CN101502699B - Implantation type bioelectrode and method for producing the same - Google Patents

Implantation type bioelectrode and method for producing the same Download PDF

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Publication number
CN101502699B
CN101502699B CN2009100214508A CN200910021450A CN101502699B CN 101502699 B CN101502699 B CN 101502699B CN 2009100214508 A CN2009100214508 A CN 2009100214508A CN 200910021450 A CN200910021450 A CN 200910021450A CN 101502699 B CN101502699 B CN 101502699B
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electrode
bioelectrode
point
substrate
link
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CN101502699A (en
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刘亚雄
秦歌
丁玉成
卢秉恒
祁夏萍
杜如坤
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Xian Jiaotong University
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Xian Jiaotong University
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Abstract

The invention relates to an implanted bioelectrode and a manufacturing method thereof, belonging to the technical field of micro manufacturing. An implanted bioelectrode comprises electrode stimulating points arranged on a Si substrate or glass substrate, electrode recording points positioned at the head of the work end and a metal micro wire which is positioned on a metal ring at the electrode connecting end and used for connecting the stimulating points and the end metal ring and forming the recording points; the work end of the electrode is sealed by nondegradable high molecular material with good biocompatibility into an elliptic cylinder shape; the connecting end of the electrode is sealed into a cylinder shape; the stimulating points are distributed at the upper and lower sides of the elliptic cylinder face of the bioelectrode work end; the recording points are positioned at the head of the bioelectrode work end. A manufacturing technique of the implanted bioelectrode comprises the following steps: 1) manufacturing stimulating points on the Si substrate or the glass substrate; 2) winding plural strands of micro wires into the spiral micro wires on a mandrel; 3) connecting the micro wire and placing the micro wire into a sealing die to form the work end of the bioelectrode; 4) being sheathed sequentially with the connecting end metal ring and being placed into the die to be sealed; and 5) truing to form two recording points to finish the micro-bioelectrode.

Description

A kind of implantating biological electrode and manufacture method thereof
Technical field
The invention belongs to the micro-fabrication technology field, particularly a kind of manufacture method that is suitable for the bioelectrode and the bioelectrode thereof of implant into body.
Background technology
The more serious nervous system disease of treatment in the modern medicine, as parkinsonism, optic nerve disorder, audition neurological disorder, paralysis and serious epilepsy or the like, the normal effective and efficient manner that adopts is at patient's brain deep target position implant electrode by surgical operation, utilize the stimulator battery to give electrode power supply, disease sites is carried out the long-time stimulus treatment.Whether the position for the treatment of successful key and at first be the art point of impact on target is accurate.Before operation, can make the particular location of operation target spot through CT scan according to anatomy relationship.But, rely on the localized target spot accuracy of CT scan that certain deviation is often arranged because brain deep target spot size, shape, direction are changeable, and exist individuality and differences of Physiological; And in cerebral tissue, can verify and correct that therefore the record result according to electrode determines that target spot is just important in operation process to target position with the electricity physiological signal of electrode record cell.Now the stimulating electrode of used implant into body is the millimeter ring electrode clinically, as the series of products that Medtronic Inc. produced, have 4 stimulating electrodes, its diameter is 1.26 millimeters, each electrode length is 1.5 millimeter, because its size is bigger, easily tissue is caused bigger infringement when implant into body; Power consumption is bigger, and the service life of stimulator battery is shorter relatively, and frequent replacing battery has increased patient's misery; The cost costliness, only one-sided implantation expense is about about 100,000 RMB; And this product does not have recording electrode, and the location of implant electrode can only lean on the coarse positioning of CT and the implantation passage that special-purpose little recording electrode thrusts electrode in advance accurately to locate, and extracts recording electrode behind the location, replants into stimulating electrode.Deviation may take place and cause therapeutic effect to descend in this mode because of stimulating electrode position when implanting.
What of the discharge cell that microelectrode recording arrives are closely related with the size of its electrode.The electrode that size is less, impedance be big (>1M Ω), records single celled discharge easily, even transmembrane potential in the cell; Larger-size electrode, what record during impedance less (<10K Ω) is the field potential of odd discharge cell.In cerebral tissue, the brain neuron cell size is not more than 100 microns, the microelectrode that uses in the operation, and when electrode size during less than 20 microns, what record is to be unit discharge.The flash-over characteristic of each cell (size of action potential and shape) is different, according to the unit discharge characteristic that microelectrode recording arrives, just can calculate the exact position of the electrode stimulating point 3 of electrode with respect to target spot.
In clinical research, also useful stimulating electrode carries out record as recording electrode pair cell discharge signal, but because the stimulating electrode size is bigger, its impedance is less, record for (many cells) discharge signal is not the discharge signal of individual cells, thereby cause accurately determining position that electrode rolls into a ball with respect to nucleus, can't accurately locate.Along with the development of silicon micromachining technology MEMS, manufacturing microelectrode and size more small electrode become possibility.Domestic and international many scholars have proposed different microelectrode structure and manufacture method thereof.The structure that has the function that stimulates and write down is simultaneously also arranged in these electrodes, but their position is positioned in the middle of the surface of electrode, only is suitable for implanting the record of the rear electrode peripheral cell signal of telecommunication.
Summary of the invention
At big impedance smaller defect of the existing size of existing microelectrode or deficiency, the objective of the invention is to, a kind of bigger implantating biological electrode of the less impedance of size with stimulation and writing function is provided.This bioelectrode can provide the stimulus signal and the record cell signal of telecommunication respectively, the electrode measuring point is positioned at the head of electrode, its size range is 5~20 microns, born of the same parents' flash-over characteristic during implantation, can determine the why cell of position of this cell, can calculate the position of electrode thus, thereby carry out accurate localization with respect to target spot.The bioelectrode that is provided, the rehabilitation of the behavior disorder that can cause for nervous system disease provide accurate localization to implant and better therapeutic effect, can be used as the stimulation/recording electrode of long-term implant into body.
Technical scheme of the present invention is as follows:
A kind of implantating biological electrode comprises electrode stimulating point, electrode measuring point and link becket, and the electrode stimulating point is arranged on Si substrate or the substrate of glass; Directly encapsulate by the metal micro wiring and to form the electrode measuring point; Link becket, electrode stimulating point, electrode measuring point are connected by the metal micro wiring; The working end of bioelectrode is packaged into the insulating barrier of oval column by non-degraded macromolecular material; At the link of bioelectrode, be packaged into by non-degraded macromolecular material cylindric, the junction of the transition face between the cylindric and oval column between metal micro wiring and Si substrate or substrate of glass; The electrode stimulating point that is array distribution is distributed in the two sides up and down of bioelectrode working end elliptic cylinder; The electrode measuring point is arranged at the head of bioelectrode working end and stretches out in head.
Described metal micro wiring is made of metal micro wiring platinumiridio or rustless steel, is the helical structure of hollow; Its surface parcel one layer insulating, its material is a macromolecular material.
Described macromolecular material is as polyurethane, Teflon or silicone rubber.
Described electrode stimulating point is made of metallic film platinum or platinumiridio, and the surface of described electrode stimulating point is lower than insulating barrier.
Described electrode stimulating point is by the link becket of metal micro wiring, electrode link and the signal conduction that is connected realization electrode stimulating point and external circuit of external circuit.
Described insulating barrier is made of non-degraded macromolecular material polyurethane, Teflon or silicone rubber.
Described link becket is at least one.Described electrode stimulating point is at least a place.
A kind of preparation technology of implantating biological electrode may further comprise the steps:
1) electrode stimulating point and the circuit lead that on Si substrate or substrate of glass, has the metallic film structure with Si micro-processing technology MEMS processing;
2) on axle, micro wiring turned to piped spirality metal micro wiring structure, stranded conductor mutually insulated;
3) with ultrasonic bonding Bonding or electro-plating method one end of metal micro wiring and the circuit lead of Si substrate or substrate of glass top electrode stimulation point are connected, lead is put in the encapsulating mould with axle, with the stretching substrate both sides that are fixed on electrode stimulating point of the micro wiring that is used to form the electrode measuring point, form the working end of bioelectrode with the method encapsulation of hot injection moulding or room temperature injection moulding;
4) other end at the metal micro wiring puts the link becket successively, connected micro wiring is moved near the link becket, and with the link becket that will be connected with the welding method connect, put it into then in the corresponding mould, encapsulate with the method for hot injection moulding or room temperature injection moulding;
5) cast gate is removed in finishing, goes axle, and 2 micro wirings that expose the bioelectrode head that are used to form the electrode measuring point after the encapsulation are cut off, and forms 2 electrode measuring points, finishes the manufacturing of implantating biological electrode.
The present invention compared with prior art, its technical characterstic that brings is: utilize the Si substrate of silicon micromachining technology MEMS preparation or the electrode stimulating point electrode on the substrate of glass, and utilize encapsulation technology to form the electrode measuring point at the head of bioelectrode, overall dimensions is less, avoids the damage to organizing when surgery is implanted as far as possible; Production cost is low, greatly reduces the expense that surgical operation is implanted, and the chronicity that helps improving the therapeutic effect of electrode and realize electrode is implanted and used.
Description of drawings
Fig. 1 is the overall structure sketch map of implantable bioartificial electrode of the present invention;
Fig. 2 is the perspective view of implantating biological electrode of the present invention;
Fig. 3 is the working end enlarged diagram of implantating biological electrode of the present invention;
Fig. 4 is the profile of the working end of implantating biological electrode of the present invention along the A-A direction;
Label among the figure is represented respectively: the link becket 1 of implantating biological electrode; The metal micro wiring 2 of implanted electrode; The stimulation point 3 of implanted electrode working end; The measuring point 4 of implanted electrode working end; The insulating barrier 5 of electrode; The Si substrate of stimulation point 3 or substrate of glass 6.
The specific embodiment
The present invention is described in further detail below in conjunction with drawings and Examples.
As Fig. 1, Fig. 2, Fig. 3, shown in Figure 4, implantating biological electrode of the present invention is divided into link and working end, and linkage section comprises becket 1, and the working end comprises stimulation point 3 and forms measuring point 4.The becket 1 of link, be used for being connected with the external pulse device, its quantity adopts 6 according to stimulating the quantity with measuring point 4 to decide in the present embodiment, its material is selected biocompatibility, electric conductivity, good corrosion resistance and the higher material of intensity, as platinumiridio; Metal micro wiring 2 uses 6 in the present embodiment, wherein 4 are used for being connected with stimulation point 3 on Si substrate or the substrate of glass, and remaining 2 are used to form measuring point 4; The number of stimulation point 3 and measuring point 4 can be decided according to the specific requirement of implanted target spot, the stimulation point 3 of working end, constitute by the metallic film on Si substrate or the substrate of glass 6, it is a bilateral structure, present embodiment adopts 8 stimulation points 3 (both sides are each 4 up and down), 2 measuring points 4, measuring point 4 is positioned at the both sides of the working end apical head of bioelectrode, by diameter is that micron-sized metal micro wiring 2 directly forms, because the signal that is write down is the signal of individual cells, therefore its size range is 5~20 microns, and its material is chosen as biocompatibility, electric conductivity, the metal material of good corrosion resistance is as platinumiridio; For guaranteeing the overall flexibility of implanted electrode, metal micro wiring 2 is turned to the spiral type of hollow, being connected of metal micro wiring 2 and link becket 1 can be by being welded, and metal material is selected the material of biocompatibility, electric conductivity, good corrosion resistance, as platinumiridio or rustless steel; Conducting between metal micro wiring 2 and the electrode stimulating point 3 can be carried out with methods such as welding, ultrasonic bonding Bonding or plating by the circuit lead of metal micro wiring 2 and stimulation point 3.Be the insulating properties between the multiply micro wiring of the metal micro wiring 2 that guarantees coiling, a layer insulating is wrapped up on the surface of metal micro wiring, insulating barrier is macromolecular material such as polyurethane, Teflon or the silicone rubber of good biocompatibility, insulating barrier 5, be used to encapsulate all surface except that stimulation point 3, measuring point 4, link becket, being chosen as of its material has good biocompatibility, intensity and the non-degraded macromolecular material of flexible macromolecule, as other polyurethane of medical grade, silicone rubber and Teflon etc.
The specific implementation process of present embodiment is as follows:
1) stimulation point 3 and the circuit lead that on Si substrate or substrate of glass 6, has the metallic film structure with Si micro-processing technology MEMS processing;
2) the metal micro wiring of the tape insulation layer of 6 5-20 microns of winding forms spiral metal micro wiring 2 on a single mandrel, after winding line, the lead-in wire that length in reserve is exposed at two ends is respectively applied for and being connected and the making of measuring point 4 of link becket 1, working end stimulation point 3;
3) wherein 4 of an end of the spiral metal micro wiring 2 that winds are connected with methods such as welding, ultrasonic bonding Bonding or plating with the circuit lead position of working end stimulation point 3, put it in the encapsulating mould then, a little 42 metal micro wirings, 2 stretching Si substrate or substrate of glass 6 both sides that are fixed on stimulation point 3 that will be used to keep a record form the working end of bioelectrode then with the method encapsulation of hot injection moulding or room temperature injection moulding.Bioelectrode working end encapsulation be shaped as oval column, stimulation point 3 is distributed in the both sides up and down of bioelectrode working end elliptic cylinder, is array distribution, the surface of described stimulation point 3 is lower than insulating barrier 5.
4) put the becket 1 of 6 links successively at the other end of spirality metal micro wiring 2, connected 6 metal micro wirings 2 are pulled out near the becket 1 that will connect, and with after the method for becket 1 usefulness that will be connected welding connects, put it in the corresponding mould, with the method for hot injection moulding or room temperature injection moulding, encapsulate with insulating barrier 5, encapsulation is shaped as cylindric.
5) cast gate is removed in finishing, goes axle, and the 2 metal micro wirings that expose the bioelectrode head that are used to form measuring point 4 after the encapsulation are cut off, and forms 2 measuring points 4, finishes the manufacturing of implantating biological electrode.
Bioelectrode of the present invention in use, target position in the implanted brain in the working end of bioelectrode, the link of electrode is fixed on the subcutaneous of ear back, the circuit lead-out wire of the pulse generator subcutaneous with implanting chest is connected, and the signal of telecommunication that pulse generator produces is directly delivered to the working end of implantable bioartificial electrode by the link of implant electrode.

Claims (9)

1. an implantating biological electrode comprises electrode stimulating point (3), electrode measuring point (4) and link becket (1), it is characterized in that: electrode stimulating point (3) is arranged on Si substrate or the substrate of glass (6); Directly encapsulate by the metal micro wiring and to form electrode measuring point (4); Link becket (1), electrode stimulating point (3), electrode measuring point (4) are connected by metal micro wiring (2); The working end of bioelectrode is packaged into the insulating barrier (5) of oval column by non-degraded macromolecular material; At the link of bioelectrode, be packaged into by non-degraded macromolecular material cylindric, the junction of the transition face between the cylindric and oval column between metal micro wiring (2) and Si substrate or substrate of glass (6); The electrode stimulating point (3) that is array distribution is distributed in the two sides up and down of bioelectrode working end elliptic cylinder; Electrode measuring point (4) is arranged at the head of bioelectrode working end and stretches out in head.
2. implantating biological electrode according to claim 1 is characterized in that, described metal micro wiring (2) is made of metal micro wiring platinumiridio or rustless steel, is the helical structure of hollow; Its surface parcel one layer insulating, its material is a macromolecular material.
3. implantating biological electrode according to claim 2 is characterized in that: described macromolecular material is polyurethane, Teflon or silicone rubber.
4. implantating biological electrode according to claim 1 is characterized in that, described electrode stimulating point (3) is made of metallic film platinum or platinumiridio, and the surface of described electrode stimulating point (3) is lower than insulating barrier (5).
5. implantating biological electrode according to claim 4, it is characterized in that described electrode stimulating point (3) is by the link becket (1) of metal micro wiring (2), electrode link and the signal conduction that is connected realization electrode stimulating point (3) and external circuit of external circuit.
6. implantating biological electrode according to claim 1 is characterized in that, described insulating barrier (5) is made of non-degraded macromolecular material polyurethane, Teflon or silicone rubber.
7. implantating biological electrode according to claim 1 is characterized in that, described link becket (1) is at least one.
8. implantating biological electrode according to claim 1 is characterized in that, described electrode stimulating point (3) is at least a place.
9. the preparation technology of an implantating biological electrode is characterized in that, may further comprise the steps:
1) goes up electrode stimulating point (3) and the circuit lead that has the metallic film structure with Si micro-processing technology MEMS processing in Si substrate or substrate of glass (6);
2) on axle, micro wiring turned to piped spirality metal micro wiring structure, stranded conductor mutually insulated;
3) with ultrasonic bonding Bonding or electro-plating method one end of metal micro wiring (2) and the circuit lead of Si substrate or substrate of glass (6) top electrode stimulation point (3) are connected, lead is put in the encapsulating mould with axle, to be used to form the stretching substrate both sides that are fixed on electrode stimulating point (3) of micro wiring of electrode measuring point (4), form the working end of bioelectrode with the method encapsulation of hot injection moulding or room temperature injection moulding;
4) other end at metal micro wiring (2) puts link becket (1) successively, connected micro wiring is moved near the link becket, and with the link becket that will be connected with the welding method connect, put it into then in the corresponding mould, encapsulate with the method for hot injection moulding or room temperature injection moulding;
5) cast gate is removed in finishing, goes axle, and 2 micro wirings that expose the bioelectrode head that will be used to form electrode measuring point (4) after will encapsulating are cut off, and form 2 electrode measuring points (4), finish the manufacturing of implantating biological electrode.
CN2009100214508A 2009-03-09 2009-03-09 Implantation type bioelectrode and method for producing the same Expired - Fee Related CN101502699B (en)

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Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101829401B (en) * 2010-05-21 2013-07-31 西安交通大学 Implanted bioelectrode based on photoetching and other micro-nano manufacturing technologies and preparation method thereof
CN102068760B (en) * 2011-01-28 2015-08-05 北京品驰医疗设备有限公司 Implanted bioelectrode and preparation method thereof
CN103446665B (en) * 2013-08-29 2016-03-30 河南理工大学 Implanted flexible biological electrode and manufacture method thereof
US10792490B2 (en) 2013-11-12 2020-10-06 Medtronic, Inc. Open channel implant tools and implant techniques utilizing such tools
US11083491B2 (en) 2014-12-09 2021-08-10 Medtronic, Inc. Extravascular implant tools utilizing a bore-in mechanism and implant techniques using such tools
US10349978B2 (en) 2014-12-18 2019-07-16 Medtronic, Inc. Open channel implant tool with additional lumen and implant techniques utilizing such tools
CN107206228A (en) * 2015-01-20 2017-09-26 Med-El电气医疗器械有限公司 With the cochleostapedial reflex recording electrode for sacrificing part
AU2016248247A1 (en) * 2015-04-17 2017-12-07 Mudjala Medical Pty Limited An implantable neuro-stimulation device
CN107198522A (en) * 2017-07-18 2017-09-26 中国人民解放军总医院第附属医院 A kind of compound electrode for being used to record brain deep signal
CN110721402B (en) * 2018-07-16 2023-11-21 上海交通大学 Implantable neural electrode system
CN110720936A (en) * 2019-09-09 2020-01-24 浙江省北大信息技术高等研究院 Implanted pressure sensor and method for measuring internal pressure
CN113426011A (en) * 2021-06-23 2021-09-24 上海沃克森医疗科技有限公司 Percutaneous implantation electrode

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CN2721130Y (en) * 2004-06-11 2005-08-31 文贵华 Array electrode and electric signal processor
CN101204603A (en) * 2007-12-14 2008-06-25 西安交通大学 Embedded MENS bioelectrode and preparation technology thereof
CN101342405A (en) * 2008-08-22 2009-01-14 西安交通大学 Implanted bioelectrode

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Publication number Priority date Publication date Assignee Title
CN2721130Y (en) * 2004-06-11 2005-08-31 文贵华 Array electrode and electric signal processor
CN101204603A (en) * 2007-12-14 2008-06-25 西安交通大学 Embedded MENS bioelectrode and preparation technology thereof
CN101342405A (en) * 2008-08-22 2009-01-14 西安交通大学 Implanted bioelectrode

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