CN101520356A - Pressure sensing device for insulated integrated circuit - Google Patents
Pressure sensing device for insulated integrated circuit Download PDFInfo
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- CN101520356A CN101520356A CN200910004503A CN200910004503A CN101520356A CN 101520356 A CN101520356 A CN 101520356A CN 200910004503 A CN200910004503 A CN 200910004503A CN 200910004503 A CN200910004503 A CN 200910004503A CN 101520356 A CN101520356 A CN 101520356A
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- diaphragm
- pressure
- accommodating chamber
- integrated circuit
- pressure sensitive
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Abstract
The invention relates to a pressure sensing device for an insulated integrated circuit, which comprises a body, wherein the body is provided with an accommodating chamber of which the inside is provided with a pressure sensing IC; one side of the body is provided with a hole; a membrane is arranged between the hole of the body in the accommodating chamber and the pressure sensing IC to separate the accommodating chamber into two parts and form a closed space between the membrane and the pressure sensing IC, the closed space is filled with insulated medium fluid, and the membrane is elastic; the pressure sensing IC is isolated by the membrane and the insulated medium fluid so that the pressure sensing IC cannot directly contact with the fluid entering the accommodating chamber from the hole so as to prevent the pressure sensing IC from short circuiting, and the pressure sensing IC is arranged on one circuit board; the membrane is fixed in the accommodating chamber through a fixing element to divide the accommodating chamber into two parts; and the contact part of the fixing element and the circuit board is provided with a sealing component so that the space between the circuit board and the membrane in the accommodating chamber is closed and is filled with the insulated medium fluid.
Description
The present invention is to be that June 26, application number in 2006 are 200610093540.4, denomination of invention is divided an application for " insulation type IC pressure sensing device " a case the applying date.
Technical field
The present invention is a kind of insulation type IC pressure sensing device, is meant a kind of working pressure induction IC especially as detecing element, and can be applicable to detect the insulativity IC pressure-sensing device of conducting fluid pressure.
Background technology
Traditional pressure inductor mainly is as pressure responsive element with mechanical type sensing elements such as worm pipe or mercury pressure inductor or spring pressure sensors, because the mechanical type sensing element has volume big, the cost costliness, and problem such as responsiveness and repeatability is not good, therefore existing in recent years semiconductor pressure inductor produces.
The semiconductor pressure inductor mainly is to utilize pressure sensitive IC (Integrated circuit, integrated circuit) element is as the detecing element (sensor) of pressure sensor, as shown in Figure 7, it is the organigram of an existing IC pressure sensitive device, comprising: a pedestal 1, its top is provided with a joint 2, can connect a conduit, and pressure fluid is imported to pedestal 1 inside; One circuit board 3 is arranged on the top of pedestal 1, is provided with a pressure sensitive IC4 on this circuit board 3, and this pressure sensitive IC4 has some pins, is to be welded on the circuit board 3; Some leads 5 are connected with circuit board 3, are transferred to extraneous arithmetic unit in order to the signal that pressure sensitive IC is sensed, to calculate the induction force value that IC4 was detected; Reach a lid 6, be arranged at the top of pedestal 1, in order to circuit board 3 and induction IC are coated on wherein.
The cardinal principle of pressure sensitive IC is to have some variable-resistance circuit components on this pressure sensitive IC, and when sensing IC bore pressure, these some variable-resistance resistance values produced change thereupon, therefore reaches the purpose that detecting pressure changes.
The pressure-sensing device of existing use semiconductor-type is owing to be to utilize semiconductor and circuit component pressure sensor, its employed semiconductor and circuit component can directly contact the fluid in order to conducting pressure, if therefore the pressure-sensing device fluid in contact has electric conductivity, will make IC element and short circuit, and cause circuit and IC component failure, make that therefore existing IC pressure sensitive device only can be applied in the purposes of detecting air pressure usually.
Because existing IC formula pressure inductor can't contact conducting fluid, therefore when it uses purposes at detecting hydraulic pressure or oil pressure, usually must by piston or other pressure transport element indirectly conducting pressure arrive on the pressure sensitive IC.Embodiment as shown in Figure 8 is that the pedestal 1 with the pressure sensitive device is arranged on the cylinder body 7, and an end of this cylinder body 7 is connected with pressure fluid, and its inside is provided with a piston 8.These cylinder body 7 inside are full of air, when piston 8 bears pressure, can produce compressed action to the air of cylinder body 7 inside, and the air that passes through cylinder body 7 inside indirectly make pressure sensitive IC4 sense pressure indirectly to pressure sensitive IC4 generation pressure.
Though the fluid that existing IC formula pressure inductor can avoid IC directly to contact electric conductivity by indirect conduction pattern damages, but because the many cylinder body 7 and pistons 8 of conduction in the middle of between the fluid of pressure sensitive IC4 and desire detecting pressure, therefore be easy to generate the loss of mechanical energy, and have influence on the detecting pressure precision, and expand with heat and contract with cold owing to the air of cylinder body 7 inside is subjected to temperature effect easily, make cylinder body 7 pressure inside produce and change.Simultaneously piston 8 is after being compressed, and easily because friction force influence and can't homing, and produces the not good situation of repeatability.
Because above situation, make the pressure that existing IC formula pressure sensitive device can't the direct sensing conducting fluid, and its purposes is restricted, and precision is good and can't be applied in the occasion that high precision requires, and therefore improved necessity obviously arranged.
Summary of the invention
Fundamental purpose of the present invention be to provide a kind of can be in order to direct detecting conducting fluid pressure, and guarantee the insulation type IC pressure sensing device of the precision of sensor detecting force value.
Major technique means of the present invention are: a kind of pressure sensing device for insulated integrated circuit, by a diaphragm that the pressure-sensing integrated circuit can be coated on fully wherein is set on an integrated circuit pressure sensor, this diaphragm has elasticity, and the fluid that can completely cut off sensing integrated circuit and desire detecting pressure contacts; Reach the pressure conducting fluid that is filled with insulation in this diaphragm inner space, conduct to this pressure-sensing integrated circuit so as to the pressure that this diaphragm is born, make this pressure-sensing integrated circuit can the sensing diaphragm hydrodynamic pressure in the outside, this pressure sensitive integrated circuit is arranged on the circuit board; This diaphragm has a circular arc-shaped recess, and this circular arc-shaped recess can coat this pressure sensitive integrated circuit, and around it with this circuit board surface driving fit, and form a confined space for filling insulativity medium fluid.
Another kind of pressure sensing device for insulated integrated circuit provided by the invention, diaphragm is fixed in this accommodating chamber inside by a retaining element, and this accommodating chamber is divided into two partly; And this retaining element contacts with this circuit board and partly a containment member is set, and it is airtight to make in this accommodating chamber that the space between this circuit board and diaphragm forms, and in this confined space filling insulativity medium fluid.
By above-mentioned technological means, pressure sensing device for insulated integrated circuit of the present invention can be directly in order to the pressure of detecting conducting fluid, and must not add the mechanism of other switching, thereby can improve the accuracy of its detecting pressure.
Description of drawings
Fig. 1 is the combination section of first embodiment of the invention.
Fig. 2 is the three-dimensional exploded view of first embodiment of the invention.
The three-dimensional exploded view that Fig. 3 is got by other direction for first embodiment of the invention.
Fig. 4 is the user mode synoptic diagram of first embodiment of the invention.
Fig. 5 is the three-dimensional exploded view of second embodiment of the invention.
Fig. 6 is the combination section of second embodiment of the invention.
Fig. 7 is the organigram of existing IC formula pressure-sensing device.
Fig. 8 is applied to detect the organigram of conducting fluid for existing IC formula pressure-sensing device.
The main element symbol description
1............ pedestal 2............ joint
3............ circuit board 4............ pressure sensitive IC
5............ lead 6............ lid
7............ cylinder body 8............ piston
10......... body 11......... pedestal
12......... lid 13......... accommodating chamber
14......... joint 15......... hole
16......... groove 17......... bolt
20......... diaphragm 21......... recess
22......... flange 23......... medium fluid
30......... circuit board 30A...... circuit board
31........ pressure sensitive IC 31A...... pressure sensitive IC
32......... lead 33......... circuit junction
50......... conduit 60......... body
61......... pedestal 62......... lid
63......... accommodating chamber 64......... joint
65......... hole 70......... retaining element
71......... packing ring 72......... medium fluid
80......... diaphragm
Embodiment
For reaching above-mentioned and other purpose, the technological means that it adopted, element and effect thereof now with a preferred embodiment, and cooperate correlative type to be described in detail as follows as for the present invention.
Shown in Fig. 1～4, the present invention mainly comprises: a body 10, a circuit board 30, a pressure sensitive IC31 and a diaphragm 20.
This body 10 is made up of a pedestal 11 and a lid 12.This pedestal 11 is provided with a groove and forms an accommodating chamber 13 near lid 12 1 sides.This pedestal 11 have a joint 14 with in order to conduction hydraulic pressure or the connecting pipe of air pressure is connected, and be provided with a hole 15 of leading to this accommodating chamber 13, so that hydraulic pressure or air pressure can enter among this accommodating chamber 13 in this joint 14.
As shown in Figure 1, this pressure sensitive IC31 is arranged on the position that this circuit board 30 is positioned at the accommodating chamber 13 of this body 10, and the direction of its setting is the hole 15 towards this pedestal, and make the pressure that enters into the fluid of accommodating chamber 13 from this hole 15 can be transmitted to this pressure sensitive IC31, and make this pressure sensitive IC can detect the size of the hydrodynamic pressure that enters these accommodating chamber 13 inside.
The present invention is characterized in to have a diaphragm 20, this pressure sensitive IC31 can be coated on wherein, and in the medium fluid of the full insulativity of these diaphragm 20 inner fillings, so that this diaphragm 20 when bearing hydrodynamic pressure, can conduct to pressure this pressure sensitive IC31.As shown in Figure 3, the diaphragm 20 of first embodiment of the invention has a semicircular recess 21; And a flange 22 that is arranged on recess 21 outer rims, this recess 21 can be coated on this pressure sensitive IC31 wherein fully, and in the medium fluid 23 of its inner filling insulativity; And this flange 22 is pressed the surface that is posted by this circuit board 30 by this pedestal 11, and makes that formation seals between this recess 21 and the circuit board 30, and makes medium fluid can not leak.
Shown in Fig. 2～3, the mounting means of this diaphragm 20 is to utilize pedestal 11 that the flange 22 of diaphragm 20 is pressed on the surface of circuit board 30, makes the surface of itself and circuit board 30 form sealing.As shown in Figure 2, this diaphragm 20 is arranged on circuit board 30 side near these pedestals 11, and as shown in Figure 3, the side that this pedestal 11 and this diaphragm 20 are approaching, be provided with one and the mutual corresponding groove 16 of flange 22 shapes of this diaphragm 20, this groove 16 can engage mutually with this flange 22.Utilize some bolt 17 sealed in addition between this base and cover body 12, when locking, can force this pedestal 11 to be exerted pressure, and flange 22 packings of this diaphragm 20 are fixed on the surface of circuit board 30, and reach the effect of sealing by the groove 16 on this pedestal 11 to diaphragm 20.
As shown in Figure 4, be use embodiment of the present invention, wherein the joint 14 of body 10 is connected with a conduit (not shown), and conduit can conduct the hole 15 that hydraulic pressure or air pressure equal pressure fluid enter into this joint 14.Enter after the accommodating chamber 13 and work as pressure fluid, because the buffer action of diaphragm 20, therefore pressure fluid can not touch pressure sensitive IC31 and circuit board 30, and can be isolated with the conducting element on it, makes it can directly not contact from the hole 15 fluids that enter into accommodating chamber.And this diaphragm 20 has elasticity, when it bears accommodating chamber 13 internal fluid pressures, the recess 21 of this diaphragm 20 can produce compression deformation, therefore make the medium fluid 23 of recess 21 inside be compressed, and the pressure that this diaphragm 20 is born is conducted to this pressure sensitive IC31, and make it can detect the numerical value of the hydrodynamic pressure that this diaphragm 20 born.
The buffer action of the medium fluid 23 by this diaphragm 20 and insulativity, make this pressure sensitive IC31 can directly not contact from the hole 15 fluids that enter accommodating chamber 13, and make pressure sensitive IC31 and circuit board 30 can not produce short circuit phenomenon because contacting conducting fluid, therefore make the present invention can be used in the occasion that detecting hydraulic pressure or oil pressure etc. have the hydrodynamic pressure of electric conductivity.And the present invention do not need to add any middle conduction mechanism when being used in the pressure applications of conducting fluids such as detecting hydraulic pressure or oil pressure again, thus can avoid because the error that middle conduction mechanism produces, and the precision of raising pressure-sensing.
As shown in Figure 5, be the second embodiment of the present invention, comprising: a body 60, this body 60 have a pedestal 61 and a lid 62, are provided with an accommodating chamber 63 between this pedestal 61 and the lid 62.This pedestal 61 has a joint 64 in addition, and the central authorities of joint 64 are provided with a hole 65, can make fluid enter among this accommodating chamber 63; And a circuit board 30A, be arranged among the accommodating chamber 63, and the one end stretches out in the outside of this body 60, on this circuit board 30A, be provided with a pressure sensitive IC31A, with the circuit junction that is connected with external circuit in order to voltage supply power induction IC.
The difference of second embodiment and first embodiment, be installation and the fixed form that is its diaphragm, the employed diaphragm 80 of this embodiment is a circular flat elastic strip body, and be fixed on the end of this accommodating chamber 63 near this hole 65 by a retaining element 70, and this accommodating chamber 63 can be divided into two partly, prevent that 65 fluids that enter enter the side of this accommodating chamber near this pressure sensitive IC31A from the hole.
Shown in Fig. 5～6, this retaining element 70 generally in a tubular form, the one end is resisted against this diaphragm 80 and forces the edge of diaphragm 80 to be pushed against in the end face of this accommodating chamber 63; And its other end is near circuit board 30A, and is provided with a packing ring 71 in retaining element 70 and circuit board 30A surface of contact, with so that form closed state between retaining element 70 and the circuit board 30.
In the confined space between diaphragm 80 and circuit board 30A and pressure sensitive IC31A, fill up the medium fluid 72 of insulativity, therefore make behind diaphragm 80 pressurizeds, pressure can be passed to this pressure sensitive IC31A.
Second embodiment and first embodiment compare down, though its diaphragm shapes and fixed form difference, but principle that it used and the effect of being reached are all identical, therefore can avoid pressure sensitive IC to be contacted and situation of short circuit equally, and need not add the pressure that other referral office just can be applicable to detect conducting fluid by conducting fluid.
Claims (2)
1. pressure sensing device for insulated integrated circuit, comprising:
One body is made up of a pedestal and a lid, has an accommodating chamber in it, and a pressure sensitive integrated circuit is set in this accommodating chamber; And establish a hole in the body and enter into this accommodating chamber for fluid;
In this accommodating chamber, be provided with a diaphragm between the hole of this body and this pressure sensitive integrated circuit, this diaphragm has elasticity, forms a confined space between this diaphragm and the pressure sensitive integrated circuit, and fill up the insulativity medium fluid in this confined space; The fluid that is entered accommodating chamber by this hole contacts this diaphragm, make this diaphragm bear by this hole enter accommodating chamber fluid pressure and produce distortion, and compress aforementioned medium fluid via this diaphragm, the pressure that makes diaphragm bear is passed to this pressure sensitive integrated circuit, therefore makes this pressure sensitive integrated circuit detect the pressure of the fluid in the hole that enters aforementioned body;
By above elements combination, make it can directly not contact the fluid that enters this accommodating chamber from this hole by isolated this pressure sensitive integrated circuit of this diaphragm and insulativity medium fluid, therefore can avoid the pressure sensitive integrated circuit situation that is short-circuited, it is characterized in that:
This pressure sensitive integrated circuit is arranged on the circuit board; This diaphragm is fixed in this accommodating chamber inside by a retaining element, and this accommodating chamber is divided into two partly; And this retaining element contacts with this circuit board and partly a containment member is set, and it is airtight to make in this accommodating chamber that the space between this circuit board and diaphragm forms, and in this confined space filling insulativity medium fluid.
2. pressure sensing device for insulated integrated circuit as claimed in claim 1, it is characterized in that: this diaphragm is a circular flat lamellar body, and this retaining element in a tubular form, the one end is resisted against this diaphragm and forces the edge of diaphragm to be pushed against end face in this accommodating chamber, and the other end is near circuit board, and in retaining element and circuit board surface of contact described containment member is set, with so that form closed state between retaining element and the circuit board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910004503A CN101520356A (en) | 2006-06-26 | 2006-06-26 | Pressure sensing device for insulated integrated circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910004503A CN101520356A (en) | 2006-06-26 | 2006-06-26 | Pressure sensing device for insulated integrated circuit |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006100935404A Division CN100535623C (en) | 2006-06-26 | 2006-06-26 | Insulation type IC pressure sensing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101520356A true CN101520356A (en) | 2009-09-02 |
Family
ID=41081067
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200910004503A Pending CN101520356A (en) | 2006-06-26 | 2006-06-26 | Pressure sensing device for insulated integrated circuit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101520356A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104510330A (en) * | 2013-09-27 | 2015-04-15 | 美的集团股份有限公司 | Pressure sensor and pressure cooker |
| CN111372667A (en) * | 2017-12-26 | 2020-07-03 | 雅玛信过滤器株式会社 | Filter device |
| JP2021060273A (en) * | 2019-10-07 | 2021-04-15 | 株式会社不二工機 | Pressure sensor |
| CN113390703A (en) * | 2020-03-13 | 2021-09-14 | 致茂电子(苏州)有限公司 | Pressure generating device for self-adaptive adjustment of force application angle |
-
2006
- 2006-06-26 CN CN200910004503A patent/CN101520356A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104510330A (en) * | 2013-09-27 | 2015-04-15 | 美的集团股份有限公司 | Pressure sensor and pressure cooker |
| CN104510330B (en) * | 2013-09-27 | 2017-10-27 | 美的集团股份有限公司 | Pressure sensor and pressure cooker |
| CN111372667A (en) * | 2017-12-26 | 2020-07-03 | 雅玛信过滤器株式会社 | Filter device |
| CN111372667B (en) * | 2017-12-26 | 2022-06-10 | 雅玛信过滤器株式会社 | Filter device |
| JP2021060273A (en) * | 2019-10-07 | 2021-04-15 | 株式会社不二工機 | Pressure sensor |
| JP7345173B2 (en) | 2019-10-07 | 2023-09-15 | 株式会社不二工機 | pressure sensor |
| CN113390703A (en) * | 2020-03-13 | 2021-09-14 | 致茂电子(苏州)有限公司 | Pressure generating device for self-adaptive adjustment of force application angle |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20090902 |