CN101495822A - Method for controlling temperature - Google Patents
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- CN101495822A CN101495822A CNA2007800260115A CN200780026011A CN101495822A CN 101495822 A CN101495822 A CN 101495822A CN A2007800260115 A CNA2007800260115 A CN A2007800260115A CN 200780026011 A CN200780026011 A CN 200780026011A CN 101495822 A CN101495822 A CN 101495822A
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Abstract
A method for controlling the temperature of a coolant supplied to a process, such as a semiconductor process. The method provides for chilling a coolant to a predetermined temperature, controlling the coolant at the predetermined temperature and delivering the coolant to the semiconductor process. The method includes feedback and feed-forward control algorithms to control the temperature to within about +-0.1 DEG C. under steady state conditions and to within about +-0.75 DEG C. under maximum heat loading and unloading conditions. The invention may be used in any fluid or component temperature control application (e.g. semiconductor, pharmaceutical, or food applications).
Description
Technical field
[0001] the present invention relates to a kind of for controlling the method for the temperature of the cooling agent that is supplied to a kind of technique.More specifically, the invention provides a kind of method that coolant cools is controlled to predetermined temperature place to predetermined temperature, by cooling agent and cooling agent is passed to semiconductor processes.
Background technology
[0002] a lot of industries are all used cooler to control the fluid of technique and the temperature of parts.For example, in semicon industry, typical processing of wafers step comprises that a series of heat loads and heat unloading part place, and cooler is used to control the temperature of electrostatic chuck, quartz window and chamber wall.
[0003] for controlling the known cooler of the temperature of the cooling agent that is supplied to semiconductor technology, there are TCU 40/80 and the TCU 40/80+ of BOC EDWARD S company.TCU 40/80 cooler utilizes FEEDBACK CONTROL to be supplied to the coolant temperature of semiconductor processing device to maintain predetermined set-points.TCU 40/80 cooler comprises the coolant circuit of removing heat from treating apparatus, from this coolant circuit, removes the refrigerant loop of heat and the chilled(cooling) water return (CWR) of removing heat from this refrigerant loop.TCU 40/80 cooler has adopted the operation of standard feedback method, measure the temperature of the cooling agent be supplied to treating apparatus, more measured coolant temperature and the difference between predetermined set-points also send a signal to expansion valve in refrigerant loop to adjust the flow velocity of cold-producing medium.
[0004] although TCU 40/80 and TCU 40/80+ cooler can be controlled coolant temperature and reach approximately ± 1 ℃ under stable state operating mode, maximum heat load or unload condition is next reaches approximately ± 1.5 ℃, but these coolers technique Dynamic Thermal load and heat unloading during but there is the deteriorated or even cause problems such as controlling loss gradually of obvious overshoot of temperature, temperature fluctuation, performance.Therefore, need a kind of improved method, for controlling the temperature of the cooling agent that is supplied to technique and loading and heat unloading (thermal change) for the Dynamic Thermal that response technique produces fast.
Summary of the invention
For controlling a method for technological temperature, comprise the following steps: from evaporimeter to described technique supply coolant; Measurement is supplied to the temperature of the cooling agent of described technique; Determine poor between cooling agent supply temperature and cooling agent supply temperature set point; By making cold-producing medium flow through the heat that described evaporimeter is removed cooling agent; The temperature of the cooling agent that measurement is returned from described technique; By measured cooling agent supply temperature and measured cooling agent, return to temperature computation differential exponential weighted moving average (DEWMA); By DEWMA and predetermined logic rule are compared to definite thermal change state; The temperature of the cooling agent returning from described technique based on described thermal change status predication; And the temperature based on predicted is adjusted the flow velocity of cold-producing medium.
Accompanying drawing explanation
Fig. 1 is the schematic diagram according to device of the present invention.
Fig. 2 is the example of heat loading and hot uninstall process.
Fig. 3 is and the example of measuring the exponentially weighted moveing average that source signal compares.
Fig. 4 has adopted linear interpolation and as the example of the differential exponential weighted moving average of the function of possibility.
Fig. 5 has adopted non--linear interpolation and as the differential of the function of possibility
The example of exponentially weighted moveing average.
Fig. 6 is the experimental data that illustrates performance of the present invention.
The specific embodiment
[0005] the invention provides a kind of method of controlling technological temperature.More specifically, the invention provides a kind of for being controlled at the method for the temperature of fluid that technique works or parts.The method comprises feedback and FEEDFORWARD CONTROL algorithm, to control temperature under stable state operating mode, reaches approximately ± 0.1 ℃ with interior and control temperature reach in approximately ± 0.75 ℃ under maximum heat loading and hot Unloading Condition.Although in fact the present invention can be used for the fluid of any type or the temperature of parts, control application scenario (semiconductor for example, medicine or food applications), but by the invention of description, be for controlling the coolant temperature of the semiconductor technology parts of semiconductor fabrication here.
[0006] Fig. 1 is the schematic diagram according to an embodiment of cooler 100 of the present invention.The hot compression circulation of cooler 100 comprises three loops: coolant circuit 102, refrigerant loop 104 and water cooling loop 106, controlled the operation of this cooler 100 by control system.The target of coolant circuit 102 is to technique 108 supply coolants according to specific flow velocity 118 and temperature 116.Control system is not generally directly controlled coolant flow speed 118.Controlling cooling agent supply temperature 116 is targets of this control system, is main purpose of the present invention simultaneously.
[0007] coolant circuit 102 comprise there is cooling agent storage tank 110, the pump 112 of coolant heater 111, hot side and a plurality of tapping point of evaporimeter 120, these tapping points return to temperature (T with being respectively used to measure cooling agent
cr), cooling agent supply temperature (T
cs) and coolant flow speed (F
c) sensor 114,116 and 118.Coolant circuit 102 for example, to semiconductor technology 108 supply coolants (non-conductive perfluocarbon), and the hot side of these loop 102 process evaporimeters 120 is to remove the heat obtaining from semiconductor technology 108 places.Coolant circuit 102 can be used to control parts in technique 108 or the temperature of fluid.For example, coolant circuit 102 can be from semiconductor device by maintain or to adjust the temperature of electrostatic chuck, quartz window or chamber wall.Coolant circuit 102 is loops, and cooling agent flows to technique 108 continuously from the hot side of evaporimeter 120, then from technique 122, returns, and flows through storage tank 110, heater 111, circulating pump 112, returns the hot side of evaporimeter 120.
[0008] heat-removal rate that refrigerant loop 104 moves to remove the heat of cooling agent and controls cooling agent.Except evaporimeter 120, refrigerant loop 104 also comprises compressor 124, condenser 126, have the main refrigerant line 128 of adjustable refrigerant valve 130 and have the adjustable hot-gas bypass pipeline 132 of hot gas bypass valve 134.Refrigerant loop 104 also can comprise tapping point, and these tapping points have measures respectively evaporating temperature (T
re), evaporating pressure (P
re) and condensing pressure (P
rc) sensor 136,138 and 140.Sensor 136,138 and 140 is mainly used in guaranteeing that compressor 124 moves under suitable operating mode.The same with coolant circuit 102, refrigerant loop is also loop, and cold-producing medium flows through the cold side of hot side, expansion of liquids valve 130 and the evaporimeter 120 of compressor 124, condenser 126 therein continuously.Cold-producing medium leaves the cold side of evaporimeter 120 with vapor form.This steam is compressed subsequently, then or to compress the form of hot gas by hot-gas bypass pipeline 132, flow in evaporimeter 120, flow through condenser 126, in condenser 126 water cooling loops, place 106, remove the heat in compression hot gas, this heat of compression is so incensed that to condensation and is turned back in evaporimeter 120.
[0009] water cooling loop 106 operation is to remove the heat in cold-producing medium during by condenser 126 at cold-producing medium.Except condenser 126, water cooling loop also comprises adjustable cooling water control valve 142, cooling water supply unit 148, cooling water recovery device 150 and tapping point, and these tapping points have and are respectively used to measure chilled(cooling) water supply (CWS) temperature (T
cws) and cooling water return to temperature (T
cwr) sensor 144 and 146.In duty cycle, the cold side of cooling water circulation by cooling water control valve 142 and compressor 126 is to remove the heat in cold-producing medium.
[0010] in common hot compression circulation, the refrigerant vapour that leaves evaporimeter 120 with the first lower evaporating pressure 138 and temperature 136 flows through compressor 124 and reaches higher condensing pressure 140.Vapours is condensed subsequently in condenser 126, and the condenser heat water loop 106 that is cooled at this place consumes.The cold-producing medium being condensed leaves the hot side of condenser 126 and enters the cold side of evaporimeter 120, and the cold-producing medium being condensed at this place has absorbed the heat returning in cooling agent 122 and again evaporated at the temperature of corresponding evaporating pressure 138.Expansion of liquids valve 130 and hot gas bypass valve 134 rely on cooling agent to return to temperature 114 and control the required refrigerant amount of cooling cooling agent.
[0011] method of the present invention comprises feedback and feed forward control method, for cooling agent supply temperature 116 being maintained to the set point of user regulation and for occurring in technique 108 that heat loads and the quick response that regulates temperature being provided during heat unloading.The target of control system feedback aspect is the cooling agent supply temperature 116 that remains constant.By continuous regulator solution volume expansion valve 130 and hot gas bypass valve 134, control this cooling agent supply temperature 116.When expansion of liquids valve 130 openings larger (being that port size increases), the cold-producing medium that flows through evaporimeter 120 cold sides will increase, and therefore, can remove the more heats in cooling agent.Result is that cooling agent supply temperature 116 reduces.On the contrary, when hot gas bypass valve 134 openings are when larger, the hot gas that flows through evaporimeter 120 cold sides will increase, and therefore the cooling capacity of evaporimeter 120 reduces, and makes the heat removed from cooling agent still less.Result is that cooling agent supply temperature 116 raises.Like this, by the position (being port size) of balancing liquid expansion valve 130 and hot gas bypass valve 134, just controlled cooling agent supply temperature 116.For example,, if the set point (T that cooling agent supply temperature 116 is stipulated than user
sp) height, control system orders expansion of liquids valve 130 to open large and to order hot gas bypass valve 134 to be opened little.Notably, user can change set point at any time by man-machine interface (HMI) or by some other electronics input.
[0012] when comprising, technique relates to that a series of heat that obtain or lose non-quantitative heat load and during hot unloading step, except feed forward method, control system has also been used aforesaid feedback.Fig. 2 illustrates typical thermal change (instant heating load and heat unloading) process, and cooling agent returns to temperature 114 and showed with curve as the function of time in the drawings.116 of cooling agent supply temperatures are not the good indexs that heat loads and heat unloads, because it is controlled in the set point place of user's regulation.Thermal change process shown in Fig. 2 can be described to three states: state 1, state 2 and state 3.In state 1, the heat that has experienced technique 108 due to cooling agent loads, and therefore returns to temperature 114 and raises according to certain ratio (being the line slope of state 1).Like this, state 1 has represented temperature 114 as the function of time and the operating mode raising.Along with the continuation that heat loads, cooling agent returns to temperature 114 finally will reach steady state value, and it indicates the beginning of state 2.Therefore state 2 has represented that cooling agent returns to the stable state operating mode of temperature 114.State 3 has illustrated that heat and cooling agent that unloading applies return to the process that temperature 114 reduces with certain ratio (being the line slope of state 3).State 3 representation temperatures 114 are as the function of time and the operating mode reducing.When hot uninstall process arrives new steady state temperature, state 3 finishes, and 2 of states start again.Fig. 2 loads heat and hot uninstall process provides simply and illustrates.Notably, according to technique 108 or user's requirement, heat loads and hot sequence of unloading can change.For example, the heat that technique 108 can apply in the end of state 2 increase loads, and state 1 is started again.
[0013] the present invention further comprises the new method of the earlier detection changing for thermic load.Rely on hot LOADING RATES, control system adopts different technologies to process control variables and returns to temperature 114 to obtain continuous cooling agent.
[0014] temperature control system of prior art is used passive FEEDBACK CONTROL conventionally, by this FEEDBACK CONTROL, regulates cold-producing medium to flow to respond the error between cooling agent supply temperature and coolant temperature set point.Yet, because there is time delay (lagging behind) between the actual rising of the caused coolant temperature of hot load or unload (occurring in the upstream of evaporimeter) and measured cooling agent supply temperature (from the measured downstream of evaporimeter), while therefore the error between cooling agent supply temperature and temperature set-point being detected, system has started to loosen the control to cooling agent supply temperature.Therefore, control system has caused the excessive adjusting of cooling agent supply temperature or has regulated not enough.The invention solves this problem, method is to load and hot unloaded state (being state 1 and state 3) by detecting fast and accurately heat, and by adjusting refrigerant temperature and flow velocity, responds the needs that these change to meet technique 108 before controlling loss occurrence.
[0015] in order to detect heat, load and hot unloaded state, whether control system of the present invention continuously monitor source temperature signal is rising, is declining or keeping stable.Source temperature signal can be that cooling agent returns to temperature 114, cooling agent and returns to any one rate of change in difference between temperature 114 and cooling agent supply temperature 116 or these signals.In order to make the method effectively and accurately, must to get rid of measure error or the interference in source signal.
[0016] in order to filter out measure error or the interference in source signal, method of the present invention has adopted exponentially weighted moveing average (EWMA).For signal S, by applying the following definition of the formula along with time recurrence S at the EWMA at time t place.
T wherein
0be the time that signal S had previously been scanned, w is weighted factor or the filter constant being positioned between 0 and 1 (comprising).
[0022] EWMA depends primarily on filter constant (being weighted factor w).Fig. 3 illustrates two kinds of EWMA with two kinds of filter constants, slowly follow EWMA (SEWMA) and the correspondence of corresponding larger filter constant are followed EWMA (FEWMA) (for illustrative purposes, the gap between line may be exaggerated) soon compared with small filter constant.FEWMA line more approaches primary signal than SEWMA line.When source signal increases, (for example because heat loads, cause cooling agent to return to temperature 114 raising), fast EWMA line and slow EWMA line start separated, and fast EWMA line is above EWMA line slowly.On the contrary, when source signal reduces, (for example because heat unloading causes cooling agent to return to temperature 114, reduce), fast EWMA line and slowly EWMA line start separated, but FEWMA line is below SEWMA line.When source signal reaches steady state value, fast mobile EWMA line and slow mobile EWMA line start to overlap.
[0023] note that when the filter constant w for fast EWMA is set as 0, fast EWMA just becomes source signal itself.Like this by only adopting SEWMA and this signal itself just can detect hot load or unload.Also can be by determining that the slope (being rate of change) between single EWMA detects thermal change.For example, when slope is timing, adding heat load.The slope of EWMA has also been indicated the speed of signal intensity.
[0024], although EWMA is the method for preferred filtered source signal, those skilled in the art will recognize that other method can filtered source signal and detection mobile trend in addition.For example, can carry out filtered source signal by simple moving average, the average in this simple moving average is to calculate by the nearest measurement result of fixed number; Or, also can carry out filtered source signal with weighted moving average, in this weighted moving average, nearest measurement result is carried out to linear weighted function according to their " age ".Therefore,, by suitable source signal is applied to suitable filter, just can detect the significant change in hot load or unload.
[0025] Fig. 3 also shows differential EWMA (DEWMA) in the bottom of figure, and this differential EWMA calculates by deduct slow EWMA from fast EWMA.The speed that differential EWMA can indicate source signal changing, or, when using in the present invention, can indicate the intensity of thermic load.Differential EWMA can be associated with thermal change state.When DEWMA is timing, its indicating status 1.When DEWMA is when negative, its indicating status 3.2 DEWMA corresponding near fluctuation zero of state.
[0026] following example shows control system and can how to use DEWMA.If the rate of change that use cooling agent returns between temperature 114 and cooling agent supply temperature 116 is also used fast mobile EWMA and mobile slowly EWMA as original source signal, can apply some positive parameter x
1and x
2(0 < x
2< x
1) detection thermal change state.Suppose x
1=0.5x
2=0.2; Table 1 has been listed can be by some rules that decide technique in which kind of thermal change state.
Table 1. is for determining the logic rules of thermal change state
| Thermal change | Describe | For determining the rule of |
| State | ||
| 1 | Increase thermic load | If DEWMA > 0.5 |
| State 2 | Maintenance heat load | If-0.2 < DEWMA < 0.2 |
| State 3 | Reduce thermic load | If DEWMA <-0.5 |
Have been found that following formula (formula 2) is very effective when determining above-mentioned three states:
Formula 2
Wherein, a
1to a
4constant, T
spit is temperature set-point.
[0032], according to the listed example of table 1 and rule, if DEWMA is between 0.2 to 0.5 or between-0.5 to-0.2, do not determine thermal change state.If DEWMA=0.3, people's judgement will think that signal is in possibility in state 2 and surpasses and be in state 1; If DEWMA=0.4, people's judgement will think that signal is in possibility in state 1 and surpasses and be in state 2, etc.Therefore, if can only determine that state is likely correct, the method is not all right, because cannot which output function of choice for use.Fuzzy logic can be with solving this problem.
[0033] fuzzy logic is considered as the number between 0 to 1 by the uncertainty between two states or possibility, rather than simple " a kind of " state or " another kind " state.Therefore, if DEWMA=0.35, Simple Control Regular will generate this " state " have 50% possibility in state 1 and 50% possibility in state 2.This process that clear and definite DEWMA value is converted to " fuzzy " thermal change state is exactly obfuscation method.Fig. 4 illustrates this fuzzification process.In Fig. 4, the region below solid line covers state 1, and the region below dotted line covers state 2, and the region below chain-dotted line covers state 3.While note that at DEWMA the scope between-0.5 to-0.2 and 0.2 to 0.5, state 2 is overlapping with state 1 and 3 respectively.When DEWMA falls into this two overlapping ranges, can not clearly determine this state, therefore must apply obfuscation rule.The dotted line of Fig. 4 illustrates the possibility of how to confirm above-mentioned 50% when DEWMA=0.35.
[0034] by above-mentioned possibility value, can also control the calculating of output.First can calculate (i.e. state in above-mentioned example 1 and 2) to the control output of every kind of related state.Then, last master control output is calculated to be 50% output from the output of state 1 and 50% from state 2.
[0035] above-mentioned example shows the obfuscation method that adopts simple linear interpolation.That is, by linear interpolation (along the straight line in Fig. 4), determine fuzzy or nondeterministic statement, last output adds up to acquisition by linearity.In the other embodiment of the present invention, the non-linear conversion function shown in formula 3 can be used for interpolation method.
R＝tanh(r
0+r
1d+r
2d
2)×r
3+r
4
Formula 3
Wherein lowercase represents constant, and d represents DEWMA.
[0040] Fig. 5 is the diagrammatic representation of this non-linear conversion function.Except level and smooth angle, Fig. 2 is similar to Fig. 4.The shape that note that curve in Fig. 5 can be revised by applying different constants.Therefore, compare with the linear function shown in Fig. 4, this non-linear conversion function has adaptability more, and level and smooth continuous control output is provided.Notably, in Fig. 4 the examples given, thermic load is characterized as three kinds of states, and detection variable DEWMA is divided into five regions, and every kind of state is given a region, and these states are related to by obfuscation method in two remaining regions.Yet in Fig. 5, three states are given point value, rather than the region of DEWMA value.State 1,2 and 3 is distinguished assignment and is+∞, and 0, and-∞.By obfuscation method and via the continuous function of formula 3 shown types, the every other value of DEWMA is given to three states.
[0044] Fig. 6 provides the experimental data of carrying out periodically heat loading and unloading and being controlled in 0 ℃ of cooler of locating.In this experiment, coolant flow speed is fixed; Hot gas bypass valve 134, expansion of liquids valve 130 and cold valves 142 are controlled respectively by three standard proportional-integration-differential (PID) controller.During thermal change, control temperature and be less than 1 ℃, and after arriving stable state, control temperature and be less than 0.5 ℃.
[0045] in a word, the present invention be directed to temperature control system, wherein take process variable value as basis and according to one group of logic rules, thermic load be characterized as to one group of state.For every kind of state and each controlled variable, by adjusting control algolithm, predict that the control of the variable of this state exports.
[0046] be in operation, operation variable detects the state of thermic load and exports for one or more in check variablees provide FEEDFORWARD CONTROL.State-variable can be measured variable, or the rate of change of measured variable, or the induced variable that calculates or be converted to one or more measured variablees.Measured variable can be that cooling agent returns to temperature.Induced variable can be that cooling agent returns to difference between temperature and cooling agent supply temperature or the rate of change of this difference.Induced variable can also be that cooling agent returns to difference between temperature and temperature set-point or the rate of change of this difference.In addition, induced variable can be the simple moving average of state-variable or the weighted moving average of this state-variable.Induced variable can be also the difference between the exponentially weighted moveing average of this state-variable or two exponentially weighted moveing averages with two different weights factors of this state-variable.When the value of the frequency computation part average according to about 5 to 50, one of weighted factor can be between 0.7 and 0.95, and another weighted factor has larger value.
[0047] adopt calculating Predicting Technique or digital modeling method to predict induced variable by state-variable.State group can comprise three kinds of states: increase thermic load, reduce thermic load and maintenance heat load.The four corner of process variable value is divided at least three continuums.Every kind of state is given a region, makes when the value of state-variable falls into this region, for temperature controlled object, can conclude in high confidence that this system is in this state.Relate on three states by obfuscation method in the region not being given (if any).By to by the output of control variables with relate to the output application defuzzification rule of all states of obfuscation, can obtain this control by control variables and export.Three continuums can be divided into five continuums.First, second, and third region is determined respectively, makes when the value of state-variable falls into first region, can determine in high confidence the state that increases thermic load, reduces thermic load or maintenance heat load.The the 4th and the 5th region lays respectively between the first and second regions and between the second and the 3rd region.
[0048] as the aforementioned and illustrated the invention provides a kind of accurately and respond method fast, for controlling technological temperature or for controlling the temperature of control assembly or the fluid stream of this technique.Can expect, under the enlightenment of description above and example, to those skilled in the art, other embodiments of the present invention and modification are obviously.Now be intended to such embodiment and change be also included within by the illustrated scope of the present invention of following claim.
Claims (21)
1. for controlling a method for technological temperature, comprise the following steps:
From evaporimeter to described technique supply coolant;
Measurement is supplied to the temperature of the cooling agent of described technique;
Determine poor between cooling agent supply temperature and cooling agent supply temperature set point;
By making cold-producing medium flow through described evaporimeter, remove the heat in cooling agent;
The temperature of the cooling agent that measurement is returned from described technique;
With measured cooling agent supply temperature and measured cooling agent, return to temperature computation differential exponential weighted moving average;
By differential exponential weighted moving average and predetermined logic rule are compared and determine thermal change state;
The temperature of the cooling agent returning from described technique based on described thermal change status predication; And
Temperature based on predicted is adjusted cold-producing medium flow velocity.
2. the method for claim 1, wherein the step of described definite thermal change state comprises fuzzy logic and obfuscation rule.
3. the method for claim 1, wherein the step of described adjustment cold-producing medium flow velocity comprises control expansion of liquids valve.
4. method as claimed in claim 3, comprises by making cold-producing medium flow through the step that condenser is removed the heat in cold-producing medium.
5. method as claimed in claim 4, comprises and makes part of refrigerant by hot-gas bypass pipeline, flow into the step of described evaporimeter from the upstream of described condenser.
6. method as claimed in claim 5, comprises by the step of the cold-producing medium flow velocity in hot-gas bypass pipeline described in the valve regulation of control hot-gas bypass.
7. the method for claim 1, wherein the step of described definite thermal change state comprises differential exponential weighted moving average and comprises that the predetermined logic rule of following condition compares:
State 1, if differential exponential weighted moving average > 0.5;
State 2, if-0.2 < differential exponential weighted moving average < 0.2; And
State 3, if differential exponential weighted moving average <-0.5.
8. method as claimed in claim 7, wherein, the step of described definite thermal change state comprises fuzzy logic and obfuscation rule.
9. the method for claim 1, wherein described technique is semiconductor technology.
10. for controlling a method for the part temperatures of semiconductor processing device, comprise the following steps:
From evaporimeter to described parts supply coolant;
Measurement is supplied to the temperature of the cooling agent of described parts;
Determine poor between cooling agent supply temperature and cooling agent supply temperature set point;
By making cold-producing medium flow through described evaporimeter, remove the heat in cooling agent;
The temperature of the cooling agent that measurement is returned from described parts;
Filter measured cooling agent and return to temperature data to get rid of error and interference;
By the cooling agent having filtered being returned to temperature data and predetermined logic rule, compare and determine thermal change state;
The temperature of the cooling agent returning from described parts based on described thermal change status predication; And
Temperature based on predicted regulates the flow velocity of cold-producing medium.
11. methods as claimed in claim 10, wherein, the step of described definite thermal change state comprises fuzzy logic and obfuscation rule.
12. methods as claimed in claim 10, wherein, the step of described adjusting cold-producing medium flow velocity comprises controls expansion of liquids valve.
13. methods as claimed in claim 12, comprise by making cold-producing medium flow through the step that condenser is removed the heat in cold-producing medium.
14. methods as claimed in claim 13, comprise and make part of refrigerant by hot-gas bypass pipeline, flow into the step of described evaporimeter from the upstream of described condenser.
15. methods as claimed in claim 14, comprise the step that regulates the cold-producing medium flow velocity in described hot-gas bypass pipeline by controlling hot gas bypass valve.
16. methods as claimed in claim 10, wherein, the step of described definite thermal change state comprises differential exponential weighted moving average and comprises that the predetermined logic rule of following condition compares:
State 1, if differential exponential weighted moving average > 0.5;
State 2, if-0.2 < differential exponential weighted moving average < 0.2; And
State 3, if differential exponential weighted moving average <-0.5.
17. methods as claimed in claim 16, wherein, the step of described definite thermal change state comprises fuzzy logic and obfuscation rule.
18. methods as claimed in claim 10, wherein, described parts are selected from the group that comprises following content: electrostatic chuck, quartz window and chamber wall.
19. methods as claimed in claim 10, wherein, the measured cooling agent of described filtration returns to temperature data and comprises that to get rid of the step of error and interference the difference of calculating between slow mobile exponentially weighted moveing average and fast mobile exponentially weighted moveing average is to determine differential exponential weighted moving average.
20. methods as claimed in claim 10, wherein, the measured cooling agent of described filtration returns to temperature data and comprises calculating simple moving average to get rid of the step of error and interference.
21. methods as claimed in claim 10, wherein, the measured cooling agent of described filtration returns to temperature data and comprises calculating weighted moving average to get rid of the step of error and interference.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US81976006P | 2006-07-10 | 2006-07-10 | |
| US60/819,760 | 2006-07-10 | ||
| US11/825,340 | 2007-07-03 |
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| Publication Number | Publication Date |
|---|---|
| CN101495822A true CN101495822A (en) | 2009-07-29 |
Family
ID=40925422
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|---|---|---|---|
| CNA2007800260115A Pending CN101495822A (en) | 2006-07-10 | 2007-07-09 | Method for controlling temperature |
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| TW (1) | TW200817589A (en) |
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| CN103836724A (en) * | 2012-11-22 | 2014-06-04 | 中国舰船研究设计中心 | Constant-temperature air conditioner and refrigeration adjusting method thereof |
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2007
- 2007-07-09 CN CNA2007800260115A patent/CN101495822A/en active Pending
- 2007-07-10 TW TW96125081A patent/TW200817589A/en unknown
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