CN101498035A - Controllable pressure pen ejecting apparatus with self-locking function for epitaxial production - Google Patents
Controllable pressure pen ejecting apparatus with self-locking function for epitaxial production Download PDFInfo
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- CN101498035A CN101498035A CNA2009100953730A CN200910095373A CN101498035A CN 101498035 A CN101498035 A CN 101498035A CN A2009100953730 A CNA2009100953730 A CN A2009100953730A CN 200910095373 A CN200910095373 A CN 200910095373A CN 101498035 A CN101498035 A CN 101498035A
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- penholder
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- slide bar
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- locking function
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Abstract
The invention discloses a pen-propping device with self-locking function and controllable pressure for epitaxial production, which comprises a pen-propping head, a pen body, a slide rod, a spring, a pen holder, a pre-tightening screw and a circular ring, wherein the circular ring is sleeved on the pen holder to form rotary match, and a rectangular wedge protrusion is arranged on the outer wall of the slide rod which is arranged in the pen holder; a spring leaf is arranged on the inner wall of the circular ring, and the slide rod is locked by the match of the spring leaf and the rectangular wedge protrusion. The pen-propping device can ensure that applied pen-propping pressure is consistent when an operator uplifts a liner bottom sheet arranged in a base, eliminates top sheet effect differences caused by human factors, improves the resistivity consistency and the thickness uniformity of an epitaxial wafer, can effectively avoid surface scrapes caused by the resetting of the pen-propping head leaving an acted surface and improves the fetching efficiency and the yield of the liner bottom sheet.
Description
Technical field
The present invention relates to have the epitaxial growth controllable pressure pen pushing apparatus of self-locking function.
Background technology
Epitaxial growth is generally used for the forward and backward dress of epitaxial wafer growth, gets in the sheet process with the top pen.Before epitaxy, substrate slice need be positioned on the graphite base, for vertical epitaxial furnace, the operator need place substrate slice in the resettlement groove perpendicular to the graphite base of horizontal plane by the support of top pen.After epitaxy finished, the operator took off epitaxial wafer by means of the top pen by similar reverse operating.Graphite base provides heating function for substrate slice in epitaxial process.Yet because epitaxial furnace self, the actual temperature of substrate slice top and lower surface has difference in epitaxial process usually.It is worthy of note, the another one vital role of extension pen pushing, promptly by the substrate slice surface specific position of putting into the graphite base resettlement groove is applied roof pressure, reach combining closely of substrate slice and pedestal, guarantee that the substrate slice surface has the temperature of homogeneous in the high temperature epitaxy process of growth, thereby obtain having the epitaxial wafer of good thickness evenness and resistivity evenness.
Existing epitaxial growth does not have pressure controlled device with the top pen, the operator carries out roof pressure time institute applied pressure value at the use extension pen pushing to substrate slice and can vary with each individual unavoidably, thereby the roof pressure difference on effect that obtains is very big, and the thickness evenness and the uniform resistivity gender gap that show as the same specification epitaxial wafer that grows are very big.In addition, in the actual use of top pen, particularly the getting in the sheet process of epitaxial wafer, the top nib can automatically reset under the restoring force effect of spring in leaving the process on stressed surface, and this is easy to cause the scuffing to the epitaxial wafer surface.
Summary of the invention
The purpose of this invention is to provide a kind of controlled extension pen pushing apparatus of pressure with self-locking function, particularly can fix the position that applies the top nib behind the certain pressure by self-locking device, prevent to push up nib and in leaving the process of action face, automatically reset, thereby avoid the top nib that surface in contact is caused scuffing.
Epitaxial growth with self-locking function controllable pressure pen pushing apparatus of the present invention, comprise the top nib, body, slide bar, spring, penholder, pretension screw and annular collar, the top nib is fastened on an end of a body, the other end of body is provided with screwed hole of centre and guide path, the top of penholder is provided with the protuberance with the guide path coupling, slide bar places penholder, one end of slide bar is threaded with the screwed hole of centre of a body, the other end of slide bar has the boss that cooperates with ring surface in the penholder, the pretension screw is twisted and is connected in the threaded hole of tubular penholder end, spring place the penholder end threaded hole, the one end props up the pretension screw, and the other end props up the end face of slide bar boss, and the slide bar outer wall is provided with right angle wedge type " projection ", annular collar is enclosed within on the penholder, opening is arranged on the penholder, and the inwall of annular collar is hinged with an end of the reed that is used to lock slide bar, and the other end of reed is a free end, stretch in the opening of penholder, annular collar constitutes rotation with penholder and cooperates.
The top nib can be polyimide (PI) material, and this material is high temperature resistant, and is corrosion-resistant, and self-lubricating is wear-resistant, and high strength contacts with the high temperature silicon chip can not to cause and melts and distortion.Body and penholder material are polytetrafluoroethylene (PTFE), and this material has extremely low frictional coefficient, good wear resistance and fabulous chemical stability.The slide bar material is stainless steel or polytetrafluoroethylene (PTFE).
Pen pushing apparatus of the present invention is in the elastic range of spring, according to formula F
Actual=F
Preliminary tension+ k Δ x, wherein k is the coefficient of elasticity of spring, establishes the preliminary tension F of spring
Preliminary tensionFor reality is used required minimum pressure values F
MinDuring use, when the true pressure of top written top epitaxial wafer greater than F
Preliminary tensionThe time, relatively sliding will take place between a body and the penholder.If a body is Δ x with respect to the sliding distance of penholder, the written true pressure that is applied on the epitaxial wafer in top is F so
Actual=F
Min+ k Δ x.The operator can be applied to the top nib true pressure F on the epitaxial wafer by the variation range of control Δ x
ActualMaintain in the scope that needs.
In the use,, will slide along the hypotenuse of right angle wedge type " projection " with the hinged reed of annular collar inwall bossing with the increase of body of beginning to write with respect to penholder sliding distance Δ x, until Δ x greater than Δ x
1The time, reed falls into square edge one side of right angle wedge type " projection " and contacts with square edge, and oppositely resetting of restriction slide bar realizes the purpose from locking.If the required maximum pressure value F of actual use
MaxA corresponding body is Δ x with respect to the sliding distance of penholder
Max, Δ x1 satisfies 0＜Δ x so
1＜Δ x
Max
During this top of the actual use of operator, in the time of only need accomplishing that top moved away from out action face, make a body be positioned at Δ x with respect to the sliding distance Δ x of penholder
1＜Δ x＜Δ x
MaxIn the scope, can avoid pushing up automatically reseting of nib.
When needs reset, rotate annular collar, reed is broken away from and the contacting of right angle wedge type " projection " square edge, under the effect of spring, slide bar resets, and subsequently annular collar is gone back to starting position.
The present invention has following technique effect:
1. the consistence and the repeatability of the person that guarantees different operating value of exerting pressure when using extension pen pushing to be opposite to substrate slice in the pedestal to carry out roof pressure, thereby eliminate the top flat effect difference that human factor causes, improve the resistivity consistence and the thickness evenness of epitaxial wafer.
2. can by regulating the relative position of pretension screw in penholder, can obtain different preliminary tension F according to the various needs of epitaxial wafer preparation process
Preliminary tension
3. a body can be regulated by the length of slide bar and the degree of depth in the slide bar screw-in body with respect to the ultimate range that penholder slides, and in conjunction with selecting for use of different coefficient of elasticity k value springs, can satisfy the adjusting to actual pressure value variation range size.
4. effectively avoid pen pushing apparatus surface tear that resets and produce owing to the top nib when leaving action face, improve efficient and yield rate that dress is got sheet.
Description of drawings
Fig. 1 is the structural representation of pen pushing apparatus of the present invention
Fig. 2 is the partial enlarged drawing of Fig. 1.
Fig. 3 is A-A sectional view (self-locking state) of Fig. 1.
Fig. 4 is A-A sectional view (self-locking releasing state) of Fig. 1.
Embodiment
Further specify the present invention below in conjunction with accompanying drawing.
With reference to accompanying drawing, epitaxial growth with self-locking function controllable pressure pen pushing apparatus of the present invention, comprise top nib 1, body 2, slide bar 3, spring 4, penholder 5, pretension screw 6 and annular collar 10, top nib 1 is fastened on an end of a body 2, the other end of body 2 is provided with screwed hole of centre 12 and guide path 7, the top of penholder 5 is provided with the protuberance with guide path 7 couplings, slide bar 3 places penholder, one end of slide bar 3 is threaded with the screwed hole of centre 12 of a body 2, the other end of slide bar 3 has the boss that cooperates with ring surface 13 in the penholder 5, pretension screw 6 is twisted and is connected in the threaded hole 14 of tubular penholder 5 ends, spring 4 place penholder 5 ends threaded hole 14, the one end props up pretension screw 6, the other end props up the end face of slide bar 3 boss, slide bar 3 outer walls are provided with right angle wedge type " projection " 8, annular collar 10 is enclosed within on the penholder 5, on the penholder 5 opening is arranged, the inwall of annular collar 10 is provided with bossing 11, bossing 11 is hinged with an end of the reed 9 that is used to lock slide bar, the other end of reed 9 is a free end, stretch in the opening of penholder 5, annular collar 10 constitutes rotation with penholder 5 and cooperates.
For the ease of processing, the guide path 7 on the body 2 can be ring groove, and penholder 5 vertical protuberances can be annular bead.Rotate for preventing that a body is relative with penholder, can take to make annular guide path along the circumferential direction inconsistent in the axial degree of depth.
Claims (3)
1. the epitaxial growth controllable pressure pen pushing apparatus that has self-locking function, it is characterized in that comprising top nib (1), body (2), slide bar (3), spring (4), penholder (5), pretension screw (6) and annular collar (10), top nib (1) is fastened on an end of a body (2), the other end of body (2) is provided with screwed hole of centre (12) and guide path (7), the top of penholder (5) is provided with the protuberance with guide path (7) coupling, slide bar (3) places penholder, one end of slide bar (3) is threaded with the screwed hole of centre (12) of a body (2), the other end of slide bar (3) has the boss that cooperates with ring surface (13) in the penholder (5), pretension screw (6) is twisted and is connected in the terminal threaded hole (14) of tubular penholder (5), spring (4) place penholder (5) terminal threaded hole (14), the one end props up pretension screw (6), the other end props up the end face of slide bar (3) boss, slide bar (3) outer wall is provided with right angle wedge type " projection " (8), annular collar (10) is enclosed within on the penholder (5), penholder has opening on (5), the inwall of annular collar (10) is hinged with an end of the reed (9) that is used to lock slide bar, the other end of reed (9) is a free end, stretch in the opening of penholder (5), annular collar (10) constitutes rotation with penholder (5) and cooperates.
2. the controllable pressure pen pushing apparatus of the epitaxial growth with self-locking function according to claim 1 is characterized in that guide path (7) is a ring groove, and the vertical protuberance of penholder (5) is an annular bead.
3. the controllable pressure pen pushing apparatus of the epitaxial growth with self-locking function according to claim 2 is characterized in that annular guide path (7) is along the circumferential direction inconsistent in the axial degree of depth.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2009100953730A CN101498035A (en) | 2009-01-12 | 2009-01-12 | Controllable pressure pen ejecting apparatus with self-locking function for epitaxial production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2009100953730A CN101498035A (en) | 2009-01-12 | 2009-01-12 | Controllable pressure pen ejecting apparatus with self-locking function for epitaxial production |
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| Publication Number | Publication Date |
|---|---|
| CN101498035A true CN101498035A (en) | 2009-08-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2009100953730A Pending CN101498035A (en) | 2009-01-12 | 2009-01-12 | Controllable pressure pen ejecting apparatus with self-locking function for epitaxial production |
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|---|---|
| CN (1) | CN101498035A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109464283A (en) * | 2018-12-27 | 2019-03-15 | 江苏翰洋自动化科技有限公司 | A kind of horizontal capsule machine |
-
2009
- 2009-01-12 CN CNA2009100953730A patent/CN101498035A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109464283A (en) * | 2018-12-27 | 2019-03-15 | 江苏翰洋自动化科技有限公司 | A kind of horizontal capsule machine |
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| PB01 | Publication | ||
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20090805 |