CN101502812B - Composite type water tank device - Google Patents

Abstract

A composite water tank device belongs to the field of temperature control water tank device. The water tank is formed in such a manner that the water tank is divided into an upper water compensating tank and a lower water heating tank by a heat-insulation layer; holes are arranged on the heat-insulation layer to form one or more than one water compensating openings used for directly compensating solution to the water heating tank; the solution flows through a water inlet, and is heated by the heater of the water heating tank and then discharged from a water outlet. The water tank has the characteristics of compact structure, small volume and high temperature control accuracy.

Description

A kind of composite type water tank device

Technical field

The present invention relates to temperature control water tank device, be specifically related to a kind of composite structured cistern device that is used to realize the solution temperature control.

Background technology

In semiconductor manufacturing facility or other large scale system equipment, different technical process need be kept constant working temperature, and temperature-controlled precision requires very high (the highest temperature-controlled precision reach ± 0.01 ℃) at present, this just requires special-purpose temperature control device to take the heat that load produces out of equipment endlessly, to control the constant of working cell temperature, the conductor temperature cooler utilizes liquid cycling hot exchange principle exactly, balance temperature control by heating, refrigeration satisfies the semiconductor manufacturing to temperature controlled requirement.Figure 1 shows that water tank is applied to the temperature cooler schematic block diagram of semiconductor equipment; enter refrigeration system from the hot solution of semiconductor equipment after through liquid outlet, ball valve; after the refrigeration system refrigeration; solution temperature is lower than the temperature control setting value of requirement; therefore can input to water tank more usually, through reentering in the semiconductor equipment behind pump, ball valve, the liquid return hole.The basic role of water tank is that the temperature control that makes the solution of water tank output accurately be controlled at requirement sets value, to satisfy the job requirement of semiconductor equipment.

In the prior art, U.S. Patent number is 5323846 patent disclosure a kind ofly is used for the cistern device that fluid temperature is regulated, and it is used for the adjustment of electrophoresis process.In this device, not to the direct moisturizing of expansion tank, but carry out moisturizing on pipeline between expansion tank and the heating water tank, moisturizing is regulated and is finished by magnetic valve, and the water source is introduced from water supplement port; Exhaust outlet is placed on the exhaust ports of expansion tank, when being used for opening water pump for the first time, gets rid of the gas in pipeline and the water tank, and simultaneously, exhaust outlet also serves as the effect of water filling port, and expansion tank is mainly finished the function of water filling, exhaust, draining; Evaporimeter is arranged in the heating water tank, and heater etc. are used to carry out the temperature control heat exchange, and this method advantage that expansion tank and heating water tank are separated independent design has: moisturizing, exhaust, water filling etc. are dropped to minimum to the influence of temperature control, guarantee that leaving water temperature is stable.Also have simultaneously following shortcoming: water tank occupies larger volume in the machine overall structure on the one hand, and structure is done greatly, disperseed; On the other hand, moisturizing in the pipeline in flowing, the liquid resistance is big, causes moisturizing not smooth easily.

Another U.S. Patent number a kind of liquid temperature-controlling system that has been 6508068 patent disclosure with water tank, Figure 2 shows that a kind of liquid temperature-controlling system of this patent disclosure with water tank, gather leaving water temperature by temperature sensor (14), deliver to controller (12), controller is regulated output of refrigeration system (11) cold and mixed flow control valve (13) aperture by computing, to reach the purpose of control load (H) temperature, as can be seen from Figure 2, device is when waterbox design, used the separately principle of independent design of expansion tank (T) and evaporation water tank (8) equally, two water tanks link by pipeline (15), directly be delivered to load by water pump after the hot and cold water mixed flow, though this method for designing has been cancelled heater, control principle is simple, but can only be applicable to the less demanding occasion of temperature-controlled precision, device is used has very big limitation; In addition, two water tank independent design have increased structural volume equally, and are compact inadequately.

Summary of the invention

The technical problem to be solved in the present invention is, a kind of compact conformation, volume is little, temperature-controlled precision is high cistern device are provided.

For solving the problems of the technologies described above, composite type water tank device provided by the invention is set to the water supply tank on top and the heating water tank of bottom by the isolation of thermal insulation layer water tank; The water supply tank top is provided with water filling port, and water inlet, delivery port and heater are set in the heating water tank, by perforate on the thermal insulation layer, forms the one or more water supplement port that is used for direct to the heating water tank make-up solution; Solution is exported from delivery port via water inlet, after the heater heating of heating water tank.

As the preferred technique scheme, fixedly install in the described heating water tank and be useful on the deflector of prolongation, and be provided with the water fender that one or more are used for the even mixed flow of solution simultaneously from water inlet to delivery port liquid flow path.Described heating water tank is rectangular structure, and described water inlet and delivery port are arranged at the same side of rectangular structure heating water tank, and described deflector is perpendicular to the bottom surface of described side and heating water tank; Described water supplement port is arranged at the water inlet near zone, the solution that flows into via water supplement port and mix via the solution that water inlet flows into after heater via heating together, the solution heating is flowed out from delivery port at last after realize even mixed flow by the water fender that fixedly installs.Described deflector comprises that being used for part isolates the isolated part in heating water tank zone and the water diversion part that is used for the arc surfaced of solution water conservancy diversion.Described water inlet, heater and water supplement port are arranged at the same side of relative deflector, and described delivery port is arranged at the opposite side of relative deflector.Described water fender is provided with kidney slot arranged side by side more than two.

According to composite type water tank device provided by the invention, wherein, the minimum volume V of heating water tank ₀The formula of calculating institute foundation be:

${\mathrm{<figure-callout\; id="0"\; label="V"\; filenames="H2009100458733E00052.png"\; state="\{\{state\}\}">V</figure-callout>}}_0\&GreaterEqual;\frac{V_1\&CenterDot;(T_0-T_1-\mathrm{\&tau;})}{\mathrm{\&tau;}}$

Wherein, V ₁Be the volume of the cold liquid that enters heating water tank in the unit interval, T ₁Be the temperature of described cold liquid, T ₀Be the temperature control design temperature, τ is that the maximum temperature in the unit interval appreciates.

The volume of described water supply tank is greater than 1.1 times of the liquid capacity sum in the semiconductor temperature-control cavity of water tank outside, whole pipeline, the refrigeration system.

According to composite type water tank device provided by the invention, wherein, described water supplement port is arranged at the water inlet near zone, heater via heating together after mixing via the solution of water supplement port inflow with via the solution that water inlet flows into.Described thermal insulation layer is ethylene-vinyl acetate copolymer (Ethylene-vinyl acetate, EVA) heat-barrier material.Described composite type water tank device also comprises the level monitoring meter that communicates with heating water tank solution.

According to composite type water tank device provided by the invention, wherein, described heater adopts one or more heating tubes; Described heating tube runs through the top that thermal insulation layer and water supply tank are fixed in water tank; Only the heating tube inside below thermal insulation layer is provided with heater strip.Described composite type water tank also comprises the heating control apparatus that is connected with heater.

Technique effect of the present invention is: the composite type water tank of (1) bilayer is except basic water storage function, increased inner moisturizing function, change in the past this class device with the defective of expansion tank and heating water tank independent design, structure is compact more, dwindled the water tank overall volume, reduced the pipe leakage risk, and the tubes rows wave is moving little.(2) heating water tank and and the two-layer equation cisten mechanism of water supply tank, it is little not only to add heat, and can guarantee absolute no dry combustion method by the straight-through moisturizing of the water supplement port of thermal insulation layer, effectively minimizing adds the security feature of heat power consumption, raising system.(3) further, inside deflector, the mixed flow structural design of heating water tank part improve heating temperature control uniformity, further improve the accuracy of temperature control of water tank.

Description of drawings

Fig. 1 is the temperature cooler schematic block diagram that water tank is applied to semiconductor equipment;

Fig. 2 is the disclosed a kind of liquid temperature-controlling system with water tank of prior art;

Fig. 3 is the structure embodiment schematic diagram of composite type water tank device provided by the present invention;

Fig. 4 is the model schematic diagram that calculates the heating water tank minimum volume;

Fig. 5 and Fig. 6 are the another structure embodiment schematic diagrames of composite type water tank device provided by the present invention;

Fig. 7 is the A-A position profile view of water tank shown in Figure 5;

Fig. 8 is the deflector structure schematic diagram;

Fig. 9 is the block water plate structure schematic diagram.

The specific embodiment

For making the purpose, technical solutions and advantages of the present invention clearer, the present invention is described in further detail below in conjunction with accompanying drawing.

Figure 3 shows that the structure embodiment schematic diagram of composite type water tank device provided by the present invention.The cross-sectional view that has represented the composite type water tank device front as shown in Figure 3, the water tank 100 of this embodiment includes water supply tank 110, heating water tank 120, heater 121, water inlet 122, delivery port 123, discharge outlet 124, thermal insulation layer 130, water filling port 111, draining valve 124, level monitoring meter 132, water filling port 132 and heater control device 128.Water tank 100 is a rectangular structure, and it also can be square, prismatoid structure, and its shape can be according to the design of concrete application need, can make by metal material etc., water tank 100 shown in Figure 3 be modes of emplacement signal when normally using.Wherein, thermal insulation layer 130 is fixedly set in the middle part of water tank 100 inside, directly water tank 100 is isolated into two parts up and down, and wherein top is divided into water supply tank 110, and the bottom is divided into heating water tank 120.The top of water supply tank 110 has water filling port 111, can in water supply tank 110, inject needed solution (as the signal of the figure direction of arrow) by water filling port, when the cistern device daily use, water supply tank 110 keeps certain solution, and the dotted line among the figure is illustrated as solution; Water filling port can serve as simultaneously exhaust outlet to be used, and for example when first time water filling, starts the water pump of water tank outside, and when solution was filled with external pipe, the bubble in the external pipe can be discharged by water filling port.By the water supplement port of opening at thermal insulation layer, the solution of water supply tank 110 can constantly be mended in the heating water tank 120 under self gravitation, have at water supply tank under the situation of solution, solution in the water supply tank can flow into heating water tank 120 under the natural gravity situation, thereby guarantees that heating water tank is full of required hydronic liquid is arranged.The hydronic liquid of need in the heating water tank is identical with the liquid that injects water supply tank from water filling port.In this embodiment, the water injection hole in the thermal insulation layer is one, can open a plurality of water injection holes according to actual needs, but be preferably one.Thermal insulation layer 130 can (Ethylene-vinyl acetate, EVA) heat-barrier material also can be that double-deck EVA heat-barrier material is isolated and formed double-decker, further improve effect of heat insulation for the ethylene-vinyl acetate copolymer of the waterproof of individual layer.Can make the heat of the solution in the heating water tank be not easy to conduct by thermal insulation layer to water supply tank.Cuboid one flank side surface of heating water tank 120 is provided with water inlet 122, be provided with delivery port 123 in the another side side, required hydronic solution injects then from water inlet and flow out (as the signal of the figure direction of arrow) from delivery port after heater 121 heating of heating water tank 120, and water inlet and the delivery port position on heating water tank 120 is not limited by the present invention.In this embodiment, adopt three heating tubes that have heater strip as heater, heater 121 is fixed by the top of thermal insulation layer 130 and water tank 100, the thermal insulation layer of heater is provided with heater strip with the heating tube of lower part (part in the heating water tank), and with the heating tube of top (part in the water supply tank) heater strip not being set at thermal insulation layer, heater strip preferentially adopts the good nickel filament of anti-dry performance as heating material.The quantity of heating tube is not limited by the present invention.Heater 121 is electrically connected with external heated control device 128, by heating control apparatus can control heater 121 heating power, thereby reach the temperature of predefined liquid of discharging from delivery port.In the prior art, inflow temperature parameter and pump rotary speed parameter that control heater 121 can feed back to according to the temperature sensor (not shown) of the water inlet position setting of heating water tank, the water pump of water tank outside etc. are regulated the heating power of heater 121.

Continue as shown in Figure 3, the bottom of heating water tank 120 is provided with discharge outlet 123, and discharge outlet 123 is connected with draining valve 124 pipelines, and draining valve 124 is opened, and can thoroughly drain the liquid in the water tank.Further, in order to guarantee when the heater of heating water tank heats, to prevent that liquid from dryouting, be provided with a level monitoring meter 132 in water tank 100 sides, the bottom of level monitoring meter 132 communicates with heating water tank, its bottom is arranged on the allowed minimum liquid level of heating water tank (during the caution liquid level), in this embodiment, the bottom interface of level monitoring meter is arranged on the below of thermal insulation layer slightly partially.During normal the use, the liquid level of level monitoring meter 132 is identical with liquid level in the water tank, when because fortuitous event when causing solution in the heating water tank to be lower than the caution liquid level, does not have in the level monitoring meter shows, therefore can stop the heater heating soon, prevent that dry combustion method from damaging.

Continue as shown in Figure 3, the volume of heating water tank is by water tank and thermal insulation layer decision, generally, the volume of heating water tank is big more, under the certain situation of temperature, the heat that the solution of heating water tank outwards transmits is many more, therefore should reduce the volume of heating water tank according to physical condition as far as possible, add heat with minimizing, reduce the water tank power consumption.Figure 4 shows that the model schematic diagram that calculates the heating water tank minimum volume, the volume that enters heating water tank cold water in the unit interval is V1, and the temperature of cold water is T1, and the water tank volume is V ₀, the water temperature operating mode is T ₀(the temperature control design temperature of requirement is promptly from the temperature of the liquid of the outflow of delivery port), fluid density ρ, specific heat of liquid C _P, the maximum temperature rise τ of (is example with 1S) in the unit interval.The boundary condition of heating water tank design: V in the unit interval ₁After liter cold water entered heating water tank, the heating water tank temperature rise Δ T that causes was less than or equal to τ, and obviously, τ is less than minimum control accuracy.According to thermodynamic principles, establishing the unit interval (1S) back (cold water enters heating water tank) water temperature is T ', does not consider the ratio thermal change that water temperature causes, draws formula (1) according to law of conservation of energy.

ρ·C _P·(V ₀+V ₁)·T′＝ρ·C _P·V ₀·T ₀+ρ·C _P·V ₁·T ₁ (1)

Derive formula (2) according to formula (1):

$T^{\&prime;}=\frac{{\mathrm{<figure-callout\; id="0"\; label="V"\; filenames="H2009100458733E00052.png"\; state="\{\{state\}\}">V</figure-callout>}}_0\&CenterDot;{\mathrm{<figure-callout\; id="0"\; label="T"\; filenames="H2009100458733E00052.png"\; state="\{\{state\}\}">T</figure-callout>}}_0+V_1\&CenterDot;T_1}{V_0+V_1}---\left(2\right)$

Further, the substitution boundary condition is obtained water tank capacity to formula (2), and concrete derivation is as shown in the formula (3):

$\mathrm{\&Delta;T}=T_0-T^{\&prime;}\&le;\mathrm{\&tau;}\&DoubleLeftRightArrow;T^{\&prime;}\&GreaterEqual;T_0-\mathrm{\&tau;}\&DoubleLeftRightArrow;\frac{{\mathrm{<figure-callout\; id="0"\; label="V"\; filenames="H2009100458733E00052.png"\; state="\{\{state\}\}">V</figure-callout>}}_0\&CenterDot;{\mathrm{<figure-callout\; id="0"\; label="T"\; filenames="H2009100458733E00052.png"\; state="\{\{state\}\}">T</figure-callout>}}_0+V_1\&CenterDot;T_1}{{\mathrm{<figure-callout\; id="0"\; label="V"\; filenames="H2009100458733E00052.png"\; state="\{\{state\}\}">V</figure-callout>}}_0+V_1}\&GreaterEqual;T_0-\mathrm{\&tau;}\&DoubleLeftRightArrow;{\mathrm{<figure-callout\; id="0"\; label="V"\; filenames="H2009100458733E00052.png"\; state="\{\{state\}\}">V</figure-callout>}}_0\&GreaterEqual;\frac{V_1\&CenterDot;(T_0-T_1-\mathrm{\&tau;})}{\mathrm{\&tau;}}---\left(3\right)$

Therefore, volume V1, the temperature T 1 of cold water, the water temperature operating mode T of the volume of heating water tank minimum volume that can design and the cold water that enters heating water tank in the unit interval ₀And the maximum temperature rise τ in the unit interval is relevant.Wherein (T0-T1) reflected the temperature difference of water inlet and water outlet before and after the heating water tank, and V1 has reflected that the flow velocity of liquid, τ in the water tank have reflected the heating power of heater.The as far as possible little heating water tank of design volume such as V parameter 1 that therefore can be by requiring in advance, T1, τ, T0 specifically can be by setting the determining positions of thermal insulation layer, and thermal insulation layer down fixedly installs more, and the volume of heating water tank is more little.

Continue as shown in Figure 3, same, the volume of water supply tank is by water tank and thermal insulation layer decision.In conjunction with shown in Figure 1, generally, in order to satisfy when semiconductor equipment keeps in repair, the liquid leakage of not outflowing, but by temporary transient storage with in the form of water tank, realize the utilization again of liquid.Therefore the volume of water supply tank should be designed to more than 1.1 times of liquid capacity in semiconductor equipment, whole pipeline, the refrigeration system.At this moment, ball valve is closed, by pneumatic shuttle make semiconductor equipment, all the liquid in pipeline, the refrigeration system all can be pressed into water tank and be stored in the original water supply tank.

Fig. 5 and the another structure embodiment schematic diagram that Figure 6 shows that composite type water tank device provided by the present invention; Wherein Figure 5 shows that three-dimensional perspective, Figure 6 shows that from the three-dimensional perspective at visual angle, the back side from positive visual angle.As shown in Figure 5 and Figure 6, the difference of this embodiment and maximum embodiment illustrated in fig. 3 is: increase in heating water tank and be provided with deflector 125 and water fender 126.As shown in Figure 5 and Figure 6, composite type water tank device comprises: water supply tank 110, heating water tank 120, heater 121, water inlet 122, delivery port 123, discharge outlet 124, thermal insulation layer 130, water filling port 111, draining valve 124, level monitoring meter 132, water filling port 132, deflector 125 and water fender 126.In this embodiment, water tank integral body is rectangular structure, and heating water tank so integral body also are rectangular structure, and water inlet 122 and delivery port 123 on the heating water tank 120 are arranged on same broad side surface; Deflector that heating water tank is 120 li 125 be arranged in parallel with the long side surface of heating water tank, with 120 local isolation of heating water tank, thereby has prolonged solution from path that the delivery port of water inlet is flowed through; Heating water tank is provided with the water fender that is used for the even mixed flow of solution more than two for 120 li simultaneously, and the quantity of water fender is not limited by the present invention.Further pass through in conjunction with Fig. 7, clearly the interior location structure of clear and definite heating water tank.

Figure 7 shows that the A-A position profile vertical view of water tank shown in Figure 5.As shown in Figure 7, water inlet and delivery port are distributed in the both sides of deflector 125, so solution must be mobile around deflector, thereby have prolonged flow of solution through the path, and the water supplement port on the thermal insulation layer is arranged on the water inlet near zone.Via the solution of water supplement port inflow with via heater via 121 heating together after the solution mixing of water inlet inflow, therefore, water supplement port, water inlet and heater are arranged on the same side with respect to deflector, and water fender is arranged on the opposite side that is provided with respect to deflector.The concrete structure of deflector as shown in Figure 8, deflector is divided into isolated part 1251 that is used for part isolation heating water tank zone and the water diversion part 1252 that is used for the arc surfaced of solution water conservancy diversion, the length of deflector is less than the length of heating water tank, the wide height that equals the volume of heating water tank substantially of deflector, thus deflector can fixedly install perpendicular to the broad side surface of heating water tank and the bottom surface of heating water tank.By deflector, water fender, water inlet, delivery port and water supplement port, heating water tank can be divided into mixed flow region, the thermal treatment zone, guide portion, four functional areas of homogeneity range (dividing) as dotted line among the figure.Wherein:

1, mixed flow region

In order to reduce the influence of moisturizing to temperature control, water supplement port 131 is placed on into water initiating terminal, here mixed flow region is accepted the moisturizing solution from the water supply tank of the water inlet solution of water tank outside and water tank inside, be guiding heating temperature control, the temperature of external solution before entering water tank is lower than the temperature control setting value, it is the main part of mixed flow, under the normal temperature control condition, the quantity of moisturizing seldom, and the water temperature of moisturizing is near normal temperature, and its water temperature influence after to mixed flow is little, but is enough to influence temperature-controlled precision, if water supplement port is put into after the thermal treatment zone, such influence is difficult to eliminate in follow-up liquid is flowed through the path.

2, the thermal treatment zone

In order to improve heating uniformity, characteristics according to this class water tank elongated shape, the layout of the heater in the thermal treatment zone adopts the parallel arrangement along water (flow) direction, change the defective of circumferential arrangement hot-spot in the past, evidence, the turbulent flow design of this transverse flow tube bundle has heating uniformity preferably.

3, guide portion

For the current solution after the guiding heating enters homogeneity range along path planning, guide portion one side design at deflector has 1/4 arc transition (being water diversion part shown in Figure 8), avoided the water impact of right-angle turning, the while guide portion has also been served as once makes the mixed uniformly function of solution.

4, homogeneity range

In order to improve temperature-controlled precision, utilize half zone design of the deflector isolation formation of heating water tank to be homogeneity range, middle water fender design has a plurality of kidney slots arranged side by side (as shown in Figure 9), two water fenders are in both sides dislocation placement, if water tank is long, can also increase water fender, guarantee that the even effect of heating back mixed flow reaches best.

Continue as shown in Figure 5 and Figure 6, when water tank 100 is applied in the system shown in Figure 1, the solution temperature value that liquid return hole requires is temperature control setting value T3 (also being the problem of the solution of water outlet of water tank outflow), semiconductor equipment is T4 from the temperature value of the solution that liquid outlet flows out, refrigeration system cooling solutions such as compressed machine become temperature T 5, T5＜T3＜T4.Solution enters heating water tank 120 from the water inlet 122 of water tank, passes through heater 121, the water fender 126 of heating water tank then, discharges from delivery port 123.When the solution of heating water tank reduces owing to semiconductor equipment consume or leakage etc., inject the solution of normal temperature to water supply tank 110 from the inlet 111 of water tank, solution can mend heating water tank from the water supplement port the water supply tank 110 131, with the solution mixed flow that enters from water inlet, can monitor the liquid level of water tank simultaneously by liquid level monitoring meter 132 in real time, prevent dry combustion method.Solution in the water supply tank is not heated, and makes the heat in the heating water tank be not easy to conduct to water supply tank by thermal insulation layer.By the solution of this water tank 100, its accuracy of temperature control reaches ± and 0.5 ℃, temperature control setting value road scope covers-30 ℃ to 90 ℃.

Under situation without departing from the spirit and scope of the present invention, can also constitute many very embodiment of big difference that have.Should be appreciated that except as defined by the appended claims, the invention is not restricted at the specific embodiment described in the specification.

Claims (14)

1. a composite type water tank device is characterized in that, described water tank is set to the water supply tank on top and the heating water tank of bottom by the isolation of thermal insulation layer water tank; The water supply tank top is provided with water filling port, and water inlet, delivery port and heater are set in the heating water tank; By perforate on the thermal insulation layer, form the more than one water supplement port that is used for direct to the heating water tank make-up solution; Solution is exported from delivery port via water inlet, after the heater heating of heating water tank.

2. composite type water tank device according to claim 1 is characterized in that described water supplement port is arranged at the water inlet near zone, heater via heating together after mixing via the solution of water supplement port inflow with via the solution that water inlet flows into.

3. composite type water tank device according to claim 1 is characterized in that, fixedly installs in the described heating water tank to be useful on the deflector of prolongation from water inlet to delivery port liquid flow path, and is provided with the water fender that is used for the even mixed flow of solution more than simultaneously.

4. composite type water tank device according to claim 3, it is characterized in that, described heating water tank is rectangular structure, and described water inlet and delivery port are arranged at the same side of rectangular structure heating water tank, and described deflector is perpendicular to the bottom surface of described side and heating water tank; Described water supplement port is arranged at the water inlet near zone, the solution that flows into via water supplement port and mix via the solution that water inlet flows into after heater via heating together, the solution heating is flowed out from delivery port at last after realize even mixed flow by the water fender that fixedly installs.

5. composite type water tank device according to claim 4 is characterized in that, described deflector comprises that being used for part isolates the isolated part in heating water tank zone and the water diversion part that is used for the arc surfaced of solution water conservancy diversion.

6. composite type water tank device according to claim 4 is characterized in that described water inlet, heater and water supplement port are arranged at the same side of relative deflector, and described delivery port is arranged at the opposite side of relative deflector.

7. according to claim 3 or 4 described composite type water tank devices, it is characterized in that described water fender is provided with kidney slot arranged side by side more than two.

8. composite type water tank device according to claim 1 is characterized in that, described thermal insulation layer is an ethylene-vinyl acetate copolymer.

9. composite type water tank device according to claim 1 is characterized in that, described composite type water tank device also comprises the level monitoring meter that communicates with heating water tank solution.

10. composite type water tank device according to claim 1 is characterized in that, described heating water tank bottom is provided with discharge outlet.

11. composite type water tank device according to claim 1 is characterized in that, the minimum volume V of described heating water tank ₀The formula of calculating institute foundation be:

$V_0\&GreaterEqual;\frac{V_1\&CenterDot;(T_0-T_1-\mathrm{\&tau;})}{\mathrm{\&tau;}}$

Wherein, V ₁Be the volume of the cold liquid that enters heating water tank in the unit interval, T ₁Be the temperature of described cold liquid, T ₀Be the temperature control design temperature, τ is that the maximum temperature in the unit interval appreciates.

12. composite type water tank device according to claim 1 is characterized in that, the volume of described water supply tank is greater than 1.1 times of the liquid capacity sum in the semiconductor equipment temperature control cavity of water tank outside, whole pipeline and the refrigeration system.

13. composite type water tank device according to claim 1 is characterized in that, described heater adopts more than one heating tube; Described heating tube runs through the top that thermal insulation layer and water supply tank are fixed in water tank; Only the heating tube inside below thermal insulation layer is provided with heater strip.

14. composite type water tank device according to claim 1 is characterized in that, described composite type water tank also comprises the heating control apparatus that is connected with heater.

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