (en) * | 2009-05-22 | 2010-02-24 | 唐山海通电子有限公司 | Radio frequency ion power supply |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101552551A (en) | 2009-10-07 |
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Owner name: TANGSHAN JIBANG ENERGY SAVING TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: TANGSHAN HITONE ELECTRONICS CO., LTD. Effective date: 20141125 |
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| C41 | Transfer of patent application or patent right or utility model | ||
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Free format text: CORRECT: ADDRESS; FROM: 063500 TANGSHAN, HEBEI PROVINCE TO: 063020 TANGSHAN, HEBEI PROVINCE |
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| TR01 | Transfer of patent right |
Effective date of registration: 20141125 Address after: 063020, B building, block 5, Tangshan City hi tech Zone, Hebei Patentee after: Tangshan Jibang Energy Technology Co. Ltd. Address before: 063500 Luannan Tangshan City County of Hebei Province town of Ben Xihuan Road Songhe Street No. 33 Patentee before: Tangshan Hitone Electronics Co., Ltd. |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110202 Termination date: 20150522 |
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| EXPY | Termination of patent right or utility model |