CN101446584A - Biochip for filtering blood cell and preparation method thereof - Google Patents
Biochip for filtering blood cell and preparation method thereof Download PDFInfo
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- CN101446584A CN101446584A CNA2007101940940A CN200710194094A CN101446584A CN 101446584 A CN101446584 A CN 101446584A CN A2007101940940 A CNA2007101940940 A CN A2007101940940A CN 200710194094 A CN200710194094 A CN 200710194094A CN 101446584 A CN101446584 A CN 101446584A
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- biochip
- blood cell
- substrate
- filtering blood
- perforation
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Abstract
The invention provides a biochip for filtering blood cell and the preparation method thereof. The biochip comprises a placode. The placode has a special shape, and the middle of the placode is provided with a sunken part. The sunken part is provided with a plurality of oblong punches. The short diameters of the oblong apertures of the punches are within 2.5mum to 3.6mum and the long diameters are within 25mum to 50mum. As the biochip is provided with a plurality of microform holes which can filter normal cells in the blood of human bodies and blocks cells infected by bacteria or cells with pathological changes, therefore, the biochip can be applied in medicine field or biological field to ensure that the blood washing of the human bodies can be easily treated. And the biochip is manufactured by using a chip processing way, which can simplify the manufacture cost and is suitable for mass-produced manufacturing ways.
Description
Technical field
The present invention is relevant a kind of biochip (Biochip), particularly about a kind of biochip and manufacture method thereof of filtering blood cell.
Background technology
Flourish along with microminiaturized chip fabrication techniques, the trend that the production technology of microchip is introduced the miniature instrument of biotechnology and medical application has become the trend of biology and micro electronmechanical engineering integrated development now, thereby the Application of Biochips of various detection usefulness is arranged.
The general same trial of biochip commonly used is used for placing the big molecule (Macromolecules) as gene, protein or cell etc., and then utilize biochemical characteristic to observe the result of its variation, with as the symptom that detects patient, it has the confidence level of analysis and accuracy height, the fast characteristic of analysis speed.
In addition, the patient who has with blood-related diseases, normally the mode with medicine is implemented the medicine treatment to blood cell when treatment, and this drug therapy mode can influence all blood cells, and can not do narrow spectrum treatment at the cell that is subjected to disease infection or pathology.
Therefore, but the present invention in the biochip and the manufacture method thereof that propose the low and filtering blood cell of a kind of cost of manufacture.
Summary of the invention
A purpose of the present invention is the biochip that proposes a kind of filtering blood cell, forms a plurality of microns holes by the sub-micron processing procedure of integrated circuit on a biological chip, can filter general normal person's blood cell.
Another object of the present invention is the manufacture method at the biochip that a kind of filtering blood cell is provided, and it is to utilize the integrated circuit manufacture process manufacturing, can produce in a large number cost is reduced, and can less program making be oversimplified by manufacturing.
Biochip according to filtering blood cell proposed by the invention, it comprises: a substrate, it has a given shape, has a depression position in the middle of the substrate, the depression position is provided with the perforation that several have geometry in particular, and the oval aperture of several perforation is minor axis 2.5 μ m to 3.6 μ m, and major diameter is 25 μ m to 50 μ m.
In addition, the biochip manufacturing method of filtering blood cell proposed by the invention comprises: a substrate is provided; In substrate surface etching one depressed part; And implement plasma etching at depressed part and form several perforation with a geometry in particular and pass substrate, and the oval aperture of each perforation is minor axis 2.5 μ m to 3.6 μ m, major diameter is 25 μ m to 50 μ m.
Below cooperate appended graphic explanation in detail by specific embodiment, when the effect that is easier to understand purpose of the present invention, technology contents, characteristics and is reached.
Description of drawings
Fig. 1 is a front schematic view of the present invention.
Fig. 2 is a diagrammatic cross-section of the present invention.
Fig. 3 A～Fig. 3 C is a manufacture method process flow diagram of the present invention.
Embodiment
The present invention forms a biochip with the big small holes of several microns by the processing procedure of integrated circuit.
See also and Figure 1 shows that front schematic view of the present invention, comprise a substrate 10, substrate 10 is silicon substrate or wafer (wafer), it is shaped as the square that is about 1.5cm on one side, has a depression position 12 in the middle of the substrate 10, depression position 12 penetrates the back side diagrammatic cross-section of the present invention as shown in Figure 2 of substrate for the perforation that is about the square about 1.0cm on one side and is provided with several elliptical shape, depression position 12 is apart from about 50 μ m to the 60 μ m of this substrate back, and the oval aperture of perforation is minor axis 2.5 μ m to 3.6 μ m, and major diameter is 25 μ m to 50 μ m.
The minor axis in the oval aperture of the perforation of the above-mentioned biochip with micron perforation is 2.5 μ m to 3.6 μ m, just can be by cell in general normal person's the blood, as white blood cell, red blood cell or blood platelet etc., the diameter of the cell in these blood is less than 3 μ m, so when a patients'blood cell of suffering from hematologic disease is subjected to virus infections, infected cell can increase volume because of structural change in the blood, its diameter can be greater than 3 μ m, thus, just can utilize the present invention that the infected cell of patient is stopped and allow normal cell pass through, make the normal cell that to circulate in the patient's blood vessel, can very big benefiting be arranged to sufferer, also can provide the doctor that one convenient and easy treatment tool is arranged when the relevant disease of treatment blood.
Fig. 3 A～Fig. 3 C is a manufacture method process flow diagram of the present invention, shown in Fig. 3 A～Fig. 3 B, becoming one side to be about on substrate 20 surfaces with hydrofluoric acid etch is the square depressed part 22 of 1cm, and wherein, substrate thickness is about 300 μ m to 500 μ m and caves in 22 ones apart from about 50 μ m to the 60 μ m of this substrate back; Then, shown in Fig. 3 C, implements plasma etchings at depressed part 22 and form several and have an oval-shaped perforation and pass this substrate, and the aperture of each perforation is minor axis 2.5 μ m to 3.6 μ m that major diameter is 25 μ m to 50 μ m.
The above is preferred embodiment of the present invention only, is not to be used for limiting scope of the invention process.So every equalization of doing according to the described shape of claims of the present invention, structure, feature and spirit changes and modifies, and all should be included in the claimed scope of the present invention.
Claims (10)
1. the biochip of a filtering blood cell is characterized in that comprising:
One substrate, it has a given shape, has a depression position in the middle of this substrate, and this depression position is provided with several oval-shaped perforation, and the minor axis in the oval aperture of these perforation is 2.5 μ m to 3.6 μ m, and major diameter is 25 μ m to 50 μ m.
2. the biochip of filtering blood cell as claimed in claim 1 is characterized in that, this substrate is to be silicon substrate or wafer.
3. the biochip of filtering blood cell as claimed in claim 1 is characterized in that, this substrate thickness is 300 μ m to 500 μ m.
4. the biochip of filtering blood cell as claimed in claim 1 is characterized in that, this given shape is a square or rectangular.
5. the biochip of filtering blood cell as claimed in claim 1 is characterized in that, this depression position is a square or rectangular.
6. the biochip of filtering blood cell as claimed in claim 1 is characterized in that, this depressed part distance of positions is from about 50 μ m to the 60 μ m of this substrate back.
7. the biochip manufacturing method of a filtering blood cell is characterized in that comprising:
One substrate is provided;
In this substrate surface etching one depressed part; And
Implements plasma etching at this depressed part and form several oval-shaped perforation and pass this substrate, and the oval aperture of each this perforation is minor axis 2.5 μ m to 3.6 μ m that major diameter is 25 μ m to 50 μ m.
8. the biochip manufacturing method of filtering blood cell as claimed in claim 7 is characterized in that, this substrate is silicon substrate or wafer.
9. the biochip manufacturing method of filtering blood cell as claimed in claim 7 is characterized in that, this substrate thickness is about 300 μ m to 500 μ m.
10. the biochip manufacturing method of filtering blood cell as claimed in claim 7 is characterized in that, this substrate surface is to become this depressed part with hydrofluoric acid etch.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101940940A CN101446584A (en) | 2007-11-27 | 2007-11-27 | Biochip for filtering blood cell and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101940940A CN101446584A (en) | 2007-11-27 | 2007-11-27 | Biochip for filtering blood cell and preparation method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101446584A true CN101446584A (en) | 2009-06-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007101940940A Pending CN101446584A (en) | 2007-11-27 | 2007-11-27 | Biochip for filtering blood cell and preparation method thereof |
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| Country | Link |
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| CN (1) | CN101446584A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103026208A (en) * | 2010-07-22 | 2013-04-03 | 玛里丹格姆研究知识产权信托 | Sensor for fast detection of e-coli |
| CN104459131A (en) * | 2013-09-25 | 2015-03-25 | 爱科来株式会社 | Method for processing blood sample |
-
2007
- 2007-11-27 CN CNA2007101940940A patent/CN101446584A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103026208A (en) * | 2010-07-22 | 2013-04-03 | 玛里丹格姆研究知识产权信托 | Sensor for fast detection of e-coli |
| CN104459131A (en) * | 2013-09-25 | 2015-03-25 | 爱科来株式会社 | Method for processing blood sample |
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Application publication date: 20090603 |