CN101472833A - Method and apparatus for dispensing liquid with precise control - Google Patents
Method and apparatus for dispensing liquid with precise control Download PDFInfo
- Publication number
- CN101472833A CN101472833A CNA2007800134979A CN200780013497A CN101472833A CN 101472833 A CN101472833 A CN 101472833A CN A2007800134979 A CNA2007800134979 A CN A2007800134979A CN 200780013497 A CN200780013497 A CN 200780013497A CN 101472833 A CN101472833 A CN 101472833A
- Authority
- CN
- China
- Prior art keywords
- pressure
- distribution system
- sensor
- fuid distribution
- centrifugal pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
The present invention provides methods and apparatus combining a pressure vessel and a centrifugal pump to accurately and efficiently control pressure and flow rate of liquid in a liquid dispense system. The present invention particularly relates to the accurate and efficient control of pressure and flow rate of liquids, such as high purity chemicals or slurries used in semiconductor manufacturing processes.
Description
Technical field
The present invention relates to a kind of at the method and apparatus that requires to be used under control presssure highly precisely or the flow rate conditions fluid transfer.Especially, the present invention relates to be used for highly purified chemicals or slurries are transferred to the method and apparatus of one or more use locations of semiconductor fabrication process, wherein, chemicals or slurries are provided to the use location with constant flow velocity.
Background technology
Usually require accuracy control to be provided to the amount of liquid of the target location of fluid dispensing system.And importantly, the amount of liquid that provides is constant as far as possible, so that avoid having the spike of detrimental effect.Especially true for semiconductor fabrication process, in semiconductor fabrication process, the amount of liquid that provides is to very big such as technogenic influences such as the formation of layer, etching, cleanings.The variation of pressure can cause the nonrepeatability of producing and finally cause the loss of output.FLOW CONTROL also is very important.For specific technology, for example need the semiconductor technology of slurries, flow velocity is maintained to make particle be suspended in speed essential in the slurries be important.Alternatively, for the application of high purity chemical, keep constant flow velocity for guaranteeing that optimum filtration is important.The change of flow velocity also can for example influence the pressure of distribution system by the loss due to friction (for example loss in head) in pipeline or the filter cylinder.
Therefore need provide to the end points of use location or distribution system accurately, the liquid of may command, constant flow rate.But this is difficult to reach for some reason, and these reasons comprise in requirement change, the operating process pressure change in the distribution system, the pressure change that causes owing to plugged filter, the influence and the other reasons of pump circulation.In order to illustrate in greater detail the problem that must overcome, provide Fig. 1 that basic fluid dispensing system well known in the prior art is described.
Fig. 1 illustrates basic system 100, comprises liquid dispense tank 10, pump 20 and use location 30.In system 100, described pump is delivered to use location 30 with liquid from jar 10 from jar 10.Described jar 10 vented tank that is generally standard, this jar can refill liquid from fluid supply 40 if desired.Described pump 20 can be the pump of any type, for example displacement pump or vane pump.But recently, centrifugal pump also is used for the application of a large amount of chemicalss and slurries.In semi-conductor industry, because purity aspect former thereby only use the centrifugal pump of limited amount, this is the trend of upgrading.
Centrifugal pump is good under the small amount of liquid demand and is kept pressure stable.But empty filter head housings is for example loaded in a large amount of consumption and interruption in the distribution system, can cause significantly reducing the mobile transient phenomenon of the delivery pressure of centrifugal pump, and the therefore pressure in the appreciable impact distribution system.In addition, centrifugal pump needs a large amount of electric power, and aspect release limitation is arranged.Reaching higher pressure needs more electric power, and the centrifugal pump that moves under the required high RPM of operation with high pressure can be introduced the heat that some technologies is had adverse effect in system.
Although a use location 30 only is shown in Fig. 1, it will be appreciated by those of skill in the art that from same distribution system 100 to provide liquid to a plurality of use locations.But can recognize that also additional use location can increase the complexity of system, and make maintenance system pressure and flow velocity difficult more.As shown in fig. 1, in distribution system 100, provide excessive liquid, to help to stablize the flow velocity and the pressure of use location 30.Particularly, liquid transmits from jar 10, flows through system 100, and amount on request offers use location 30, and any liquid that has more flows back to jar 10 with recycling.For the pressure or the flow velocity of control system better, can provide feed back loop.Especially, as shown in fig. 1, sensor 50, for example pressure sensor or flow counter provide the information of expression flow velocity, the back pressure control that this can be used for the speed of control pump 20 or system 100 is provided by the operation of the current limiter 60 that links with jar 10.These parts have also increased the complexity of system.
As mentioned above, described jar 10 vented tank that is generally standard.But also the working pressure container provides pressure stable control more to distribution system.A lot of modification are arranged in pressure vessel dispense systems, and all modification all have some shortcoming.For example, Cao Zuo multiple pressure force container can be system pressure stable is provided successively, but when liquid circulation time in total system need pressurize continuously, emptying, ventilate and recharge, and this makes system very complex.When using single pressure container, the liquid that returns container must at first be sent in the lower container of the required pressure of score complexion device, and dispense container is returned in pumping then.When liquid demand is low,, still can consume big energy owing to need to keep recirculation flow.
Still need overcome the problems referred to above in the art.
Summary of the invention
The invention provides the method and apparatus that is used for requiring pressure and flow velocity are carried out fluid transfer under the situation of High Accuracy Control.Particularly, the invention provides in the semiconductor fabrication process method and apparatus that high purity chemical or slurries is transferred to one or more use locations, wherein, chemicals or slurries are provided to the use location with stable flow velocity.
Purpose of the present invention realizes by in same distribution system pressure container and centrifugal pump being made up.By pressure container and centrifugal pump are used together, the advantage of each parts can reach the best, and the overall performance of system will be strengthened.
Description of drawings
Fig. 1 is the scheme drawing of the known basic system of prior art;
Fig. 2 is the scheme drawing of basic system according to an embodiment of the invention;
Fig. 3 is the scheme drawing of an alternative embodiment of the invention, shows the selectable unit (SU) and the layout of system;
Fig. 4 is the scheme drawing of an alternative embodiment of the invention.
The specific embodiment
With reference to the accompanying drawings the present invention will be described in further detail, in the preferred embodiments of the present invention shown in the described accompanying drawing.But this invention can be embodied as many multi-form, should not be considered as only at the embodiment shown in this.On the contrary, these embodiment are used to make the disclosure thorough and complete more, and completely express scope of the present invention to those skilled in the art.
Fig. 2 is the scheme drawing of basic system according to an embodiment of the invention.Especially, Fig. 2 illustrates fluid dispensing system 200, and comprising can be from pressure container 210, centrifugal pump 220 and the use location 230 that fluid supply 240 recharges.Although single use location 230 only is shown, it will be appreciated by those of skill in the art that and utilize same distribution system 200 to supply liquid to a plurality of use locations.Also illustrate be used to set up and the container 210 that keep-ups pressure in the pressure-regulating device 250 of suitable pressure.For example, control apparatus 250 can comprise nitrogen gas feed.Centrifugal pump 220 can be any resistant to corrosion centrifugal pump, for example
The pump that LLC produces.
In operating process, liquid passes through system 200 by centrifugal pump 220 pumpings.Liquid transports out and is provided to use location 230 from pressure container 210.Any liquid that has more turns back in the pressure container 210.Preferably, return line is immersed in below the liquid level in the pressure container 210.Pressure in the system 200 keeps by set up suitable pressure in pressure container 210, for example uses control apparatus 250 to pressurize.The speed of centrifugal pump 220 is also set suitably so that the pressure of system 200 is remained on the level of requirement.
Use together by pressure container 210 and centrifugal pump 220, can obtain significant advantage.Especially, by working pressure container 210, the pressure of desired system 200 can be operated and still be produced to centrifugal pump 220 under low speed.By this method, system 200 according to the present invention compares requirement energy still less with the prior art systems of the vented tank of the standard of use.In addition, by while working pressure container 210 and centrifugal pump 220, compare the system pressure that can reach higher with the use of vented tank.
Additional advantage of the present invention is that the pressure through overregulate of pressure container 220 is used to alleviate the instantaneous pressure fluctuation of operation.For example, the pressure in the pressure container 210 is high more, just gets over the meeting limit return flow, has therefore alleviated the resistance head loss.This pressure to total system 200 has played stabilization.
Fig. 3 is the scheme drawing of additional embodiments of the present invention, and the selectable unit (SU) and the layout of native system is shown.Especially, Fig. 3 illustrates fluid dispensing system 300, and comprising can be from pressure container 310, centrifugal pump 320 and the use location 330 that fluid supply 340 recharges.Although single use location 330 only is shown, it will be appreciated by those of skill in the art that and utilize same distribution system 300 to supply liquid to a plurality of use locations.The pressure-regulating device 350 that is used in pressure container 310 setting up and keeps suitable pressure also is shown.For example, control apparatus 350 can comprise nitrogen gas feed.Also can comprise optional feature in the system 300, so that the loop feedback control of pressure and flow velocity is provided.Provide sensor 360 so that the liquid state in the mensuration system 300.For example, sensor 360 can be a pressure sensor of measuring fluid pressure, perhaps can be the flow counter of measuring flow rate of liquid.Sensor 360 provides the signal of expression result of a measurement to controller 370, described controller 370 and then send signal with pressure or flow velocity in the control system 300 more accurately to the miscellaneous part of system 300.For example, controller 370 can send signal to regulate the speed of pump 320 to pump 320, makes the result of a measurement of sensor 360 remain unchanged.In other words, if sensor 360 is pressure sensors, represent that so the signal of the fluid pressure in the system 300 is sent to controller 370.On the basis of this result of a measurement, controller judges whether to adjust the constant pressure in the maintenance system 300, if like this, just send the speed that signal is regulated pump 320 suitably.If sensor 360 is flow counter, the speed of pump 320 can similarly be regulated and be made and can reduce or increase flow velocity on request, so that remain to the constant flow rate of use location 330.
Alternatively, controller 370 can be to the pressure in control apparatus 350 sends the feasible pressure of pressure vessel 310 on request of signal, so that remain to the pressure or the constant flow rate of use location 330.An advantage of this possibility is, centrifugal pump 320 can be operated with constant speed, and the pressure of pressure container 310 is conditioned for the operation of control system 300.
Another possibility is to make controller 370 not only provide signal to pump 320 but also to control apparatus 350, with pressure and the constant flow rate that keeps leading to use location 330.
Although Fig. 3 only comprises single sensor 360, the present invention also comprises the embodiment with a plurality of sensors.For example, can use two pressure sensors, and these two all can provide signal to controller 370.Based on these signals, controller 370 can provide an output signal with the pressure in the setting pressure container 310 and control the pressure at first sensor place to control apparatus 350, and to the other output signal of pump 320 outputs with the speed of control pump and control the pressure at the second sensor place.Also comprise with flow counter and replace pressure sensor or be used in combination flow counter and other possibilities of pressure sensor.For example, pressure that can pressure of pressure vessel 310 is with the pressure at the sensor place that keep-ups pressure, and the speed that can regulate pump 320 is to keep the flow velocity at flow counter place.
The present invention also comprises other possibility and embodiment.For example, can add additional centrifugal pump so that provide reserve and redundancy for system to system.In addition, can use a plurality of pressure containers, perhaps be used as reserve and redundancy, perhaps be used for allowing liquid mixing to take place, and another container be to the total system dispense liquid at a pressure container.Also can add the disconnecting valve that is used to keep in repair to system.Can provide pressure-relief valve to exempt from damage in addition with the protection pressure control apparatus.For example also can provide humidification if necessary by the nitrogen stream humidification that will be used to pressurize.
Fig. 4 is the scheme drawing of an alternative embodiment of the invention.Especially, Fig. 4 illustrates fluid dispensing system 400, and comprising can be from fluid supply 440 pressure container 410, two centrifugal pumps 420,425 and the use location 430 that refill of source bucket or day tank for example.Although a plurality of use locations 430 shown in Fig. 4 it will be appreciated by those of skill in the art that and use described distribution system 400 to supply liquid to single use location.Centrifugal pump 420 and 425 is redundant, that is: pump is as the reserve of another pump.Also comprise in the system 400 pressure in the control presssure container 410 control apparatus 450, measure the state of the liquid in the described system 400 and produce signal with the first sensor 460 of the speed of control centrifugal pump 420 or 425 with measure the state of the liquid in the described system 400 and produce second sensor 470 of signal with the pressure of control presssure container 410.For example, first sensor 460 can be pressure sensor or flow counter, can be used for controlling in the mode identical with the mode that above proposes in conjunction with Fig. 3 the speed of centrifugal pump 420 or 425.Second sensor 470 can be pressure sensor or flow counter also, can be used for coming pressure in the control presssure container 410 in the mode identical with the mode that above proposes in conjunction with Fig. 3.
The possibility of embodiment shown in Fig. 4 is with above identical in conjunction with the described scheme of Fig. 3.Especially, can add additional centrifugal pump to system, further to provide reserve and redundancy to system.Can use a plurality of pressure containers, perhaps be used for reserve and redundancy, perhaps allow in a pressure container, liquid mixing to take place, and another container be to the total system dispense liquid.In special embodiment, pressure container can be a pressure measuring unit, makes any moment during operation all can determine the liquid level that pressure container is interior.Can add disconnecting valve to be used for maintenance to system.In addition, can provide pressure-relief valve to come the protection pressure control apparatus to exempt from damage.For example also can provide humidification if necessary by the nitrogen humidification that will be used to pressurize.
The present invention is by providing lot of advantages in conjunction with the favourable characteristics of pressure container and centrifugal pump on the prior art basis.Especially, the centrifugal pump according to system of the present invention can still produce desired system pressure with lower speed operation.Therefore, the prior art systems of system according to the present invention and the vented tank of using standard specific consumption energy still less mutually.In addition, by while working pressure container 210 and centrifugal pump 220, can reach than using the high system pressure of vented tank.Additional advantage of the present invention is that pressure container 220 is used to alleviate the instantaneous pressure fluctuation of operation, and the pressure of total system 200 is played stable effect.
Those skilled in the art can expect many modifications of the present invention and other embodiment by reading fwd specification sheets and relevant drawings.Therefore, be to be understood that the present invention is not limited to disclosed certain embodiments, modification of being done and other embodiment comprise within the scope of the appended claims.Although used specific term at this, they only are that universality or illustrative ground use, and purpose is not in order to limit.
Claims (28)
1. fluid dispensing system comprises:
Be used to distribute a fluid to the centrifugal pump of use location;
Be connected to the pressure container of centrifugal pump, wherein, described centrifugal pump receives pressure fluid from pressure container;
The pressure-regulating device that is used for the pressure of pressure vessel internal pressure; And
Be used for will the fluid returning pressure container that is assigned with of part pipeline.
2. fuid distribution system according to claim 1 is characterized in that, this fuid distribution system also comprises near the sensor that is used for the monitoring fluid state that is arranged on the use location.
3. fuid distribution system according to claim 2 is characterized in that described sensor is a pressure sensor.
4. fuid distribution system according to claim 2 is characterized in that described sensor is a flow counter.
5. fuid distribution system according to claim 2 is characterized in that this fuid distribution system also comprises controller.
6. fuid distribution system according to claim 5 is characterized in that, described controller is suitable for transmitting signal to centrifugal pump and pressure-regulating device, and from the sensor received signal.
7. fuid distribution system according to claim 1 is characterized in that this fuid distribution system also comprises the fluid source that is connected to pressure container.
8. fuid distribution system according to claim 1 is characterized in that, this fuid distribution system also comprises second centrifugal pump that is used to distribute a fluid to the use location that is connected to pressure container.
9. fuid distribution system according to claim 2 is characterized in that, this fuid distribution system also comprises second sensor that is arranged in the return line, and wherein second sensor is suitable for transmitting signal to pressure-regulating device.
10. fuid distribution system according to claim 1 is characterized in that described pressure container is a pressure measuring unit.
11. fuid distribution system according to claim 1 is characterized in that, described use location is the position at semiconductor fabrication process place.
12. fuid distribution system according to claim 1 is characterized in that, this fuid distribution system also comprises and is connected to the inert gas source of pressure-regulating device with the control presssure container inner pressure.
13. a method of controlling the pressure in the fuid distribution system comprises:
The speed of control centrifugal pump is to keep the predetermined pressure in place, use location;
The control presssure control apparatus is to keep being connected in the pressure of being scheduled in the pressure container of centrifugal pump; And
Utilization is arranged on the state that near the sensor in use location is measured fluid, and wherein measured state is used to control the speed and the pressure-regulating device of centrifugal pump.
14. method according to claim 13 is characterized in that, this method comprises that also the signal of the state that the indication of autobiography sensor in future is measured passes to controller.
15. method according to claim 14 is characterized in that, described controller basis is from the speed of the signal control centrifugal pump of sensor.
16. method according to claim 14 is characterized in that, described controller is according to the pressure that comes the control presssure container from the signal of sensor.
17. method according to claim 14 is characterized in that, this method also comprises uses controlled reset to control pressure in the fuid distribution system, and its middle controller receives the signal that transmitted and transmits control signal to centrifugal pump, so that governing speed.
18. method according to claim 17 is characterized in that, described controller sends second control signal to pressure-regulating device, with the pressure in the pressure of pressure vessel.
19. method according to claim 14, it is characterized in that, this method also comprises uses controlled reset to control pressure in the fuid distribution system, and its middle controller receives the signal that transmitted and transmits control signal to pressure-regulating device, so that the pressure in the pressure of pressure vessel.
20. method according to claim 14 is characterized in that, this method also comprises the state that is arranged near the described liquid of second sensor measurement of pressure container that utilizes.
21. method according to claim 20 is characterized in that, this method also comprises the signal from the measured state of the indication of second sensor is passed to controller.
22. method according to claim 21 is characterized in that, described controller basis is from the speed of the signal control centrifugal pump of second sensor.
23. method according to claim 21 is characterized in that, described controller basis is from the pressure in the signal control pressure container of second sensor.
24. method according to claim 21 is characterized in that, described controller is according to the speed of two signal control centrifugal pumps and the pressure in the pressure container.
25. method according to claim 20 is characterized in that, the step of measuring fluid state comprises the pressure of measuring fluid.
26. method according to claim 20 is characterized in that, the step of measuring fluid state comprises the measurement flow rate of fluid.
27. method according to claim 13 is characterized in that, this method also comprises the speed of controlling second centrifugal pump.
28. method according to claim 13 is characterized in that, this method also comprises the weight of the fluid in the transmission indicated pressure container or the signal of liquid level, and wherein pressure container is a pressure measuring unit.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US77344806P | 2006-02-15 | 2006-02-15 | |
| US60/773,448 | 2006-02-15 | ||
| US11/674,253 | 2007-02-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101472833A true CN101472833A (en) | 2009-07-01 |
Family
ID=40829507
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007800134979A Pending CN101472833A (en) | 2006-02-15 | 2007-02-14 | Method and apparatus for dispensing liquid with precise control |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101472833A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102180303A (en) * | 2011-02-18 | 2011-09-14 | 张联 | Fluid control device and control method thereof |
| CN102955480A (en) * | 2011-08-25 | 2013-03-06 | 睿纳有限责任公司 | Method for adjusting the liquid level of liquid in continuous equipment and device thereof |
| CN103852121A (en) * | 2012-11-29 | 2014-06-11 | 查特股份有限公司 | Metering System and Method for Cryogenic Liquids |
| CN111644279A (en) * | 2020-05-15 | 2020-09-11 | 西安西矿环保科技有限公司 | Low-pressure slurry supply device |
-
2007
- 2007-02-14 CN CNA2007800134979A patent/CN101472833A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102180303A (en) * | 2011-02-18 | 2011-09-14 | 张联 | Fluid control device and control method thereof |
| CN102955480A (en) * | 2011-08-25 | 2013-03-06 | 睿纳有限责任公司 | Method for adjusting the liquid level of liquid in continuous equipment and device thereof |
| CN103852121A (en) * | 2012-11-29 | 2014-06-11 | 查特股份有限公司 | Metering System and Method for Cryogenic Liquids |
| CN103852121B (en) * | 2012-11-29 | 2019-06-21 | 查特股份有限公司 | The metering system and method for cryogenic liquid |
| CN111644279A (en) * | 2020-05-15 | 2020-09-11 | 西安西矿环保科技有限公司 | Low-pressure slurry supply device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6561381B1 (en) | Closed loop control over delivery of liquid material to semiconductor processing tool | |
| US7828527B2 (en) | Paint circulating system and method | |
| WO2007103043A2 (en) | Liquid dispense system | |
| CA2842914C (en) | Method and device for controlling and/or regulating a fluid conveyor for conveying a fluid within a fluid line | |
| CN102274812A (en) | Gluing system and gluing method | |
| US11913606B2 (en) | Large-scale hydrogen refueling station | |
| US20130105182A1 (en) | System and Method of Automatic Tank Refill | |
| CN101472833A (en) | Method and apparatus for dispensing liquid with precise control | |
| CN101184536A (en) | Foam extinguishing device and method for operating it | |
| US20050049755A1 (en) | Fluid regulation | |
| CN110160230A (en) | Central air-conditioning, air-conditioner water system and its control method and control device | |
| CN107762824B (en) | Test pressure regulating system for oil-gas mixing pump | |
| CN102713088A (en) | Hydraulic system for construction machinery | |
| CN1846873A (en) | Method for operating a pneumatic device for the metered delivery of a liquid and pneumatic device | |
| CN104634023A (en) | Fluid flow control system and variable flow control method | |
| US20070215639A1 (en) | Method and Apparatus for Dispensing Liquid with Precise Control | |
| CN108201798B (en) | Method for mixing multiple liquids in high-precision online proportion | |
| CN102335877A (en) | Polishing solution delivery device | |
| US20160193620A1 (en) | Device for supplying an application material | |
| CN108138760B (en) | Control system and method for controlling a compression system | |
| KR20210058819A (en) | How to operate liquefied natural gas import facility | |
| CN114076261B (en) | Natural gas filling system and filling method | |
| CN114699941A (en) | Liquid mixing device, supply system and supply method | |
| US20240238467A1 (en) | System for conveying a sterilization medium and method of providing a sterilization medium | |
| CN203488983U (en) | System is seen off to internal compression flow oxygenerator pipe network |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20090701 |