CN101455948B - Fluid mixing apparatus - Google Patents
Fluid mixing apparatus Download PDFInfo
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- CN101455948B CN101455948B CN2007100945576A CN200710094557A CN101455948B CN 101455948 B CN101455948 B CN 101455948B CN 2007100945576 A CN2007100945576 A CN 2007100945576A CN 200710094557 A CN200710094557 A CN 200710094557A CN 101455948 B CN101455948 B CN 101455948B
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Abstract
The invention discloses a fluid mixing device which comprises a buffer tank, a metering device and a mixing tank connected in the flow direction of fluid, and also comprises a first tee device, a second tee device and a third tee device, wherein a first end of the first tee device is used for connecting a first fluid supply source, while a second end is in fluid connection with the input end of the buffer tank and a third end is in fluid connection with a first end of the second tee device; a second end of the second tee device is in fluid connection with the input end of the mixing tank, while a third end is in fluid connection with a first end of the third tee device; and a second end of the third tee device is in fluid connection with the input end of the buffer tank, while a third end is used for connecting a second fluid supply source. The fluid mixing device can realize the mixing of two sorts of fluid in any proportion under the condition that the connection ends of both fluid supply sources and the fluid mixing device are unchangeable.
Description
Technical field
The present invention relates to technical field of manufacturing semiconductors, the fluid mixer in particularly a kind of semiconductor fabrication process.
Background technology
In the manufacturing process of semiconductor integrated circuit, usually need wet etching or wet clean process, for example in publication number is the Chinese patent application file of CN101063821A, disclose a kind of technology of removing etch residue, wherein used wet clean process and removed etch residue.
In the technology of wet etching or wet-cleaning, need two or more etching solution or cleaning solution to mix use sometimes.Thereby the device that need two kinds of different solution can be mixed according to a certain percentage.
Fig. 1 is a kind of fluid mixer in the prior art, and described fluid mixer comprises dashpot 100, measuring pump 102 and mixing channel 104.Wherein, dashpot 100 is connected with described measuring pump 102 by fluid circuit, measuring pump 102 is connected with described mixing channel 104 by fluid circuit, on described dashpot 100, has first incoming end 106, be used for being connected with the first fluid supply source, on described mixing channel 104, has second incoming end 108, owing to be connected with the second fluid supply source.Described mixing channel 104 has output 105, is used for the liquid output with described mixing channel 104.
When using described fluid mixer and mixing two kinds of different fluids, first incoming end 106 is connected to the first fluid supply source, second incoming end 108 is connected to the second fluid supply source.Supply with the first fluid and second fluid to described fluid supply apparatus simultaneously; First fluid inputs to mixing channel 104 through measuring pump 102 according to certain flow then through first incoming end, 106 input buffering grooves 100; Second fluid inputs to mixing channel 104, the second fluids and controls the flow that is input in the mixing channel 104 by flowmeter behind second incoming end 108.The first fluid and second fluid that are input to simultaneously in the mixing channel 104 according to different flows mix, and form mixed liquor.
In order to realize the accurate control of fluid flow, the flow of measuring pump 102 is generally less, thereby the flow of the fluid of process dashpot 100 and measuring pump 102 inputs is less, and it is bigger through the flow of the fluid of input 108 input, mixing when causing described fluid mixer only to be only applicable to the first fluid ratio less than second fluid proportional, for example, the first fluid and second fluid ratio are can be suitable for described fluid mixer at 1: 100 o'clock; When the ratio of first fluid is greater than second fluid proportional in needing mixed liquor, for example needing the first fluid and second fluid proportional is 100: 1 o'clock, just the first fluid supply source need be connected to second incoming end 108,, could realize the second fluid supply source that operation is trouble comparatively and being connected to first input end 106; Described fluid mixer can't be realized mixing of first fluid and the second fluid arbitrary proportion under the constant situation of first fluid supply source, the second fluid supply source and this fluid mixer link.
Summary of the invention
The invention provides a kind of fluid mixer, the present invention can be implemented in mixing of this two kinds of fluid arbitrary proportions under the constant situation of two kinds of fluid supply sources and fluid mixer link.
A kind of fluid mixer provided by the invention comprises dashpot, metering device and mixing channel that the order fluid connects, also comprises first three-way device, second three-way device and the 3rd three-way device;
Wherein, first end of described first three-way device is used for being connected with the first fluid supply source, and second end is connected with described dashpot input fluid, and the 3rd end is connected with the first end fluid of described second three-way device;
Second end of described second three-way device is connected with described mixing channel input fluid, and the 3rd end is connected with the first end fluid of described the 3rd three-way device;
Second end of described the 3rd three-way device is connected with described dashpot input fluid, and the 3rd end is connected with the second fluid supply source.
Optionally, described first three-way device, second three-way device and/or the 3rd three-way device are triple valve.
Optionally, described first three-way device, second three-way device and/or the 3rd three-way device are made up of first one-way valve, second one-way valve and the 3rd one-way valve; Wherein, an end of an end of described first one-way valve, an end of second one-way valve and the 3rd one-way valve links together, and the other end is respectively first end, second end and the 3rd end of each three-way device.
Optionally, described first three-way device is made up of first one-way valve and second one-way valve, wherein an end of first one-way valve and second one-way valve links together, as first end of described first three-way device, the other end of described first one-way valve and second one-way valve is respectively as second end and the 3rd end of this first three-way device.
Optionally, described second three-way device is made up of first one-way valve and second one-way valve, wherein an end of first one-way valve and second one-way valve links together, as second end of described second three-way device, the other end of described first one-way valve and second one-way valve is respectively as first end and the 3rd end of this second three-way device.
Optionally, described the 3rd three-way device is made up of first one-way valve and second one-way valve, wherein an end of first one-way valve and second one-way valve links together, as second end of described the 3rd three-way device, the other end of described first one-way valve and second one-way valve is respectively as first end and the 3rd end of the 3rd three-way device.
Optionally, described triple valve and/or one-way valve are pneumatic operated valve or electronic valve or mechanical valve.
Optionally, second end of described second three-way device and mixing channel between metering device is arranged.
Optionally, described metering device is gauge table or measuring pump.
Optionally, the described first fluid and/or second fluid are liquid or gas.
Accordingly, the present invention also provides a kind of fluid mixer, comprises dashpot, metering device and mixing channel that the order fluid connects, also comprises first three-way device, second three-way device and the 3rd three-way device;
Wherein, first end of described first three-way device is used for being connected with the first fluid supply source, and second end is connected with described mixing channel input fluid, and the 3rd end is connected with the first end fluid of described second three-way device;
Second end of described second three-way device is connected with described dashpot input fluid, and the 3rd end is connected with the first end fluid of described the 3rd three-way device;
Second end of described the 3rd three-way device is connected with described mixing channel input fluid, and the 3rd end is used for being connected with the second fluid supply source.
Optionally, described first three-way device, second three-way device and/or the 3rd three-way device are triple valve.
Optionally, described first three-way device, second three-way device and/or the 3rd three-way device are made up of first one-way valve, second one-way valve and the 3rd one-way valve; Wherein, an end of an end of described first one-way valve, an end of second one-way valve and the 3rd one-way valve links together, and the other end is respectively first end, second end and the 3rd end of each three-way device.
Optionally, described first three-way device is made up of first one-way valve and second one-way valve, wherein an end of first one-way valve and second one-way valve links together, as second end of described first three-way device, the other end of described first one-way valve and second one-way valve is respectively as first end and the 3rd end of this first three-way device.
Optionally, described second three-way device is made up of first one-way valve and second one-way valve, wherein an end of first one-way valve and second one-way valve links together, as second end of described second three-way device, the other end of described first one-way valve and second one-way valve is respectively as first end and the 3rd end of this second three-way device.
Optionally, described the 3rd three-way device is made up of first one-way valve and second one-way valve, wherein an end of first one-way valve and second one-way valve links together, as the 3rd end of described the 3rd three-way device, the other end of described first one-way valve and second one-way valve is respectively as first end and second end of the 3rd three-way device.
Optionally, described triple valve and/or one-way valve are pneumatic operated valve or electronic valve or mechanical valve.
Optionally, between second end and mixing channel of described first three-way device, between the 3rd three-way device second end and the mixing channel metering device is arranged.
Optionally, described metering device is gauge table or measuring pump.
Optionally, the described first fluid and/or second fluid are liquid or gas.
Compared with prior art, in the technique scheme has the following advantages:
Described fluid mixer by the connection between first, second and the 3rd three-way device and with being connected of mixing channel, dashpot, can be implemented under the situation that needn't change two kinds of fluids and this fluid mixer, realize the mixing of arbitrary proportion, it is comparatively convenient to operate.
Description of drawings
Fig. 1 is the schematic diagram of a kind of fluid mixer of the prior art;
Fig. 2 is the schematic diagram of first embodiment of fluid mixer of the present invention;
Fig. 3 is the schematic diagram of second embodiment of fluid mixer of the present invention;
Fig. 4 is the schematic diagram of the 3rd embodiment of fluid mixer of the present invention;
Fig. 5 is the schematic diagram of the 4th embodiment of fluid mixer of the present invention;
Fig. 6 is the schematic diagram of the 5th embodiment of fluid mixer of the present invention;
Fig. 7 is the schematic diagram of the 6th embodiment of fluid mixer of the present invention.
The specific embodiment
Below in conjunction with accompanying drawing the specific embodiment of the present invention is described in detail.
The invention provides a kind of fluid mixer, can make of the mixing of two kinds of different fluids by arbitrary proportion.This fluid mixer comprises dashpot, metering device, mixing channel, first three-way device, second three-way device and the 3rd three-way device; Wherein, described dashpot is connected with the metering device fluid; Described metering device is connected with the mixing channel fluid; Described first three-way device, first three-way device, second three-way device and the 3rd three-way device respectively have three ends, first end of described first three-way device is connected with the first fluid supply source, second end is connected with described dashpot input fluid, and the 3rd end is connected with the first end fluid of described second three-way device; Second end of described second three-way device is connected with described mixing channel input fluid, and the 3rd end is connected with the first end fluid of described the 3rd three-way device; Second end of described the 3rd three-way device is connected with described dashpot input fluid, and the 3rd end connects the second fluid supply source.Described fluid connecting device can be realized the mixing of two kinds of different fluids by arbitrary proportion, and is easy to use.
Below in conjunction with schematic diagram fluid mixer of the present invention is described in detail.
Fig. 2 is the schematic diagram of first embodiment of fluid mixer of the present invention.
Please refer to Fig. 2, fluid mixer comprises dashpot 10, measuring pump 12 and mixing channel 14, and first triple valve 16, second triple valve 18 and the 3rd triple valve 20.Wherein, described first triple valve 16 has the first end 16a, the second end 16b and the 3rd end 16c, and second triple valve 18 has the first end 18a, the second end 18b and the 3rd end 18c, and described the 3rd triple valve 20 has the first end 20a, the second end 20b and the 3rd end 20c.Described mixing channel 14 has output 11.
Described dashpot 10 is connected to measuring pump 12 by fluid circuit, realizes that the fluid between dashpot 10 and the measuring pump 12 connects, and described measuring pump 12 is connected to mixing channel 14 by fluid circuit, realizes that the fluid between measuring pump 12 and the mixing channel 14 connects.Thereby the fluid in the dashpot 10 can enter mixing channel 14 by measuring pump 12, and wherein, the fluid that measuring pump 12 is used for controlling dashpot 10 enters the flow in the mixing channel 14.
The first end 16a of described first triple valve 16 is used for being connected with the first fluid supply source, and the second end 16b is connected with described dashpot 10 inputs, and the 3rd end 16c is connected by fluid circuit with the first end 18a of described second triple valve 18.
When the 3rd end 16c of described first triple valve 16 sealing, the first end 16a and the second end 16b opened, the first fluid supply source can be supplied with fluid to described dashpot 10 by the first end 16a and the second end 16b of this first triple valve 16; Same, as the second end 16b that closes described first triple valve 16, when opening the first end 16a and the 3rd end 16c, the first fluid supply source is supplied with fluid by the first end 16a and the 3rd end 16c of this first triple valve 16 to the first end 18a of second triple valve 18.
The second end 18b of described second triple valve 18 is connected with described mixing channel 14 inputs, and the 3rd end 18c is connected by fluid circuit with the first end 20a of described the 3rd triple valve 20.
As the 3rd end 18c that closes described second triple valve 18, when opening the first end 18a and the second end 18b, can receive from the fluid of first triple valve 16 and be delivered in the mixing channel 14; In like manner, when closing the first end 18a, when opening the second end 18b and the 3rd end 18c, can receiving fluid, and be delivered in the mixing channel 14 from the 3rd triple valve 20.
The second end 20b of described the 3rd triple valve 20 is connected with described dashpot 10 inputs by fluid circuit, and the 3rd end 20c is used for being connected with the second fluid supply source.
Close the second end 20b, open the first end 20a and the 3rd end 20c, second fluid of the second fluid supply source can be delivered to second triple valve 18 by described the 3rd end 20c and the first end 20a.Close the first end 20a, open the second end 20b and the 3rd end 20c, second fluid of the second fluid supply source can pass through the 3rd end 20c and the second end 20b, and is delivered in the dashpot 10 by fluid circuit.
Wherein, described first triple valve 16 can be pneumatic operated valve or electronic valve or mechanical valve, and second triple valve 18 can also be pneumatic operated valve or electronic valve or mechanical valve, and the 3rd triple valve 20 also can be pneumatic operated valve or electronic valve or mechanical valve.
Described metering device 12 can be measuring pump or gauge table.Described measuring pump can be a kind of in plunger type metering pump, hydraulic diaphragm metering pump, the Mechanical Driven diaphragm metering pump.
Can have metering device (figure does not show) on the fluid circuit of the second end 18b of described second triple valve 18 and described mixing channel 14, this metering device can be gauge table or measuring pump.
The described first fluid and second fluid can be gas or liquid.
The fluid mixer of described embodiment can be realized the mixing of two kinds of different fluids by arbitrary proportion, when for example needing to realize that fluid A and B mix according to 1: 100 volume ratio, described fluid A supply source is connected with the first end 16a of described first triple valve 16 by fluid circuit, and fluid B supply source is connected with the 3rd end 20c of described the 3rd triple valve 20 by fluid circuit; Close the 3rd end 16c of first triple valve 16, open the first end 16a and the second end 16b of first triple valve 16; Close the second end 20b of the 3rd triple valve 20, open the first end 20a and the 3rd end 20c of the 3rd triple valve 20; Close second triple valve, 18 first end 18a, open the second end 18b of second triple valve 18, the 3rd end 18c.
During work, fluid A is supplied to the first end 16a of first triple valve 16 by fluid circuit, pass through the second end 16b of described first triple valve 16 then, be transported to dashpot 10, the fluid A in the dashpot 10 supplies with fluid A according to certain flow or dosage to described mixing channel 14 behind metering device 12.In addition, fluid B is supplied to the 3rd end 20c of the 3rd triple valve 20 by fluid circuit, through being delivered to the 3rd end 18c of second triple valve 18 behind the first end 20a of the 3rd triple valve 20, be transported to mixing channel 14 behind the second end 18b through the 3rd triple valve 18 then, if have gauge table, controllable flow body B enters the flow of mixing channel 14 on the fluid circuit between the second end 18b and the mixing channel 14.On the fluid circuit between the 3rd end 20c of fluid B supply source and the 3rd triple valve 20, also can have flowmeter, the supply of control fluid B.
By according to different flows, for example 1: 100, in mixing channel 14, supply with fluid A and fluid B simultaneously, realize that fluid A and fluid B mix in mixing channel 14, the formation volume ratio is 1: 100 a mixed liquor.
Above-mentioned realization fluid A and B form in the method for mixed liquor according to 1: 100 ratio, and the ratio of fluid A is less, the large percentage of fluid B; If will still realize fluid A large percentage with described fluid mixer, during the less mixed liquor of fluid B ratio, for example need to realize that fluid A and fluid B mix according to 100: 1 volume ratio, needn't change the link of fluid A supply source and fluid B supply source and this fluid mixer, the switch setting that only needs to change the different ends in first triple valve 16, second triple valve 18 and the 3rd triple valve 20 gets final product, and its concrete operations are as follows:
Close the second end 16b of first triple valve 16, open the first end 16a and the 3rd end 16c of first triple valve 16, close the first end 20a of the 3rd triple valve 20, open the second end 20b and the 3rd end 20c of the 3rd triple valve 20, close the 3rd end 18c of second triple valve 18, open first end 18a and the 18c of second triple valve 18.
During work, fluid A enters first triple valve 16 by the first end 16a, and flow out by the 3rd end 16c, enter the first end 18a of second triple valve 18 then by fluid circuit, and enter mixing channel 14 after the second end 18b outflow by second triple valve 18, if have gauge table (figure does not show) between the second end 18b and the mixing channel 14, enter the flow of mixing channel 14 by gauge table controllable flow body A.
Fluid B enters the 3rd triple valve 20 by the 3rd end 20c, and by after the second end 20b outflow, longshore current body pipeline enters dashpot 10, enters mixing channel 14 by metering device 12 then, and metering device 12 controllable flow body B enter the flow of mixing channel 14.
The ratio that enters mixing channel by control fluid A and fluid B is 100: 1, can be implemented in and form 100: 1 mixed liquor in the mixing channel.
Utilize described fluid mixer can realize two kinds of different fluid A and fluid B mixing according to arbitrary proportion, easy to use.
Fig. 3 is the schematic diagram of second embodiment of fluid mixer of the present invention.
Please refer to Fig. 3, fluid mixer comprises dashpot 10, measuring pump 12 and mixing channel 14, and first three-way device 16, second three-way device 18 and the 3rd three-way device 20.Described mixing channel 14 has output 11.
Described dashpot 10 is connected to measuring pump 12 by fluid circuit, realize that the fluid between dashpot 10 and the measuring pump 12 connects, described measuring pump 12 is connected to mixing channel 14 by fluid circuit, realize that the fluid between measuring pump 12 and the mixing channel 14 connects, thereby, fluid in the dashpot 10 can enter mixing channel 14 by measuring pump 12, and wherein, the fluid that measuring pump 12 is used for controlling dashpot 10 enters the amount in the mixing channel 14.
Described first three-way device 16 is made up of first one-way valve 15 and second one-way valve 13, wherein, one section of one end of described first one-way valve 15 and second one-way valve 13 links together, first end as this first three-way device 16, be used for being connected with the first fluid feedway, the other end of described first one-way valve 15 is as second end of first three-way device 16, be connected with described dashpot 10 inputs, the other end of described second one-way valve 13 is as the 3rd end of first three-way device 16, and first end that is connected with described second three-way device 18 connects.
Described second three-way device 18 is made up of first one-way valve 17 and second one-way valve 19, wherein, one end of one end of described first one-way valve 17 and second one-way valve 19 links together as second end of this second three-way device 18, be connected with described mixing channel 14 inputs, the other end of described first one-way valve 17 is as first end of second three-way device 18, and the other end of described second one-way valve 19 is connected by first end of fluid circuit with described the 3rd three-way device 20 as the 3rd end of second three-way device 18.
Described the 3rd three-way device 20 is made up of first one-way valve 21 and second one-way valve 23, wherein, one end of described first one-way valve 21 and second one-way valve 23 links together as second end of the 3rd three-way device 20, be connected with described dashpot 10 inputs by pipeline, the other end of described first one-way valve 21 is as first end of the 3rd three-way device 20, the other end of described second one-way valve 23 is used for being connected with the described second fluid supply source as the 3rd end of the 3rd three-way device 20.
Wherein said one-way valve can be pneumatic operated valve or electronic valve or mechanical valve.
Described metering device 12 can be gauge table or measuring pump, and described measuring pump can be a kind of in plunger type metering pump, hydraulic diaphragm metering pump, the Mechanical Driven diaphragm metering pump.
The described first fluid and/or second fluid are liquid or gas.
Fig. 4 is the schematic diagram of the 3rd embodiment of fluid mixer of the present invention.
Please refer to Fig. 4, described first three-way device 16, second three-way device 18 and the 3rd three-way device 20 have increased the 3rd one-way valve 27, the 3rd one-way valve 33 and the 3rd one-way valve 39 respectively.Remainder is identical with second embodiment, repeats no more here.
Fig. 5 is the schematic diagram of the 4th embodiment of fluid mixer of the present invention.
Please refer to Fig. 5, fluid mixer comprises dashpot 50, measuring pump 52 and mixing channel 54, and first triple valve 60, second triple valve 58 and the 3rd triple valve 56.Wherein, described first triple valve 60 has the first end 60a, the second end 60b and the 3rd end 60c, and second triple valve 58 has the first end 58a, the second end 58b and the 3rd end 58c, and the 3rd triple valve 56 has the first end 56a, the second end 56b the 3rd end 56c.Described mixing channel 54 has output 51.
Described dashpot 50 is connected to measuring pump 52 by fluid circuit, realizes that the fluid between dashpot 50 and the measuring pump 52 connects, and described measuring pump 52 is connected to mixing channel 54 by fluid circuit, realizes that the fluid between measuring pump 52 and the mixing channel 54 connects; Thereby the fluid in the dashpot 50 can enter mixing channel 54 by measuring pump 52, and wherein, the fluid that measuring pump 52 is used for controlling dashpot 50 enters the amount in the mixing channel 54.
The first end 60a of described first triple valve 60 is used for being connected with the first fluid supply source, and the second end 60b is connected with described mixing channel 54 inputs, and the 3rd end 60c is connected by fluid circuit with the first end 58a of described second triple valve 58.
When the 3rd end 60c of described first triple valve 60 sealing, when the first end 60a and the second end 60b opened, the first fluid supply source can be supplied with fluid to described mixing channel 54 by the first end 60a and the second end 60b of this first triple valve 60; Same, as the second end 60b that closes described first triple valve 60, when opening the first end 60a and the 3rd end 60c, the first fluid supply source is supplied with fluid by the first end 60a and the 3rd end 60c of this first triple valve 60 to the first end 58a of second triple valve 58.
The second end 58b of described second triple valve 58 is connected with described dashpot 50 inputs, and the 3rd end 58c is connected by fluid circuit with the first end 56a of described the 3rd triple valve 56.
As the 3rd end 58c that closes described second triple valve 58, when opening the first end 58a and the second end 58b, can receive from the fluid of first triple valve 60 and be delivered in the dashpot 50; In like manner, when closing the first end 58a, when opening the second end 58b and the 3rd end 8c, can receive fluid, and be delivered in the dashpot 50 from the 3rd triple valve 56.
The second end 56b of described the 3rd triple valve 56 is connected with described mixing channel 54 inputs by fluid circuit, and the 3rd end 56c is used for being connected with the second fluid supply source.Close the second end 56b, open the first end 56a and the 3rd end 56c, second fluid of the second fluid supply source can be delivered to second triple valve 58 by described the 3rd end 56c and the first end 56a; Close the first end 56a, open the second end 56b and the 3rd end 56c, second fluid of the second fluid supply source can pass through the 3rd end 56c and the second end 56b, and is delivered in the mixing channel 54 by fluid circuit.
Wherein, described first triple valve 60 can be pneumatic operated valve or electronic valve or mechanical valve, and second triple valve 58 can be pneumatic operated valve or electronic valve or mechanical valve, and the 3rd triple valve 56 can be pneumatic operated valve or electronic valve or mechanical valve.
Described metering device 52 can be measuring pump or gauge table.Described measuring pump can be a kind of in plunger type metering pump, hydraulic diaphragm metering pump, the Mechanical Driven diaphragm metering pump.
The described first fluid and second fluid can be gas or liquid.
Fig. 6 is the schematic diagram of the 5th embodiment of fluid mixer of the present invention.
Please refer to Fig. 6, fluid mixer comprises dashpot 50, measuring pump 52 and mixing channel 54, and first three-way device 60, second three-way device 58 and the 3rd three-way device 56.Described mixing channel 54 has output 51.
Described dashpot 50 is connected to measuring pump 52 by fluid circuit, realize that the fluid between dashpot 50 and the measuring pump 52 connects, described measuring pump 52 is connected to mixing channel 54 by fluid circuit, realize that the fluid between measuring pump 52 and the mixing channel 54 connects, thereby, fluid in the dashpot 50 can enter mixing channel 54 by measuring pump 52, and wherein, the fluid that measuring pump 52 is used for controlling dashpot 50 enters the amount in the mixing channel 54.
Described first three-way device 60 is made up of first one-way valve 63 and second one-way valve 61, wherein, one end of one end of described first one-way valve 63 and second one-way valve 61 links together, and as second end of this first three-way device 60, is connected with described mixing channel 54 inputs by fluid circuit; The other end of described first one-way valve 63 is used for being connected with the first fluid feedway as first end of first three-way device 60; The other end of described second one-way valve 61 connects as first end that the 3rd end of first three-way device 60 is connected with described second three-way device 58.
Described second three-way device 58 is made up of first one-way valve 59 and second one-way valve 57, wherein, second end that links together as this second three-way device 58 of an end of an end of described first one-way valve 59 and second one-way valve 57 is connected with described dashpot 50 inputs; The other end of described first one-way valve 59 is as first end of second three-way device 58; The other end of described second one-way valve 57 is connected by first end of fluid circuit with described the 3rd three-way device 56 as the 3rd end of second three-way device 58.
Described the 3rd three-way device 56 is made up of first one-way valve 53 and second one-way valve 55, wherein, one end of described first one-way valve 53 and second one-way valve 55 links together as the 3rd end of the 3rd three-way device 56, is used for being connected with the described second fluid supply source; The other end of described first one-way valve 53 is as first end of the 3rd three-way device 56; The other end of described second one-way valve 55 is connected with described mixing channel 54 inputs by pipeline as the 3rd end of the 3rd three-way device 56.
Wherein said one-way valve can be pneumatic operated valve or electronic valve or mechanical valve.
Described metering device 52 can be gauge table or measuring pump, and described measuring pump can be a kind of in plunger type metering pump, hydraulic diaphragm metering pump, the Mechanical Driven diaphragm metering pump.
The described first fluid and/or second fluid are liquid or gas.
Fig. 7 is the schematic diagram of the 6th embodiment of fluid mixer of the present invention.
Please refer to Fig. 7, described first three-way device 60, second three-way device 58 and the 3rd three-way device 56 have increased the 3rd one-way valve 69, the 3rd one-way valve 73 and the 3rd one-way valve 65 respectively.Remainder is identical with second embodiment, repeats no more here.
In other embodiments, described first three-way device, second three-way device and the 3rd three-way device can be triple valve simultaneously, or form by three one-way valve simultaneously, or form by two one-way valve simultaneously, but can make up arbitrarily, for example first three-way device is a triple valve, and second three-way device is made up of three one-way valve, and the 3rd three-way device is made up of two one-way valve ... repeat no more here.
Though the present invention with preferred embodiment openly as above; but it is not to be used for limiting the present invention; any those skilled in the art without departing from the spirit and scope of the present invention; can make possible change and modification, so protection scope of the present invention should be as the criterion with the scope that claim of the present invention was defined.
Claims (20)
1. a fluid mixer comprises dashpot, metering device and mixing channel that the order fluid connects, it is characterized in that: also comprise first three-way device, second three-way device and the 3rd three-way device;
Wherein, first end of described first three-way device is used for being connected with the first fluid supply source, and second end is connected with described dashpot input fluid, and the 3rd end is connected with the first end fluid of described second three-way device;
Second end of described second three-way device is connected with described mixing channel input fluid, and the 3rd end is connected with the first end fluid of described the 3rd three-way device;
Second end of described the 3rd three-way device is connected with described dashpot input fluid, and the 3rd end is connected with the second fluid supply source.
2. fluid mixer as claimed in claim 1 is characterized in that: described first three-way device, second three-way device and/or the 3rd three-way device are triple valve.
3. fluid mixer as claimed in claim 1 is characterized in that: described first three-way device, second three-way device and/or the 3rd three-way device are made up of first one-way valve, second one-way valve and the 3rd one-way valve; Wherein, an end of an end of described first one-way valve, an end of second one-way valve and the 3rd one-way valve links together, and the other end is respectively first end, second end and the 3rd end of each three-way device.
4. fluid mixer as claimed in claim 1, it is characterized in that: described first three-way device is made up of first one-way valve and second one-way valve, wherein an end of first one-way valve and second one-way valve links together, as first end of described first three-way device, the other end of described first one-way valve and second one-way valve is respectively as second end and the 3rd end of this first three-way device.
5. fluid mixer as claimed in claim 1, it is characterized in that: described second three-way device is made up of first one-way valve and second one-way valve, wherein an end of first one-way valve and second one-way valve links together, as second end of described second three-way device, the other end of described first one-way valve and second one-way valve is respectively as first end and the 3rd end of this second three-way device.
6. fluid mixer as claimed in claim 1, it is characterized in that: described the 3rd three-way device is made up of first one-way valve and second one-way valve, wherein an end of first one-way valve and second one-way valve links together, as second end of described the 3rd three-way device, the other end of described first one-way valve and second one-way valve is respectively as first end and the 3rd end of the 3rd three-way device.
7. as the described fluid mixer of the arbitrary claim of claim 2 to 6, it is characterized in that: described triple valve and/or one-way valve are pneumatic operated valve or electronic valve or mechanical valve.
8. fluid mixer as claimed in claim 1 is characterized in that: between second end of described second three-way device and the mixing channel metering device is arranged.
9. as claim 1 or 8 described fluid mixers, it is characterized in that: described metering device is gauge table or measuring pump.
10. fluid mixer as claimed in claim 1 is characterized in that: the described first fluid and/or second fluid are liquid or gas.
11. a fluid mixer comprises dashpot, metering device and mixing channel that the order fluid connects, it is characterized in that: also comprise first three-way device, second three-way device and the 3rd three-way device;
Wherein, first end of described first three-way device is used for being connected with the first fluid supply source, and second end is connected with described mixing channel input fluid, and the 3rd end is connected with the first end fluid of described second three-way device;
Second end of described second three-way device is connected with described dashpot input fluid, and the 3rd end is connected with the first end fluid of described the 3rd three-way device;
Second end of described the 3rd three-way device is connected with described mixing channel input fluid, and the 3rd end is used for being connected with the second fluid supply source.
12. fluid mixer as claimed in claim 11 is characterized in that: described first three-way device, second three-way device and/or the 3rd three-way device are triple valve.
13. fluid mixer as claimed in claim 11 is characterized in that: described first three-way device, second three-way device and/or the 3rd three-way device are made up of first one-way valve, second one-way valve and the 3rd one-way valve; Wherein, an end of an end of described first one-way valve, an end of second one-way valve and the 3rd one-way valve links together, and the other end is respectively first end, second end and the 3rd end of each three-way device.
14. fluid mixer as claimed in claim 11, it is characterized in that: described first three-way device is made up of first one-way valve and second one-way valve, wherein an end of first one-way valve and second one-way valve links together, as second end of described first three-way device, the other end of described first one-way valve and second one-way valve is respectively as first end and the 3rd end of this first three-way device.
15. fluid mixer as claimed in claim 11, it is characterized in that: described second three-way device is made up of first one-way valve and second one-way valve, wherein an end of first one-way valve and second one-way valve links together, as second end of described second three-way device, the other end of described first one-way valve and second one-way valve is respectively as first end and the 3rd end of this second three-way device.
16. fluid mixer as claimed in claim 11, it is characterized in that: described the 3rd three-way device is made up of first one-way valve and second one-way valve, wherein an end of first one-way valve and second one-way valve links together, as the 3rd end of described the 3rd three-way device, the other end of described first one-way valve and second one-way valve is respectively as first end and second end of the 3rd three-way device.
17. as each described fluid mixer of claim 12 to 16, it is characterized in that: described triple valve and/or one-way valve are pneumatic operated valve or electronic valve or mechanical valve.
18. fluid mixer as claimed in claim 11 is characterized in that: between second end and mixing channel of described first three-way device, between the 3rd three-way device second end and the mixing channel metering device is arranged.
19. as claim 11 or 18 described fluid mixers, it is characterized in that: described metering device is gauge table or measuring pump.
20. fluid mixer as claimed in claim 11 is characterized in that: the described first fluid and/or second fluid are liquid or gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007100945576A CN101455948B (en) | 2007-12-13 | 2007-12-13 | Fluid mixing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007100945576A CN101455948B (en) | 2007-12-13 | 2007-12-13 | Fluid mixing apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101455948A CN101455948A (en) | 2009-06-17 |
| CN101455948B true CN101455948B (en) | 2010-09-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007100945576A Expired - Fee Related CN101455948B (en) | 2007-12-13 | 2007-12-13 | Fluid mixing apparatus |
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| Country | Link |
|---|---|
| CN (1) | CN101455948B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102252953B (en) * | 2010-05-21 | 2013-07-03 | 武汉新芯集成电路制造有限公司 | Adaptive device for testing liquid particles |
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| Publication number | Publication date |
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| CN101455948A (en) | 2009-06-17 |
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