CN101539519B - Method and apparatus for generating charged excitons in undoped quantum wells by photoexcitation - Google Patents
Method and apparatus for generating charged excitons in undoped quantum wells by photoexcitation Download PDFInfo
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Abstract
Description
技术领域technical field
本发明涉及一种带电激子的生成方法及装置,特别涉及一种用光致激发在非掺杂量子阱中产生带电激子的方法及装置。The invention relates to a method and a device for generating charged excitons, in particular to a method and a device for generating charged excitons in a non-doped quantum well by photo-induced excitation.
背景技术Background technique
硒化锌(ZnSe)和碲化铍(BeTe)都是重要的宽禁带化合物半导体,具有较强的离子性和大的结合能。由二者组成的硒化锌/碲化铍(ZnSe/BeTe)异质结构有很好的结构质量,有低的位错密度和点缺陷,其界面处的晶格失配小于0.5%。ZnSe/BeTe具有一个II型能带结构,使得ZnSe层中受激产生的电子和空穴发生空间分离,并能在ZnSe层中形成二维电子气从而导致带电激子的出现。这些特点使得ZnSe/BeTe II型量子阱(或超晶格)结构成为研究凝聚态现象的很好的候选材料。Both zinc selenide (ZnSe) and beryllium telluride (BeTe) are important wide bandgap compound semiconductors with strong ionicity and large binding energy. The zinc selenide/beryllium telluride (ZnSe/BeTe) heterostructure composed of the two has good structural quality, low dislocation density and point defects, and the lattice mismatch at the interface is less than 0.5%. ZnSe/BeTe has a type II energy band structure, which makes the excited electrons and holes in the ZnSe layer spatially separated, and can form a two-dimensional electron gas in the ZnSe layer, resulting in the appearance of charged excitons. These characteristics make the ZnSe/BeTe II quantum well (or superlattice) structure a good candidate material for studying condensed matter phenomena.
带电激子是凝聚现象的重要形态之一,是理解有意掺杂或无意掺杂结构中涉及自旋态的许多光学过程的重要课题。根据公开的带电激子的生成方法主要有在I型量子阱中通过结构掺杂、无意掺杂结构中的杂质和缺陷以及隧穿粒子注入等。美国学术期刊杂志《PhysicalReview B》(2002年,第65卷,第115310页,“Optical method for the determination of carrierdensity in modulation-doped quantum wells”)公开了结构掺杂方法生成带电激子的制备方法(G.V.Astakhov,et al.,65(2002)115310),但这些杂质离子不仅影响晶体的结构质量还将导致能带结构的变形甚至对量子阱造成影响,同时也因掺杂而使得生长工艺复杂化;另外美国学术期刊杂志《Physical Review B》(1996年,第54卷,第10609页,“Exciton and trion spectral lineshape in the presence of an electron gas in GaAs/AlAs quantum wells”)公开了隧穿粒子注入方法生成带电激子的制备方法(A.Manassen,et al.,54(1996)10609),但由于隧穿粒子注入受势垒层的反射及势垒层中各种缺陷的影响,使带电激子的形成效率受到影响,并且还必须同时使用两个激发光源。Charged excitons are one of the important forms of condensation phenomena and are an important topic for understanding many optical processes involving spin states in intentionally doped or unintentionally doped structures. According to the disclosed methods for generating charged excitons, there are mainly doping through structures in I-type quantum wells, unintentional doping of impurities and defects in structures, and tunneling particle injection. American academic journal "Physical Review B" (2002, volume 65, page 115310, "Optical method for the determination of carrier density in modulation-doped quantum wells") discloses a preparation method for generating charged excitons by a structural doping method ( G.V.Astakhov, et al., 65(2002) 115310), but these impurity ions not only affect the structural quality of the crystal, but also cause the deformation of the energy band structure and even affect the quantum well, and also complicate the growth process due to doping In addition, American academic journal "Physical Review B" (1996, volume 54, page 10609, "Exciton and trion spectral lineshape in the presence of an electron gas in GaAs/AlAs quantum wells") discloses tunneling particle injection method to generate charged excitons (A. Manassen, et al., 54 (1996) 10609), but because the tunneling particle injection is affected by the reflection of the barrier layer and various defects in the barrier layer, the charged excitons The efficiency of particle formation is affected, and two excitation light sources must also be used simultaneously.
发明内容Contents of the invention
为了克服现有技术的缺陷和不足,本发明提出了一种用光致激发在非掺杂量子阱中产生带电激子的方法及装置。In order to overcome the defects and deficiencies of the prior art, the present invention proposes a method and a device for generating charged excitons in non-doped quantum wells by using photoexcitation.
一种用光致激发在非掺杂量子阱中产生带电激子的方法,步骤如下:A method for generating charged excitons in a non-doped quantum well by photoexcitation, the steps are as follows:
1.将硒化锌/碲化铍(ZnSe/BeTe)样品裁剪成长方形晶片,对其表面用丙酮溶液去污、超纯净水冲洗、高纯氮气吹干后,再将样品粘贴在圆形铜片上;1. Cut the zinc selenide/beryllium telluride (ZnSe/BeTe) sample into a rectangular wafer, decontaminate the surface with acetone solution, rinse with ultra-pure water, and dry with high-purity nitrogen, and then paste the sample on a round copper wafer. Chip;
2.将粘贴有硒化锌/碲化铍样品的铜片固定在样品支架上,然后放置于盛有低温液体氦(He)的光低温恒温器中;光低温恒温器与抽气机相连,样品旁装有加热丝及温度探测装置;通过单独调节抽气机的抽速或加热丝中的电流,将样品的温度控制在约1~150K之间;2. Fix the copper sheet pasted with the ZnSe/BeT sample on the sample holder, and then place it in an optical cryostat filled with cryogenic liquid helium (He); the optical cryostat is connected to the air pump, A heating wire and a temperature detection device are installed next to the sample; the temperature of the sample is controlled between about 1-150K by separately adjusting the pumping speed of the aspirator or the current in the heating wire;
3.将能量为2.8~4.0eV、激发密度为0.001~200W/cm2的激光束垂直投射在样品的上表面上;3. Vertically project a laser beam with an energy of 2.8-4.0eV and an excitation density of 0.001-200W/ cm2 on the upper surface of the sample;
4.样品产生的荧光经凸透镜会聚后可经由光纤输出至光谱仪;4. The fluorescence generated by the sample can be output to the spectrometer through the optical fiber after being converged by the convex lens;
5.经光谱仪分光后,由CCD检测器得到带电激子的荧光光谱。5. After being separated by the spectrometer, the fluorescence spectrum of the charged excitons is obtained by the CCD detector.
所述步骤1中的硒化锌/碲化铍(ZnSe/BeTe)样品结构可以是单量子阱,也可以是多量子阱或者是超晶格结构。The zinc selenide/beryllium telluride (ZnSe/BeTe) sample structure in the step 1 can be a single quantum well, multiple quantum wells or a superlattice structure.
所述步骤1中的硒化锌/碲化铍(ZnSe/BeTe)样品中ZnSe量子阱的厚度约为10~80ML。The thickness of the ZnSe quantum well in the zinc selenide/beryllium telluride (ZnSe/BeTe) sample in the step 1 is about 10-80ML.
ML是英文字monolayer的缩写,即分子层。对于BeTe或者ZnSe,1ML约为0.28nm。ML is the abbreviation of the English word monolayer, that is, molecular layer. For BeTe or ZnSe, 1ML is about 0.28nm.
上述方法中盛有液体氦的光低温恒温器内的温度要想达到4.2K之下时需通过抽气机抽气进行调节;温度在4.2K之上时需通过调节加热丝中的电流来控制温度。In the above method, if the temperature in the optical cryostat filled with liquid helium is to reach below 4.2K, it needs to be adjusted by pumping air through an air pump; when the temperature is above 4.2K, it needs to be controlled by adjusting the current in the heating wire temperature.
本发明所用样品ZnSe/BeTe是采用GaAs作为衬底,用分子束外延(MBE)的方法生长而成的,下面是该样品的制备方法。The sample ZnSe/BeTe used in the present invention is grown by using GaAs as the substrate by the method of molecular beam epitaxy (MBE). The preparation method of the sample is as follows.
一种用分子束外延工艺制备II型量子阱的方法,步骤如下:A method for preparing type II quantum wells by molecular beam epitaxy, the steps are as follows:
1、将(001)取向的砷化镓(GaAs)衬底用铟(In)固定在钼(Mo)样品托上;1. Fix the (001) oriented gallium arsenide (GaAs) substrate on the molybdenum (Mo) sample holder with indium (In);
2、通液氮冷却生长室,在确认III-V族生长室真空度为1×10-10Torr以下后,通过磁力传送杆把样品传送到III-V族生长室里;将样品托、装有As固体源的K-cell容器和装有Ga固体源的K-cell容器加热升温,使之达到设定的温度分别为300℃、100℃和750℃;2. Pass liquid nitrogen to cool the growth chamber. After confirming that the vacuum degree of the III-V growth chamber is below 1×10-10Torr, transfer the sample to the III-V growth chamber through the magnetic transfer rod; The K-cell container of the As solid source and the K-cell container equipped with the Ga solid source are heated to the set temperature of 300°C, 100°C and 750°C respectively;
3、调整As源K-cell容器的温度,使之由100℃开始升温到295℃后,再将样品托和Ga源K-cell容器的温度分别设定为550℃和915℃,并开始升温,同时打开As源K-cell容器的挡板,As分子束照射在衬底上,以补偿因衬底温度升高而造成的衬底表面As的蒸发,并使得衬底表面上As的蒸发与附着达到平衡;3. Adjust the temperature of the As source K-cell container from 100°C to 295°C, then set the temperature of the sample tray and the Ga source K-cell container to 550°C and 915°C respectively, and start to heat up At the same time, the baffle of the As source K-cell container is opened, and the As molecular beam is irradiated on the substrate to compensate for the evaporation of As on the substrate surface caused by the increase of the substrate temperature, and to make the evaporation of As on the substrate surface and Attachment reaches equilibrium;
4、待Ga源K-cell容器升至915℃后,再将样品托升温至620℃,升温期间可通过反射式高能电子衍射(RHEED仪)仪在[1ī0]方向上进行观察,如果能观察到清晰的条纹出现,则说明在此温度下已经去除衬底表面的氧化物并获得清洁有序的衬底表面;4. After the Ga source K-cell container rises to 915°C, then raise the temperature of the sample holder to 620°C. During the heating period, it can be observed in the [1ī0] direction by a reflection high-energy electron diffraction (RHEED instrument). When clear stripes appear, it means that the oxide on the substrate surface has been removed at this temperature and a clean and orderly substrate surface has been obtained;
5、GaAs缓冲层的生成:打开温度已升至915℃的Ga源K-cell容器的挡板,Ga分子束照射在衬底上;此时Ga和As的分子束同时照射在衬底表面,GaAs缓冲层的生长开始,生长时间为24~120分钟,GaAs缓冲层的厚度可达到200~1000nm,此时将Ga源关掉,并将Ga源K-cell容器的温度由915℃降至750℃,之后再降至300℃,并通过RHEED仪可观察到此时的衬底有一个清洁、平整和有序的表面;5. Generation of GaAs buffer layer: Open the baffle of the Ga source K-cell container whose temperature has risen to 915°C, and the Ga molecular beam is irradiated on the substrate; at this time, the Ga and As molecular beams are irradiated on the substrate surface at the same time, The growth of the GaAs buffer layer starts, the growth time is 24~120 minutes, and the thickness of the GaAs buffer layer can reach 200~1000nm. At this time, turn off the Ga source and lower the temperature of the Ga source K-cell container from 915°C to 750°C. ℃, and then lowered to 300 ℃, and it can be observed by the RHEED instrument that the substrate at this time has a clean, flat and orderly surface;
6、稳定5分钟后,将衬底温度由620℃逐渐降至580℃,降温方法为阶梯式,即每次降温设定为降5℃,达到设定温度时再设定下一次,分8次完成降温;降温开始后,通过RHEED仪观察图像没有什么异常变化时,将As源关掉,并将As源温度由295℃调至100℃;将衬底温度由580℃逐渐降至500℃,降温方法为阶梯式,每次降10℃;之后,再将衬底温度由500℃逐渐降至300℃,整个降温过程分10次进行,每次降温间隔为20℃;6. After stabilizing for 5 minutes, gradually lower the substrate temperature from 620°C to 580°C. The cooling method is stepwise, that is, the temperature is set to drop 5°C each time, and the next time is set when the set temperature is reached, divided into 8 minutes. Complete the cooling for the first time; after the cooling starts, when there is no abnormal change in the image observed by the RHEED instrument, turn off the As source, and adjust the temperature of the As source from 295°C to 100°C; gradually lower the substrate temperature from 580°C to 500°C , the cooling method is stepwise, 10°C each time; after that, the substrate temperature is gradually lowered from 500°C to 300°C, and the entire cooling process is divided into 10 times, and the cooling interval is 20°C;
7、观察RHEED仪图像没有什么异常变化,此时可将RHEED仪关掉,在确定III-V族生长室的真空度变为7.5×10-9Torr以下后,将用来加热衬底的电源关掉,并准备将衬底通过高真空传输管道传向II-VI族生长室;7. Observe that there is no abnormal change in the image of the RHEED instrument. At this time, the RHEED instrument can be turned off. After confirming that the vacuum degree of the III-V growth chamber has become below 7.5×10-9Torr, turn off the power supply for heating the substrate. and prepare to transfer the substrate to the II-VI growth chamber through the high vacuum transfer pipeline;
8、在确定II-VI族生长室的真空度为1×10-10Torr以下且II-VI族生长室里的Zn、Be、Te、Se和Mg源的温度分别加热到150、820、150、50和200℃以后,再把衬底由III-V族生长室通过超高真空传输管道传送到II-VI族生长室;将衬底升温至300℃~350℃,并将Zn、Be、Te、Se和Mg源的温度再分别升温至307、1065、320、202和322.5℃;8. After confirming that the vacuum degree of the II-VI growth chamber is below 1×10-10 Torr and the temperature of the Zn, Be, Te, Se and Mg sources in the II-VI growth chamber are respectively heated to 150, 820, 150, After 50 and 200°C, the substrate is transferred from the III-V growth chamber to the II-VI growth chamber through an ultra-high vacuum transmission pipeline; the substrate is heated to 300°C~350°C, and the Zn, Be, Te , Se and Mg sources are heated up to 307, 1065, 320, 202 and 322.5°C respectively;
9、BeTe缓冲层的生成:当Be、Te源的温度分别达到1065和320℃后,稳定30分钟,打开Be、Te源的挡板,Be分子束和Te分子束照射在衬底的表面,此时开始生长BeTe缓冲层;用RHEED仪进行实时监控(或者根据生长前预先测得的各个固体源的生长率,用计算机进行设定、控制。下同),当BeTe缓冲层的生长厚度约为5ML时,生长结束,然后先关掉Be源,随后再关掉Te源,使表面富Te;9. Formation of the BeTe buffer layer: when the temperatures of the Be and Te sources reach 1065 and 320°C respectively, stabilize for 30 minutes, open the baffles of the Be and Te sources, and irradiate the Be and Te molecular beams on the surface of the substrate. Begin to grow BeTe buffer layer at this moment; Carry out real-time monitoring with RHEED instrument (or according to the growth rate of each solid source measured in advance before growing, set, control with computer. The same below), when the growth thickness of BeTe buffer layer is about When it is 5ML, the growth is over, then turn off the Be source first, and then turn off the Te source to make the surface Te-rich;
10、Zn0.77Mg0.15Be0.08Se隔离层的生长:先打开Zn源的挡板,再打开Se、Be和Mg源的挡板进行Zn0.77Mg0.15Be0.08Se隔离层的生长,此时分别有Zn分子束、Se分子束、Be分子束和Mg分子束同时照射在衬底的表面,当隔离层生长厚度为200~1000nm时,结束生长,先关闭Se、Be、Mg源,约5~10秒钟后再关闭Zn源;10. Growth of the Zn0.77Mg0.15Be0.08Se isolation layer: first open the baffle of the Zn source, and then open the baffles of the Se, Be and Mg sources to grow the Zn0.77Mg0.15Be0.08Se isolation layer. Zn molecular beams, Se molecular beams, Be molecular beams and Mg molecular beams are irradiated on the surface of the substrate at the same time. When the growth thickness of the isolation layer is 200~1000nm, the growth ends, and the Se, Be, and Mg sources are turned off first, about 5~10 After a few seconds, turn off the Zn source;
11、ZnSe势阱层的生长:打开Zn、Se源,使二者同时照射在衬底表面上,Zn、Se固体源的温度分别保持在307和202℃,当ZnSe层生长的厚度为10~80ML时,生长结束,先关闭Se源,经过约5~10秒后再关闭Zn源,以便形成富Zn表面层;11. Growth of ZnSe potential well layer: Turn on the Zn and Se sources and irradiate them on the surface of the substrate at the same time. The temperatures of the Zn and Se solid sources are kept at 307 and 202°C respectively. When the thickness of the ZnSe layer grows to 10~ At 80ML, the growth is over, first turn off the Se source, and then turn off the Zn source after about 5 to 10 seconds, so as to form a Zn-rich surface layer;
12、BeTe势垒层的生长:Be、Te源的温度分别保持在1065和320℃,打开Te源,经过5~10秒后再打开Be源开始生长BeTe势垒层,当BeTe层生长的厚度约为10ML时,生长结束,先关闭Be源,经过约5~10秒后再关闭Te源,以便形成富Te表面层,此时可将Te源的温度降至150℃;上述生长过程能够在ZnSe和BeTe之间的界面处得到Zn-Te形式的化学键12. Growth of BeTe barrier layer: keep the temperatures of Be and Te sources at 1065 and 320°C respectively, turn on the Te source, and then turn on the Be source after 5 to 10 seconds to start growing the BeTe barrier layer. When the thickness of the BeTe layer grows When the growth is about 10ML, the growth is over, first turn off the Be source, and then turn off the Te source after about 5 to 10 seconds to form a Te-rich surface layer. At this time, the temperature of the Te source can be lowered to 150°C; the above growth process can be performed at A chemical bond in the form of Zn-Te is obtained at the interface between ZnSe and BeTe
13、ZnSe势阱层的生长:打开Zn源,经过5~10秒后再打开Se源生长ZnSe势阱层,Zn、Se固体源的温度分别保持在307和202℃,当ZnSe层生长的厚度为10~80ML时,生长结束,先后关闭Se源和Zn源;上述生长过程能够在BeTe和ZnSe之间的界面处得到Te-Zn形式的化学键;13. Growth of ZnSe potential well layer: turn on the Zn source, and then turn on the Se source after 5-10 seconds to grow the ZnSe potential well layer. The temperatures of the Zn and Se solid sources are kept at 307 and 202°C respectively. When it is 10~80ML, the growth is over, and the Se source and the Zn source are turned off successively; the above growth process can obtain a chemical bond in the form of Te-Zn at the interface between BeTe and ZnSe;
14、重复步骤11的隔离层的生长过程,可得到200~1000nm厚的Zn0.77Mg0.15Be0.08Se隔离层;生长结束时要先关闭Se、Be、Mg源,约10秒钟后再关闭Zn源,这样可在样品的顶部生长一层Zn作为覆盖层,以保护样品不受腐蚀;生长结束后,将衬底温度设为150℃并使之降温,同时也将Zn、Se、Be和Mg源的温度分别设定为100、50、820和150℃并使之降温;当衬底温度降至150℃并确认Se源的温度降至100℃以下后,将样品从生长室中取出,即可得到完整的ZnSe/BeTe/ZnSe形式的量子阱材料。14. Repeat the growth process of the isolation layer in step 11 to obtain a Zn0.77Mg0.15Be0.08Se isolation layer with a thickness of 200~1000nm; at the end of the growth, turn off the Se, Be, and Mg sources first, and then turn off the Zn after about 10 seconds source, so that a layer of Zn can be grown on the top of the sample as a covering layer to protect the sample from corrosion; The temperature of the source was set to 100, 50, 820 and 150 °C respectively and allowed to cool down; when the substrate temperature dropped to 150 °C and the temperature of the Se source was confirmed to drop below 100 °C, the sample was taken out of the growth chamber, namely A complete quantum well material in the form of ZnSe/BeTe/ZnSe can be obtained.
通过上述生长过程,我们可以得到ZnSe/BeTe/ZnSe形式的量子阱结构(即,有两个势阱层和一个势垒层)。Through the above growth process, we can obtain a quantum well structure in the form of ZnSe/BeTe/ZnSe (that is, there are two potential well layers and one potential barrier layer).
上述ML是英文字monolayer的缩写,即分子层。对于BeTe或者ZnSe,1ML约为0.28nm。The above-mentioned ML is an abbreviation of the English word monolayer, that is, molecular layer. For BeTe or ZnSe, 1ML is about 0.28nm.
上述所使用的RHEED仪是反射高能电子衍射仪。The RHEED instrument used above is a reflection high energy electron diffractometer.
本发明中ZnSe量子阱的厚度大小对带电激子的形成效率有很大影响,其厚度约为10~80ML。激光器可以是cw型或者脉冲型。入射激光束可以和样品表面垂直也可以成某一角度。另外,带电激子的荧光强度随着温度的降低、激发强度的增强而增强。In the present invention, the thickness of the ZnSe quantum well has a great influence on the formation efficiency of charged excitons, and its thickness is about 10-80ML. Lasers can be cw or pulsed. The incident laser beam can be perpendicular to the sample surface or at an angle. In addition, the fluorescence intensity of charged excitons increases with the decrease of temperature and the increase of excitation intensity.
本发明方法的工作原理如下:The working principle of the inventive method is as follows:
在低温下采用能量大于ZnSe量子阱禁带宽度的激光对异质结构ZnSe/BeTe中的ZnSe阱层进行激发而产生电子和空穴,由于电子和空穴的最低能量值分别处于不同的量子阱层中(即当电子处在ZnSe层,而空穴处在BeTe层中时他们的能量最低),因而发生电荷的空间分离,使得ZnSe层中的电子相对于空穴有较高的浓度并从而生成带负电的带电激子(即由两个电子和一个空穴组成的激子复合体)。At low temperature, the ZnSe well layer in the heterostructure ZnSe/BeTe is excited by a laser with energy greater than the forbidden band width of the ZnSe quantum well to generate electrons and holes, because the lowest energy values of the electrons and holes are in different quantum wells. layer (that is, when the electrons are in the ZnSe layer and the holes are in the BeTe layer, their energy is the lowest), so the spatial separation of the charges occurs, so that the electrons in the ZnSe layer have a higher concentration relative to the holes and thus Negatively charged excitons (ie, exciton complexes consisting of two electrons and a hole) are generated.
一种上述方法中所使用的装置,由激光器、反射镜、两个凸透镜、棱镜、光低温恒温器、硒化锌/碲化铍样品、光纤、光谱仪、CCD检测器及计算机组成。其特征在于,反射镜、凸透镜、棱镜组成光路放置在激光器之前,可对激光器的出射激光进行反射、聚焦及转向;棱镜前面放置光低温恒温器,经棱镜转向的激光可入射到光低温恒温器中;另一凸透镜放置在棱镜的后面,可接收光低温恒温器内硒化锌/碲化铍样品的荧光(PL)光谱;凸透镜后面放置光纤和光谱仪,光谱仪带有CCD检测器,两者连接在计算机上,能自动完成光谱检测任务。所述的棱镜是半反半透棱镜。A device used in the above method is composed of a laser, a reflector, two convex lenses, a prism, an optical cryostat, a ZnSe/BeTe sample, an optical fiber, a spectrometer, a CCD detector and a computer. It is characterized in that the optical path composed of reflective mirror, convex lens and prism is placed in front of the laser, which can reflect, focus and turn the outgoing laser light of the laser; an optical cryostat is placed in front of the prism, and the laser light diverted by the prism can enter the optical cryostat Middle; another convex lens is placed behind the prism to receive the fluorescence (PL) spectrum of the ZnSe/BeTe sample in the cryostat; the optical fiber and the spectrometer are placed behind the convex lens, the spectrometer has a CCD detector, and the two are connected On the computer, the spectrum detection task can be automatically completed. The prism is a semi-reflective and semi-transparent prism.
本发明方法不需要在晶体样品中掺杂,也无需通过隧穿效应对样品进行粒子注入,该方法简单,只要满足一些宽松的实验条件(如温度、激光的能量和照射密度,都允许有很大的变化范围)即可产生带电激子。同时因为本发明所用的是非掺杂样品,所以不必考虑因掺杂而影响晶体的结构质量问题以及因掺杂而导致生长工艺的复杂性,也不必像隧穿方法那样需要两个激发光源以及必须考虑势垒宽度等因素对生成带电激子的影响。The method of the present invention does not require doping in the crystal sample, and does not need to inject particles into the sample through the tunneling effect. Large variation range) can generate charged excitons. Simultaneously because what the present invention uses is non-doped sample, so do not need to consider the structure quality problem that influences crystal because of doping and the complexity that causes growth process because of doping, also need not need two exciting light sources and must Consider the influence of barrier width and other factors on the generation of charged excitons.
带电激子是费米子,也是凝聚现象的重要形态之一。研究带电激子在不同实验条件下的各种光谱特性和电学特性,是理解包括自旋态和高密度态在内的许多物理过程的重要课题。同时它在光通信、量子计算机(包括量子信息存储和处理)、光电器件等方面也有着重要的应用。Charged excitons are fermions, which are also one of the important forms of condensation phenomena. Studying the various spectral and electrical properties of charged excitons under different experimental conditions is an important topic for understanding many physical processes including spin states and high-density states. At the same time, it also has important applications in optical communications, quantum computers (including quantum information storage and processing), and optoelectronic devices.
附图说明Description of drawings
图1是本发明装置的示意图。Figure 1 is a schematic diagram of the device of the present invention.
其中:1、激光器,2、反射镜,3、凸透镜,4、棱镜,5、光低温恒温器,6、硒化锌/碲化铍样品,7、凸透镜,8、光纤,9、光谱仪,10、CCD检测器,11、计算机。Among them: 1. Laser, 2. Mirror, 3. Convex lens, 4. Prism, 5. Optical cryostat, 6. ZnSe/BeTe sample, 7. Convex lens, 8. Optical fiber, 9. Spectrometer, 10 , CCD detector, 11, computer.
图2是本发明硒化锌/碲化铍样品的晶体结构及能带示意图。Fig. 2 is a schematic diagram of the crystal structure and energy band of the zinc selenide/beryllium telluride sample of the present invention.
其中左侧为ZnSe/BeTe结构(样品)的截面图,右侧是其相应的能带结构。C.B和V.B分别表示导带和价带,DT代表ZnSe层中的空间直接跃迁(即I型跃迁)。The left side is the cross-sectional view of the ZnSe/BeTe structure (sample), and the right side is its corresponding energy band structure. C.B and V.B represent the conduction band and valence band, respectively, and DT represents the spatially direct transition (i.e., type I transition) in the ZnSe layer.
具体实施方式Detailed ways
下面结合附图和实施例对本发明做进一步说明,但不限于此。The present invention will be further described below in conjunction with the accompanying drawings and embodiments, but is not limited thereto.
实施例1:(方法实施例)Embodiment 1: (method embodiment)
一种用光致激发在非掺杂量子阱中产生带电激子的方法,步骤如下:A method for generating charged excitons in a non-doped quantum well by photoexcitation, the steps are as follows:
1.将硒化锌/碲化铍(ZnSe/BeTe)样品裁剪成长方形晶片,对其表面用丙酮溶液去污、超纯净水冲洗、高纯氮气吹干后,再将样品粘贴在圆形铜片上;1. Cut the zinc selenide/beryllium telluride (ZnSe/BeTe) sample into a rectangular wafer, decontaminate the surface with acetone solution, rinse with ultra-pure water, and dry with high-purity nitrogen, and then paste the sample on a round copper wafer. Chip;
2.将粘贴有硒化锌/碲化铍样品的铜片固定在样品支架上,然后放置于盛有低温液体氦的光低温恒温器中;光低温恒温器与抽气机相连,样品旁装有加热丝及温度探测装置;通过调节抽气机的抽速将样品的温度控制在1.4K左右;2. Fix the copper sheet pasted with the ZnSe/BeTe sample on the sample holder, and then place it in an optical cryostat filled with cryogenic liquid helium; the optical cryostat is connected to the air pump, and the sample is installed There is a heating wire and a temperature detection device; the temperature of the sample is controlled at about 1.4K by adjusting the pumping speed of the aspirator;
3.将能量为2.85eV、激发密度为0.1W/cm2的激光束垂直投射在样品的上表面上;3. Vertically project a laser beam with an energy of 2.85eV and an excitation density of 0.1W/ cm2 on the upper surface of the sample;
4.样品产生的荧光经凸透镜会聚后可经由光纤输出至光谱仪;4. The fluorescence generated by the sample can be output to the spectrometer through the optical fiber after being converged by the convex lens;
5.经光谱仪分光后,由CCD检测器得到带电激子的荧光光谱。5. After being separated by the spectrometer, the fluorescence spectrum of the charged excitons is obtained by the CCD detector.
所述步骤1中的硒化锌/碲化铍(ZnSe/BeTe)样品结构是单量子阱;样品中ZnSe量子阱的厚度为20ML。The zinc selenide/beryllium telluride (ZnSe/BeTe) sample structure in the step 1 is a single quantum well; the thickness of the ZnSe quantum well in the sample is 20ML.
实施例2:(方法实施例)Embodiment 2: (method embodiment)
本发明方法实施例2和实施例1相同,只是硒化锌/碲化铍样品的温度通过调节加热丝中的电流控制在20K左右;激光束的能量为3.06eV、激发密度为5W/cm2。硒化锌/碲化铍(ZnSe/BeTe)样品结构是多量子阱,样品中ZnSe量子阱的厚度为28ML。Embodiment 2 of the method of the present invention is the same as Embodiment 1, except that the temperature of the zinc selenide/beryllium telluride sample is controlled at about 20K by adjusting the current in the heating wire; the energy of the laser beam is 3.06eV, and the excitation density is 5W/cm 2 . The sample structure of zinc selenide/beryllium telluride (ZnSe/BeTe) is multiple quantum wells, and the thickness of the ZnSe quantum wells in the sample is 28ML.
实施例3:(方法实施例)Embodiment 3: (method embodiment)
本发明方法实施例3和实施例1相同,只是硒化锌/碲化铍样品的温度通过调节加热丝中的电流控制在70K左右;激光束的能量为3.35eV、激发密度为90W/cm2。硒化锌/碲化铍(ZnSe/BeTe)样品结构是超晶格结构,样品中ZnSe量子阱的厚度为40ML。Embodiment 3 of the method of the present invention is the same as Embodiment 1, except that the temperature of the zinc selenide/beryllium telluride sample is controlled at about 70K by adjusting the current in the heating wire; the energy of the laser beam is 3.35eV, and the excitation density is 90W/cm 2 . The zinc selenide/beryllium telluride (ZnSe/BeTe) sample structure is a superlattice structure, and the thickness of the ZnSe quantum well in the sample is 40ML.
实施例4:(方法实施例)Embodiment 4: (method embodiment)
本发明方法实施例4和实施例1相同,只是硒化锌/碲化铍样品的温度通过调节加热丝中的电流控制在140K左右;激光束的能量为3.8eV、激发密度为180W/cm2。硒化锌/碲化铍(ZnSe/BeTe)样品结构是超晶格结构,样品中ZnSe量子阱的厚度为55ML。Embodiment 4 of the method of the present invention is the same as Embodiment 1, except that the temperature of the zinc selenide/beryllium telluride sample is controlled at about 140K by adjusting the current in the heating wire; the energy of the laser beam is 3.8eV, and the excitation density is 180W/cm 2 . The zinc selenide/beryllium telluride (ZnSe/BeTe) sample structure is a superlattice structure, and the thickness of the ZnSe quantum well in the sample is 55ML.
实施例5:(装置实施例)Embodiment 5: (device embodiment)
本发明实施例2如图1所示,由激光器1、反射镜2、两个凸透镜3和7、棱镜4、光低温恒温器5、硒化锌/碲化铍样品6、光纤8、光谱仪9、CCD检测器10及计算机11组成,其特征在于,反射镜2、凸透镜3、棱镜4组成光路放置在激光器1之前,可对激光器1的出射激光进行反射、聚焦及转向;棱镜4前面放置光低温恒温器5,经棱镜4转向的激光可入射到光低温恒温器5中;另一凸透镜7放置在棱镜4的后面,可接收光低温恒温器5内硒化锌/碲化铍样品6的荧光(PL)光谱;凸透镜7后面放置光纤8和光谱仪9,光谱仪9带有CCD检测器10,两者连接在计算机11上,能自动完成光谱检测任务。所述的棱镜4是半反半透棱镜。Embodiment 2 of the present invention is shown in Figure 1, consists of a laser 1, a reflector 2, two convex lenses 3 and 7, a prism 4, an optical cryostat 5, a zinc selenide/beryllium telluride sample 6, an optical fiber 8, and a spectrometer 9 , CCD detector 10 and computer 11, it is characterized in that, reflective mirror 2, convex lens 3, prism 4 make up the optical path and place before laser 1, can reflect, focus and turn the outgoing laser light of laser 1; Place light in front of prism 4 In the cryostat 5, the laser light diverted by the prism 4 can be incident on the optical cryostat 5; another convex lens 7 is placed behind the prism 4 to receive the ZnSe/BeTe sample 6 in the optical cryostat 5. Fluorescence (PL) spectrum; optical fiber 8 and spectrometer 9 are placed behind the convex lens 7, spectrometer 9 has a CCD detector 10, both are connected on the computer 11, can automatically complete the spectrum detection task. The prism 4 is a semi-reflective and semi-transparent prism.
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