CN101533227B - Edge exposure adjusting device - Google Patents
Edge exposure adjusting device Download PDFInfo
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- CN101533227B CN101533227B CN2009100486409A CN200910048640A CN101533227B CN 101533227 B CN101533227 B CN 101533227B CN 2009100486409 A CN2009100486409 A CN 2009100486409A CN 200910048640 A CN200910048640 A CN 200910048640A CN 101533227 B CN101533227 B CN 101533227B
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- lens cone
- cone frame
- bearing
- lens
- lens barrel
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Abstract
The invention provides an edge exposure adjusting device, comprising a support, a lens cone frame and an adjusting bolt. The bottom of the support comprises three gaskets which are positioned on the same straight line; and the support is put on a fixed platform by the three gaskets. One end of the lens cone frame is arranged in the support by a linear guideway in a sliding way, and the other end of the lens cone frame is sheathed with a lens cone which is rotatablely arranged in the other end of the lens cone frame. The linear guideway comprises a guideway which is fixed on the support and a slide block which is fixed on the lens cone frame and is arranged on the guideway in a sliding way. The adjusting bolt thrills through the support and the lens cone frame along x axial direction, the adjusting bolt comprises an adjusting part and a first thread, the lens cone frame comprises a second thread, the first thread is matched with the second thread in a corresponding way, wherein, when the adjusting part is turned, the lens cone frame drives the lens cone to move along the x axial direction. The edge exposure adjusting device can realize leveling, x axial direction adjustment and Rz axial rotation adjustment, as well as has the advantages of simple structure, high precision and convenient adjustment.
Description
Technical field
The present invention relates to a kind of adjusting gear, and be particularly related to a kind of silicon chip edge exposure adjusting device.
Background technology
Plating is one of very important technology of encapsulation behind the IC circuit, it utilizes the edge of silicon chip to do anode, plating window in the middle of the silicon chip is done negative electrode, between negative and positive the two poles of the earth, add certain direct-current working volts then, control the height of metal coupling by the concentration of electroplate liquid in Control current size and the electroplating bath.
Because photoresist is non-conductive, therefore before electroplating technology, need the photoresist of silicon chip edge is removed, and trimming width size depends on the trimming width of preceding road WEE (Wafer Edge Exclusion) technology.
Silicon chip edge exposure width, the distortion inaccuracy of hot spot and hot spot Rz precision all can influence the quality and the precision of edge exposure, so edge exposure adjusting device must be able to realize that leveling, level are to X and rotation Rz adjustment.The level of U.S. Pat 2006/0250594 adjusting gear adopts guide rail guiding, ball stud or belt-driven to realize that the Rz adjusting gear is arranged in the silicon chip below to adjusting.Its shortcoming is not have levelling function, when Rz adjusts or difficulty, or complex structure.
Summary of the invention
The present invention proposes a kind of edge exposure adjusting device that is used to adjust the exposure spot position, can address the above problem.
In order to achieve the above object, the present invention proposes a kind of edge exposure adjusting device, in order to adjust the position of lens barrel with respect to silicon chip in the edge exposure process.Edge exposure adjusting device comprises bearing, lens cone frame, line slideway and adjustment bolt.Bearing, its bottom surface comprise three pads, and these three pads are not located along the same line, and bearing is placed on the stationary platform by these three pads.One end of lens cone frame is mounted slidably in bearing by line slideway, its other end socket lens barrel, and lens barrel is arranged in the other end of lens cone frame rotationally.Line slideway comprises the guide rail that is fixed on the bearing and is fixed on the lens cone frame and is slidably disposed on slide block on the guide rail.Adjust bolt and pass bearing and lens cone frame along the x direction of principal axis, adjust bolt and have the adjustment part and first screw thread, lens cone frame has second screw thread, first screw thread and the second screw thread corresponding matching, wherein when rotating the adjustment part, lens cone frame drives lens barrel and moves along the x direction of principal axis.
Optionally, but wherein these three pads are the pad of reconditioning height, wherein realize the leveling of this bearing by three pads of reconditioning.
Optionally, wherein be provided with a plurality of balls between this guide rail and this slide block, in order to reduce this guide rail and this slide block friction force when sliding.
Optionally, edge exposure adjusting device also comprises the tightening device.This tightening device comprises first holding screw, top board and second holding screw.First holding screw inserts this lens cone frame and in order to this lens barrel of conflicting.Top board is fixed on this bearing.Second holding screw inserts this top board and in order to this lens cone frame of conflicting.Wherein ought tighten this first holding screw and this second holding screw, this lens barrel is fixed on the lens cone frame, and this lens cone frame is fixed on this bearing.
Optionally, edge exposure adjusting device also comprises data fetch device, and data fetch device comprises: the lens barrel scale mark is positioned at this lens barrel outside; The lens cone frame scale mark is positioned at this lens cone frame outside; The bearing scale mark is positioned at this bearing outside; And adjustment screw scale mark, be positioned at this adjustment screw outside, wherein lens barrel scale mark and lens cone frame scale mark each other minimum scale value have poor than down scale, realize the rotation accurate reading, the minimum scale value of adjusting the bolt scale mark is slightly smaller than all scale value sums of bearing scale mark, realizes 360 ° of scope rotation readings.
The edge exposure adjusting device that the present invention proposes can realize that leveling, x axially adjust and the rotation of Rz axle is adjusted, and it is simple in structure, with low cost, precision is high, easy to adjust.
Description of drawings
Fig. 1 is that preferred embodiment edge exposure adjusting device axle of the present invention is surveyed synoptic diagram;
Fig. 2 is a preferred embodiment edge exposure adjusting device front elevational schematic of the present invention;
Fig. 3 is that preferred embodiment edge exposure adjusting device of the present invention is along A-A axle diagrammatic cross-section;
Fig. 4 is a preferred embodiment edge exposure adjusting device schematic top plan view of the present invention;
Fig. 5 is that the switching of preferred embodiment edge exposure of the present invention position, exposure width and rectangular light spot Rz precision are adjusted synoptic diagram.
Embodiment
In order more to understand technology contents of the present invention, especially exemplified by specific embodiment and cooperate appended graphic being described as follows.
Fig. 1 is that preferred embodiment edge exposure adjusting device axle of the present invention is surveyed synoptic diagram; Fig. 2 is a preferred embodiment edge exposure adjusting device front elevational schematic of the present invention; Fig. 3 is that preferred embodiment edge exposure adjusting device of the present invention is along A-A axle diagrammatic cross-section; Fig. 4 is a preferred embodiment edge exposure adjusting device schematic top plan view of the present invention, please in conjunction with referring to figs. 1 to Fig. 4.
Edge exposure adjusting device comprises bearing 1, lens barrel 5, lens cone frame 6, line slideway 2 and adjusts bolt 9 in the present embodiment.
The bottom surface of bearing 1 comprises that 3, three pads 3 of three pads are not located along the same line, so they constitute a plane.Bearing 1 is placed on the stationary platform (figure does not show) by three pads 3, but these three pads 3 are the pad of reconditioning height, can realize the leveling of bearing 1 by the thickness of three pads 3 of reconditioning.
Please emphasis in conjunction with referring to figs. 2 and 3, it has described the combination of lens cone frame 6 with bearing 1.Bearing 1 has line slideway 2.The other end of lens cone frame 6 is mounted slidably to bearing 1 by line slideway 2.
Line slideway 2 comprises slide block 21, guide rail 22 and ball 23.
In the present embodiment, edge exposure adjusting device also comprises the tightening device.
The tightening device comprises holding screw 4, holding screw 7, top board 8.Holding screw 4 inserts lens cone frame 6, and in order to conflict lens barrel 5, the friction force that increases lens barrel 5 and lens cone frame 6 fixes the position of lens barrel 5 on the Rz direction.Top board 8 is fixed on the bearing 1, and after holding screw 7 inserted top board 8, in order to conflict lens cone frame 6, the friction force that increases lens cone frame 6 and bearing 1 fixed the position of lens cone frame 6 (and then fixed lens barrel 5) on the x direction.After tightening holding screw 4 and 7, lens barrel 5 is fixed on the lens cone frame 6, and this lens cone frame 6 is fixed on the bearing 1.
In the present embodiment, edge exposure adjusting device also comprises data fetch device.
Data fetch device comprises lens barrel scale mark 501, lens cone frame scale mark 601, bearing scale mark 101 and adjusts screw scale mark 901.
Lens barrel scale mark 501 is positioned at lens barrel 5 outsides; Lens cone frame scale mark 601 is positioned at lens cone frame 6 outsides; Bearing scale mark 101 is positioned at bearing 1 outside; And adjustment screw scale mark 901 is positioned at adjustment screw 9 outsides.
The lens barrel scale mark 501 of lens barrel 5 and the lens cone frame scale mark 601 of lens cone frame 6 minimum scale value each other have poorly than down scale, realize the rotation accurate reading.Can read the anglec of rotation of lens barrel 5 on the Rz direction by lens barrel scale mark 501 and lens cone frame scale mark 601.
The minimum scale value of adjusting the adjustment bolt scale mark 901 of bolt 9 is slightly smaller than all scale value sums of the bearing scale mark 101 of bearing 1, realizes 360 ° of scope rotation readings.Can read the displacement of lens barrel 5 on the x direction by adjusting bolt scale mark 901 and bearing scale mark 101.
Figure 5 shows that the switching of preferred embodiment edge exposure of the present invention position, exposure width and rectangular light spot Rz precision adjustment synoptic diagram.
Shown in Fig. 5 is the silicon chip synoptic diagram on the work stage when overlooking edge exposure adjusting device.A, b, c represent the position of the hot spot that lens barrel 5 sends respectively among the figure, and in the present embodiment, hot spot is a rectangular light spot.Please in conjunction with referring to figs. 1 to Fig. 5, switch the edge exposure position, exposure width and rectangular light spot Rz precision are adjusted flow process:
1, the thickness of three pads 3 of reconditioning is realized leveling, and the rectangular light spot optical axis that makes lens barrel 5 belows is perpendicular to silicon chip surface, until the distortion inaccuracy that satisfies rectangular light spot.For example arrive position a shown in Figure 5;
When 2, needing edge exposure position between silicon chip Φ 300mm and the Φ 200mm to switch, rotate and adjust bolt 9 rectangular light spot of lens barrel 5 belows is moved along the x axle, thereby realize that the exposure position switches.For example arrive position b shown in Figure 5;
3, fine setting is adjusted bolt 9 and is realized that the rectangular light spot x of lens barrel 5 belows is to adjustment; And rotate lens barrel 5 and realize that rectangular light spot Rz is to adjustment.For example arrive position c shown in Figure 5;
4, according to exposure width d and rectangular light spot Rz error amount, repetitive operation step 3 is until satisfying accuracy requirement;
5, tighten holding screw 4 fixed lens barrel 5, tighten holding screw 7 fixed lens barrel supports 6, thus the built-in edge exposure adjusting device.
Though the present invention discloses as above with preferred embodiment, so it is not in order to limit the present invention.The persond having ordinary knowledge in the technical field of the present invention, without departing from the spirit and scope of the present invention, when being used for a variety of modifications and variations.Therefore, protection scope of the present invention is as the criterion when looking claims person of defining.
Claims (4)
1. an edge exposure adjusting device in order to adjust the position of lens barrel with respect to silicon chip in the edge exposure process, is characterized in that, comprising:
Bearing, its bottom surface comprise three pads, and these three pads are not located along the same line, and this bearing is placed on the stationary platform by these three pads;
Lens cone frame, the one end is mounted slidably in this bearing by line slideway, its this lens barrel of other end socket, this lens barrel is arranged in the other end of this lens cone frame rotationally, and wherein this line slideway comprises:
Guide rail is fixed on this bearing;
Slide block is fixed on this lens cone frame and is slidably disposed on this guide rail; And
Adjust bolt, this adjustment bolt passes this bearing and this lens cone frame along the x direction of principal axis, this adjustment bolt has the adjustment part and first screw thread, this lens cone frame has second screw thread, this first screw thread and this second screw thread corresponding matching, wherein when rotating this adjustment part, this lens cone frame drives this lens barrel and moves along the x direction of principal axis;
Wherein but these three pads are the pad of reconditioning height, wherein realize the leveling of this bearing by three pads of reconditioning.
2. edge exposure adjusting device according to claim 1 is characterized in that, wherein is provided with a plurality of balls between this guide rail and this slide block, in order to reduce this guide rail and this slide block friction force when sliding.
3. edge exposure adjusting device according to claim 1 is characterized in that, also comprises the tightening device, and this tightening device comprises:
First holding screw inserts this lens cone frame and in order to this lens barrel of conflicting;
Top board is fixed on this bearing; And
Second holding screw inserts this top board and in order to this lens cone frame of conflicting;
Wherein ought tighten this first holding screw and this second holding screw, this lens barrel is fixed on this lens cone frame, and this lens cone frame is fixed on this bearing.
4. edge exposure adjusting device according to claim 1 is characterized in that, also comprises comprising data fetch device: the lens barrel scale mark is positioned at this lens barrel outside; The lens cone frame scale mark is positioned at this lens cone frame outside; The bearing scale mark is positioned at this bearing outside; And adjust the screw scale mark, be positioned at this adjustment screw outside,
Wherein lens barrel scale mark and lens cone frame scale mark each other minimum scale value have poorly than down scale, realize the rotation accurate reading,
The minimum scale value of adjusting the bolt scale mark is slightly smaller than all scale value sums of bearing scale mark, realizes 360 ° of scope rotation readings.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100486409A CN101533227B (en) | 2009-03-31 | 2009-03-31 | Edge exposure adjusting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100486409A CN101533227B (en) | 2009-03-31 | 2009-03-31 | Edge exposure adjusting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101533227A CN101533227A (en) | 2009-09-16 |
| CN101533227B true CN101533227B (en) | 2011-02-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009100486409A Active CN101533227B (en) | 2009-03-31 | 2009-03-31 | Edge exposure adjusting device |
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| CN (1) | CN101533227B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102077439B1 (en) * | 2012-03-26 | 2020-02-13 | 가부시키가이샤 니콘 | Pattern forming device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101162700A (en) * | 2006-10-12 | 2008-04-16 | De&T株式会社 | Wafer inspecting equipment |
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- 2009-03-31 CN CN2009100486409A patent/CN101533227B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101162700A (en) * | 2006-10-12 | 2008-04-16 | De&T株式会社 | Wafer inspecting equipment |
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| Publication number | Publication date |
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| CN101533227A (en) | 2009-09-16 |
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Address after: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
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