CN101424925B - Aspherical mirror measuring system and method - Google Patents

Aspherical mirror measuring system and method Download PDF

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Publication number
CN101424925B
CN101424925B CN2007102023402A CN200710202340A CN101424925B CN 101424925 B CN101424925 B CN 101424925B CN 2007102023402 A CN2007102023402 A CN 2007102023402A CN 200710202340 A CN200710202340 A CN 200710202340A CN 101424925 B CN101424925 B CN 101424925B
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measurement
axis
measuring
workpiece
negative direction
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CN101424925A (en
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李军旗
欧阳渺安
刘庆
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Ji Zhun Precision Industry Hui Zhou Co ltd
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Hongfujin Precision Industry Shenzhen Co Ltd
Hon Hai Precision Industry Co Ltd
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    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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Abstract

The invention relates to an aspherical mirror face measuring method which comprises the following steps: a scanning mode is set to lead a board to measure a workpiece; a corresponding measuring route is generated according to the scanning mode; a plurality of measuring parameters and corresponding values of the measuring parameters are set; the design parameter of the workpiece is obtained; a measuring process is generated according to the generated measuring route and the set measuring parameters, and is transmitted to the board; the measuring data is obtained; the obtained measuring data and the obtained design parameter of the workpiece are analyzed and compared so as to judge whether the process of the workpiece is qualified or not; and a data file including the measuring data and an analysis result are output. The invention also provides an aspherical mirror face measuring system. The invention is utilized to automatically generate the measuring process so that the measuring board automatically measures the workpiece and visually reflects the measuring parameters and the result.

Description

Aspherical mirror measuring system and method
Technical field
The present invention relates to a kind of measuring system and method, relate in particular to a kind of measuring system and method at aspherical mirror.
Background technology
For current electronics industry, from the assembly to the system, be designed into production, surveying work all is an indispensable ring.Product usefulness must be known by measurement in factory, as the reference frame of product design; In process of production, often need measuring equipment to hold the lifeblood of factory building; And efficiency of measurement is often also very close with the production efficiency relation, becomes the key factor of decision market competitiveness growth and decline.
Quality is that an enterprise keeps one of key factor of permanent developing ability, how to guarantee and improves the quality of products, and be the important content in the business activity.In order to improve and to guarantee product quality, product is implemented check to be absolutely necessary, by checking activity that the quality information of product and manufacture process thereof is provided, according to these information the manufacture process of product is implemented control---revise and the compensation activity, make waster and reprocessed products rate drop to minimum level, guarantee the stability and the output consistency of product thereof of product quality forming process.
Pursue higher manufacturing accuracy is manufacturing target always, and lathe, cutter and Numeric Control Technology are not only depended in the raising of manufacturing accuracy, and depends on the measuring accuracy that means of testing that manufacturing system adopts can reach.Because non-spherical element obtains application more and more widely in optical design, have higher requirement to the detection of non-spherical element face shape parameter and to the evaluation of aspheric surface quality.Along with the modern and open development of numerical control (NC) technology, effectively utilized the software resource and the powerful operation capacity of computing machine non-spherical element has been measured, thereby improved the check accuracy.
Yet the device of original measurement non-spherical element is too complicated, and processing can not realize robotization, and measuring accuracy is not high, and can not embody measurement data intuitively in measuring process, and still needs to carry out repeated operation when measuring same element.In addition, also need labor intensive and time manually to write the operation of code, make efficiency of measurement effectively to improve, and have inevitable personal error with the control survey board.
Summary of the invention
In view of above content, be necessary to provide a kind of aspherical mirror measuring system, it can generate the process of measurement order automatically at aspherical mirror and related die and measure board workpiece is measured automatically, provide multiple scan mode that workpiece is taked the measurement of different modes, and can reflect measurement parameters and result intuitively.
In addition, also be necessary to provide a kind of aspherical mirror measuring method, it can generate the process of measurement order automatically at aspherical mirror and related die and measure board workpiece is measured automatically, provide multiple scan mode that workpiece is taked the measurement of different modes, and can reflect measurement parameters and result intuitively.
A kind of aspherical mirror measuring system, this system is used to control board workpiece is measured, it comprises: scan mode is provided with module, be used for from the multiple scan mode that sets in advance, choosing a kind of to guide board that workpiece is measured at a coordinate system of setting, and generating corresponding measuring route according to the scan mode that is selected, this scan mode is provided with the multiple scan mode that module sets in advance and comprises following type: from the negative direction motion to X-axis of the positive dirction of X-axis; Move to the positive dirction of X-axis from the negative direction of X-axis; Move to the positive and negative direction of X-axis simultaneously from the central point of X-axis; Move to the negative direction of Y-axis from the positive dirction of Y-axis; Move to the positive dirction of Y-axis from the negative direction of Y-axis; And from the central point of Y-axis simultaneously to the positive and negative direction motion of Y-axis; Parameter is provided with module, is used to be provided with a plurality of measurement parameters and measurement parameter value corresponding, and obtains the design parameter of workpiece; Measurement module is used for generating process of measurement automatically according to measuring route that generates and set measurement parameter, makes board according to this process of measurement workpiece be measured, and obtains measurement data; Delivery module is used to transmit process of measurement to board, and transmits the measurement data of being obtained; And data processing module, be used for measurement data and design parameter are analysed and compared, judge whether the processing of this workpiece is qualified, and output comprises the data file and the analysis result of this measurement data.
A kind of aspherical mirror measuring method, this method is used to control board workpiece is measured, it comprises the steps: that scan mode is provided with step, choose a kind ofly guiding board that workpiece is measured in the coordinate system that sets from the multiple scan mode that sets in advance, this scan mode is provided with the multiple scan mode that module sets in advance and comprises following type: from the negative direction motion to X-axis of the positive dirction of X-axis; Move to the positive dirction of X-axis from the negative direction of X-axis; Move to the positive and negative direction of X-axis simultaneously from the central point of X-axis; Move to the negative direction of Y-axis from the positive dirction of Y-axis; Move to the positive dirction of Y-axis from the negative direction of Y-axis; And from the central point of Y-axis simultaneously to the positive and negative direction motion of Y-axis; Measuring route generates step, generates corresponding measuring route according to the scan mode that is selected; Measurement parameter is provided with step, and a plurality of measurement parameters and measurement parameter value corresponding are set; Different scan modes is set, generates different measuring route and corresponding measurement parameter, thereby the control board is measured workpiece; The design parameter obtaining step obtains the design parameter of workpiece; Process of measurement generates step, generates process of measurement automatically according to measuring route that generates and set measurement parameter, transmits this process of measurement to the board place; The measurement data obtaining step is measured workpiece according to process of measurement, and obtains measurement data; The comparison step measurement data of obtaining and the workpiece design parameter that obtains are analysed and compared, thereby whether the processing of judging this workpiece is qualified; And the output step, output comprises the data file and the analysis result of measurement data.
Compared to prior art, described aspherical mirror measuring system and method, it can generate the measuring route order automatically at aspherical mirror and related die and measure board workpiece is measured automatically, and the exchange from internal system realization measurement data and design data realizes the automatic centering function.In addition, also can directly carry out airborne measurements, needn't dismantle workpiece in addition, and can guarantee kinematic accuracy, avoid dismantling error, improve measuring accuracy and efficiency of measurement greatly by the motion control of ultraprecise processing machine to the workpiece that machines.
Description of drawings
Fig. 1 is the hardware structure figure of the preferred embodiment of aspherical mirror measuring system of the present invention.
Fig. 2 is the functional block diagram of aspherical mirror measuring system of the present invention.
Fig. 3 is the process flow diagram of the preferred embodiment of aspherical mirror measuring method of the present invention.
Fig. 4 is the operation interface synoptic diagram of aspherical mirror measuring system of the present invention.
Embodiment
As shown in Figure 1, be the hardware structure figure of aspherical mirror measuring system better embodiment of the present invention.This aspherical mirror measuring system 2 (hereinafter claiming " native system ") is built in the computing machine 1, and described computing machine 1 also comprises timer integrated circuit board 3, counter integrated circuit board 4 and memory storage 5.Computing machine 1 is connected with a plurality of boards 6 (only indicating two boards 6 among the figure), make 6 pairs of workpiece of native system 2 may command boards, mould or other products measure and obtain the measurement of correlation data, thereby whether the processing of judging this workpiece is qualified.This board 1 can be the dissimilar computer numerical control that possesses measurement function (CNC, Computer Numerical Contro1) lathes such as numerically-controlled machine, measurement lathe.
Described timer integrated circuit board 3 and counter integrated circuit board 4 provide a timer 30 and counter 40 respectively, be used for calculating the measurement of correlation parameter in the process of measuring workpieces, for example, location survey time, calculating Measuring Time, measurement point counting etc.Described memory storage 5 is used to store Various types of data and controls code or the program that board 6 is measured, and wherein, Various types of data can comprise: the design parameter of workpiece, measuring route, measurement data, measurement data curve map and other related datas.
Described memory storage 5 is used to store Various types of data, comprises the parameter of design data, measurement data, setting etc.
Native system 2 provides an operation interface, is used to show the state of the parameter of all kinds of settings, all kinds of devices, the contents (operation interface 8 as shown in Figure 6) such as coordinate figure, measuring route and measurement data of measurement point.The user can carry out associative operation by described operation interface 88, for example: select the operations such as duty of probe to scan mode, input parameter, inquiry timer 30 and the counter 40 of workpiece.
Comprise a CNC controller 60 in the described board 6, this CNC controller 60 is used for receiving numerical control code (Numerical Control Codes) thereby the miscellaneous equipment that drives board 6 is measured workpiece.
As shown in Figure 2, be the functional block diagram of aspherical mirror measuring system of the present invention.Native system 2 is installed in the computing machine 1, it comprises seven functional modules, is respectively: measurement pattern setting module 20, plant control unit 21, scan mode are provided with module 22, parameter is provided with module 23, measurement module 24, delivery module 25 and data processing module 26.
Described measurement pattern setting module 20 is used to set different measurement patterns, can select according to actual conditions during for user's measuring workpieces.In this better embodiment, this measurement pattern setting module 20 provides two kinds of measurement patterns: automatic measurement pattern and manual measurement pattern, and this automatic measurement pattern is the measurement pattern of native system 2 acquiescences.Wherein, automatic measurement pattern is that design parameter, the probe radius on the board 6, the probe according to workpiece to be measured (for example is used for board 6 to automatic generation of the data such as scan mode of workpiece, the CNC lathe) process of measurement of last measuring workpieces utilizes this process of measurement that workpiece is measured automatically; The manual measurement pattern can be adjusted the correlation parameter and the location of workpiece, and workpiece is carried out the heart and 6 pairs of workpiece of manual control board such as are measured at operation.
Described plant control unit 21 was used for before measuring beginning, timer 30 in the startup timer integrated circuit board 3 and the counter 40 in the counter integrated circuit board 4, make timer 30, counter 40 measure beginning back calculating correlation parameter and measurement point information, for example, Measuring Time, measurement point number etc.Timer 30 and correlation parameter and measurement point information that counter 40 calculated can be used for changing, calculate data such as measuring distance.After measurement was finished, described plant control unit 21 was promptly closed timer 30 and counter 40.
Scan mode is provided with module 22 and is used to be provided with multiple scan mode and guides the probe on the board 6 that workpiece is measured.In this better embodiment, can set six types scan mode, comprise: move to the negative direction of X-axis from the positive dirction of X-axis, move to the positive dirction of X-axis from the negative direction of X-axis, move to the positive and negative direction of X-axis simultaneously from the central point of X-axis, from the negative direction motion of the positive dirction of Y-axis to Y-axis, from the positive dirction motion of the negative direction of Y-axis to Y-axis, from the central point of Y-axis simultaneously to the positive and negative direction motion of Y-axis.The central point of described X-axis and the central point of Y-axis can be all the initial point of coordinate system.Scan mode need not to be provided with once more in follow-up measurement flow process, but can make amendment according to measurement requirement after being provided with successfully for the first time.
Described scan mode is provided with module 22 and also is used for generating corresponding measuring route according to selected scan mode, and in the operation interface 8 that native system 2 provides this measuring route of analog demenstration.Described measuring route is the travel path of probe when measuring workpieces on the board 6.
Described parameter is provided with module 23 and is used to be provided with a plurality of measurement parameters, and the default value of measurement parameter correspondence.Measurement parameter can comprise: probe radius, scanning step pitch, message transmission rate, Data Transport Protocol etc.The corresponding default value of each measurement parameter, the user also can make amendment according to measurement requirement or actual conditions, and for example: the probe radius of different platform there are differences, and can import the probe radius on the board 6 of actual use.
Described parameter is provided with the design parameter that module 23 also is used to obtain workpiece, and this design parameter is used for determining measurement parameter, and it comprises: speed of feed, enter/withdraw from data such as position, workpiece formal parameter.
Described measurement module 24 is used for generating process of measurement automatically according to measuring route that generates and set measurement parameter, and this process of measurement can directly be controlled board 6 and according to process of measurement workpiece be measured automatically.In addition, the code of described process of measurement can show at operation interface Fig. 8 that native system 2 provides.
For example: the process of measurement of generation can be the G-code program, this G-code program can be sent to CNC controller 60 places in the board 6 by delivery module 25, and CNC controller 60 begins workpiece is measured according to this G-code program main shaft (Z axle) motor and slide unit (XY axle) motor that drives on the board 6 of giving an order then.
The process of measurement that described delivery module 25 is used for generating is sent to board 6, so that measurement module 24 control boards 6 are measured workpiece according to this process of measurement.
Measurement module 24 also is used to obtain measurement data.In the process that 6 pairs of workpiece of board are measured, the running orbit of probe on the workpiece outline on the measurement module 24 detectable boards 6, and obtain the measurement data such as number, Measuring Time of coordinate figure, the measurement point of measurement point and the distance, the data such as travelling speed of probe when measuring that calculate the current measuring route of covering of probe according to the process of measuring automatically.In addition, measurement module 24 is further used for providing the automatic centering function to be in correct place, measuring position to guarantee workpiece.Under the manual measurement pattern, the user can manually carry out the heart is operated.
Delivery module 25 is sent to the measurement data that measurement module 24 is obtained in the data processing module 26.Described data processing module 26 is used for that measurement data and parameter are provided with the workpiece design parameter that module 23 obtains analyses and compares, and judge whether the processing of this workpiece is qualified, and output comprises the data file and the analysis result of measurement data.Wherein, measurement data comprises: the distance of the coordinate figure of measurement point, the number of measurement point, measuring route, timer 30 and related data that counter 40 obtained etc.
Measurement data with the output of different form, for example, is the data file of suffix name with mod by data processing module 26, be the data file of suffix name with omm and be the data file of suffix name with txt.The data file of different-format can and be called for different systems or device identification.
In this better embodiment, shown measurement data is the coordinate figure (as shown in Figure 4) of a plurality of specified points in the operation interface 8 that native system 2 is provided, for example: the coordinate figure of the exit point of starting point coordinate value, terminal point coordinate value, probe, the coordinate figure of current measurement point etc., wherein, the coordinate figure of current measurement point changes along with moving of probe.
Described delivery module 25 is sent to data file and analysis result in the memory storage 5 in the computing machine 1.
As shown in Figure 3, be the process flow diagram of the preferred embodiment of aspherical mirror measuring method of the present invention.Following each step is to carry out under the automatic measurement pattern of system's 2 acquiescences.At first, step S2, scan mode is provided with module 22 and multiple scan mode is set to guide the probe on the board 6 workpiece is measured.Scan mode need not to be provided with once more in follow-up measurement flow process after being provided with successfully for the first time, only need to select required scan mode to get final product, and scan mode can be made amendment according to measurement requirement.
Step S4, scan mode is provided with module 22 and generates corresponding measuring route according to selected scan mode, and in the operation interface 8 that native system 2 provides this measuring route of analog demenstration.Described measuring route is the travel path of probe when measuring workpieces on the board 6.
Step S6, parameter is provided with the default value that module 23 is provided with a plurality of measurement parameters and measurement parameter correspondence, and obtains the design parameter of workpiece.Measurement parameter can comprise: probe radius, scanning step pitch, message transmission rate, Data Transport Protocol etc.The corresponding default value of each measurement parameter, the user can make amendment according to the actual conditions of measurement requirement or board 6, and for example: the probe radius of different platform there are differences, and can import the probe radius on the board 6 of actual use.Described design parameter is used for determining measurement parameter, and it comprises: speed of feed, enter/withdraw from data such as position, workpiece formal parameter.
Step S8, measurement module 24 generates process of measurement automatically according to measuring route that generates and set measurement parameter, and this process of measurement is sent in the CNC controller 60 at board 6 places by delivery module 25.The code of described process of measurement can show in the operation interface 8 that native system 2 provides.
Step S10, timer 30 in the plant control unit 21 startup timer integrated circuit boards 3 and the counter 40 in the counter integrated circuit board 4, make timer 30, counter 40 after measuring beginning, be calculated correlation parameter and measurement point information, for example, Measuring Time, measurement point number etc.Timer 30 and correlation parameter and measurement point information that counter 40 calculated can be used for changing, calculate data such as measuring distance.
Step S12, measurement module 24 control boards 6 are measured workpiece according to this process of measurement.
Step S14, measurement module 24 obtains measurement data, and by delivery module 25 described measurement data is sent to data processing module 26.For example: board 6 carries out in the measuring process workpiece according to this process of measurement, the running orbit of probe on the workpiece outline that measurement module 24 is surveyed on the board 6, and obtain the measurement data such as number, Measuring Time of coordinate figure, the measurement point of measurement point and the distance, the data such as travelling speed of probe when measuring that calculate the current measuring route of covering of probe according to the process of measuring automatically.
Step S16, plant control unit 21 close timer 30 and counter 40.
Step S18,26 pairs of measurement data of obtaining of data processing module and parameter are provided with the workpiece design parameter that module 23 obtains and analyse and compare, thus whether the processing of judging this workpiece is qualified.
Step S20, data processing module 26 output comprises the data file and the analysis result of measurement data, by delivery module 25 data file and analysis result is sent in the memory storage 5 in the computing machine 1, and process ends.Measurement data with the output of different form, for example, is the data file of suffix name with mod by data processing module 26, be the data file of suffix name with omm and be the data file of suffix name with txt.The data file of different-format can and be called for different systems or device identification.
Thereby step S2 can circulate to step S14 and carry out obtaining more accurate measurement data.For example, can different scan modes be set, generate different measuring route and corresponding process of measurement then, thereby guide probe that workpiece is measured by step S2.And for example, also can different measurement parameters and value corresponding be set by step S8.
In addition, in other embodiments, also can before step S10, utilize measurement module 24 to carry out the automatic centering function and be in correct place, measuring position to guarantee workpiece.Under the manual measurement pattern, the user can manually carry out the heart is operated.
As shown in Figure 4, be the operation interface synoptic diagram of aspherical mirror measuring system of the present invention.Native system 2 is used to show the state of the parameter of all kinds of settings, all kinds of devices, the contents (operation interface figure as shown in Figure 6) such as coordinate figure, measuring route and measurement data of measurement point for the operation interface 8 that the user provides an interaction.The user can carry out associative operation by described operation interface 8, for example: select the operations such as duty of probe to scan mode, input parameter, inquiry timer 30 and the counter 40 of workpiece.
Described operation interface 8 can comprise a plurality of fields, not only be confined to each field as shown in Figure 4, for example: measurement pattern selects 81, unit state 82, parameter are provided with 83, scan mode selects 84, measuring route 85, process of measurement generate 86, measure control 87, process of measurement code 88 and measuring position 89.
Measurement pattern selects 81 to provide two to select frame, is respectively manually to select frame and select frame automatically, and to the measurement pattern of workpiece, under the different measuring pattern, each module of native system 2 or device are carried out different operations for you to choose.Unit state 82 is used to show the On/Off state of timer 30 and counter 40.Parameter is provided with 83 corresponding parameters the set a plurality of measurement parameters (not shown among Fig. 4) of module 23 and the default value of measurement parameter correspondence is set, and wherein, measurement parameter can comprise: probe radius, scanning step pitch, message transmission rate, Data Transport Protocol etc.
Scan mode selection 84 provides scan mode that module 22 set various scan modes (not shown among Fig. 4) are set and selects, in this better embodiment, comprise six kinds of scan modes: move to the negative direction of X-axis from the positive dirction of X-axis, move to the positive dirction of X-axis from the negative direction of X-axis, move to the positive and negative direction of X-axis simultaneously from the central point of X-axis, move to the negative direction of Y-axis from the positive dirction of Y-axis, from the positive dirction motion of the negative direction of Y-axis to Y-axis, from the central point of Y-axis simultaneously to the positive and negative direction motion of Y-axis.Described six kinds of scan modes show in the operation interface 8 with the form of option, can select wherein a kind of scan mode in the time of each the measurement.
Measuring route 85 is used to generate measuring route, and simulates, demonstrates this measuring route.Described measuring route is the travel track of probe when measuring workpieces.
It is that frame is selected in a control that process of measurement generates 86, is used for making measurement module 24 generate corresponding process of measurement according to measuring route.Measure control 87 and comprise that two orders select frame to be used for the beginning and the end of control survey.
Process of measurement code 88 is used to show the code of the process of measurement that is generated.Measuring position 89 is used for showing the coordinate figure of a plurality of specified points of measuring process, for example: the coordinate figure of the exit point of starting point coordinate value, terminal point coordinate value, probe, the coordinate figure of current measurement point etc., wherein, the coordinate figure of current measurement point changes along with moving of probe.
Content displayed can be adjusted according to the measurement demand in field in the described operation interface 8 or the field.

Claims (8)

1. an aspherical mirror measuring system is used to control board workpiece is measured, and it is characterized in that this system comprises:
Scan mode is provided with module, be used for from the multiple scan mode that sets in advance, choosing a kind of to guide board that workpiece is measured at a coordinate system of setting, and generating corresponding measuring route according to the scan mode that is selected, this scan mode is provided with the multiple scan mode that module sets in advance and comprises following type: from the negative direction motion to X-axis of the positive dirction of X-axis; Move to the positive dirction of X-axis from the negative direction of X-axis; Move to the positive and negative direction of X-axis simultaneously from the central point of X-axis; Move to the negative direction of Y-axis from the positive dirction of Y-axis; Move to the positive dirction of Y-axis from the negative direction of Y-axis; And from the central point of Y-axis simultaneously to the positive and negative direction motion of Y-axis;
Parameter is provided with module, is used to be provided with a plurality of measurement parameters and measurement parameter value corresponding, and obtains the design parameter of workpiece;
Measurement module is used for generating process of measurement automatically according to measuring route that generates and set measurement parameter, makes board according to this process of measurement workpiece be measured, and obtains measurement data;
Delivery module is used to transmit process of measurement to board, and transmits the measurement data of being obtained; And
Data processing module is used for measurement data and design parameter are analysed and compared, and judges whether the processing of this workpiece is qualified, and output comprises the data file and the analysis result of this measurement data.
2. aspherical mirror measuring system as claimed in claim 1 is characterized in that this system also comprises the measurement pattern setting module, is used to set different measurement patterns, comprises automatic measurement pattern and manual measurement pattern.
3. aspherical mirror measuring system as claimed in claim 1 is characterized in that this system also comprises plant control unit, is used for starting and closing timer and counter, makes timer and counter obtain in measuring process and calculates measurement point information.
4. aspherical mirror measuring system as claimed in claim 1 is characterized in that, described scan mode is provided with module and also is used to simulate and demonstrate the measuring route that is generated.
5. an aspherical mirror measuring method is used to control board workpiece is measured, and it is characterized in that this method comprises the steps:
Scan mode is provided with step, choose a kind ofly guiding board that workpiece is measured in the coordinate system that sets from the multiple scan mode that sets in advance, this scan mode is provided with the multiple scan mode that module sets in advance and comprises following type: from the negative direction motion to X-axis of the positive dirction of X-axis; Move to the positive dirction of X-axis from the negative direction of X-axis; Move to the positive and negative direction of X-axis simultaneously from the central point of X-axis; Move to the negative direction of Y-axis from the positive dirction of Y-axis; Move to the positive dirction of Y-axis from the negative direction of Y-axis; And from the central point of Y-axis simultaneously to the positive and negative direction motion of Y-axis;
Measuring route generates step, generates corresponding measuring route according to the scan mode that is selected;
Measurement parameter is provided with step, and a plurality of measurement parameters and measurement parameter value corresponding are set;
Different scan modes is set, generates different measuring route and corresponding measurement parameter, thereby the control board is measured workpiece;
The design parameter obtaining step obtains the design parameter of workpiece; Process of measurement generates step, generates process of measurement automatically according to measuring route that generates and set measurement parameter, transmits this process of measurement to the board place;
The measurement data obtaining step is measured workpiece according to process of measurement, and obtains measurement data;
The comparison step measurement data of obtaining and the workpiece design parameter that obtains are analysed and compared, thereby whether the processing of judging this workpiece is qualified; And
The output step, output comprises the data file and the analysis result of measurement data.
6. aspherical mirror measuring method as claimed in claim 5 is characterized in that, this method also comprises the steps: after measuring route generates step
The measuring route that simulation and demonstration are generated.
7. aspherical mirror measuring method as claimed in claim 5 is characterized in that this method also comprises the steps:
Before the measurement data obtaining step, start timer and counter;
Make timer and counter in measuring process, obtain and calculate measurement point information; And
After the measurement data obtaining step, close timer and counter.
8. aspherical mirror measuring method as claimed in claim 5 is characterized in that this method also comprised the steps: before the measurement data obtaining step
The setting measurement pattern comprises automatic measurement pattern and manual measurement pattern.
CN2007102023402A 2007-10-31 2007-10-31 Aspherical mirror measuring system and method Expired - Fee Related CN101424925B (en)

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0874296B1 (en) * 1997-04-22 2003-10-22 Mitutoyo Corporation Measuring aid system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0874296B1 (en) * 1997-04-22 2003-10-22 Mitutoyo Corporation Measuring aid system

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JP特开平7-174547A 1995.07.14
JP特开平8-29152A 1996.02.02

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