CN101532127A - Hanging tool for silicon wafer carriers - Google Patents
Hanging tool for silicon wafer carriers Download PDFInfo
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- CN101532127A CN101532127A CN200810171738A CN200810171738A CN101532127A CN 101532127 A CN101532127 A CN 101532127A CN 200810171738 A CN200810171738 A CN 200810171738A CN 200810171738 A CN200810171738 A CN 200810171738A CN 101532127 A CN101532127 A CN 101532127A
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- hanger
- support arm
- support
- silicon chip
- lug boss
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Abstract
The invention provides a hanging tool for silicon wafer carriers, which comprises a U-shaped frame formed by two supporting arms and a supporting part connected with the two supporting arms, wherein a position of every supporting arm far from the supporting part is provided with a convex part which faces the outside of a U-shaped opening and is used as a fastening head. When the hanging tool is arranged on a silicon wafer carrier, the fastening heads bear force to bend the supporting arms by use of the hanging tool, so that installation can be more precise and convenient.
Description
Technical field
The present invention relates to the silicon chip technology field, be meant the hanger that the silicon chip carrier in the plasma vacuum coating film equipment uses in the silicon chip production.
Background technology
In solar cell and semi-conductive silicon chip are produced, need be on silicon chip deposited silicon nitride.The technology of deposited silicon nitride is that silicon chip is contained on the silicon chip carrier, silicon chip carrier is put into the plasma vacuum coating film equipment again, feeds reactant gases again and carries out in vacuum high-temperature.
When each silicon chip is contained each position, hole (as 36 holes, 25 holes) into silicon chip carrier, at first need hanger is installed on the framework of silicon chip carrier to support each silicon chip.Hanger comprises hook and two kinds of catch, links up with to comprise bill, and each position, silicon chip carrier hole is used for supporting silicon chip by the bill of a plurality of hooks, and catch is used for locating the silicon chip position.Show present hanger as Fig. 1, comprise two support arms and the support portion that is connected two support arms, support arm and support portion form the framework of U type, can have under the framework hook part form Fig. 1 (a) or (b) shown in hook, or have flap member and form the washer shown in Fig. 1 (c) or the d.
When hanger is installed, hanger U type opening vertical direction is upwards placed, be inserted in the framework of silicon chip carrier, use nose pliers to clamp the top of two support arms of hanger then, the support arm that makes is crooked in U type opening, thereby hanger is fixed on the framework of silicon chip carrier.
The precision that hanger is installed have influence on silicon chip can contain into, whether can fall sheet, and directly influence the coating quality of silicon nitride.Therefore, need hanger to install accurately, firmly, especially Gua Gou each bill will be in one plane.But because when clamping the support arm of hanger, the position of the hanger support arm of the nose pliers institute application of force is to confirm by manual, the therefore unavoidable support arm institute force application location difference that different hangers occurs makes each hanger not just not install, and bill is not in one plane.
On the other hand, in order to ensure the precision of installing, operator's requirement than higher, is made that the installation process of hanger is more consuming time, consumption power.
Summary of the invention
In view of this, main purpose of the present invention is to provide employed hanger on a kind of silicon chip carrier so that hanger is when being installed to silicon chip carrier, the installation site more accurately, more quick.
The hanger that silicon chip carrier provided by the invention uses comprises the U type framework that is formed by two support arms and the support portion that is connected two support arms, in the position of described each support arm away from the support portion, is provided with the lug boss as fastener head towards U-shaped open outer side direction.
Wherein, described support arm is the apical position of support arm away from the support portion away from the position of support portion.
Preferable, between described support arm lug boss and support portion, have the position of certain distance with lug boss, be provided with gap.
Optionally, described gap is arranged on support arm towards U-shaped open outer side direction.
Optionally, described gap is arranged on support arm side direction in the U-shaped opening.
Described hanger can be also to be connected with the hook of hook portion or the catch of catch portion is arranged at U type opening direction dorsad.
As seen from the above, the support arm of hanger of the present invention has the lug boss as fastener head, when hanger was installed, because that the lug boss of hanger support arm contacts with nose pliers is stressed, and the lug boss of all hanger support arms was in identical position, therefore, because stressed position is identical, support arm is also basic identical to the position of U type opening inside bend, and each hanger is installed, the height of hook of the lower end of hook is basic identical, makes that all bills are smooth to be positioned on the plane.As seen, the present invention has improved the accuracy that hanger is installed, and has improved the hanger installation quality.
And, described lug boss can be arranged on the support arm apical position, thereby can be when using nose pliers to clamp lug boss, can use the less strength application of force or make the nose pliers jaw less distance that relatively moves, just can be so that two support arms of U type opening flex inward into predetermined shape.
And, on the hanger support arm, gap can also be set, gap is set after, when two support arms are stressed when curving inwardly, can at first carry out bending, can make each hanger bent position more accurate like this, thereby make more accurate being positioned at substantially on the plane of bill of each hanger in this gap position.
As seen from the above, owing to need not be as background technology in the installation process remove to confirm the force application location of the hanger support arm that will clamp again by experience, therefore make installation process more convenient, more quick, shortened the settling time widely, through comparing, use when of the present invention, one 36 hole silicon chip carrier is installed is only needed a people 1 hour, and when using the hanger of describing in the background technology to install, not only need the complex installation instrument, and one 36 hole silicon chip carrier is installed is wanted two people's times half a day.
Description of drawings
Fig. 1 is the synoptic diagram of present hanger; Wherein, (a) being the hanger of two hooks, (b) is the hanger of single hook, is the hanger of two catch (c), (d) is the hanger of single catch;
Fig. 2 is provided with hanger synoptic diagram as the lug boss of fastener head for the support arm top, wherein, (a) is the hangers of two hooks, (b) be the hanger of single hook, is the hanger of pair catch (c), (d) is the hanger of single catch;
Fig. 3 is for being provided with the hanger synoptic diagram of gap on the support arm; Wherein, (a) being the hanger of gap towards U type open outer side, (b) is the hanger of gap towards U type opening inboard;
Fig. 4 is installed to synoptic diagram on the silicon chip carrier for hanger of the present invention; Wherein, (a) be installed in the silicon chip carrier synoptic diagram for hanger; (b) be the schematic cross-section of the partial enlarged drawing among (a) figure.
Embodiment
Show hanger of the present invention as Fig. 2.Wherein, hanger of the present invention comprises framework, comprises two support arms 1 and the support portion 2 that is connected two support arms on the framework, and support arm 1 forms the U type with support portion 2 with framework.In the position of each support arm 1, be provided with lug boss 3 towards U-shaped open outer side direction away from support portion 2.
Wherein, as shown in Figure 2, lug boss 3 is arranged on the apical position of support arm 1 away from the support portion, when lug boss 3 is arranged on support arm 1 apical position, when using nose pliers to clamp lug boss 3, can use the less strength application of force, make two support arms 1 of U type opening in U type opening, bend to predetermined shape.
In addition, as shown in Figure 3, between the lug boss 3 and support portion 2 of described support arm 1, the position that has certain distance with lug boss 3 can also be provided with gap 6.Wherein, the effect of this gap 6 is the location that are used for realizing when support arm 1 is crooked, gap 6 is set after, when two support arms, 1 stressed curving inwardly, can at first carry out bending in gap 6 positions, can make like this that each hanger is more accurate to be fixed on the silicon chip carrier.Need to prove that the position of gap 6 should guarantee that hanger is installed to this gap 6 and the distance of support portion 2 and the consistency of thickness of silicon chip carrier framework behind the silicon chip carrier.
Wherein, the above gap of support arm 1 can be arranged on support arm 1 towards U-shaped open outer side direction shown in Fig. 3-a.Gap 6 can be linear, trilateral.Perhaps, support arm 1 the above gap 6 also can be arranged on the side direction in the U-shaped opening of support arm 1 shown in Fig. 3-b, and present dynasty is to the inside the time, and the opening angle of gap 6 is preferably and is not less than 90 degree, so that support arm 1 can be than the bending of wide-angle.
In addition, only be described above at the hanger framework, U type framework dorsad U type opening direction also can be connected with hook part 4, thereby make hanger of the present invention form the hook effect.Show hanger respectively as Fig. 2-a and Fig. 2-b with two hooks and single hook.Perhaps, U type framework dorsad U type opening direction be connected with flap member 5, thereby make hanger of the present invention form the catch effect.Show hanger respectively as Fig. 2-c and Fig. 2-d with two catch and single catch.Be understood that, as required, also can U type framework dorsad U type opening direction connect a hook part 4 and a flap member 5, repeat no more herein.
Hanger is installed to the synoptic diagram on the silicon chip carrier as shown in Figure 4, when carrying out the hanger installation, the U type opening of hanger is inserted towards the silicon chip carrier framework, make the silicon chip carrier framework be positioned at U type opening, then at two support arms of hanger, clamp lug boss on the hanger support arm with nose pliers, nose pliers by lug boss to two support arm application of forces, make two support arms crooked in U type opening, be fixed on the silicon chip carrier.
When nose pliers clamped, nose pliers only contacted with described support arm lug boss, only can be to the lug boss application of force, and, that hanger two support arms are crooked in U type opening by lug boss as stress point.Because each hanger stress point is unified, so the installation site can be unified.Moreover, again because support arm is provided with gap, so the U type can at first carry out bending from described gap position when propping up brachiocylloosis, thereby the position that makes each hanger install is accurate, and is unified more neat.
As seen,, therefore need not as background technology, go to confirm to clamp the position of hanger again by experience, make installation process more convenient because nose pliers only contacts with lug boss in the installation process, more quick, shortened the settling time widely.
On the other hand, because all hanger lug boss positions are identical, the gap position is identical, therefore, the aduncate position of U type opening is also identical, can make the height of hook of hook of each hanger lower end identical like this, hanger is installed and is rectified, and makes that all bills are smooth to be positioned on the plane.As seen, the present invention has improved the accuracy that hanger is installed.
The above only is preferred embodiment of the present invention, and is in order to restriction the present invention, within the spirit and principles in the present invention not all, any modification of being done, is equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (7)
1, a kind of hanger of silicon chip carrier use, comprise the framework that forms by two support arms (1) and the support portion (2) that is connected two support arms (1) with U type opening, it is characterized in that, in the position of described each support arm (1), be provided with lug boss (3) towards U-shaped open outer side direction away from support portion (2).
2, hanger according to claim 1 is characterized in that, described support arm (1) is the apical position of support arm (1) away from support portion (2) away from the position of support portion (2).
3, hanger according to claim 1 and 2 is characterized in that, at lug boss (3) and support on the support arm (1) between (2) portion, is provided with gap (6) apart from the position of lug boss (3) certain distance.
4, hanger according to claim 3 is characterized in that, described gap (6) be arranged on support arm (1) on the outside of U-shaped opening.
5, hanger according to claim 3 is characterized in that, described gap (6) be arranged on support arm (1) on the inboard of U-shaped opening.
6, hanger according to claim 1 is characterized in that, described hanger U type opening direction dorsad also is connected with hook part (4).
7, hanger according to claim 1 is characterized in that, described hanger U type opening direction dorsad also is connected with flap member (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810171738A CN101532127A (en) | 2008-10-24 | 2008-10-24 | Hanging tool for silicon wafer carriers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810171738A CN101532127A (en) | 2008-10-24 | 2008-10-24 | Hanging tool for silicon wafer carriers |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101532127A true CN101532127A (en) | 2009-09-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200810171738A Pending CN101532127A (en) | 2008-10-24 | 2008-10-24 | Hanging tool for silicon wafer carriers |
Country Status (1)
| Country | Link |
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| CN (1) | CN101532127A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101826483A (en) * | 2010-03-29 | 2010-09-08 | 常州亿晶光电科技有限公司 | Quickly-dismounted silicon wafer coating symmetrical hanging hook subassembly and mounting method thereof |
| CN101877373A (en) * | 2010-03-29 | 2010-11-03 | 常州亿晶光电科技有限公司 | Special silicon wafer loader for PECVD (Plasma Enhanced Chemical Vapor Deposition) film coating |
| CN101892465A (en) * | 2010-03-29 | 2010-11-24 | 常州亿晶光电科技有限公司 | Quickly-changed silicon chip film-coated single-faced hanging hook assembly and mounting method thereof |
| CN102214727A (en) * | 2010-04-01 | 2011-10-12 | 浙江索日光电科技有限公司 | Silicon wafer hanging device of solar cell coating machine |
| CN102709400A (en) * | 2012-06-28 | 2012-10-03 | 无锡绿波新能源设备有限公司 | Piece falling prevention lower coating hook |
| CN103409756A (en) * | 2013-07-23 | 2013-11-27 | 吴江龙硕金属制品有限公司 | Metal polishing agent and preparation method thereof |
-
2008
- 2008-10-24 CN CN200810171738A patent/CN101532127A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101826483A (en) * | 2010-03-29 | 2010-09-08 | 常州亿晶光电科技有限公司 | Quickly-dismounted silicon wafer coating symmetrical hanging hook subassembly and mounting method thereof |
| CN101877373A (en) * | 2010-03-29 | 2010-11-03 | 常州亿晶光电科技有限公司 | Special silicon wafer loader for PECVD (Plasma Enhanced Chemical Vapor Deposition) film coating |
| CN101892465A (en) * | 2010-03-29 | 2010-11-24 | 常州亿晶光电科技有限公司 | Quickly-changed silicon chip film-coated single-faced hanging hook assembly and mounting method thereof |
| CN102214727A (en) * | 2010-04-01 | 2011-10-12 | 浙江索日光电科技有限公司 | Silicon wafer hanging device of solar cell coating machine |
| CN102709400A (en) * | 2012-06-28 | 2012-10-03 | 无锡绿波新能源设备有限公司 | Piece falling prevention lower coating hook |
| CN102709400B (en) * | 2012-06-28 | 2015-02-04 | 无锡绿波新能源设备有限公司 | Piece falling prevention lower coating hook |
| CN103409756A (en) * | 2013-07-23 | 2013-11-27 | 吴江龙硕金属制品有限公司 | Metal polishing agent and preparation method thereof |
| CN103409756B (en) * | 2013-07-23 | 2015-12-09 | 葛娟 | Metal polish and preparation method thereof |
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Open date: 20090916 |