CN101424577A - Test fixture for preparing silicon capacitor differential pressure transducer - Google Patents
Test fixture for preparing silicon capacitor differential pressure transducer Download PDFInfo
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- CN101424577A CN101424577A CNA2008102294057A CN200810229405A CN101424577A CN 101424577 A CN101424577 A CN 101424577A CN A2008102294057 A CNA2008102294057 A CN A2008102294057A CN 200810229405 A CN200810229405 A CN 200810229405A CN 101424577 A CN101424577 A CN 101424577A
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Abstract
The invention provides a test fixture for preparing a silicon capacitance differential pressure sensor, comprising a horizontal section, a positioning section, a clamping section, an air passage section and a sealing section. The test fixture is characterized by a positioning mechanism of the sensor, wherein a left receiving chamber, six middle receiving chambers and a right receiving chamber are arranged between a left supporting seat and a right supporting seat in sequence, seven V-shaped supports are respectively positioned between the receiving chambers, a guide rod passes through guide rod holes on the receiving chambers, the V-shaped supports, the left supporting seat and the right supporting seat to be fixed; a housing pin is screwed through the right supporting seat which is sleeved by a pressing seat to form the clamping section; the gas vent of each receiving chamber has the same direction as that of a chassis and is communicated with an air guiding groove of the chassis to form an air guiding channel, and each receiving chamber has an O-shaped obturating ring. The test fixture can clamp seven sensors for one time, can perform the pressurizing test on the sensors at the same time, saves time and labor, has good consistency and high efficiency, guarantees the test quality, and can meet the test requirement of the mass production.
Description
Technical field
The present invention relates to the preparation of sensor, a kind of preparation silicon capacitor differential pressure transducer test fixture.
Background technology
In the test of silicon capacitor differential pressure transducer preparation, generally adopt a pair of room to clamp the method for single sensor at present.Time-consuming, the effort of this traditional anchor clamps mode, test fixture takes up room greatly, and manually test is only single respectively, and it is consistent that the clamping degree of each sensor is difficult to control, and the no whole comparison and contrast of single only test influences test result to a certain extent.In the face of present domestic silicon capacitive transducer market keen competition situation, the method for single assembling jig can not satisfy the production demand of batch testing far away.
Summary of the invention
The purpose of this invention is to provide a kind of preparation silicon capacitor differential pressure transducer test fixture, can 7 sensors of disposable clamping, applied voltage test simultaneously, high conformity, time saving and energy saving, the efficient height.
Preparation silicon capacitor differential pressure transducer test fixture, comprise level, location, clamping, gas circuit, hermetic unit, it is characterized in that the sensor detent mechanism: left room, six middle rooms, right rooms are placed between the left and right supporting seat successively, seven V-types support and place respectively between each room, and guide rod passes the guide rod hole on room, V-type support, the left and right supporting seat and fixes; Forcing screw revolved right supporting seat, put pressed seat formation clamp system; The gas port of each room is consistent with the gas port direction on chassis, and the gas port of each room is communicated with the formation air guide channel by pipeline with the air slot on chassis, and each room all has the O RunddichtringO.
Design of the present invention solved the preparation silicon capacitor differential pressure transducer produce in batches in the bottleneck problem of last pass, significantly improve efficient, reduce each detection error.All provide assurance from the design of each part for realization this purpose.For example: the shaped position design of the thickness of the left and right supporting seat of anchor clamps, fixing threaded hole diameter and reinforcement, having satisfied part deformation when tested person pressure 10-16Mpa can not influence the sealing of whole anchor clamps, and the diameter of design forcing screw has also satisfied withstand voltage 10-16Mpa.Pipe adapter, the soldered joint of wireway are installed are simultaneously all selected to satisfy the requirement of anchor clamps sealing.Designed hexagonal nut 19 and installation site thereof have been played the forcing screw anticreep and have been strengthened the effect of self-locking.The cooperating of forcing screw and pressed seat, pressed seat and the matching design of right room and the hexagonal structure design of forcing screw handle, make the clamp operation process more laborsaving, and the Position Design that forcing screw passes right supporting seat make right room can not produce axially-movable.Select stainless steel flexible hose not only without limits room move but also guaranteed tested sensor conveniently assemble and disassemble.The design of the design of left and right supporting seat, room guide rod hole and V-type supporting construction has guaranteed that all tested sensors are concentric, and then has reached seal request in the test process.The design of whole air guide channel minimizes the test process airshed.The gas circuit mechanism design of anchor clamps is used for a kind of differential pressure pick-up test, and this air-guide type can satisfy the positive and negative chamber while of differential pressure pick-up and the testing requirement of pressurizeing respectively.The selection of clamp material has guaranteed requirement withstand voltage, attractive in appearance.
Description of drawings
Fig. 1 is the clamp structure synoptic diagram of this patent;
Fig. 2 is ground stand structure and the gas circuit connection diagram in these anchor clamps;
Fig. 3 is a V-type supporting seat synoptic diagram;
Embodiment
The present invention prepares the silicon capacitor differential pressure transducer test fixture, comprise level, the location, clamp, gas circuit, hermetic unit, see Fig. 1: it is characterized in that the sensor detent mechanism: with left room 1, room 3 in the middle of six, right room 2 places a left side successively, right supporting seat 4, between 5, seven V-types support 6 and place respectively between each room, the gas port H on the gas port of each room and chassis, L direction unanimity, guide rod 11 passes each room, V-type supports 6, a left side, right supporting seat 4, guide rod hole on 5 is also fixing with hexagon thin nut 21, seven latch 14 fixedly V-type supports 6 respectively, hex bolts 17 is with a left side, right supporting seat 4,5 are fixed on the chassis 12.Clamp system, revolved forcing screw 7 right supporting seat 5, put pressed seat 8 as point of fixity with left and right supporting seat 4,5, was equipped with 18,19 pairs of tested sensors of hexagon thin nut and implemented to clamp.The gas port of each room is communicated with the formation air guide channel by pipeline 23 with the air slot on chassis, each room all has the O RunddichtringO to realize sealing.
Gas circuit mechanism: comprise pipeline air guide part and room air guide part.Pipeline air guide part: as shown in Figure 1, 2, chassis 12 upper surfaces have 12 gas ports, 6 positive chamber H, and 6 negative chamber L have the two-layer air slot 24 that does not highly wait in the chassis 12, also have corresponding gas port to be parallel to the groove surface level in the groove; The positive chamber gas port that last air slot and 12 surfaces, chassis indicate " H " intersects vertically, following air slot intersects with the negative chamber gas port that indicates " L ", to go up air slot respectively with two branch air parcel lids 13 covers with following air slot, again two branch air parcels lid 13 is welded together with chassis 12 and do surface treatment, be the air guide channel in " L " type right angle minor face, the air guide channel mouth connects the stainless steel flexible hose 23 that leads to each room with cutting ferrule joint 22.Room air guide part: each room (room, right room in the middle of the left room, 6) has all designed air guide channel, integrally welded with soldered joint 15 then, as shown in Figure 1, each soldered joint 15 is all corresponding with a gas port on the chassis 12, connects with stainless steel flexible hose 23, cutting ferrule joint 22 between them.Among Fig. 1 to going into gas and venthole marks.
Sealing mechanism: in the groove of left room 1, right room 2, middle room 3, the O RunddichtringO will be installed,, guarantee the measuring accuracy of sensor so that after tested sensor is installed is positioned, clamp, play good sealing function.
Because tested sensor is a differential pressure pick-up, so will put with reference to " H " shown in Figure 1, " L " direction according to pressuring method when placing.
Horizontal mechanism: whole test process requires chassis 12 level relatively, respectively there is screw and horizontal adjustment hole of four fixed supporting seats at 12 upper surface two ends, chassis, in " L " type right angle minor face on chassis is air guide channel, join with air supply pipe, opposite side is by ground runners 10 vertical support, a ground runners 10 has respectively been designed at two angles at this position, also there is hexagon thin nut 20 on horizontal adjustment hole, the top with two horizontal screws 9 screw-in chassis 12, adjusts the levelness on test chassis 12 by the height of adjusting horizontal screw 9.
Left supporting seat 4 in the detent mechanism, right supporting seat 5 are as shown in Figure 1, the bolt hole that there are two guide rod holes that penetrate wall thickness the bottom, intersect vertically with base, there are two reinforcements in the outside, right supporting seat 5 middle parts compress screw, and left and right supporting seat 4,5 and forcing screw 7 all design withstand voltage 10-16Mpa.
Above-mentioned V-type supports 6 shape as shown in Figure 3: the extended line of inclined-plane in opposite directions that is used to support tested sensor at an angle of 90, the guide rod hole that symmetry is arranged on the seat wall under the inclined-plane in opposite directions, hole axially parallel with the base on two inclined-planes, the intersection of two faces that two inclined-planes are vertical with V-type base surface level and the height of baseplane are 2 times of guide rod diameter; Base one side extension has upright opening, with seven corresponding cooperations of pin hole on chassis 12.
Claims (4)
1, a kind of preparation silicon capacitor differential pressure transducer test fixture, comprise level, location, clamping, gas circuit, hermetic unit, it is characterized in that the sensor detent mechanism: left room (1), six middle rooms (3), right rooms (2) are placed between left and right supporting seat (4), (5) successively, seven V-types support (6) and place respectively between each room, and guide rod (11) passes the guide rod hole in room, V-type support (6), left and right supporting seat (4), (5) and fixes; Forcing screw (7) revolved right supporting seat (5), put pressed seat (8) clamping; The gas port of each room is consistent with the gas port direction on chassis, and the gas port of each room is consistent with the gas port direction on chassis, and the gas port of each room is communicated with the formation air guide channel by pipeline with the air slot on chassis, and each room all has the O RunddichtringO.
2, preparation silicon capacitor differential pressure transducer test fixture according to claim 1, it is characterized in that V-type supports the shape of (6): the extended line of inclined-plane in opposite directions that is used to support tested sensor at an angle of 90, the guide rod hole that symmetry is arranged on the seat wall under the inclined-plane in opposite directions, hole axially parallel with the base on two inclined-planes, the intersection of two faces that two inclined-planes are vertical with V-type base surface level and the height of baseplane are 2 times of guide rod diameter; Base one side extension has upright opening, with seven corresponding cooperations of pin hole of chassis (12).
3, preparation silicon capacitor differential pressure transducer test fixture according to claim 1 is characterized in that right supporting seat (5) middle part compresses screw, and a side of left and right supporting seat (4), (5) all has reinforcement, and the bolt hole that intersects vertically with base is arranged; The guide rod hole that supports (6) identical symmetry with V-type is all arranged at each supporting seat and each room bottom; Left and right supporting seat designs withstand voltage 10-16Mpa.
4, preparation silicon capacitor differential pressure transducer test fixture according to claim 1, it is characterized in that described gas circuit mechanism: chassis (12) upper surface has 12 gas ports, 6 positive chamber H, 6 negative chamber L, the two-layer air slot (24) that does not highly wait is arranged in the chassis (12), also have corresponding gas port to be parallel to the groove surface level in the groove; The two-layer air guide channel that does not highly wait is arranged in the chassis (12), the gas port perpendicular to the groove surface level is all arranged in each passage, last air slot intersects vertically with the positive chamber gas port that indicates " H ", and following air slot intersects vertically with the negative chamber gas port that indicates " L "; To go up air slot respectively and following air slot covers with two branch air parcels lids (13), will divide air parcel lid (13) and chassis (12) to weld together again and do surface treatment; Respectively there are the screw of four fixed supporting seats, seven pin holes and a horizontal adjustment hole in upper surface two ends, chassis (12), are air guide channel in " L " type right angle minor face of chassis (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200810229405 CN101424577B (en) | 2008-12-09 | 2008-12-09 | Test fixture for preparing silicon capacitor differential pressure transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200810229405 CN101424577B (en) | 2008-12-09 | 2008-12-09 | Test fixture for preparing silicon capacitor differential pressure transducer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101424577A true CN101424577A (en) | 2009-05-06 |
| CN101424577B CN101424577B (en) | 2013-02-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200810229405 Expired - Fee Related CN101424577B (en) | 2008-12-09 | 2008-12-09 | Test fixture for preparing silicon capacitor differential pressure transducer |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105319006A (en) * | 2015-11-27 | 2016-02-10 | 上海立格仪表有限公司 | Multi-function tooling for production test of sensor |
| CN106853614A (en) * | 2015-12-09 | 2017-06-16 | 中国科学院上海硅酸盐研究所 | A kind of piezoelectric acceleration sensor piezoelectric system test fixture |
| CN111707405A (en) * | 2020-08-19 | 2020-09-25 | 歌尔光学科技有限公司 | Testing device |
| CN113639833A (en) * | 2021-08-13 | 2021-11-12 | 麦克传感器股份有限公司 | Liquid level transmitter testing device and method based on pneumatic control |
| CN115597772A (en) * | 2022-11-16 | 2023-01-13 | 国机传感科技有限公司（Cn） | Differential pressure sensor core body testing tool and testing method thereof |
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| US5461901A (en) * | 1991-10-14 | 1995-10-31 | Ottestad Breathing Systems As | Testing apparatus for pressure gauges implementing pneumatic feedback to control stepless regulating valve |
| CN2551984Y (en) * | 2002-04-11 | 2003-05-21 | 王连新 | Automatic detector for pressure-meter |
| CN2577271Y (en) * | 2002-11-08 | 2003-10-01 | 大庆油田有限责任公司 | Portable checking water for metering device |
| US20070108671A1 (en) * | 2005-10-27 | 2007-05-17 | Korea Research Institute Of Standards And Science | Apparatus and method for in-situ calibration of vacuum gauge by absolute method and comparison method |
| CN201000383Y (en) * | 2007-01-09 | 2008-01-02 | 上海工业自动化仪表研究所 | Intelligent pressure difference sensor multi-point regulating device |
| CN201307049Y (en) * | 2008-12-09 | 2009-09-09 | 沈阳仪表科学研究院 | Test fixture for manufacturing silicon capacitance differential pressure sensor |
-
2008
- 2008-12-09 CN CN 200810229405 patent/CN101424577B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5461901A (en) * | 1991-10-14 | 1995-10-31 | Ottestad Breathing Systems As | Testing apparatus for pressure gauges implementing pneumatic feedback to control stepless regulating valve |
| CN2551984Y (en) * | 2002-04-11 | 2003-05-21 | 王连新 | Automatic detector for pressure-meter |
| CN2577271Y (en) * | 2002-11-08 | 2003-10-01 | 大庆油田有限责任公司 | Portable checking water for metering device |
| US20070108671A1 (en) * | 2005-10-27 | 2007-05-17 | Korea Research Institute Of Standards And Science | Apparatus and method for in-situ calibration of vacuum gauge by absolute method and comparison method |
| CN201000383Y (en) * | 2007-01-09 | 2008-01-02 | 上海工业自动化仪表研究所 | Intelligent pressure difference sensor multi-point regulating device |
| CN201307049Y (en) * | 2008-12-09 | 2009-09-09 | 沈阳仪表科学研究院 | Test fixture for manufacturing silicon capacitance differential pressure sensor |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105319006A (en) * | 2015-11-27 | 2016-02-10 | 上海立格仪表有限公司 | Multi-function tooling for production test of sensor |
| CN106853614A (en) * | 2015-12-09 | 2017-06-16 | 中国科学院上海硅酸盐研究所 | A kind of piezoelectric acceleration sensor piezoelectric system test fixture |
| CN106853614B (en) * | 2015-12-09 | 2019-04-16 | 中国科学院上海硅酸盐研究所 | A kind of piezoelectric acceleration sensor piezoelectric system test fixture |
| CN111707405A (en) * | 2020-08-19 | 2020-09-25 | 歌尔光学科技有限公司 | Testing device |
| CN113639833A (en) * | 2021-08-13 | 2021-11-12 | 麦克传感器股份有限公司 | Liquid level transmitter testing device and method based on pneumatic control |
| CN115597772A (en) * | 2022-11-16 | 2023-01-13 | 国机传感科技有限公司（Cn） | Differential pressure sensor core body testing tool and testing method thereof |
| CN115597772B (en) * | 2022-11-16 | 2023-03-14 | 国机传感科技有限公司 | Differential pressure sensor core body testing tool and testing method thereof |
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| CN101424577B (en) | 2013-02-27 |
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Granted publication date: 20130227 Termination date: 20131209 |