CN101445241B - Air inlet and air outlet for reduction furnace for polycrystalline silicon production - Google Patents
Air inlet and air outlet for reduction furnace for polycrystalline silicon production Download PDFInfo
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- CN101445241B CN101445241B CN2008102496237A CN200810249623A CN101445241B CN 101445241 B CN101445241 B CN 101445241B CN 2008102496237 A CN2008102496237 A CN 2008102496237A CN 200810249623 A CN200810249623 A CN 200810249623A CN 101445241 B CN101445241 B CN 101445241B
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- air inlet
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- air outlet
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Abstract
The invention relates to an air inlet and an air outlet for a reduction furnace for polycrystalline silicon production. The air inlet is fixedly installed at the bottom of a base and extents into the furnace in a position with a height of 100-300 mm from the bottom of the furnace, the top part of the furnace is plugged with a plugging plate or a flare opening with a diameter of 6-12 mm is formed in the center of the plugging plate. 3-6 spiral tangential outlets are uniformly arranged on the side wall of end portion of the air inlet. The air inlet includes openings of uniformly distributed 9-16 air inlet pipes, and the spiral directions of the spiral tangential outlets on the end portion of the air inlet are same or different. 2-4 uniformly distributed swirling plates are arranged in the end portion of each air inlet in the position below the spiral tangential outlets. The swirling plates have a spiral shape. The air inlet and air outlet can avoid diffusion of a rising air column at the bottom, so as to allow the rising air column to sufficiently contact a silicon rod; has no fluid dead zone at the top, thereby resulting in high silicon deposition speed on the upper part of the silicon rod. Furthermore, the invention is convenient for regulating air temperature, and enhances turbulence of the air in the furnace, so as to enhance mass transfer, prolong air retention time and improve one-step turnover rate.
Description
Technical field
The invention belongs to technical field of polysilicon production, more particularly relate to Siemens process polycrystalline silicon the production inlet mouth of reduction furnace and the improvement and the innovation of air outlet.
Background technology
The inlet, outlet of existing reducing furnace for polycrystalline silicon production is and the concordant circular open in reduction furnace inner bottom plane, and intake velocity is very fast.SiHCI after the purification
3With H
2After the mixing, nine inlet mouths spray into reduction furnace from the bottom.Gas is also discharged from the air outlet, bottom.Original design being intended that: inlet gas forms gas column to spray in the stove at a high speed, turns back behind the arrival top again and discharges from outlet at bottom downwards; Since the disturbance of high velocity air with turn back, in stove, form the strong turbulence flow field, guarantee gas composition homogeneous on each section on the one hand, the mass transfer between gas-solid can be strengthened in the turbulent flow flow field on the other hand, accelerates the sedimentation velocity of silicon on the silicon rod surface.
But there is following defective in the inlet, outlet of above-mentioned polycrystalline silicon reducing furnace:
1. the rising gas column promptly can produce diffusion in the bottom, causes segment fluid flow fully not contact with silicon rod, promptly produces short circuit and directly discharges from the air outlet, has reduced the disposable transformation rate of producing.
2. there is the dead band of fluid flow in the top.Especially when blow-on just, the influx of gas is low, sprays gas column and can not arrive the top, and the density of hydrogen is little in addition, easily forms the high zone of hydrogen concentration at the top, causes silicon rod top siliceous deposits speed low; Because air outlet and near the center only on the base so also there is the dead band of fluid flow in bottom periphery, causes siliceous deposits speed low equally.The top and the bottom of present production silicon rod is thin, the middle part slightly is provable above-mentioned inference.
3. furnace gas temperature is not easy to control.Because during come out of the stove, the fluctuations in discharge of gas is very big from blow-on, the diameter of silicon rod is also in continuous increase in addition, if the silicon rod surface keep 1100 ℃ constant, above-mentioned two factors all cause gas temperature to change, and adjust difficulty.
4. the disposable transformation rate is low.The disposable transformation rate of polycrystalline silicon reducing furnace is 10%～18% at present.Improve the disposable transformation rate, should improve the gas flow of some production phase, to strengthen the furnace gas turbulence, reinforcing mass transfer promptly improves the sedimentation velocity of silicon on the silicon rod surface.But gas flow increases, and has shortened the residence time of gas in stove, can cause the disposable transformation rate low again.Can't solve above-mentioned contradiction with existing reduction furnace structure and operating method.
Summary of the invention
Purpose of the present invention just is to overcome above-mentioned shortcoming and defect, and a kind of inlet mouth and air outlet of reducing furnace for polycrystalline silicon production is provided.It is rational in infrastructure, and the gas column of can avoiding rising is in the diffusion of bottom, and fluid can fully contact with silicon rod, the disposable transformation rate height of silicon.There is not the dead band of fluid flow in the reduction furnace top, improved the siliceous deposits speed on silicon rod top, improved produce the silicon rod top and the bottom is thin, the middle part is thick shortcoming.Be convenient to control, adjust the interior gas temperature of stove, both can have strengthened furnace gas turbulence reinforcing mass transfer, improve the sedimentation velocity of silicon, can not shorten the residence time of gas in stove again, thereby further improve the disposable transformation rate on the silicon rod surface.
Reduction furnace comprises the shell that has bottom and the base of bearing, be connected as a single entity by fastening piece with base and seal, be fixedly mounted on the bottom of base and be arranged in shell many counter electrode, be fixed on thin silicon rod on the electrode, be fixedly mounted on the reduction furnace to feed and the inlet mouth and the air outlet of discharge mixed gas.Shell has chuck, fixes, is being communicated with cooling water intake and water outlet on the chuck.
In order to achieve the above object, inlet mouth of the present invention is fixedly mounted on the bottom of base, and the air outlet is fixedly mounted on the shell.Inlet mouth stretches into 100～300mm above the stove inner bottom part, and the top is with the closure plate shutoff or open the hydraucone of a φ 6～φ 12 at the closure plate center.Stretch into and uniformly on the inlet mouth end sidewalls in the stove 3 to 6 spirals are set tangentially export.The air outlet is fixedly mounted on the end socket of cover top portion.
The air outlet is 5～7 a uniform mouth of pipe formula structures, that is 5～7 uniform gas branch pipes that go out that are fixedly mounted on the cover top portion end socket are communicated with the house steward that gives vent to anger.For this reason, the height of reduction furnace shell improves about 400mm more in the past.
Inlet mouth is 9～16 a uniform mouth of pipe formula structures, that is an inlet manifold is communicated with 9～16 uniform inlet mouths that are fixedly mounted on the bottom.The hand of spiral of the tangential outlet of the spiral of 9～16 inlet mouth ends is identical or different.
The present invention changes down the gas inlet and outlet form advance into and, and 9～16 mouth of pipe distribution forms are adopted in import, and draw by 5～7 uniform mouths of pipe at the top.Be the contraction flow that prevents that each place, air outlet, top from forming, influence the homogeneity of furnace gas axial flow velocity, the stove outer covering height improves 400mm.Fluid short circuit between the form that goes out on advancing down can be avoided importing and exporting, and can guarantee axial flow velocity homogeneous on each transverse section, make the diameter uniformity of many silicon rod products in the stove.
In order to make the strong turbulence flow field that all forms the axial velocity homogeneous in the stove from top to bottom, be beneficial to the reinforcement of rate of mass transfer, improve sedimentation velocity, and the silicon rod diameter homogeneous that produces, the present invention stretches into 100～300mm in the stove with inlet mouth, and the top shutoff, or opens the hydraucone of φ 6～φ 12 at the closure plate center.Gas is provided with 3 to 6 spirals by end sidewalls and tangentially exports, and enters in the stove with strong rotation mode.According to the flow field simulation result, 9～16 inlet mouths go out cyclostrophic revolve direction can be identical or inequality, be that principle is provided with can cause the furnace gas strong turbulence.
Be positioned in each inlet mouth end and have 2～4 uniform eddy flow plates below the tangential outlet of spiral.The eddy flow plate can be spirrillum.The purpose of eddy flow plate is to make gas promptly form strong rotation in inlet pipe, to avoid tube wall to approach, only lean against the drawback that the tube wall upper shed can not be led well, control, guide the flow direction of air inlet better, eliminate the mobile dead angle, make the gas strong turbulence that enters in the stove, thereby improve the disposable transformation rate.Spirrillum eddy flow plate can be strengthened air inlet, makes it to enter in the stove better effects if with strong rotation mode.
The house steward that gives vent to anger is leaded up to pipeline and Venturi tube in addition and is introduced the inlet manifold.That is to say that directly extraction system is as the tail gas except that part, other gas can draw back into mouth by jet injection mode, promptly realizes the circulation of portion gas.
The present invention is rational in infrastructure, and the gas column of can avoiding rising is in the diffusion of bottom, and fluid can fully contact with silicon rod, the disposable transformation rate height of silicon.There is not the dead band of fluid flow in the reduction furnace top, improved the siliceous deposits speed on silicon rod top, improved produce the silicon rod top and the bottom is thin, the middle part is thick shortcoming.Be convenient to control, adjust the interior gas temperature of stove, both can have strengthened furnace gas turbulence reinforcing mass transfer, improve the sedimentation velocity of silicon, can not shorten the residence time of gas in stove again, thereby further improve the disposable transformation rate on the silicon rod surface.It can be widely used in the also original production of polysilicon.
Description of drawings
Fig. 1 is the structural representation of reduction furnace of the present invention.
Fig. 2 is the vertical view of Fig. 1.
Fig. 3 is the D-D sectional view of Fig. 1, that is inlet mouth airintake direction synoptic diagram.
Fig. 4 stretches into the sectional view of the end in the stove for inlet mouth.
Fig. 5 is the C-C sectional view of Fig. 4.
Embodiment
Embodiment 1.A kind of inlet mouth of reducing furnace for polycrystalline silicon production and air outlet are as Fig. 1～shown in Figure 5.Reduction furnace comprise have bottom 2 and the base 1 of bearing 3, be connected as a single entity by fastening piece with base 1 and the shell 4 that seals, the bottom 2 that is fixedly mounted on base 1 and be arranged in shell 4 many counter electrode 5, be fixed on silicon rod 6 on the electrode 5, be fixedly mounted on the reduction furnace to feed and to discharge the inlet mouth 17 and the air outlet 12 of mixed gas.Shell 4 has chuck 9, fixes, is being communicated with cooling water intake 10 and water outlet 11 on the chuck 9.
Inlet mouth 7 is 9 a uniform mouth of pipe formula structures, that is inlet manifold 7 is communicated with 9 uniform inlet mouths 17 that are fixedly mounted on the bottom 2, and it is identical that the spiral of 9 inlet mouth 17 ends tangentially exports 21 the hand of spiral.
Be positioned in each inlet mouth 17 end and have 3 uniform eddy flow plates 22 below the tangential outlet 21 of spiral.Eddy flow plate 22 is a spirrillum.
The house steward 15 that gives vent to anger is leaded up to pipeline 18 and Venturi tube 19 in addition and is introduced inlet manifolds 7.
Embodiment 2.A kind of inlet mouth of reducing furnace for polycrystalline silicon production and air outlet.Its inlet mouth stretches into 100mm above the stove inner bottom part, and the hydraucone of a φ 6 is opened at the top at the closure plate center.Stretch into and uniformly on the inlet mouth end sidewalls in the stove 4 spirals are set tangentially export.
The air inlet that is distributed in 8 inlet mouths 17 on the circumference changes that to revolve direction alternate each other for clockwise and counterclockwise, to cause the furnace gas strong turbulence.Uniform eddy flow plate 22 is a spirrillum, and its hand of spiral is identical with the hand of spiral of the tangential outlet 21 of spiral of this inlet mouth 17.All the other are with embodiment 1.
Embodiment 3.A kind of inlet mouth of reducing furnace for polycrystalline silicon production and air outlet.Its inlet mouth stretches into 300mm above the stove inner bottom part, and the hydraucone of a φ 12 is opened at the top at the closure plate center.Stretch into and uniformly on the inlet mouth end sidewalls in the stove 6 spirals are set tangentially export.
Inlet mouth 7 is 16 a uniform mouth of pipe formula structures, that is inlet manifold 7 is communicated with 16 uniform inlet mouths 17 that are fixedly mounted on the bottom 2, and it is identical that the spiral of 16 inlet mouth 17 ends tangentially exports 21 the hand of spiral.
Be positioned in each inlet mouth 17 end and have 4 uniform eddy flow plates 22 below the tangential outlet 21 of spiral.Eddy flow plate 22 is a spirrillum.
Embodiment 1～3 is rational in infrastructure.Its advantage is: 1. can regulate the amount of recycle gas according to the needs of different production phases, to guarantee each production phase, the furnace gas flow field all keeps the strong turbulence state.Especially at the blow-on initial stage, silicon rod is thin, and depositional area is little, and required air input is little.If can add big cycle volume, but reinforcing mass transfer and deposition on the one hand, and can increase substantially the speed that disposable transformation rate and silicon rod diameter increase.2. by regulating the size of the circulation gas scale of construction, the temperature that can regulate furnace gas easily.As, need to reduce furnace gas temperature, can strengthen the circulation gas scale of construction, and water cooler is set on outlet pipe, with the adjustments of gas temperature.3. can improve the disposable transformation rate.As long as control the composition and the flow of recycle gas well, can improve the concentration of HCI in the tail gas, promptly improve the disposable transformation rate.4. need not establish power-equipment during gas circulation, only need suitably to improve the pressure of former air inlet (now being fresh supplemented gas), injection and Venturi tube by gas can realize the portion gas circulation, and can realize the adjustment of internal circulating load by pressure, adjustment tail gas and the circulation line valve of adjusting former air inlet.5. help the increase of product silicon rod diameter.The silicon rod diameter of photovoltaic production at present is generally 100mm.If increase the product diameter, at production period, silicon rod increases to 150mm even when bigger, charge flow rate is big from diameter 100mm, and the air outlet temperature height is not easy to regulation and control.When adopting this reduction furnace technology, the internal circulating load or the gas that can reduce gas in the production later stage do not circulate, and temperature in adjustments of gas flow and the stove guarantees that the silicon rod diameter increases smoothly by the expection continuation easily.
Embodiment 1～3 can be widely used in the also original production of polysilicon.
Claims (2)
1. the inlet mouth of a reducing furnace for polycrystalline silicon production and air outlet, inlet mouth is fixedly mounted on the bottom of base, the air outlet is fixedly mounted on the shell, it is characterized in that said inlet mouth stretches into 100～300mm above the stove inner bottom part, the top is with the closure plate shutoff or open the hydraucone of a φ 6～φ 12 at the closure plate center, stretch into and uniformly on the inlet mouth end sidewalls in the stove 3 to 6 spirals are set tangentially export, the air outlet is fixedly mounted on the end socket of cover top portion; The air outlet is 5～7 a uniform mouth of pipe formula structures, that is 5～7 uniform gas branch pipes that go out that are fixedly mounted on the cover top portion end socket are communicated with the house steward that gives vent to anger; Inlet mouth is 9～16 a uniform mouth of pipe formula structures, that is inlet manifold is communicated with 9～16 uniform inlet mouths that are fixedly mounted on the bottom, and the hand of spiral that the spiral of inlet mouth end tangentially exports is identical or different; Be positioned in each inlet mouth end and have 2～4 uniform eddy flow plates below the tangential outlet of spiral; The house steward that gives vent to anger is leaded up to pipeline and Venturi tube in addition and is introduced the inlet manifold.
2. according to the inlet mouth and the air outlet of the described reducing furnace for polycrystalline silicon production of claim 1, it is characterized in that said eddy flow plate is a spirrillum.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2008102496237A CN101445241B (en) | 2008-12-25 | 2008-12-25 | Air inlet and air outlet for reduction furnace for polycrystalline silicon production |
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| CN2008102496237A CN101445241B (en) | 2008-12-25 | 2008-12-25 | Air inlet and air outlet for reduction furnace for polycrystalline silicon production |
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| CN101445241A CN101445241A (en) | 2009-06-03 |
| CN101445241B true CN101445241B (en) | 2011-04-20 |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102134074A (en) * | 2011-04-18 | 2011-07-27 | 天津大学 | Polycrystalline silicon reducing furnace and operating method thereof |
| CN102618921B (en) * | 2012-04-11 | 2015-06-03 | 浙江金瑞泓科技股份有限公司 | Double-exhaust flat-plate epitaxial furnace |
| CN104803388A (en) * | 2014-01-29 | 2015-07-29 | 新特能源股份有限公司 | Polycrystalline silicon reduction device |
| CN104016349B (en) * | 2014-05-29 | 2015-09-30 | 姚迅 | A kind of production equipment of polycrystalline silicon rod and method thereof |
| CN106495162B (en) * | 2015-09-07 | 2019-07-23 | 新特能源股份有限公司 | For producing the reduction furnace of polysilicon and improving the method for polysilicon surface cauliflower |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2862792A (en) * | 1954-05-28 | 1958-12-02 | Solumeta | Process and apparatus for the production of finely divided powders |
| CN1559896A (en) * | 2004-03-08 | 2005-01-05 | 成都蜀菱贸易发展有限公司 | Reduction furnace of hydrogen for polysilicon |
| CN201050940Y (en) * | 2007-05-31 | 2008-04-23 | 无锡中彩科技有限公司 | Inlet and outlet pipe device of high temperature reducing furnace |
| CN101311656A (en) * | 2008-03-12 | 2008-11-26 | 江苏双良锅炉有限公司 | Quick-opening type water-cooling structure polycrystalline silicon reducing furnace |
-
2008
- 2008-12-25 CN CN2008102496237A patent/CN101445241B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2862792A (en) * | 1954-05-28 | 1958-12-02 | Solumeta | Process and apparatus for the production of finely divided powders |
| CN1559896A (en) * | 2004-03-08 | 2005-01-05 | 成都蜀菱贸易发展有限公司 | Reduction furnace of hydrogen for polysilicon |
| CN201050940Y (en) * | 2007-05-31 | 2008-04-23 | 无锡中彩科技有限公司 | Inlet and outlet pipe device of high temperature reducing furnace |
| CN101311656A (en) * | 2008-03-12 | 2008-11-26 | 江苏双良锅炉有限公司 | Quick-opening type water-cooling structure polycrystalline silicon reducing furnace |
Non-Patent Citations (1)
| Title |
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| 吴引林.半导体多晶硅生产综述.《稀有金属》.1984,(第6期),20-25. * |
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