CN101458203A - Double-probe same-point measurement scanning probe microscope - Google Patents
Double-probe same-point measurement scanning probe microscope Download PDFInfo
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- CN101458203A CN101458203A CNA200710191137XA CN200710191137A CN101458203A CN 101458203 A CN101458203 A CN 101458203A CN A200710191137X A CNA200710191137X A CN A200710191137XA CN 200710191137 A CN200710191137 A CN 200710191137A CN 101458203 A CN101458203 A CN 101458203A
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- 238000002465 magnetic force microscopy Methods 0.000 description 6
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
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- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
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Abstract
The double-probe same-point measurement scanning probe microscope utilizes an XY or XYZ piezoelectric scanner, an XY or XYZ piezoelectric scanner with an enhanced X positioning range or an added XY inertial step, sends a sample measuring point from a first probe to the vicinity of a second probe, and realizes the remeasurement of the measuring point of the first probe by the second probe by searching for a mark. The two probes are adjusted in their spacing from the sample by two independent Z positioners so that each probe does not interfere with the measurement of the other probe. Compared with the same-point measurement technology of the existing mobile probe, the design has one less long-range degree of freedom, the two needles are allowed to be far apart, and probes of different types are also allowed, so that the control and the manufacture are greatly simplified, the given data are more comprehensive and reliable, the significance is wider and deeper, and the method is particularly suitable for the research of phase change, reaction kinetics and cross discipline.
Description
Technical field
The present invention relates to a kind of can the same tested point of same sample with two independently probe measure scanning double probe microscope with scanning imagery, belong to the scanning probe microscopy technical field.
Background technology
Existing scanning probe microscopy (SPM) kind is a lot, for example comprise scanning tunnel microscope (STM), atomic force microscope (AFM), magnetic force microscopy (MFM) or the like, these different types of scanning probe microscopies respectively have tangible relative merits: the important quantum information of this class of STM energy measurement density of electronic states, has atom definition, and can carry out Atomic Manipulation, but energy measurement insulated sample not can not obtain the important information of sample spintronics and magnetics aspect; Though and AFM can measure insulated sample, also have atom definition, can not provide the information of density of electronic states and magnetics aspect; MFM can provide the data of spintronics and magnetics aspect, but resolution generally is not higher than 20 nanometers, does not have atom definition, can not carry out Atomic Manipulation.
For addressing the above problem, people such as roentgen F.J.Giessibl write paper in 1994 on 1923 pages of scientific research academic periodical " scientific instrument comment " (Review of Scientific Instrument) the 65th phases, propose both to have done with same probe the probe of STM, the scan-probe of making AFM or other SPM again constitutes the combination microscope.This problem bringing is: this root probe all is a best choice to constituting microscopical all the different SPM of combination unlikely.This wherein has certain compromise.Such as, tungsten, platinum, iridium probe are fit to do the STM probe, but their nonferromagnetics can not be made the MFM probe.If they are plated iron, the MFM probe is made in magnetization again, has then damaged the sharpness (resolution) of probe again, is not suitable for remaking the STM probe.Promptly allow to find the magnetic probe with atom definition, how the magnetic action in the obtaining signal is thoroughly separated from the local density of states (local density of states is abbreviated as LDOS), this is first difficult problem.
As with multiprobe (STM probe+AFM probe+MFM probe+...) construct the combination microscope, so how original position (in-situ) is changed pin (do not destroy under the prerequisite of vacuum and sample and change pin), it is just very difficult how about to make the different classes of probe that changes to point to same place sample measurement point (same-point measurement) as list probe SPM, and this is second difficult problem.
Multiprobe makes up microscopical volume and how to reduce, and goes to be suitable for putting in the various extreme physical environments, also is not easy, and this is the 3rd difficult problem.
In addition, use multiprobe must introduce the degree of freedom that the more control device goes to control have been increased, this makes cost, complexity, interference, thermal stability all constitute a difficult problem.For example, people such as Alex deLozanne write articles mobile second probe of dependences (stepping ground) March in 2006 the 77th page of the 5th volume the 2nd phase IEEE TRANSACTIONS ON NANOTECHNOLOGY periodical and seek the measurement point of first probe (maintaining static) of apart from each other, its algorithm and equipment are all very complicated: need move a probe (2 long-range degree of freedom to exceed such the coming of single scanatron maximum scan scope on a large scale in the XY plane, or claim XY stepping degree of freedom) could allow the crosspointer needle point near within maximum scan imaging scope and measure same sample spot, the Z direction of crosspointer is slightly approached also needs 2 long-range degree of freedom (or claiming slightly to approach degree of freedom), amount to 4 long-range control degrees of freedom (disregarding the XYZ scanning imagery degree of freedom of short distance), but also need two feedback controllers independently to control the Z feedback regulation of crosspointer (very expensive), in addition, crosspointer can only be all the STM probe, can not select dissimilar probes for use, because the STM probe is leptosomatic, two STM probes intersect 45 degree and lean on very closely with the interior needle point that also can allow them even collide, but the AFM probe be pyramid and tower at the bottom of be fixed in again in little overarm (cantilever), the STM probe must be opened to such an extent that open very much ability and can allow their needle point lean on very closely with the angle of AFM probe, this is installing very difficulty, and is even unfeasible.
In view of this, the present invention proposes a kind ofly first probe to be delivered at the measurement point on the sample within the sweep limit of second probe and realized same-point measurement by laterally driving sample (only needing a long-range degree of freedom), add that two are slightly approached degree of freedom, only amounting to, 3 long-range degree of freedom get final product, and two probes only need parallel or the low-angle setting gets final product, can select complete different types of probe for use, feedback controller also only needs one and gets final product, because only scanning samples comes imaging (the neither scanning of two probes).
Summary of the invention
The objective of the invention is to a difficult problem, a kind of double probe same-point measurement scanning probe microscope simple and easy to control is provided for solving above-mentioned pair of probe same-point measurement control complexity and being difficult to select for use the variety classes probe.
Purpose of the present invention can be achieved through the following technical solutions: a kind of double probe same-point measurement scanning probe microscope, comprise matrix, specimen holder, it is characterized in that also comprising first probe, second probe, a Z steady arm, the 2nd Z steady arm, positioning seat, XY piezoelectric scanner, specimen holder is fixed on the XY piezoelectric scanner, the one Z steady arm is fixed on the positioning seat, first probe stationary is in the mobile terminal of a Z steady arm and point to specimen holder and constitute a Z regulator, and the 2nd Z regulator constitutes in one of following three kinds of modes:
(a) the 2nd Z steady arm is fixed on the positioning seat, and second probe stationary is in the mobile terminal of the 2nd Z steady arm and point to specimen holder, and positioning seat and XY piezoelectric scanner are fixed on the matrix;
(b) second probe stationary is on positioning seat and point to specimen holder, and positioning seat is fixed in the mobile terminal of the 2nd Z steady arm, and the 2nd Z steady arm and XY piezoelectric scanner are fixed on the matrix;
(c) second probe stationary is on positioning seat and point to specimen holder, and the XY piezoelectric scanner is fixed in the mobile terminal of the 2nd Z steady arm, and the 2nd Z steady arm and positioning seat are fixed on the matrix;
Can increase the Z location on the described XY piezoelectric scanner, constitute the XYZ piezoelectric scanner.
A described Z steady arm and the 2nd Z steady arm are to be arranged side by side and to set up on described XY or XYZ piezoelectric scanner along the steady arm of described direction side by side location to make described XY or XYZ piezoelectric scanner increase at this direction orientation range.
Can set up compressing tablet on the scanning end of described XY or XYZ piezoelectric scanner, specimen holder or be fixed on this compressing tablet or with this compressing tablet be one, between the stiff end of this compressing tablet and described XY or XYZ piezoelectric scanner, set up chest expander, the scanning end is held this compressing tablet and is produced pressure, electrical isolation between this compressing tablet and the described scanning end with this compressing tablet.
Described chest expander is spring, magnet, bungee, sash weight or a compressing tablet itself.
A described Z steady arm or the 2nd Z steady arm are piezo-electric motor, inertial motor, screw adjusting or stepper motor.
Described inertial motor comprises piezoelectricity expansion bend, spring leaf, mass, and the piezoelectricity expansion bend is flexible to be held by spring leaf perpendicular to the elastic force of Z direction mass is clamped.
The principle of work of double probe same-point measurement scanning probe microscope of the present invention is: specimen holder is fixed on the XY piezoelectric scanner, the one Z steady arm is fixed on the positioning seat, and first probe stationary constitutes a Z regulator in the mobile terminal of a Z steady arm and the sample that points on the specimen holder; The 2nd Z steady arm is fixed on the described positioning seat, and second probe stationary is in the mobile terminal of the 2nd Z steady arm and point to sample, and positioning seat and XY piezoelectric scanner are fixed on the matrix, constitute the 2nd Z regulator.Like this, the spacing of crosspointer and sample can independently be controlled.The first and second Z steady arms play independently decides the effect that probe slightly approaches (coarse approach) to sample with first and second, also can be used for realizing Z FEEDBACK CONTROL or the fine tuning of Z direction location (fineadjustment).
We at first regulate the 2nd Z regulator makes second probe away from sample surfaces.Then, regulating a Z regulator makes the close sample surfaces of the probe of winning and utilizes location, the scan function of XY piezoelectric scanner to carry out measurement or the imaging of first probe to sample.Can select a unique patterns or feature as mark from institute's altimetric image, also available first probe leaves marks by Atomic Manipulation or gas aggradation near measurement point.Afterwards, former measurement point is delivered in the measurement range of second probe, regulated the 2nd Z regulator again and make second probe near sample surfaces and carry out of the measurement or the imaging of second probe to sample with the XY piezoelectric scanner.The mark that obtains in the time of can seeking first probe measurement in one-tenth's image is with the measurement point of accurate acquisition first probe.The feasibility of this method is: the imaging area of first probe can select more greatly (micron dimension) earlier, carries out small size imaging (atom definition) again after carrying out mark, marks again; When former measurement point being sent to second probe with the XY piezoelectric scanner, also there is no need very accurately to send under second probe tip, just can become the mark of seeking in the image among the big figure of the first probe gained at it as long as deliver within the maximum imaging scope of second probe, utilize location, the scan function of XY piezoelectric scanner that second probe is moved to the mark place again and carry out magnified sweep (atom definition) to obtain the atomic level location or the imaging of former measurement point.
The purpose of above-described the 2nd Z regulator is the spacing of energy independent regulation second probe and sample, so second regulator one of also can be as follows constituted: second probe stationary is on positioning seat and point to sample, positioning seat is fixed in the mobile terminal of the 2nd Z steady arm, and the 2nd Z steady arm and XY piezoelectric scanner are on matrix; Perhaps: second probe stationary is on positioning seat and point to sample, and the XY piezoelectric scanner is due to the mobile terminal of the 2nd Z steady arm, and the 2nd Z steady arm and described positioning seat are fixed on the matrix.Can increase the Z location on the described XY piezoelectric scanner, constitute the XYZ piezoelectric scanner, realize the Z FEEDBACK CONTROL.
Because the present invention o'clock is transported to another probe from a probe with sample measurement to carry out same-point measurement, and not like the such traveling probe of prior art (crosspointer must can lean on very near ability same-point measurement), so, only need with a controller (only need control the scanning and the imaging of sample), and it is enough far away as long as sample can be transported, crosspointer can be got and opens, do not need their needle point near within the scanning imagery scope, thereby crosspointer also can make laying of crosspointer have the dirigibility of height with less angle even parallel placement.But crosspointer should be tried one's best near settling during practical operation, can make XY or XYZ piezoelectric scanner faster and more accurately the measurement point of first probe be sent to the second probe place like this, does not need to transport too big distance.Provide some below and increase the way that sample transports distance.
The one Z steady arm and the 2nd Z steady arm are arranged side by side, and on described XY or XYZ piezoelectric scanner, set up, make described XY or XYZ piezoelectric scanner increase at this direction orientation range along the steady arm of described direction side by side location.
Can set up compressing tablet on the scanning end of above-mentioned XY or XYZ piezoelectric scanner, and set up the stiff end that chest expander pulls to this compressing tablet described XY or XYZ piezoelectric scanner, described scanning end is held this compressing tablet and is produced pressure with this compressing tablet and makes it not be pulled to described stiff end, electrical isolation between compressing tablet and XY or the XYZ piezoelectric scanner.This has constituted one both can be in its sweep limit interscan, can step to the inertia step-scan device that comes on a large scale outside its sweep limit mobile example again.Its principle of work is as follows: chest expander pulls to the stiff end of XY or XYZ piezoelectric scanner with compressing tablet, but is held by its scanning end, like this, just produces pressure N between compressing tablet and the described scanning end.We apply on X electrode, Y electrode or the Z electrode of XY or XYZ piezoelectric scanning pipe and change signal V (t) slowly.Here be defined as follows slowly: V (t) changes the acceleration of motion a that compressing tablet is produced, and is equivalent to make compressing tablet to be subjected to inertial force F, F equal compressing tablet and on it gross mass m of sample multiply by a; If F is less than the maximum static friction force f (equal μ N, μ is a coefficient of maximum static friction) that is produced by N, F will be not enough to overcome f and produce slip so, and such V (t) variation is called slow variation.At this moment, F=ma＜f=μ N.Because the distance of compressing tablet one moved further is s=0.5at
2, wherein t is that compressing tablet moves the s required time, so m (2s/t
2)＜μ N also is t〉sqrt (2ms/ μ N) can be described as slowly, and wherein sqrt () is for opening radical sign.Definition t
0=sqrt (2ms/ μ N) is the marginal time.
Under so slow V (t) effect, compressing tablet will be done scanning motion with the scanning end of XY or XYZ piezoelectric scanning pipe does not have stepping.Its scanning positioning function that Here it is, the sweep limit maximum is about the 10-100 micron dimension.
As producing step motion, as long as fast again travelling backwards after XY moves slowly, the travelling backwards time is faster than t
0At this moment the inertial force that is subjected to of compressing tablet is greater than its maximum static friction force that is subjected to, compressing tablet will not held travelling backwards with the scanning of XY or XYZ piezoelectric scanning pipe but a slippage is arranged, so the cycle repeats just can produce the XY stepping, sample is sent far, just the XY stepping is to carry out having under the situation of friction force, and bearing accuracy is lower.
Be to improve bearing accuracy, can on described XYZ piezoelectric scanning pipe, apply Z elongation signal and XY signal slowly, make compressing tablet extend s in the Z direction
ZWith mobile S in the XY plane
XY, again these two signals are back removed fast, be defined as follows fast here: the retraction of Z is equivalent to a Z direction inertial force F
Z=ma
Z, a wherein
ZRetraction acceleration for the Z direction: a
Z=2s
Z/ t
Z 2, t wherein
ZFor Z bounces back the used time; As F
ZGreatly to offsetting the pressure N:F that produces friction force fully
ZN, i.e. ma
Z=m2s
Z/ t
Z 2N, also promptly: t
Z＜sqrt (2ms
Z/ N), such returning removed and is called fast.At this moment, be 0 because can produce the normal pressure of friction force, promptly friction force is 0, so when applying XY travelling backwards signal and this travelling backwards process and occur within the Z retraction process, compressing tablet will be stayed the locality owing to inertia, not hold travelling backwards with the scanning of XYZ piezoelectric scanning pipe.This process is not subjected to the interference of friction force, so compressing tablet will be very accurately be stayed the locality, and described locality with respect to original starting point accurately displacement a step-length S
XYSo repeat L time and can totally produce a mobile S on a large scale
XYL realizes its positioning function on a large scale.Owing to eliminated friction force fully, such macroscopic view location very accurately equals given value a: S
XYL so the macroscopic view location is accurate, and is not partial to problem.
Above-mentioned chest expander can be spring, magnet, bungee, sash weight or compressing tablet itself, just can be held and its generation normal pressure by the free end of XYZ piezoelectric scanner as long as compressing tablet can be pulled to the pedestal of described XYZ piezoelectric scanner.
Above-mentioned first, second Z steady arm can be regulated or stepper motor for piezo-electric motor, inertial motor, screw.If select inertial motor for use, can make as follows: the flexible end of piezoelectricity expansion bend by spring leaf mass is clamped perpendicular to the elastic force of Z direction.Its principle of work is: when slightly approaching, mass is subjected to the piezoelectricity expansion bend to extend fast contraction periodically slowly in the Z direction, when fast the contraction, be subjected to inertial force greater than maximum static friction force, cause mass in its prolonging direction slippage of piezoelectricity expansion bend upper edge, the specimen holder (or probe base) that drives on the mass approaches to probe base (or specimen holder).Otherwise the period effects that fast elongation is shunk slowly is with they two separation.
Compared with the prior art, beneficial effect of the present invention is embodied in:
(1) can carry out duplicate measurements to the same measurement point of same sample with dissimilar probes, even because use dissimilar probes, probe spacing has to strengthen, but only needs a horizontal ledex just first probe measurement point can be delivered to the second probe place.
(2) only need three long-range degree of freedom, lack one than prior art.
(3) data that record can be from dissimilar microscopes.
(4) data that record have the height comparability, because from same measurement point.
(5) data that record can help people to obtain more, more important, also more reliable conclusion, for example, first probe is chosen as the scanning tunnel microscope probe, second probe is chosen as atomic force or magnetic microscope probe, and the data that obtain from first probe can confirm or provide more multi thread with the data of second probe so.
(6) the package unit structure is very succinct, compact, firmly, and noise is little, anti-interference and vibration resistance is strong, and whole system does not have what is loosening, hangs, complicated coiling, be easy to vibrate etc. and diminish stable place.
(7) simple to operate, only need seldom several piezoelectric signals, can carry out programmed control fully, avoid manual adjustments, and can work in extreme physical condition (volume is little, does not generate heat, and it is low to give vent to anger, no magnetic, extreme condition compatibility).
Description of drawings
Fig. 1 is the two probe scanning probe microscope structural representations of the parallel same-point measurement of the present invention.
Fig. 2 is the two probe scanning probe microscope structural representations of serial same-point measurement of the present invention.
Fig. 3 is the two probe scanning probe microscope structural representations of linkage type same-point measurement of the present invention.
Fig. 4 is the two probe scanning probe microscope structural representations of the horizontal stepping type same-point measurement of the present invention.
Number in the figure: 1 first probe, 1a the one Z steady arm, 2 second probes, 2a the 2nd Z steady arm, 3 samples, 3a specimen holder, 4XY piezoelectric scanner, 5 positioning seats, 6 matrixes, 7 horizontal step-scan devices, 8 compressing tablets, 9 chest expanders.
Below by embodiment, the structure accompanying drawing is further described the present invention.
Embodiment
Embodiment 1: the two probe scanning probe microscopes of parallel same-point measurement
Fig. 1 is the two probe scanning probe microscope structural representations of the parallel same-point measurement of the present invention.Sample 3 is fixed on the specimen holder 3a, and specimen holder 3a is fixed on the XY piezoelectric scanner 4, and a Z steady arm 1a is fixed on the positioning seat 5, and first probe 1 is fixed in the mobile terminal of a Z steady arm 1a and points to sample 3 and constitutes a Z regulator; The 2nd Z steady arm 2a is fixed on the positioning seat 5, and second probe 2 is fixed in the mobile terminal of the 2nd Z steady arm 2a and points to sample 3, and positioning seat 5 is fixed on the matrix 6 with XY piezoelectric scanner 4, constitutes the 2nd Z regulator.Like this, the spacing between crosspointer 1,2 and the sample 3 can independently be controlled.The first steady arm 1a and the second steady arm 2a play independently first probe 1 and second are decided the effect that probe 2 slightly approaches to sample 3.
Principle of work is: at first regulate the second steady arm 2a and make the surface of second probe 2 away from sample 3.Then, regulating a Z steady arm 1a makes the probe 1 of winning near sample 3 surfaces and utilize the scanning positioning function of XY piezoelectric scanner 4 to carry out the measurement or the imaging of 1 pair of sample 3 of first probe.Can select a unique patterns or feature as mark from institute's altimetric image, also available first probe 1 be done a mark by the method for atom carrying or gas aggradation near measurement point.Afterwards, former measurement point is delivered near second probe 2, regulated the 2nd Z steady arm 2a again and make second probe 2 near sample 3 surfaces and carry out the measurement or the imaging of 2 pairs of samples 3 of second probe with XY piezoelectric scanner 4.The mark that obtains in the time of can seeking 1 measurement of first probe in one-tenth's image is with the measurement point of accurate acquisition first probe 1.The imaging area of first probe 1 can select more greatly (micron dimension) earlier, carries out small size imaging (atom definition) again after carrying out mark, marks again; When former measurement point being sent to second probe 2 with XY piezoelectric scanner 4, also there is no need very accurately to send under the needle point of second probe 2, just can become the mark of seeking in the image among the big figure of previous first probe, 1 gained at it as long as deliver within the maximum imaging scope of second probe 2, utilize location, the scan function of XY piezoelectric scanner 4 that second probe 2 is moved to the mark place again and carry out magnified sweep (atom definition) to obtain the atomic level location or the imaging of former measurement point.
Above-mentioned crosspointer 1,2 should be tried one's best near placing, can make like this XY piezoelectric scanner 4 more accurate, the measurement point of first probe 1 is sent to second probe, 2 places quickly, do not need to transport too big distance.
Embodiment 2: the two probe scanning probe microscopes of serial same-point measurement
The purpose that the 2nd Z regulator in the foregoing description 1 is risen is the spacing of independent regulation second probe 2 and sample 3, so second regulator also can constitute by mode shown in Figure 2: second probe 2 is fixed on the positioning seat 5 and points to sample 3, positioning seat 5 is fixed in the mobile terminal of the 2nd Z steady arm 2a, and the 2nd Z steady arm 2a and XY piezoelectric scanner 4 are fixed on the matrix 6.Like this, when the 2nd Z steady arm 2a carries out the Z telescopic adjustment, can regulate the spacing between the sample 3 and second probe 2.Though because connected in series between a Z steady arm 1a and the 2nd Z steady arm 2a makes the spacing between the sample 3 and first probe 1 also change thereupon, this spacing can make to win and not come in contact between probe 1 and the sample 3 with regard to can not damaging first probe 1 by regulating a Z steady arm 1a.So this structure can realize that also the spacing between two probes and the sample is independent adjustable.
Embodiment 3: the two probe scanning probe microscopes of linkage type same-point measurement
See Fig. 3, second probe 2 is fixed on the positioning seat 5 and points to sample 3, and XY piezoelectric scanner 4 is fixed in the mobile terminal of the 2nd Z steady arm 2a, and the 2nd Z steady arm 2a and positioning seat 5 all are fixed on the matrix 6.Like this, when the 2nd Z steady arm 2a carries out the Z telescopic adjustment, whole XY piezoelectric scanner 4 with and go up fixing sample 3 and will link with it, thereby regulate spacing between second probe 2 and the sample 3.Though the spacing between the sample 3 and first probe 1 also changes thereupon, this spacing can make to win and not come in contact between probe 1 and the sample 3 with regard to can not damaging first probe 1 by regulating a Z steady arm 1a.This structure can realize that also the spacing between two probes and the sample is independent adjustable.
The two probe scanning probe microscopes of embodiment 4:XYZ type same-point measurement
Can set up the Z location on the XY piezoelectric scanner among the foregoing description 1-3, constitute the XYZ piezoelectric scanner.
Embodiment 5: the two probe scanning probe microscopes of horizontal stepping type same-point measurement
Can select among the foregoing description 1-4 a described Z steady arm and the 2nd Z steady arm to being arranged side by side, and on described XY or XYZ piezoelectric scanner, set up along the steady arm of described direction side by side location, make described XY or XYZ piezoelectric scanner increase at this direction orientation range.
In addition, referring to Fig. 4, XY among the foregoing description 1-4 or XYZ piezoelectric scanning pipe can be constructed as follows on the scanning end of horizontal step-scan device 7:XY or XYZ piezoelectric scanner and set up compressing tablet 8, described specimen holder 3a or be fixed on this compressing tablet 8 or be one with this compressing tablet 8, between the stiff end of this compressing tablet 8 and described XY or XYZ piezoelectric scanner, set up chest expander 9, described scanning end is held this compressing tablet 8 (making it does not moved to described stiff end by chest expander 9) and is produced pressure, electrical isolation between this compressing tablet 8 and the described scanning end with this compressing tablet 8.Chest expander 9 can be spring, magnet, sash weight, bungee or a compressing tablet itself.Chest expander 9 can place the inside or the outside of XY or XYZ piezoelectric scanning pipe.This horizontal step-scan device 7 can work in microcosmic scanning, station-keeping mode, also can work in macroscopic view step mode on a large scale.
For microcosmic scanning, station-keeping mode, on the X electrode of XY or XYZ piezoelectric scanning pipe, Y electrode, apply the inertial force that variation is located slowly or sweep signal makes compressing tablet 8 be subjected to and be not enough to overcome the maximum static friction force that pressure produces, being compressing tablet 8 moves and does not relatively move with the scanning end of XY or XYZ piezoelectric scanning pipe, does not also promptly have stepping.There is not stepping just can not move on a large scale, its microcosmic scanning that Here it is, positioning function, working range is the 10-100 micron dimension to the maximum.
As producing step motion, as long as fast again travelling backwards after XY moves slowly, the travelling backwards time is short to and makes inertial force that compressing tablet (comprising the sample on it) is subjected to greater than the maximum static friction force that is subjected to, compressing tablet will not held travelling backwards with the scanning of XY or XYZ piezoelectric scanning pipe but a slippage is arranged, so the cycle repeats just can produce stepping in glide direction, sample is sent far, and just stepping is to carry out having under the situation of friction force, and bearing accuracy is lower.
Be to improve bearing accuracy, can on XYZ piezoelectric scanning pipe, apply Z elongation signal and XY signal slowly, make compressing tablet 4, slowly be meant here not produce between the scanning end of compressing tablet 8 and XYZ piezoelectric scanning pipe to relatively move in Z direction elongation and mobile in the XY plane.Again these two signals are back removed fast, are meant fast here: the retraction of Z elongation Z direction inertial force of equal value can produce the pressure N of friction force to counteracting fully greatly.At this moment, total the normal pressure that can produce friction force be 0, promptly friction force is 0, so when applying XY travelling backwards signal and travelling backwards process and occur within the Z retraction process, compressing tablet 8 will not held travelling backwards with the scanning of XYZ piezoelectric scanning pipe owing to inertia is stayed the locality.This process is not subjected to the interference of friction force, so compressing tablet 8 will very accurately be stayed the locality, and described locality with respect to original starting point accurately displacement a step-length.So repetition can totally produce one long apart from stepping, realize that its macroscopic view is located, step function on a large scale.Because of having eliminated friction force fully,, be not partial to problem on a large scale so the location is accurate yet.
The setting of above-mentioned chest expander is to interact with pressure for the stiff end that compressing tablet can be pulled to XY or XYZ piezoelectric scanning pipe and with the scanning end of XY or XYZ piezoelectric scanning pipe, so, chest expander can be in the inside or the outside of XY or XYZ piezoelectric scanning pipe except its position, its kind also can be non-spring-like, and for example: sash weight that plays under bungee, the magnet that attracts compressing tablet, the compressing tablet or compressing tablet itself (producing the gravity of the pulling force of described pressure from compressing tablet itself) etc. can produce the device of described pressure.
Embodiment 6: the Z steady arm of the two probe scanning probe microscopes of same-point measurement
The effect of first, second Z steady arm of the two probe scanning probe microscopes of same-point measurement described in the foregoing description 1-5 is the spacings between first, second probe of independent regulation and the sample, plays and slightly approaches regulating action.So the various regulators that slightly approach used in the scanning probe microscopy all can be used as the Z steady arm of the present invention with the spot scan double probe microscope, comprise piezo-electric motor, inertial motor, screw adjusting or stepper motor., aspects such as volume little, cost low, stability high, extreme physical condition compatibility simple from controlling are considered, one is selected preferably is inertial motor, a better embodiment of this inertial motor is: comprise piezoelectricity expansion bend, pedestal, spring leaf, mass, the flexible end of piezoelectricity expansion bend by spring leaf mass is clamped perpendicular to the elastic force of Z direction.
Claims (7)
1, a kind of double probe same-point measurement scanning probe microscope, comprise matrix, specimen holder, it is characterized in that also comprising first probe, second probe, a Z steady arm, the 2nd Z steady arm, positioning seat, XY piezoelectric scanner, specimen holder is fixed on the XY piezoelectric scanner, the one Z steady arm is fixed on the positioning seat, first probe stationary is in the mobile terminal of a Z steady arm and point to specimen holder and constitute a Z regulator, and the 2nd Z regulator constitutes in one of following three kinds of modes:
(a) the 2nd Z steady arm is fixed on the positioning seat, and second probe stationary is in the mobile terminal of the 2nd Z steady arm and point to specimen holder, and positioning seat and XY piezoelectric scanner are fixed on the matrix;
(b) second probe stationary is on positioning seat and point to specimen holder, and positioning seat is fixed in the mobile terminal of the 2nd Z steady arm, and the 2nd Z steady arm and XY piezoelectric scanner are fixed on the matrix;
(c) second probe stationary is on positioning seat and point to specimen holder, and the XY piezoelectric scanner is fixed in the mobile terminal of the 2nd Z steady arm, and the 2nd Z steady arm and positioning seat are fixed on the matrix;
2, double probe same-point measurement scanning probe microscope according to claim 1 is characterized in that can increasing on the described XY piezoelectric scanner Z location, constitutes the XYZ piezoelectric scanner.
3, double probe same-point measurement scanning probe microscope according to claim 1 and 2 is characterized in that a described Z steady arm and the 2nd Z steady arm are to be arranged side by side and to set up along the steady arm of described direction side by side location to make described XY or XYZ piezoelectric scanner increase at this direction orientation range on described XY or XYZ piezoelectric scanner.
4, double probe same-point measurement scanning probe microscope according to claim 1 and 2, it is characterized in that: on the scanning end of described XY piezoelectric scanner or XYZ piezoelectric scanner, set up compressing tablet, described specimen holder or be fixed on this compressing tablet or with this compressing tablet be one, between the stiff end of this compressing tablet and described XY or XYZ piezoelectric scanner, set up chest expander, described scanning end is held this compressing tablet and is produced pressure, electrical isolation between this compressing tablet and the described scanning end with this compressing tablet.
5, double probe same-point measurement scanning probe microscope according to claim 4 is characterized in that described chest expander is spring, magnet, bungee, sash weight or a compressing tablet itself.
6, double probe same-point measurement scanning probe microscope according to claim 1 and 2 is characterized in that a Z steady arm or the 2nd Z steady arm are piezo-electric motor, inertial motor, screw adjusting or stepper motor.
7, double probe same-point measurement scanning probe microscope according to claim 6 is characterized in that inertial motor comprises piezoelectricity expansion bend, spring leaf, mass, and the piezoelectricity expansion bend is flexible to be held by spring leaf perpendicular to the elastic force of Z direction mass is clamped.
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Cited By (7)
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| CN101629885B (en) * | 2009-07-07 | 2011-06-29 | 清华大学 | Double probe micro nanometer mechanics detecting system |
| CN102243253A (en) * | 2011-04-25 | 2011-11-16 | 中国科学院合肥物质科学研究院 | Scanning probe microscope body with isolated imaging scanning and rough approximation |
| CN102640007A (en) * | 2009-10-29 | 2012-08-15 | 布鲁克纳米公司 | Scanning probe microscope having support stage incorporating a kinematic flexure arrangement |
| CN105675922A (en) * | 2016-02-04 | 2016-06-15 | 广州市本原纳米仪器有限公司 | Method and system for correcting scanning range of piezoelectric ceramic tube scanner |
| CN106645803A (en) * | 2016-12-14 | 2017-05-10 | 国家纳米科学中心 | Fast dual-probe atomic force microscope approximation device and fast dual-probe atomic force microscope approximation method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN201163262Y (en) * | 2007-12-10 | 2008-12-10 | 中国科学技术大学 | Double-probe same-point measurement scanning probe microscope |
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- 2007-12-10 CN CN200710191137XA patent/CN101458203B/en not_active Expired - Fee Related
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101629885B (en) * | 2009-07-07 | 2011-06-29 | 清华大学 | Double probe micro nanometer mechanics detecting system |
| CN102640007A (en) * | 2009-10-29 | 2012-08-15 | 布鲁克纳米公司 | Scanning probe microscope having support stage incorporating a kinematic flexure arrangement |
| US8782810B2 (en) | 2009-10-29 | 2014-07-15 | Bruker Nano, Inc. | Scanning probe microscope having support stage incorporating a kinematic flexure arrangement |
| CN102640007B (en) * | 2009-10-29 | 2015-05-13 | 布鲁克纳米公司 | Scanning probe microscope having support stage incorporating a kinematic flexure arrangement |
| CN102243253A (en) * | 2011-04-25 | 2011-11-16 | 中国科学院合肥物质科学研究院 | Scanning probe microscope body with isolated imaging scanning and rough approximation |
| CN102243253B (en) * | 2011-04-25 | 2013-03-20 | 中国科学院合肥物质科学研究院 | Scanning probe microscope body with isolated imaging scanning and rough approximation |
| CN105675922A (en) * | 2016-02-04 | 2016-06-15 | 广州市本原纳米仪器有限公司 | Method and system for correcting scanning range of piezoelectric ceramic tube scanner |
| CN106645803A (en) * | 2016-12-14 | 2017-05-10 | 国家纳米科学中心 | Fast dual-probe atomic force microscope approximation device and fast dual-probe atomic force microscope approximation method |
| CN111505341A (en) * | 2020-04-27 | 2020-08-07 | 南京信息工程大学 | Multi-sample quick-replacement type scanning probe microscope |
| CN111505341B (en) * | 2020-04-27 | 2022-03-08 | 南京信息工程大学 | Multi-sample quick-replacement type scanning probe microscope |
| CN112924275A (en) * | 2021-01-25 | 2021-06-08 | 武汉大学 | Micro-force measuring device, preparation method thereof and in-situ mechanical testing method |
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