CN101451876A - Liquid level sensing apparatus with autodiagnosis function and autodiagnosis method thereof - Google Patents

Liquid level sensing apparatus with autodiagnosis function and autodiagnosis method thereof Download PDF

Info

Publication number
CN101451876A
CN101451876A CNA2007101941411A CN200710194141A CN101451876A CN 101451876 A CN101451876 A CN 101451876A CN A2007101941411 A CNA2007101941411 A CN A2007101941411A CN 200710194141 A CN200710194141 A CN 200710194141A CN 101451876 A CN101451876 A CN 101451876A
Authority
CN
China
Prior art keywords
liquid level
level sensor
self
sensing device
separating tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2007101941411A
Other languages
Chinese (zh)
Inventor
庄俊智
古明恭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Promos Technologies Inc
Original Assignee
Promos Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Promos Technologies Inc filed Critical Promos Technologies Inc
Priority to CNA2007101941411A priority Critical patent/CN101451876A/en
Publication of CN101451876A publication Critical patent/CN101451876A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)

Abstract

A liquid level sensing device with self diagnostic function and self diagnostic method thereof is applicable for sensing liquid level in a storage tank. The liquid level sensing device comprises a lifting device, a separation groove and a liquid level sensor. The separation groove is arranged on the lifting device and connected with the storage tank. The liquid level sensor is arranged in the separation groove. The liquid level sensing device with self diagnostic function provided by the invention realizes self diagnostic function by a communicating pipe theory. Therefore, it is not necessary to extract liquid in the storage tank when realizing self diagnostic function for the liquid level sensing device, which does not cause waste of material and environment pollution and reduces manufacturing cost effectively. It is very convenient to operation the self diagnostic method, which reduces checking time of the liquid level sensor greatly.

Description

Liquid level sensing device and self-diagnosing method thereof with self-diagnosing function
Technical field
The invention relates to a kind of liquid level sensing device, and particularly relevant for a kind of liquid level sensing device and self-diagnosing method thereof with self-diagnosing function.
Background technology
In known manufacture craft miscellaneous, often use various liquid to carry out different technology, these fluid storage in accumulator tank, yet use up and when not discovering when these liquid, regular meeting makes the technology failure, and causes output to descend.
Photoetching process with semiconductor fabrication process is an example, before coating photoresist layer on the semiconductor substrate, can on semiconductor substrate, spray earlier hexamethyldisilazane (Hexamethyldisilazane, HMDS), with the adhesive force between increase photoresist layer and the semiconductor substrate, and can prevent that photoresist layer from producing the phenomenon of collapsing.
Yet, when the HMDS in the accumulator tank uses up and when not discovering, will make formed photoresist layer be difficult for attaching at semiconductor-based the end, and the phenomenon that causes photoresist layer to collapse, and then make output descend.Therefore, in accumulator tank, liquid level sensor can be set, have safety stock to guarantee the HMDS in the accumulator tank.
Fig. 1 illustrate is known a kind of synoptic diagram that disposes the accumulator tank of liquid level sensor.
Please refer to Fig. 1, in accumulator tank 100, have fibre optic liquid level sensor 102, and fibre optic liquid level sensor 102 from bottom to top has three sensing points H/H, H/L, L/L.In general, if the safety stock of liquid in the accumulator tank 100 is set between sensing points H/H and the sensing points H/L, can replenish when then being lower than sensing points H/L, the liquid in accumulator tank 100 is till the safety stock.Sensing points H/H can prevent then in the accumulator tank that 100 liquid surpasses safety stock.In addition, when the disabler of sensing points H/L, sensing points L/L can be used as standby sensing points, uses up to guarantee the liquid that can not in the accumulator tank 100.Yet, when sensing points H/L, L/L lost efficacy simultaneously, will cause making failure scenarios and occur.
Whether therefore, can make regular check on the function of fibre optic liquid level sensor 102 in the known technology normal.Yet, at the sensing points H/H, the H/L that check fibre optic liquid level sensor 102, L/L whether just often, can earlier the liquid in the accumulator tank 100 be extracted out, to obtain being positioned at the liquid level below the sensing points L/L, refill new liq again, whether normal with the function of checking sensing points L/L, H/L, H/H in regular turn.
Yet, in the function of above-mentioned inspection fibre optic liquid level sensor 102 whether in the normal method, in accumulator tank 100, extract liquid out and refill the operation of new liq quite consuming time.In addition, the liquid of extraction can be rejected, and causes the waste of material, makes production cost rise.In addition, when the liquid of extracting out is volatile liquid such as HMDS, can pollute environment.
Summary of the invention
In view of this, the technical problem to be solved in the present invention is: a kind of liquid level sensing device with self-diagnosing function is provided, can reduces production costs effectively.
Another technical matters that the present invention will solve is: a kind of self-diagnosing method with liquid level sensing device of self-diagnosing function is provided, can checks apace whether the function of liquid level sensor is normal.
The present invention at first proposes a kind of liquid level sensing device with self-diagnosing function, is applicable to the liquid level in the sensing accumulator tank, and this liquid level sensing device comprises jacking gear, separating tank and liquid level sensor; Separating tank is arranged on the jacking gear and with accumulator tank and is communicated with, and liquid level sensor is arranged at separating tank inside.
Described according to a preferred embodiment of the present invention, in the above-mentioned liquid level sensing device with self-diagnosing function, jacking gear for example is a crane.
Described according to a preferred embodiment of the present invention, in the above-mentioned liquid level sensing device with self-diagnosing function, the volume of separating tank is less than the volume of accumulator tank.
Described according to a preferred embodiment of the present invention, in the above-mentioned liquid level sensing device with self-diagnosing function, separating tank for example is closed cell body.
Described according to a preferred embodiment of the present invention, in above-mentioned liquid level sensing device, also comprise first communicating pipe and second communicating pipe with self-diagnosing function.First communicating pipe was communicated with the bottom of separating tank and the bottom of accumulator tank.Second communicating pipe was communicated with separating tank top and accumulator tank top.
Described according to a preferred embodiment of the present invention, in the above-mentioned liquid level sensing device with self-diagnosing function, separating tank for example is open cell body.
Described according to a preferred embodiment of the present invention, in above-mentioned liquid level sensing device, also comprised for first communicating pipe with self-diagnosing function.First communicating pipe was communicated with the bottom of separating tank and the bottom of accumulator tank.
Described according to a preferred embodiment of the present invention, in the above-mentioned liquid level sensing device with self-diagnosing function, liquid level sensor for example is fibre optic liquid level sensor, electric pole type liquid level sensor, photoelectric level transducer, float-ball type liquid level sensor, vapour-pressure type liquid level sensor, static capacity liquid level sensor, ball float continous way liquid level sensor, ultrasonic liquid level sensor, pressure type liquid level sensor or Weight type liquid level sensor.
The present invention also proposes a kind of self-diagnosing method with liquid level sensing device of self-diagnosing function, wherein liquid level sensing device comprises jacking gear, is arranged at the separating tank on the jacking gear and is arranged at the liquid level sensor of separating tank inside, and separating tank is communicated with the accumulator tank that stores liquid, the self-diagnosing method of this liquid level sensing device comprises the following steps: at first, utilize jacking gear to adjust the height of separating tank, the liquid level of the liquid in the separating tank is dropped between the liquid level sensing area of liquid level sensor; Then, observe liquid level sensor and whether send sensing signal, if " having " represents that then the function of liquid level sensor is normal, if " not having " then represents the disabler of liquid level sensor.
Described according to a preferred embodiment of the present invention, in the self-diagnosing method of above-mentioned liquid level sensing device with self-diagnosing function, when the liquid level that also is included in the liquid in the separating tank does not enter between the liquid level sensing area of liquid level sensor as yet, observe liquid level sensor and whether send sensing signal, if " having " then represents the disabler of liquid level sensor, if " not having " represents that then the function of liquid level sensor is normal.
Described according to a preferred embodiment of the present invention, in the self-diagnosing method of the above-mentioned liquid level sensing device with self-diagnosing function, jacking gear for example is a crane.
Described according to a preferred embodiment of the present invention, in the self-diagnosing method of the above-mentioned liquid level sensing device with self-diagnosing function, the volume of separating tank is less than the volume of accumulator tank.
Described according to a preferred embodiment of the present invention, in the self-diagnosing method of the above-mentioned liquid level sensing device with self-diagnosing function, separating tank for example is closed cell body.
Described according to a preferred embodiment of the present invention, in the self-diagnosing method of the above-mentioned liquid level sensing device with self-diagnosing function, this liquid level sensing device also comprises first communicating pipe and second communicating pipe.First communicating pipe was communicated with the bottom of separating tank and the bottom of accumulator tank.Second communicating pipe was communicated with separating tank top and accumulator tank top.
Described according to a preferred embodiment of the present invention, in the self-diagnosing method of the above-mentioned liquid level sensing device with self-diagnosing function, separating tank for example is open cell body.
Described according to a preferred embodiment of the present invention, in the self-diagnosing method of the above-mentioned liquid level sensing device with self-diagnosing function, this liquid level sensing device also comprised for first communicating pipe.First communicating pipe was communicated with the bottom of separating tank and the bottom of accumulator tank.
Described according to a preferred embodiment of the present invention, in the self-diagnosing method of the above-mentioned liquid level sensing device with self-diagnosing function, liquid level sensor for example is fibre optic liquid level sensor, electric pole type liquid level sensor, photoelectric level transducer, float-ball type liquid level sensor, vapour-pressure type liquid level sensor, static capacity liquid level sensor, ball float continous way liquid level sensor, ultrasonic liquid level sensor, pressure type liquid level sensor or Weight type liquid level sensor.
Based on above-mentioned, the liquid level sensing device with self-diagnosing function proposed by the invention is to utilize connecting pipe principle to carry out autodiagnosis.Therefore, when liquid level sensor is carried out autodiagnosis, need not extract the liquid in the accumulator tank out, thus the waste and the environmental pollution of material can not be caused, and can reduce production costs effectively.
In addition, use the liquid level sensing device with self-diagnosing function proposed by the invention, can guarantee that the function of liquid level sensor is normal, can make technology carry out smoothly, and can prevent that the situation of process error from occurring.
On the other hand, the self-diagnosing method of the liquid level sensing device with self-diagnosing function proposed by the invention is quite convenient in operation, the supervision time that can reduce liquid level sensor significantly.
Description of drawings
Fig. 1 illustrate is known a kind of synoptic diagram that disposes the accumulator tank of liquid level sensor.
Fig. 2 illustrate is the synoptic diagram of the accumulator tank that disposes liquid level sensing device of one embodiment of the invention.
Fig. 3 to Fig. 5 illustrate is positioned at the synoptic diagram of differing heights position for separating tank bottom among Fig. 2 and accumulator tank bottom.
Fig. 6 illustrate is the synoptic diagram of the accumulator tank that disposes liquid level sensing device of another embodiment of the present invention.
[primary clustering symbol description]
100,300: accumulator tank
102: fibre optic liquid level sensor
200,500: liquid level sensing device 202: jacking gear
204,504: separating tank 206: liquid level sensor
208,210: communicating pipe 400: liquid
Embodiment
Fig. 2 illustrate is the synoptic diagram of the accumulator tank that disposes liquid level sensing device of one embodiment of the invention.
Please refer to Fig. 2, the liquid level sensing device 200 with self-diagnosing function is applicable to the liquid level in the sensing accumulator tank 300.The material of accumulator tank 300 and stored liquid 400 can be decided according to the needs of technology, do not limit especially at this.
Liquid level sensing device 200 comprises jacking gear 202, separating tank 204, liquid level sensor 206 and communicating pipe 208,210.Jacking gear 202 for example is a lifting table so long as can carry out the device of vertical moving and get final product.
Separating tank 204 is arranged on the jacking gear 202 and with accumulator tank 300 and is communicated with, and general when the liquid level of the liquid in the accumulator tank 300 400 is monitored, jacking gear 202 can allow the bottom of separating tank 204 be positioned at identical height and position with the bottom of accumulator tank 300.When liquid level sensor 206 is carried out autodiagnosis, can adjust the height and position of separating tank 204 by jacking gear 202, adjust the liquid level of liquid 400 in the separating tank 204.
In the present embodiment, separating tank 204 for example is closed cell body, can be in order to storing various liquid 400, and the liquid 400 of volatile liquid 400 and vulnerable to pollution is normal uses closed cell body to store.When separating tank 204 was closed cell body, separating tank 204 was to be communicated with accumulator tank 300 by communicating pipe 208,210.Communicating pipe 208 is communicated with the bottom of separating tank 204 and the bottom of accumulator tank 300, can make separating tank 204 mobile mutually with the liquid 400 in the accumulator tank 300.Communicating pipe 210 is communicated with separating tank 204 tops and accumulator tank 300 tops, but the draught head between equilibrium separation groove 204 and the accumulator tank 300.
In addition, the volume of separating tank 204 is less than the volume of accumulator tank 300.For instance, be designed to the height of separating tank 204 identical with the height of accumulator tank 300, and the sectional area of separating tank 204 is designed to sectional area less than accumulator tank 300, and make the volume of separating tank 204, but not in order to the height of restriction separating tank 204 of the present invention less than the volume of accumulator tank 300.
Liquid level sensor 206 is arranged at separating tank 204 inside, in order to the liquid level of liquid 400 in the sensing accumulator tank 300.Liquid level sensor 206 is so long as liquid level sensor that can sensed level gets final product not special restriction.In the present embodiment, liquid level sensor 206 is with fibre optic liquid level sensor with three sensing points H/H, H/L, L/L as an illustration.In other embodiments, liquid level sensor 206 can be electric pole type liquid level sensor, photoelectric level transducer, float-ball type liquid level sensor, vapour-pressure type liquid level sensor, static capacity liquid level sensor, ball float continous way liquid level sensor, ultrasonic liquid level sensor, pressure type liquid level sensor or Weight type liquid level sensor.
Based on above-mentioned, liquid level sensing device 200 is to utilize connecting pipe principle to adjust the liquid level of liquid 400 in the separating tank 204, and liquid level sensor 206 is carried out autodiagnosis.Therefore, when liquid level sensor 206 is carried out autodiagnosis, need not extract the liquid 400 in the accumulator tank 300 out, thus the waste and the environmental pollution of material can not be caused, and can reduce production costs effectively.
In addition, liquid level sensing device 200 can guarantee that the function of liquid level sensor 206 is normal, situation about not discovering so using up can not appear in the stored liquid 400 in the accumulator tank 300 can make manufacture craft carry out smoothly, and can prevent that the situation of process errors from producing.
Fig. 3 to Fig. 5 illustrate is positioned at the synoptic diagram of differing heights position for separating tank bottom among Fig. 2 and accumulator tank bottom.
Below, illustrate that by Fig. 2 to Fig. 5 200 pairs of liquid level sensors of liquid level sensing device 206 carry out the method for autodiagnosis.
Please earlier with reference to Fig. 2, general when the liquid level of the liquid in the accumulator tank 300 400 is monitored, jacking gear 202 can allow the bottom of separating tank 204 be positioned at identical height and position with the bottom of accumulator tank 300.In this embodiment, be that the liquid level of liquid 400 in safety stock is located between sensing points H/H, the H/L, be positioned at the above position of sensing points H/H between the liquid level sensing area of sensing points H/H, be positioned at the position that is lower than sensing points H/L between the liquid level sensing area of sensing points H/L, and between the liquid level sensing area of sensing points L/L the position in the position that is lower than sensing points L/L.Yet, have in this technical field and to know that usually the knowledgeable can be according to its design requirement, adjust between liquid level sensing area the liquid level of safety stock and liquid level sensor 206.
Then, please refer to Fig. 3, in the function of diagnosing sensing points H/H whether just often, can utilize jacking gear 202 to adjust the height of separating tank 204, allow separating tank 204 bottoms be positioned at the position that is lower than accumulator tank 300 bottoms, both differences in height are H1, and make the liquid level of the liquid 400 in the separating tank 204 drop between the liquid level sensing area of sensing points H/H.Then, observe the sensing signal whether liquid level sensor 206 sends sensing points H/H,,, need repair if " not having " then represents the disabler of sensing points H/H if " having " represents that then the function of sensing points H/H is normal.
In addition, when the liquid level of the liquid 400 in separating tank 204 does not enter between the liquid level sensing area of sensing points H/H as yet, observe the sensing signal whether liquid level sensor 206 sends sensing points H/H, if " having " then represents the disabler of sensing points H/H, if " not having " represents that then the function of sensing points H/H is normal.
Next, please refer to Fig. 4, in the function of diagnosing sensing points H/L whether just often, can utilize jacking gear 202 to adjust the height of separating tank 204, allow separating tank 204 bottoms be positioned at the position that is higher than accumulator tank 300 bottoms, both differences in height are H2, and make the liquid level of the liquid 400 in the separating tank 204 drop between the liquid level sensing area of sensing points H/L.Then, observe the sensing signal whether liquid level sensor 206 sends sensing points H/L,,, need repair if " not having " then represents the disabler of sensing points H/L if " having " represents that then the function of sensing points H/L is normal.
In addition, when the liquid level of the liquid 400 in separating tank 204 does not enter between the liquid level sensing area of sensing points H/L as yet, observe the sensing signal whether liquid level sensor 206 sends sensing points H/L, if " having " then represents the disabler of sensing points H/L, if " not having " represents that then the function of sensing points H/L is normal.
Afterwards, please refer to Fig. 5, in the function of diagnosing sensing points L/L whether just often, can utilize jacking gear 202 to adjust the height of separating tank 204, allow separating tank 204 bottoms be positioned at the position that is higher than accumulator tank 300 bottoms, both differences in height are H3, and make the liquid level of the liquid 400 in the separating tank 204 drop between the liquid level sensing area of sensing points L/L.Then, observe the sensing signal whether liquid level sensor 206 sends sensing points L/L,,, need repair if " not having " then represents the disabler of sensing points L/L if " having " represents that then the function of sensing points L/L is normal.
In addition, when the liquid level of the liquid 400 in separating tank 204 does not enter between the liquid level sensing area of sensing points L/L as yet, observe the sensing signal whether liquid level sensor 206 sends sensing points L/L, if " having " then represents the disabler of sensing points L/L, if " not having " represents that then the function of sensing points L/L is normal.
By the foregoing description as can be known, the self-diagnosing method of liquid level sensing device 200 is quite simple and convenient in operation, therefore the supervision time that can reduce liquid level sensor 206 effectively.
Fig. 6 illustrate is the synoptic diagram of the accumulator tank that disposes liquid level sensing device of another embodiment of the present invention.Wherein, identical with Fig. 2 member then uses identical label and omits its explanation.
Please refer to Fig. 6, the disclosed embodiment of Fig. 6 is identical haply with the disclosed embodiment of Fig. 2, and both difference only is that the separating tank 504 of the disclosed liquid level sensing device 500 of Fig. 6 is open cell body.Therefore, do not need to come communicating pipe 210 equilibrium separation groove 504 and accumulator tank 300 between draught head, only need to use communicating pipe 208 to be communicated with the bottom and the bottom of accumulator tank 300 of separating tanks 504, make liquid 400 in separating tank 504 and the accumulator tank 300 to flow mutually and get final product.Effect, advantage and self-diagnosing method and the liquid level sensing device 200 among Fig. 2 of the liquid level sensing device 500 among Fig. 6 are roughly the same, so repeat no more in this.
In sum, the present invention has following advantage at least:
1. the liquid level sensing device with self-diagnosing function proposed by the invention can not cause the waste and the environmental pollution of material, and can reduce production costs effectively when liquid level sensor is carried out autodiagnosis.
2. use the liquid level sensing device with self-diagnosing function proposed by the invention, can make manufacture craft carry out smoothly, and can prevent that the situation of process error from occurring.
3. the self-diagnosing method of the liquid level sensing device with self-diagnosing function proposed by the invention can reduce the supervision time of liquid level sensor significantly.
Though the present invention discloses as above with preferred embodiment; right its is not in order to limit the present invention; anyly have the knack of this skill person; without departing from the spirit and scope of the present invention; when can doing a little change and retouching, so protection scope of the present invention is as the criterion when looking appended the claim person of defining.

Claims (11)

1. the liquid level sensing device with self-diagnosing function is applicable to the liquid level in the sensing accumulator tank, it is characterized in that, described liquid level sensing device comprises:
Jacking gear;
Separating tank is arranged on this jacking gear and with this accumulator tank and is communicated with; And
Liquid level sensor is arranged at this separating tank inside.
2. the liquid level sensing device with self-diagnosing function as claimed in claim 1 is characterized in that the volume of this separating tank is less than the volume of this accumulator tank.
3. the liquid level sensing device with self-diagnosing function as claimed in claim 1 is characterized in that, described liquid level sensing device also comprises:
First communicating pipe, be communicated with the bottom of this separating tank and the bottom of this accumulator tank; And
Second communicating pipe, be communicated with this separating tank top and this accumulator tank top.
4. the liquid level sensing device with self-diagnosing function as claimed in claim 1 is characterized in that described liquid level sensing device also comprised for first communicating pipe, is communicated with the bottom of this separating tank and the bottom of this accumulator tank.
5. the liquid level sensing device with self-diagnosing function as claimed in claim 1, it is characterized in that this liquid level sensor comprises fibre optic liquid level sensor, electric pole type liquid level sensor, photoelectric level transducer, float-ball type liquid level sensor, vapour-pressure type liquid level sensor, static capacity liquid level sensor, ball float continous way liquid level sensor, ultrasonic liquid level sensor, pressure type liquid level sensor or Weight type liquid level sensor.
6. self-diagnosing method with liquid level sensing device of self-diagnosing function, it is characterized in that, this liquid level sensing device comprises jacking gear, be arranged at the separating tank on this jacking gear and be arranged at the liquid level sensor of this separating tank inside, wherein this separating tank is communicated with the accumulator tank that stores liquid, and this method comprises:
Utilize this jacking gear to adjust the height of this separating tank, the liquid level of this liquid in this separating tank is dropped between the liquid level sensing area of this liquid level sensor; And
Observe this liquid level sensor and whether send sensing signal, if " having " represents that then the function of this liquid level sensor is normal, if " not having " then represents the disabler of this liquid level sensor.
7. the self-diagnosing method with liquid level sensing device of self-diagnosing function as claimed in claim 6, it is characterized in that, when this liquid level that this self-diagnosing method is included in this liquid in this separating tank does not enter between this liquid level sensing area of this liquid level sensor as yet, observe this liquid level sensor and whether send this sensing signal, if " having " then represents the disabler of this liquid level sensor, if " not having " represents that then the function of this liquid level sensor is normal.
8. the self-diagnosing method with liquid level sensing device of self-diagnosing function as claimed in claim 6 is characterized in that the volume of this separating tank is less than the volume of this accumulator tank.
9. the self-diagnosing method with liquid level sensing device of self-diagnosing function as claimed in claim 6 is characterized in that, this liquid level sensing device also comprises:
First communicating pipe, be communicated with the bottom of this separating tank and the bottom of this accumulator tank; And
Second communicating pipe, be communicated with this separating tank top and this accumulator tank top.
10. the self-diagnosing method with liquid level sensing device of self-diagnosing function as claimed in claim 6 is characterized in that this liquid level sensing device also comprised for first communicating pipe, is communicated with the bottom of this separating tank and the bottom of this accumulator tank.
11. the self-diagnosing method with liquid level sensing device of self-diagnosing function as claimed in claim 6, it is characterized in that this liquid level sensor comprises fibre optic liquid level sensor, electric pole type liquid level sensor, photoelectric level transducer, float-ball type liquid level sensor, vapour-pressure type liquid level sensor, static capacity liquid level sensor, ball float continous way liquid level sensor, ultrasonic liquid level sensor, pressure type liquid level sensor or Weight type liquid level sensor.
CNA2007101941411A 2007-12-05 2007-12-05 Liquid level sensing apparatus with autodiagnosis function and autodiagnosis method thereof Pending CN101451876A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNA2007101941411A CN101451876A (en) 2007-12-05 2007-12-05 Liquid level sensing apparatus with autodiagnosis function and autodiagnosis method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNA2007101941411A CN101451876A (en) 2007-12-05 2007-12-05 Liquid level sensing apparatus with autodiagnosis function and autodiagnosis method thereof

Publications (1)

Publication Number Publication Date
CN101451876A true CN101451876A (en) 2009-06-10

Family

ID=40734243

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2007101941411A Pending CN101451876A (en) 2007-12-05 2007-12-05 Liquid level sensing apparatus with autodiagnosis function and autodiagnosis method thereof

Country Status (1)

Country Link
CN (1) CN101451876A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102353429A (en) * 2011-08-22 2012-02-15 上海理工大学 High-precision performance detector of resonant mode water level sensor and test method thereof
CN102661775A (en) * 2012-04-26 2012-09-12 长江水利委员会长江科学院 Automatic water gage detector and application
CN104252242A (en) * 2013-06-28 2014-12-31 联想(北京)有限公司 Long-range control method and data processing equipment used for realizing same
CN104576435A (en) * 2013-10-11 2015-04-29 宁夏琪凯节能设备有限公司 Energy-saving environment-friendly washing tank
CN109297572A (en) * 2018-12-14 2019-02-01 武汉普迪真空科技有限公司 A kind of high temperature fluent metal liquid level sensor measurement calibration method

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102353429A (en) * 2011-08-22 2012-02-15 上海理工大学 High-precision performance detector of resonant mode water level sensor and test method thereof
CN102353429B (en) * 2011-08-22 2012-09-05 上海理工大学 High-precision performance detector of resonant mode water level sensor and test method thereof
CN102661775A (en) * 2012-04-26 2012-09-12 长江水利委员会长江科学院 Automatic water gage detector and application
CN102661775B (en) * 2012-04-26 2013-12-25 长江水利委员会长江科学院 Automatic water gage detector and application
CN104252242A (en) * 2013-06-28 2014-12-31 联想(北京)有限公司 Long-range control method and data processing equipment used for realizing same
CN104576435A (en) * 2013-10-11 2015-04-29 宁夏琪凯节能设备有限公司 Energy-saving environment-friendly washing tank
CN109297572A (en) * 2018-12-14 2019-02-01 武汉普迪真空科技有限公司 A kind of high temperature fluent metal liquid level sensor measurement calibration method

Similar Documents

Publication Publication Date Title
CN101451876A (en) Liquid level sensing apparatus with autodiagnosis function and autodiagnosis method thereof
TWI272658B (en) Flexible tank and a chemical liquid supply apparatus using the same
US9079639B2 (en) Large volume subsea chemical storage and metering system
CN106531405A (en) Oil storage cabinet with function of automatically detecting capsule leakage and use method for oil storage cabinet
US20120204636A1 (en) Buoyancy force-based liquid level measurement
CN108240851B (en) Liquid level state detection device and fuel cell system
KR101145607B1 (en) Liquid level detecting apparatus of high-pressure vessel
CN208187618U (en) A kind of blocking solution test device and blocking solution test macro
CN201549442U (en) Liquid level control floater switch
CN205384068U (en) Multifunctional liquid level indicator
CN103411650A (en) Anti-blocking device for magnetic turning plate liquid level meter
CN203285389U (en) Deflation valve capable of releasing downhole casing pipe and achieving well backwashing
CN203989650U (en) The liquid level detection device of a kind of fire fighting truck and flow container thereof
CN206946457U (en) A kind of energy is convenient for collecting and spreads over the flexible contactor control device of non-smooth surface
CN202442756U (en) High pressure resistant magnetic floater liquid level meter
CN100441418C (en) Synthetic resin part, synthetic resin assembly and method for manufacturing the same
CN2645050Y (en) High pressure magnetic bob level gauge
CN103803481A (en) Sensor
CN212077816U (en) Bridge anticollision early warning revolving stage
CN214369324U (en) Delivery system for solutions
CN204202705U (en) A kind of aluminum paste storage tank liquid level buoy
CN203405264U (en) Anti-blocking device of magnetic flap liquidometer
CN204433386U (en) Water purifier and built-in water storage container thereof
KR20160009316A (en) Floating structure
CN109972642A (en) A kind of barrel type structure drainage device and installation method

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Open date: 20090610