CN101469977A - Collimation test device of direction gauge - Google Patents
Collimation test device of direction gauge Download PDFInfo
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- CN101469977A CN101469977A CNA200710304531XA CN200710304531A CN101469977A CN 101469977 A CN101469977 A CN 101469977A CN A200710304531X A CNA200710304531X A CN A200710304531XA CN 200710304531 A CN200710304531 A CN 200710304531A CN 101469977 A CN101469977 A CN 101469977A
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- vacuum chamber
- direction gage
- collimation
- gage
- vacuum
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Abstract
The invention relates to a collimation testing device for converter type direction regulators, belonging to the testing technical field, which comprises a direction regulator, an industrial control computer, a step motor, a magnetic fluid seal driver which is cooled by water and can bake, a collimator having a trim end of double cone structure, a fine tube, a gas intake valve, a corrugated pipe, a vacuum chamber and an air exhaust port, wherein the upper bottom face of the vacuum chamber is mounted with the direction regulator, the lower bottom face is connected with a vacuum pump unit of high pumping speed, the collimator having a trim end of double cone structure is mounted in the vacuum chamber, the gas intake valve, the corrugated pipe and the fine tube are used to induce gas, the step motor drives the collimator having a trim end of double cone structure via the magnetic fluid seal driver to rotate around an axle at low speed, and the whole test is completed by a collimation testing software piece for direction regulators. The collimation testing device improves the collimation testing accuracy and automatic degree of direct regulators, having compact structure, simple operation and the application for measuring the direction angle of converter type direction regulators.
Description
Technical field
The present invention relates to a kind of collimation test device of changing the type direction gage, belong to field tests.
Background technology
For space gas, because vacuum tightness is very low and " molsink " effect in space, air-flow mostly shows as the line of different directions, but, in the experimental provision on the ground, gas molecule can bump with wall, and the molecule after the collision is launched according to cosine law, make in container, to reach equilibrium state very soon, be difficult to form stable directed line.
The oriented flow that original research is paid close attention to is the air-flow of the porch of heavy caliber pump in the vacuum system, because the pumping speed of pump is very big, can think that the gas molecule that enters pump intake no longer returns container, thereby forming certain oriented flow, conversion type direction gage is initial appearance the in order to study this air-flow also.Along with the carrying out of research, find that the directivity of direction gage need be measured and determine, producing has the directed line of good directivity necessary.
Research and experiment show, the air-flow that is flowed out by long tube is because the boundling effect of pipe, certain directivity is arranged, the appropriate design long tube, the directivity angle can reach 30 ° (transmission probability is distributed in the awl with axis angle ± 15 ° greater than the gas molecule of maximal value 50%), can be used for producing directed line.
Fig. 1 is the synoptic diagram of regulating directivity with this device research, and valve 1 connects pressure-stabilized air source, and 2 is the magnet fluid sealing driver, and 3 for connecting bent plate, and long tube 4 is over against direction gage 5, on the axis of its inlet.During work, open valve 1, air-flow is introduced from long tube 4, rotary actuator 2 rotates to an angle by bent plate 3 guiding long tubes, and this angle can be read or calculate from the anglec of rotation of driver, choose different angles, just can obtain the angular response situation of direction gage.
Directivity that by this method can research tradition hole inlet type direction gage, but for many tubules inlet type and sphere taper type converter direction gage, owing to regulate the directivity fine (the directivity angle is less than 30 °) of itself, can cover because the air-flow distribution angle that device produces is big during with this device research direction and regulate actual directivity, can't finish experiment purpose.
Summary of the invention
The objective of the invention is in order to overcome the deficiencies in the prior art, and a kind of collimation test device and method of direction gage are provided.
The objective of the invention is to be achieved through the following technical solutions: a kind of collimation test device of direction gage, comprise direction gage, industrial control computer, stepper motor, the bakeable magnet fluid sealing driver of water-cooled, butt double cone structural alignment device, tubule, gas admittance valve, corrugated tube, vacuum chamber, bleeding point, its characteristics are: on the upper bottom surface installation direction rule of vacuum chamber, bottom surface connects the vacuum pump unit of big pumping speed; Butt double cone structural alignment device is installed in the vacuum chamber; Introduce gas by gas admittance valve, corrugated tube and tubule; Stepper motor drives butt double cone structural alignment device low speed by the magnet fluid sealing driver and pivots; The collimation testing software of whole test job direction of passage rule finishes.
A kind of collimation method of testing of direction gage is:
(1) prepares before the test, direction gage is installed on the flange-interface of vacuum chamber; Start the vacuum suction unit, make to reach 10 in the vacuum chamber
-7The final vacuum of Pa;
(2) open air intake valve and inflate in vacuum chamber, the adjustments of gas flow makes the reference gauge stable reading at a certain numerical value;
(3) connect industrial control computer and step motor control unit serial communication interface, start the collimation testing software, the testing software operation, set motor speed, turn to, position and acquisition time at interval, and collimating apparatus inlet rotated to the position that becomes θ=90 ° with direction gage inlet normal, gather the reading P (90 °) of direction gage this moment;
(4) collimating apparatus inlet is rotated to the position that becomes θ=0 ° with direction gage inlet normal, gather the reading P (0 °) of direction gage;
(5) gather in real time the angle θ that turns over and the reading P (θ) of direction gage by testing software, and the oriented flow percent of pass when calculating angle θ automatically
(6) ω (θ) is that the twice Δ θ of 0.5 o'clock angle θ is the directivity plane angle of direction gage.
The present invention's beneficial effect compared with prior art is:
(1) adopts industrial control computer by PLC control step motor, solved the accurate location and the problems of measurement of the anglec of rotation;
(2) adopt the bakeable magnet fluid sealing driver of water-cooled, this driver has good seal performance, does not almost have characteristics such as leakage, has solved 10
-7The vacuum seal problem of Pa;
(3) collimating apparatus adopts butt double cone structure, and this structure has very high collimation, can produce the directed line of fine directivity.
(4) vacuum chamber adopts hydrostatic column, and cylinder is short and diameter is big, makes that the gas in the vacuum chamber is drawn out of very soon, has reduced and the influence to direction gage of the molecule of wall collision.
Description of drawings
Fig. 1 is the structural representation of the direction gage collimation test device of long tube for collimating apparatus.
Fig. 2 is the structural representation of the direction gage collimation test device of butt double cone structure for collimating apparatus.
Among the figure: 1-valve, 2-magnet fluid sealing driver, 3-connection bent plate, 4-elongated tubular, 5,6-direction gage, 7-industrial control computer, 8-stepper motor, the bakeable magnet fluid sealing driver of 9-water-cooled, 10-butt double cone structural alignment device, 11-tubule, 12-gas admittance valve, 13-corrugated tube, 14-vacuum chamber, 15-bleeding point.
Embodiment
Below in conjunction with drawings and Examples the present invention is further described.
As shown in Figure 2, the collimation test device of a kind of direction gage of the present invention is made up of direction gage 6, industrial control computer 7, stepper motor 8, the bakeable magnet fluid sealing driver 9 of water-cooled, butt double cone structural alignment device 10, tubule 11, gas admittance valve 12, corrugated tube 13, vacuum chamber 14, bleeding point 15.
On the upper bottom surface installation direction rule 6 of vacuum chamber 14, bottom surface connects the vacuum pump unit of big pumping speed.Vacuum chamber 14 adopts
0.50m the cylindrical container of * 0.50m selects for use the special SUS316L stainless steel of vacuum melting to make.Butt double cone structural alignment device 10 is installed in the vacuum chamber 14, and its pore radius is that 4mm, awl high (equating with the awl spacing) are that 60mm, awl inclination angle are 120 °, still selects for use the special SUS316L stainless steel of vacuum melting to make.Introduce gas by gas admittance valve, corrugated tube and tubule, gas admittance valve 12 adopts the face seal micrometering valve, and the diameter of corrugated tube and tubule is 2.5mm.Stepper motor 8 drives butt double cone structural alignment device 10 low speed by magnet fluid sealing driver 9 and pivots, and the leakage rate of magnet fluid sealing driver 9 is less than 10
-12Pa.m
3/ s; The diameter of bleeding point is 0.25m, and the final vacuum of vacuum chamber 14 is 10
-7Pa.
Embodiment
(1) direction gage 6 is installed on the flange-interface of vacuum chamber 14; Start the vacuum suction unit, make in the vacuum chamber 14 to reach 10
-7The final vacuum (2.4 * 10 of Pa
-7Pa);
(2) open gas admittance valve 12 and inflate in vacuum chamber 14, the adjustments of gas flow makes the reference gauge stable reading at a certain numerical value (8.6 * 10
-6Pa);
(3) the control module serial communication interface of connection industrial control computer 7 and stepper motor 8, start the collimation testing software, the testing software operation, set motor 8 rotating speed, turn to, position and acquisition time at interval, and the inlet of collimating apparatus 10 rotated to the position that becomes θ=90 ° with the inlet normal of direction gage 6, gather the reading P (90 °) (7.2 * 10 of direction gage this moment
-6Pa);
(4) inlet of collimating apparatus 10 is rotated to the position that becomes θ=0 ° with the inlet normal of direction gage 6, gather the reading P (0 °) (3.8 * 10 of direction gage
-5Pa);
(5) gather in real time the reading P (θ) (2.3 * 10 of the angle θ (7 °) that turns over and direction gage by testing software
-5Oriented flow when Pa), and automatically calculating angle θ passes through
(6) ω (θ) is that the twice Δ θ of 0.5 o'clock angle θ is the directivity plane angle (14 °) of direction gage.
Claims (3)
1, a kind of collimation test device of direction gage is characterized in that: comprise direction gage (6), industrial control computer (7), stepper motor (8), the bakeable magnet fluid sealing driver of water-cooled (9), butt double cone structural alignment device (10), tubule (11), gas admittance valve (12), corrugated tube (13), vacuum chamber (14), bleeding point (15); On the upper bottom surface installation direction rule (6) of vacuum chamber (14), bottom surface connects the vacuum pump unit of big pumping speed by flange; Butt double cone structural alignment device (10) is installed in the vacuum chamber (14); Introduce gas by gas admittance valve (12), corrugated tube (13) and tubule (11); Stepper motor (8) drives butt double cone structural alignment device (10) by magnet fluid sealing driver (9) and pivots.
2, a kind of collimation method of testing of direction gage is:
(1) prepares before the test, direction gage is installed on the flange-interface of vacuum chamber; Start the vacuum suction unit, make to reach 10 in the vacuum chamber
-7The final vacuum of Pa;
(2) open air intake valve and inflate in vacuum chamber, the adjustments of gas flow makes the reference gauge stable reading at a certain numerical value;
(3) connect industrial control computer and step motor control unit serial communication interface, start the collimation testing software, the testing software operation, set motor speed, turn to, position and acquisition time at interval, and collimating apparatus inlet rotated to the position that becomes θ=90 ° with direction gage inlet normal, gather the reading P (90 °) of direction gage this moment;
(4) collimating apparatus inlet is rotated to the position that becomes θ=0 ° with direction gage inlet normal, gather the reading P (0 °) of direction gage;
(5) gather in real time the angle θ that turns over and the reading P (θ) of direction gage by testing software, and the oriented flow percent of pass when calculating angle θ automatically
(6) ω (θ) is that the twice Δ θ of 0.5 o'clock angle θ is the directivity plane angle of direction gage.
3, the collimation test device of a kind of direction gage according to claim 1, the material of described vacuum chamber can adopt the special 316L stainless steel of vacuum melting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710304531XA CN101469977B (en) | 2007-12-28 | 2007-12-28 | Collimation test device of direction gauge |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710304531XA CN101469977B (en) | 2007-12-28 | 2007-12-28 | Collimation test device of direction gauge |
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| Publication Number | Publication Date |
|---|---|
| CN101469977A true CN101469977A (en) | 2009-07-01 |
| CN101469977B CN101469977B (en) | 2011-04-20 |
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ID=40827677
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|---|---|---|---|
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103343320A (en) * | 2013-07-26 | 2013-10-09 | 北京丹鹏表面技术研究中心 | Multi-station source baffle system for vacuum coating equipment |
| CN107976160A (en) * | 2017-11-23 | 2018-05-01 | 哈尔滨工业大学 | A kind of inner groove seamed edge angle of bank measurement system and method |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100395531C (en) * | 2006-06-15 | 2008-06-18 | 中国航天科技集团公司第五研究院第五一○研究所 | Bypass type ultrahigh and extreme-high vacuum gauge calibrating device and method thereof |
| CN100545609C (en) * | 2006-06-15 | 2009-09-30 | 中国航天科技集团公司第五研究院第五一○研究所 | Adopt linear vacuum gauge to measure the device and method of orifice conductance |
| CN201229171Y (en) * | 2007-12-28 | 2009-04-29 | 中国航天科技集团公司第五研究院第五一〇研究所 | Alignment test device for direction gauge |
-
2007
- 2007-12-28 CN CN200710304531XA patent/CN101469977B/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103343320A (en) * | 2013-07-26 | 2013-10-09 | 北京丹鹏表面技术研究中心 | Multi-station source baffle system for vacuum coating equipment |
| CN107976160A (en) * | 2017-11-23 | 2018-05-01 | 哈尔滨工业大学 | A kind of inner groove seamed edge angle of bank measurement system and method |
| CN107976160B (en) * | 2017-11-23 | 2020-06-09 | 哈尔滨工业大学 | System and method for measuring inclination angle of inner ring groove edge |
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| Publication number | Publication date |
|---|---|
| CN101469977B (en) | 2011-04-20 |
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