CN101430942A - Optical pincers apparatus with particulate lifting device - Google Patents

Optical pincers apparatus with particulate lifting device Download PDF

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Publication number
CN101430942A
CN101430942A CNA2007101662324A CN200710166232A CN101430942A CN 101430942 A CN101430942 A CN 101430942A CN A2007101662324 A CNA2007101662324 A CN A2007101662324A CN 200710166232 A CN200710166232 A CN 200710166232A CN 101430942 A CN101430942 A CN 101430942A
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particle
electrode
runner
optical
lifting device
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CN101430942B (en
Inventor
刘承贤
王威
徐琅
周忠诚
曾胜阳
彭震
吴丰旭
李大元
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Raydium Semiconductor Corp
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Qisda Corp
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Abstract

The invention discloses an optical tweezers device with a lifting device. The particle lifting device comprises a substrate and a plurality of electrodes, and the electrodes are arranged at the bottom side of a flow channel of the substrate. The particles are driven by negative dielectrophoresis power to be lifted upwards to a specific depth of the flow channel when dielectrophoresis dynamic solution with suspended particles is guided to pass through the electrodes on the flow channel, and voltage is applied to the electrodes. At the moment, the optical tweezers can optionally focus on the specific depth of the flow channel.

Description

A kind of optical pincers apparatus with particulate lifting device
Technical field
The present invention relates to a kind of optical pincers apparatus, particularly a kind of particulate lifting device and the optical pincers apparatus of using it that uses the dielectrophoresis braking technique with particulate lifting device.
Background technology
Past is at MEMS (micro electro mechanical system) (micro electro mechanical system, MEMS), in nanometer (nano) technology or biomedicine (biomedical) field, seldom can be at fine particle, for example nano molecular, protein, cell or virus etc. are carried out the processing of single particle.At present, because the prosperity of material and process technique, many micro-fluidic systems that apply to control fine particle are grown up gradually.These micro-fluidic systems apply to detecting, separation or the screening of particle mostly.Yet the processing procedure of these micro-fluidic systems is very complicated mostly, and handled sometimes particle size is too small, still exists sizable problem when micro-fluidic system is operated on the spot.
The technology of optics clamp (optical tweezers) is very helpful controlling on the particle of micron grade.Generally be to use single beam laser light to focus on, and utilize the variation of photon momentum to remove to control particle.Because the destructive speciality of the on-mechanical of light is applied in the fields such as MEMS (micro electro mechanical system), nanometer technology or biological medicine the technology of optics clamp widely.Yet, though the focusing that the optics clamp can be by laser beam can not guarantee that the particle of sending into all is positioned on the focal plane to control the particle on its focal plane when operation.Thus, the optics clamp just can't be carried out the function that it controls particle effectively.
Summary of the invention
The present invention relates to a kind of optical pincers apparatus with particulate lifting device, it is widely used in fields such as micro electronmechanical, nanometer technology or biotechnology, with detect at fine particle, processing such as lifting or classification.
The present invention proposes a kind of particulate lifting device, and this device comprises substrate and a plurality of electrode.These electrodes are set at the runner bottom side of substrate.When the moving solution of the dielectrophoresis that has suspended particles is guided electrode place on the runner of flowing through, and when applying a voltage to these electrodes, aforementioned particles can be subjected to negative dielectrophoresis power drive and upwards be raised to the certain depth of runner.
The present invention also proposes a kind of optical pincers apparatus, and this device comprises optics clamp and particulate lifting device.Particulate lifting device comprises substrate and a plurality of electrode.These electrodes are set at the runner bottom side of substrate.When the moving solution of the dielectrophoresis that has suspended particles is guided electrode place on the runner of flowing through, and when applying a voltage to these electrodes, aforementioned particles can be subjected to negative dielectrophoresis power drive and upwards be raised to the certain depth of runner.The optics clamp just optionally focuses on the certain depth place of this runner.
For foregoing of the present invention can be become apparent, preferred embodiment cited below particularly, and accompanying drawing shown in cooperating are described in detail below:
Description of drawings
Figure 1A is the synoptic diagram according to the particulate lifting device of the embodiment of the invention one.
Figure 1B is the stereographic map of the electrode of Figure 1A.
Fig. 2 A is disposed at the synoptic diagram of substrate for Fig. 1 partial electrode.
Fig. 2 B is the gradient map of electric field on the Z direction that Fig. 2 A electrode produces.
Fig. 3 A imports the cut-away view of solution for Fig. 1 runner.
Fig. 3 B is the graph of a relation of Fig. 3 A driving voltage and particle rising height.
Fig. 4 is the synoptic diagram according to the optical pincers apparatus of the embodiment of the invention one.
Fig. 5 A is the synoptic diagram according to the particulate lifting device of the embodiment of the invention two.
Fig. 5 B is the synoptic diagram of Fig. 5 A unitary electrode.
Fig. 6 is the distribution map of the electric field that A-A ' profile line is simulated among Fig. 5 A.
Fig. 7 and Fig. 8 show the actual tests result of the particulate lifting device 300 in one embodiment of the invention.
Embodiment
Embodiment one
Please refer to Figure 1A-1B, Figure 1A is the synoptic diagram according to the particulate lifting device of the embodiment of the invention one, and Figure 1B is the stereographic map of the electrode of Figure 1A.Shown in Figure 1A, particulate lifting device 100 comprises substrate 110 and a plurality of electrodes.These electrodes are set at runner 115 bottom sides of substrate 110.When the moving solution of the dielectrophoresis that has suspended particles is guided electrode on the runner 115 of flowing through, and when applying a voltage to these electrodes, aforementioned particles can be subjected to negative dielectrophoresis power, and (dielectrophoresis DEP) drives and upwards is raised to the certain depth of runner 115.
Electrode on the substrate 110 can be divided into two groups of electrical opposite electrodes, when applying voltage to these electrodes, can produce effect of electric field thus.Shown in Figure 1A, substrate 110 is provided with a plurality of first electrode E1 and a plurality of second electrode E2, when applying voltage, make the first electrode E1 electrically and the second electrode E2 electrical opposite.Preferably, these the first electrode E1 and the second electrode E2 are crisscross arranged on runner.Shown in Figure 1B, the shape of aforementioned each electrode for example is pyramidal structure.
The moving solution of dielectrophoresis for example is to be entered by arrow A 1 place to direct on the runner 115, and derives runner 115 by arrow A 2 places.Have many particles in the moving solution of dielectrophoresis, in order to obtain the negative power-actuated effect of dielectrophoresis, the electrical conductivity that makes the moving solution of dielectrophoresis is in fact greater than the electrical conductivity of particle.Thus, when electric field produced, the degree of polarization of the moving solution of dielectrophoresis can be greater than the degree of polarization of particle, and the place of particle a little less than the electric field moved.How the following drawings explanation present embodiment is by negative dielectrophoresis power lifting particle.
Please refer to Fig. 2 A-2B, Fig. 2 A is disposed at the synoptic diagram of substrate for Fig. 1 partial electrode, and Fig. 2 B is the gradient map of electric field on the Z direction that Fig. 2 A electrode produces.Shown in Fig. 2 A, the diameter d of each electrode is approximately 10 microns (μ m), and the interval S of two adjacent electrodes is approximately 50 μ m.Each the first electrode E1 and the second electrode E2 are external to an AC power, and the driving voltage frequency of this AC power is about 1 MHz (MHz).Shown in Fig. 2 B (result after the normalization), under the aforementioned parameters design, only singly see the Electric Field Distribution of Z direction, the electric field level that the first electrode E1 and the second electrode E2 produce in runner 115 is along with reducing (is the position of Z=0 with runner 115 bottom sides) apart from increasing with substrate 110 bottom sides.In other words, with the big more place of distance, runner 115 bottom sides, the electric field intensity that electrode E1, E2 are produced is weak more.
Referring again to Fig. 3 A-3B, Fig. 3 A is the cut-away view of Fig. 1 runner importing solution, and Fig. 3 B is the graph of a relation of Fig. 3 A driving voltage and particle rising height.The particle P diameter of present embodiment is about 10 μ m, and it is the particle of latex material, and the moving solution L of dielectrophoresis then is deionized water (de-ionized water) solution, and other characteristic of the two is asked for an interview table 1.
Table 1
Specific inductive capacity Electrical conductivity
Deionized water 80 1.3E-4
Particle 7 1.0E-12
Because the electrical conductivity of deionized water solution is much larger than the electrical conductivity of latex particle, when electrode E1, E2 energising and generation electric field, the degree of polarization of deionized water solution can be greater than the degree of polarization of latex particle.Therefore, promptly particle P is produced negative dielectrophoresis power F DEP, the place of particle P a little less than electric field moved.As shown in Figure 3A, because weak more apart from substrate 110 bottom sides electric field intensity far away more, particle P just can upwards lifting gradually in the process that moves.In addition, shown in Fig. 3 B, if the driving voltage of electrode E1, E2 is big more, the electric field intensity that it produced also can be big more, makes that the height of particle P institute lifting is big more.By aforesaid characteristic, after particle P entered runner 115, the user can be by adjusting the size of driving voltage, with the height of further control particle P lifting.
Though in this size that has defined particle P is 10 μ m, yet in the utilization of reality, the particulate lifting device 100 of present embodiment is not limited to the size of particle volume.It is factor-related with the specific inductive capacity of particle size, solution, electric field intensity etc. that negative dielectrophoresis power is actually.And in the process of particle lifting, negative dielectrophoresis power also must overcome the gravity of particle itself.Because the gravity of negative dielectrophoresis power and particle all relevant (but just the identical factor of cancellation, for example diameter of particle in equation), therefore can't influence the effect of lifting because of the size of particle with particle volume.That is to say,, under same drive voltage, can in runner 115, all particles be lifted to identical height even if in solution, have many particles that vary in size.
Moreover though present embodiment one is to do test and explanation with deionized water solution and latex particle, in fact the particulate lifting device 100 of present embodiment also can apply to the lifting or the screening of other kind particle.As long as according to the characteristic of particle solution with appropriate mix.
Thus, the particulate lifting device 100 of present embodiment not only can significantly be used on the particle of variety classes and size.And as long as adjust the driving voltage size, just can change the degree of depth of particle in runner, more convenient when subsequent treatment.For instance, when the particulate lifting device 100 of present embodiment is applied to optical pincers apparatus, owing to can freely control the height that particle rises, thereby can effectively solve the problem that can't control particle because of laser light focal position mistake smoothly.In addition, if the step that detects of collocation more also can be done the processing of screening at specified particle, below it is carried out description of drawings.
Please refer to Fig. 4, it is the synoptic diagram according to the optical pincers apparatus of the embodiment of the invention one.As shown in Figure 4, optical pincers apparatus 200 comprises optics clamp 210, detecting unit 230, control module 250 and particulate lifting device 100.Control module 250 is electrically connected to the driving power 270 of LASER Light Source 215, detecting unit 230 and the particulate lifting device 100 of optics clamp 210.Detecting unit 230 is in order to provide the mechanism that detects particle, and it is the combination of Image sensor apparatus, photoelectric sensor, electric sensing apparatus, magnetic sensing apparatus or aforementioned each sensing apparatus.Detecting unit 230 can carry out the characteristic identification of disparity items at the particle properties in the device.Particle refraction/the scattering ratio of for example particle picture of Image sensor apparatus identification, photoelectric sensor to the particle magnetic effect (magnetic flux) of particle conductive/dielectricity comparison of, electric sensing apparatus, magnetic sensing apparatus than reciprocity.
As for particulate lifting device 100, as previously mentioned, it controls the driving voltage of each electrode, to adjust the rising height of particle P.And 210 designs of particulate lifting device 100 collocation optics clamps make particle P after lifting, can be positioned at focusing place of laser light just.Thus, just can solve the problem that particle P can't be positioned at focusing place of optics clamp 210 effectively.
The moving solution L of dielectrophoresis that has particle P for example be from particulate accumulator tank (not shown) in little group Pu (not shown) guiding in channel (arrow A 1).At first particle P can pass through detection zone I, is detected the particle of each process by detecting unit 230.Certainly, particle P is after unit 230 detects after testing, and its follow-up processing mode can go to be set according to the purposes of this optical pincers apparatus 200.For instance, if will be with particle P with special properties by screening in the particulate accumulator tank, when particle P after testing after, detecting unit 230 can send a signal to control module 250, judges by control module 250 whether particle P is the particle that will separate.If control module 250 can further start the lifting mechanism of particulate lifting device 100.Control module 250 is to remove to open driving power (alternating current) 270 according to the detection data of particle P, applying suitable driving voltage on each electrode, and then produces corresponding non-uniform electric field.When particle P enters particulate lifting device 100, just can be subjected to the effect of negative dielectrophoresis power and move up.Certainly, when particle P was lifted to certain height, optics clamp 210 just can firmly further process particle P strangulation again.Thus, have only and want the screened particle that comes out just can enter lifting mechanism, remaining particle all can be discharged (arrow A 2 places) via runner exit.
Another kind of mode classification is directly to utilize the optical navigation line of optics clamp 210 to do the operation of particle classifying.Explain with Fig. 4 equally, after particle P enters optical pincers apparatus 200 by the particulate accumulator tank, after detecting unit 230 detects particle P and enters, just can transmit signal and give control module 250.After control module 250 receives signal, start lifting mechanism immediately.As previously mentioned, the lifting mechanism of particulate lifting device 100 can't be subjected to the particle size influence, therefore can effectively all particles be lifted to certain height (the focussing plane place of optics clamp 210), is carried out the step of particle classifying again by optics clamp 210.At present, the technology of optics clamp 210 can allow laser light form a plurality of optical navigation lines on focussing plane, and these optical navigation lines design at the particle with different qualities.For instance, for example larger-size particle can produce bigger guiding deviation effect, so can by whether producing deviation, and reach the purpose of particulate classification.
In addition, in the employed optics clamp of the present embodiment technology, can pass through computing machine or similar calculation processing unit, the optics diffractive element in the light path is adjusted, meet the optical navigation mechanism of demand with generation.Therefore the result of aforesaid testing mechanism gained, the running of particle lifting mechanism and the light path design of optics clamp can be summarized in same processing unit (for example being arranged in control module 250) jointly.So can preferably design the effect when in fact operating at the detection bodies of actual treatment to improve.
Embodiment two
Please refer to Fig. 5 A-5B, Fig. 5 A is the synoptic diagram according to the particulate lifting device of the embodiment of the invention two, and Fig. 5 B is the synoptic diagram of Fig. 5 A unitary electrode.Shown in Fig. 5 A, the substrate 310 of particulate lifting device 300 is provided with a plurality of electrodes, and these electrodes comprise the electrically opposite first electrode E1 and the second electrode E2.Wherein, the first all electrode E1 are connected, and the second electrode E2 also is connected, and thus, when driving, can make the first all electrode E1 or the second electrode E2 have identical electrical and voltage swing.The first electrode E1 and the second electrode E2 are crisscross arranged, make apply a voltage to electrode E1, E2 after, on substrate 310, can produce non-uniform electric field.
Shown in Fig. 5 B, electrode E1, E2 are made of plate, and two tips of each electrode are connected and make electrode proximate in butterfly-like.In the test of present embodiment, the width W of the electrode that is adopted is about 140 μ m, and the spacing G at electrode two tips is about 20 μ m, and the scope that makes driving voltage is between the 0-10 volt, and driving frequency is about the 1-100 hertz.Under aforesaid parameter designing, resulting Electric Field Distribution please refer to Fig. 6, and Electric Field Distribution shown in Figure 6 is an A-A ' profile line institute Simulation result among Fig. 5 A.Be diameter to be about the latex particle of 10 μ m and deionized water solution is mixed in the present embodiment, then see table 1 as for other characteristic of particle and deionized water.
As shown in Figure 6, the distance on directions X (Fig. 5 B is asked for an interview in the definition of X, Y direction) strengthens gradually, and then electric field intensity is weak more.When electric field intensity drops to minimum point, then can strengthen gradually again.When contrast Fig. 5 A or 5B, when imposing voltage on electrode E1, the E2, in the electric field intensity minimum (the most advanced and sophisticated junction of counter electrode) of substrate 310 centre.The actual tests result of particulate lifting device 300 asks for an interview Fig. 7-8.This test is particle to be discharged into by three diverse location places on the substrate 310 (1 place enters runner by arrow A in the runner, and leave) by arrow A 2 places, the particle of diverse location is represented with blue, green, red particles respectively among Fig. 7-8, and the block that shows with different colours on the substrate 310 is the different electric field intensity of representative.As shown in Table 1, because the electrical conductivity of latex particle is much smaller than the electrical conductivity of deionized water solution, so the degree of polarization of particle is little, can be subjected to negative dielectrophoresis dynamic action and place a little less than electric field intensity is moved in electric field.These can be observed from the step 1-10 of Fig. 7-8, though particle is to be discharged by three diverse location places, in the deionized water solution process of flowing, particle can move to the centre (place that electric field intensity is the most weak) of substrate 310 gradually.
Under aforementioned effect, particulate lifting device 300 is similar to " seizure " effect (trapping) except the particle in the runner is produced, and can also allow particle present in the mode of ordering, thus, more helps the processing of follow-up particle.For instance, the particulate lifting device 300 of the present embodiment detecting unit of also can arranging in pairs or groups is made the Characteristics Detection of particle.When particle advances in the mode of ordering, the erroneous judgement that causes in the time of can avoiding a plurality of particles simultaneously through detecting unit.In addition, when particle advanced in the mode of ordering, the counting that can more help particle was handled.
Embodiment one and two particulate lifting mechanism and optical pincers apparatus correlation technique can be widely used in fields such as micro electronmechanical, nanometer technology or biotechnology.For instance, be used for the composition classification of biological blood or body fluid inside: for example classification of the different cells of blood and counting, or contained impurity, particle etc. in the filter liquide.
Particulate lifting device and the optical pincers apparatus of using it that the above embodiment of the present invention is disclosed are in the runner bottom side of substrate electrode to be set, to produce non-uniform electric field after applying voltage.Because particle is different with the degree of polarization of solution, particle can be subjected to the effect of negative dielectrophoresis power, makes particle upwards lifting in the suspension process of flowing.The optics clamp of optical pincers apparatus just can be caught particle by the ad-hoc location in runner, further to do follow-up processing at particle.In addition,, can make particle in runner, present the effect that is similar to ordering, also help the subsequent treatment of particle by shape and the configuration mode that suitably designs electrode.
In sum, though the present invention with the preferred embodiment disclosure as above, yet it is not in order to limit the present invention.The ordinary technical staff in the technical field of the invention, without departing from the spirit and scope of the present invention, when doing various changes and modification.Therefore, protection scope of the present invention scope that appending claims defined after looking is as the criterion.
The primary clustering symbol description
100,300: particulate lifting device 200: optical pincers apparatus
110,310: substrate 115: runner
210: optics clamp 215: LASER Light Source
230: detecting unit 250: control module
270: driving power E1: the first electrode
E2: the second electrode L: dielectrophoresis moves solution
P: particle I: detection zone

Claims (9)

1. optical pincers apparatus comprises:
The optics clamp; And
Particulate lifting device comprises:
Substrate has runner, and the moving solution of dielectrophoresis that has a plurality of suspended particles is conducted on the described runner; And
A plurality of electrodes, be arranged on the described substrate, and be positioned at the bottom side of described runner, when applying a voltage to described electrode, produce electric field on the described substrate, make described particle with the moving flow of solution of described dielectrophoresis when the described electrode, is subjected to negative dielectrophoresis power drive and upwards is raised to the certain depth of described runner, and described optics clamp optionally focuses on the described certain depth of described runner.
2. optical pincers apparatus according to claim 1, the electrical conductivity of wherein said particle move the electrical conductivity of solution in fact less than described dielectrophoresis.
3. optical pincers apparatus according to claim 1, wherein when adjusting the voltage of described electrode, the negative dielectrophoresis power that described particle is subjected to changes thereupon, and the degree of depth of described particle in described runner changed.
4. optical pincers apparatus according to claim 1, wherein said each electrode is pyramidal structure.
5. optical pincers apparatus according to claim 1, wherein said electrode comprise a plurality of first electrodes and a plurality of second electrode, and described first electrode is electrical opposite with described second electrode.
6. optical pincers apparatus according to claim 5, wherein said first electrode and described second electrode are crisscross arranged.
7. optical pincers apparatus according to claim 1, wherein said optics clamp laser focusing place is positioned at the described certain depth place of described runner in fact.
8. optical pincers apparatus according to claim 1 also comprises:
Detecting unit in order to detect the characteristic of described particle, makes described particulate lifting device control the driving voltage of described electrode thus, to adjust the rising height of described particle.
9. optical pincers apparatus according to claim 8, wherein said detecting unit are the combinations of Image sensor apparatus, photoelectric sensor, electric sensing apparatus, magnetic sensing apparatus or aforementioned each sensing apparatus.
CN2007101662324A 2007-11-06 2007-11-06 Optical pincers apparatus with particulate lifting device Expired - Fee Related CN101430942B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113049455A (en) * 2019-12-26 2021-06-29 中核北方核燃料元件有限公司 Cladding fuel particle and nuclear core traceability diameter auxiliary measuring device

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* Cited by examiner, † Cited by third party
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DE19757785B4 (en) * 1997-12-28 2005-09-01 Günter Prof. Dr. Fuhr Method for determining optically induced forces
CN1104642C (en) * 1999-06-21 2003-04-02 中国科学技术大学 Optically controlled sperm activity test device and method
US6416190B1 (en) * 2001-04-27 2002-07-09 University Of Chicago Apparatus for using optical tweezers to manipulate materials

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113049455A (en) * 2019-12-26 2021-06-29 中核北方核燃料元件有限公司 Cladding fuel particle and nuclear core traceability diameter auxiliary measuring device

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