CN101469977A - Collimation test device of direction gauge - Google Patents
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- 238000012360 testing method Methods 0.000 title claims abstract description 18
- 238000005086 pumping Methods 0.000 claims abstract description 6
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- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
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- 238000009434 installation Methods 0.000 claims 1
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- 239000011553 magnetic fluid Substances 0.000 abstract description 9
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- 238000000605 extraction Methods 0.000 description 3
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- 230000000694 effects Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
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Abstract
本发明涉及一种转换器型方向规的准直性测试装置,属于测试领域。本发明的装置包括方向规、工业控制计算机、步进电机、水冷可烘烤的磁流体密封传动器、截头双圆锥结构准直器、细管、进气阀、波纹管、真空室、抽气口等部件。在真空室的上底面安装方向规,下底面接大抽速的真空泵机组;截头双圆锥结构准直器安装在真空室内;通过进气阀、波纹管和细管引入气体;步进电机通过磁流体密封传动器驱动截头双圆锥结构准直器低速绕轴旋转;整个测试工作通过方向规的准直性测试软件来完成。本发明提高了方向规的准直性测试精度和自动化程度,且结构紧凑,操作简单方便,可以用于转换器方向规的方向性角测量。
The invention relates to a collimation testing device for a converter-type direction gauge, which belongs to the testing field. The device of the present invention includes a direction gauge, an industrial control computer, a stepper motor, a water-cooled and bakeable magnetic fluid seal driver, a truncated double-cone collimator, a thin tube, an air inlet valve, a bellows, a vacuum chamber, and a pump. Air port and other components. The direction gauge is installed on the upper bottom of the vacuum chamber, and the lower bottom is connected to a vacuum pump unit with a high pumping speed; the truncated biconical collimator is installed in the vacuum chamber; the gas is introduced through the intake valve, bellows and thin tube; the stepping motor passes through The magnetic fluid sealed drive drives the truncated double-cone collimator to rotate around the axis at low speed; the whole test work is completed by the collimation test software of the direction gauge. The invention improves the alignment test accuracy and automation degree of the direction gauge, has compact structure, simple and convenient operation, and can be used for the direction angle measurement of the converter direction gauge.
Description
技术领域 technical field
本发明涉及一种转换器型方向规的准直性测试装置,属于测试领域。The invention relates to a collimation testing device for a converter-type direction gauge, which belongs to the testing field.
背景技术 Background technique
对于空间气体来说,由于真空度很低和空间的“分子沉”效应,气流大都表现为不同方向的束流,但是,在地面上的实验装置中,气体分子会与器壁发生碰撞,并且碰撞后的分子按照余弦定律发射,使得在容器中很快达到平衡状态,难以形成稳定的定向束流。For space gas, due to the low degree of vacuum and the "molecular sinking" effect in space, most of the airflow appears as beams in different directions. However, in the experimental device on the ground, the gas molecules will collide with the wall, and The collided molecules are emitted according to the law of cosines, so that the equilibrium state is quickly reached in the container, and it is difficult to form a stable directional beam.
最初研究关注的定向流是真空系统中大口径泵的入口处的气流,由于泵的抽速很大,可以认为进入泵入口的气体分子不再返回容器,因而形成一定的定向流,转换器型方向规也是为了研究这种气流而最初出现的。随着研究的进行,发现方向规的方向性需要进行测量和确定,产生有良好方向性的定向束流很有必要。The directional flow that the initial research focuses on is the airflow at the inlet of the large-diameter pump in the vacuum system. Because the pumping speed is very high, it can be considered that the gas molecules entering the pump inlet will no longer return to the container, thus forming a certain directional flow. The converter type Directional gauges also originally appeared to study this airflow. As the research progressed, it was found that the directivity of the direction gauge needs to be measured and determined, and it is necessary to produce a directional beam with good directivity.
研究和实验表明,由长管流出的气流由于管的集束效应,有一定的方向性,合理设计长管,方向性角可以达到30°(传输几率大于最大值50%的气体分子分布在与轴线夹角±15°的锥内),可以用来产生定向束流。Research and experiments have shown that the airflow flowing out of the long tube has a certain directionality due to the clustering effect of the tube. If the long tube is properly designed, the directional angle can reach 30° (the gas molecules with a transmission probability greater than 50% of the maximum value are distributed in the same direction as the axis In the cone with an included angle of ±15°), it can be used to generate a directional beam.
图1是用这种装置研究规管方向性的示意图,阀门1接稳压气源,2为磁流体密封传动器,3为连接弯板,长管4正对方向规5,在其入口的轴线上。工作时,打开阀门1,气流从长管4引入,旋转传动器2,通过弯板3引导长管旋转一定角度,这个角度可以从传动器的旋转角度读出或者计算得到,选取不同的角度,就可以得到方向规的角响应情况。Figure 1 is a schematic diagram of using this device to study the directionality of the regulation, the valve 1 is connected to the stabilized air source, the 2 is the magnetic fluid seal driver, the 3 is connected to the bent plate, the long pipe 4 is facing the direction gauge 5, and at its entrance axis. When working, open the valve 1, the air flow is introduced from the long pipe 4, and the actuator 2 is rotated to guide the long pipe to rotate at a certain angle through the curved plate 3. This angle can be read or calculated from the rotation angle of the actuator, and different angles are selected. The angular response of the direction gauge can be obtained.
通过这种方法可以研究传统孔入口型方向规的方向性,但对于多细管入口型和球锥型转换器方向规,由于规管本身的方向性很好(方向性角小于30°),用这种装置研究方向性时会因为装置产生的气流分布角度大而掩盖规管实际的方向性,无法完成实验目的。This method can be used to study the directionality of the traditional hole-entry type direction gauge, but for the multi-capillary-type and spherical-cone converter direction gauges, since the directionality of the gauge itself is very good (directivity angle is less than 30°), When using this device to study directionality, the actual directionality of the gauge will be covered up due to the large airflow distribution angle generated by the device, and the purpose of the experiment cannot be achieved.
发明内容 Contents of the invention
本发明的目的是为了克服现有技术的不足,而提供一种方向规的准直性测试装置及方法。The object of the present invention is to provide a collimation testing device and method for a direction gauge in order to overcome the deficiencies of the prior art.
本发明的目的是通过下述技术方案实现的:一种方向规的准直性测试装置,包括方向规、工业控制计算机、步进电机、水冷可烘烤的磁流体密封传动器、截头双圆锥结构准直器、细管、进气阀、波纹管、真空室、抽气口,其特点在于:在真空室的上底面安装方向规,下底面接大抽速的真空泵机组;截头双圆锥结构准直器安装在真空室内;通过进气阀、波纹管和细管引入气体;步进电机通过磁流体密封传动器驱动截头双圆锥结构准直器低速绕轴旋转;整个测试工作通过方向规的准直性测试软件来完成。The object of the present invention is achieved through the following technical solutions: a device for testing the alignment of a direction gauge, including a direction gauge, an industrial control computer, a stepper motor, a water-cooled and bakeable magnetic fluid sealed drive, a truncated double Conical structure collimator, thin tube, air intake valve, bellows, vacuum chamber, and air extraction port. The structure collimator is installed in the vacuum chamber; the gas is introduced through the inlet valve, bellows and thin tube; the stepping motor drives the truncated double-cone structure collimator to rotate around the axis at low speed through the magnetic fluid sealed drive; the whole test works through the direction Standard collimation test software to complete.
一种方向规的准直性测试方法为:A method for testing the collimation of a direction gauge is:
(1)测试前准备,将方向规安装于真空室的法兰接口上;启动真空抽气机组,使真空室内达到10-7Pa的极限真空度;(1) Preparation before the test, install the direction gauge on the flange interface of the vacuum chamber; start the vacuum pumping unit to make the vacuum chamber reach the ultimate vacuum degree of 10 -7 Pa;
(2)打开进气阀门向真空室内充气,调节气体流量,使参考规读数稳定在某一数值;(2) Open the intake valve to inflate the vacuum chamber, adjust the gas flow, and stabilize the reading of the reference gauge at a certain value;
(3)连接工业控制计算机与步进电机控制单元串行通讯接口,启动准直性测试软件,测试软件运行,设定电机转速、转向、位置以及采集时间间隔,并将准直器入口旋转到与方向规入口法线成θ=90°的位置,采集此时方向规的读数P(90°);(3) Connect the serial communication interface between the industrial control computer and the stepper motor control unit, start the collimation test software, run the test software, set the motor speed, steering, position and collection time interval, and rotate the collimator inlet to At the position of θ=90° to the normal line of the direction gauge entrance, collect the reading P(90°) of the direction gauge at this time;
(4)将准直器入口旋转到与方向规入口法线成θ=0°的位置,采集方向规的读数P(0°);(4) Rotate the entrance of the collimator to the position where θ=0° is formed with the normal line of the entrance of the direction gauge, and collect the reading P(0°) of the direction gauge;
(5)通过测试软件实时采集转过的角度θ与方向规的读数P(θ),并自动计算角度θ时的定向流通过率 (5) Real-time acquisition of the turned angle θ and the reading P(θ) of the direction gauge through the test software, and automatically calculate the directional flow passing rate at the angle θ
(6)ω(θ)为0.5时的角度θ的两倍Δθ为方向规的方向性平面角。(6) Δθ twice the angle θ when ω(θ) is 0.5 is the directional plane angle of the direction gauge.
本发明与现有技术相比的有益效果是:The beneficial effect of the present invention compared with prior art is:
(1)采用工业控制计算机通过PLC控制步进电机,解决了旋转角度的精确定位与测量问题;(1) Using industrial control computer to control the stepper motor through PLC, the problem of precise positioning and measurement of the rotation angle is solved;
(2)采用水冷可烘烤的磁流体密封传动器,该传动器具有密封性能好、几乎无泄漏等特点,解决了10-7Pa的真空密封问题;(2) The water-cooled and bakeable magnetic fluid seal actuator is adopted, which has the characteristics of good sealing performance and almost no leakage, and solves the vacuum sealing problem of 10 -7 Pa;
(3)准直器采用截头双圆锥结构,该结构具有很高的准直性,可以产生很好方向性的定向束流。(3) The collimator adopts a truncated biconical structure, which has high collimation and can produce a directional beam with good directionality.
(4)真空室采用圆柱形容器,圆柱短且直径大,使得真空室中的气体很快被抽出,减小了与器壁碰撞的分子对方向规的影响。(4) The vacuum chamber adopts a cylindrical container, the cylinder is short and the diameter is large, so that the gas in the vacuum chamber is quickly drawn out, and the influence of the molecules colliding with the wall on the direction gauge is reduced.
附图说明 Description of drawings
图1为准直器为长管的方向规准直性测试装置的结构示意图。Fig. 1 is a structural schematic diagram of a direction gauge collimation test device in which the collimator is a long tube.
图2为准直器为截头双圆锥结构的方向规准直性测试装置的结构示意图。Fig. 2 is a structural schematic diagram of a direction gauge collimation testing device with a truncated double-cone structure as the collimator.
图中:1—阀门、2—磁流体密封传动器、3—连接弯板、4—细长管、5、6—方向规、7—工业控制计算机、8—步进电机、9—水冷可烘烤的磁流体密封传动器、10—截头双圆锥结构准直器、11—细管、12—进气阀、13—波纹管、14—真空室、15—抽气口。In the figure: 1—Valve, 2—Magnetic Fluid Sealed Actuator, 3—Connecting Bending Plate, 4—Slender Tube, 5, 6—Direction Gauge, 7—Industrial Control Computer, 8—Stepping Motor, 9—Water Cooling Baked ferrofluid sealed actuator, 10—truncated biconical structure collimator, 11—thin tube, 12—intake valve, 13—bellows, 14—vacuum chamber, 15—air extraction port.
具体实施方式 Detailed ways
下面结合附图及实施例对本发明作进一步描述。The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
如图2所示,本发明一种方向规的准直性测试装置由方向规6、工业控制计算机7、步进电机8、水冷可烘烤的磁流体密封传动器9、截头双圆锥结构准直器10、细管11、进气阀12、波纹管13、真空室14、抽气口15组成。As shown in Figure 2, a kind of collimation test device of direction gauge of the present invention is made up of direction gauge 6, industrial control computer 7, stepper motor 8, water-cooled ferrofluid seal driver 9 that can bake, truncated double cone structure A collimator 10, a thin tube 11, an air inlet valve 12, a bellows 13, a vacuum chamber 14, and an air extraction port 15 are composed.
在真空室14的上底面安装方向规6,下底面连接大抽速的真空泵机组。真空室14采用0.50m×0.50m的柱形容器,选用真空熔炼的特殊SUS316L不锈钢制作。截头双圆锥结构准直器10安装在真空室14内,其孔半径为4mm、锥高(与锥间距相等)为60mm、锥倾角为120°,仍选用真空熔炼的特殊SUS316L不锈钢制作。通过进气阀、波纹管和细管引入气体,进气阀12采用面密封微调阀,波纹管和细管的直径为2.5mm。步进电机8通过磁流体密封传动器9驱动截头双圆锥结构准直器10低速绕轴旋转,磁流体密封传动器9的泄漏量小于10-12Pa.m3/s;抽气口的直径为0.25m,真空室14的极限真空度为10-7Pa。A direction gauge 6 is installed on the upper bottom surface of the vacuum chamber 14, and the lower bottom surface is connected with a vacuum pump unit with a large pumping speed. The vacuum chamber 14 adopts The cylindrical container of 0.50m×0.50m is made of special SUS316L stainless steel melted by vacuum. The truncated double-cone collimator 10 is installed in the vacuum chamber 14. The hole radius is 4mm, the cone height (equal to the cone spacing) is 60mm, and the cone inclination angle is 120°. It is still made of special SUS316L stainless steel melted in vacuum. The gas is introduced through the intake valve, the bellows and the thin tube. The intake valve 12 adopts a face-seal fine-tuning valve, and the diameter of the bellows and the thin tube is 2.5 mm. The stepper motor 8 drives the truncated double-cone collimator 10 to rotate around the axis at low speed through the magnetic fluid seal driver 9, and the leakage of the magnetic fluid seal driver 9 is less than 10 -12 Pa.m 3 /s; the diameter of the air inlet is 0.25m, and the ultimate vacuum degree of the vacuum chamber 14 is 10 -7 Pa.
实施例Example
(1)将方向规6安装于真空室14的法兰接口上;启动真空抽气机组,使真空室14内达到10-7Pa的极限真空度(2.4×10-7Pa);(1) Install the direction gauge 6 on the flange interface of the vacuum chamber 14; start the vacuum pumping unit to make the ultimate vacuum degree of 10 −7 Pa in the vacuum chamber 14 (2.4×10 −7 Pa);
(2)打开进气阀12向真空室14内充气,调节气体流量,使参考规读数稳定在某一数值(8.6×10-6Pa);(2) Open the intake valve 12 to inflate the vacuum chamber 14, adjust the gas flow rate, and stabilize the reading of the reference gauge at a certain value (8.6×10 -6 Pa);
(3)连接工业控制计算机7与步进电机8的控制单元串行通讯接口,启动准直性测试软件,测试软件运行,设定电机8的转速、转向、位置以及采集时间间隔,并将准直器10的入口旋转到与方向规6的入口法线成θ=90°的位置,采集此时方向规的读数P(90°)(7.2×10-6Pa);(3) connect the industrial control computer 7 and the control unit serial communication interface of the stepper motor 8, start the collimation test software, test software operation, set the rotating speed, turning, position and collection time interval of the motor 8, and align The entrance of the straightener 10 is rotated to a position of θ=90° with the entrance normal of the direction gauge 6, and the reading P(90°) (7.2×10 -6 Pa) of the direction gauge is collected at this time;
(4)将准直器10的入口旋转到与方向规6的入口法线成θ=0°的位置,采集方向规的读数P(0°)(3.8×10-5Pa);(4) Rotate the entrance of the collimator 10 to the position of θ=0° with the entrance normal of the direction gauge 6, and collect the reading P(0°) (3.8×10 −5 Pa) of the direction gauge;
(5)通过测试软件实时采集转过的角度θ(7°)与方向规的读数P(θ)(2.3×10-5Pa),并自动计算角度θ时的定向流通过 (5) Collect the turned angle θ (7°) and the reading P(θ) (2.3×10 -5 Pa) of the direction gauge in real time through the test software, and automatically calculate the directional flow passage at the angle θ
(6)ω(θ)为0.5时的角度θ的两倍Δθ为方向规的方向性平面角(14°)。(6) Δθ twice the angle θ when ω(θ) is 0.5 is the directional plane angle (14°) of the direction gauge.
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CN103343320A (en) * | 2013-07-26 | 2013-10-09 | 北京丹鹏表面技术研究中心 | Multi-station source baffle system for vacuum coating equipment |
CN107976160A (en) * | 2017-11-23 | 2018-05-01 | 哈尔滨工业大学 | A kind of inner groove seamed edge angle of bank measurement system and method |
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CN100545609C (en) * | 2006-06-15 | 2009-09-30 | 中国航天科技集团公司第五研究院第五一○研究所 | Device and method for measuring small hole conductance using linear vacuum gauge |
CN100395531C (en) * | 2006-06-15 | 2008-06-18 | 中国航天科技集团公司第五研究院第五一○研究所 | A split-type ultra-high and extremely high vacuum gauge calibration device and method |
CN201229171Y (en) * | 2007-12-28 | 2009-04-29 | 中国航天科技集团公司第五研究院第五一〇研究所 | Alignment test device for direction gauge |
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CN103343320A (en) * | 2013-07-26 | 2013-10-09 | 北京丹鹏表面技术研究中心 | Multi-station source baffle system for vacuum coating equipment |
CN107976160A (en) * | 2017-11-23 | 2018-05-01 | 哈尔滨工业大学 | A kind of inner groove seamed edge angle of bank measurement system and method |
CN107976160B (en) * | 2017-11-23 | 2020-06-09 | 哈尔滨工业大学 | A system and method for measuring the inclination angle of an inner ring groove edge |
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