CN101408461B - Exhausting device for testing performance of infrared detector minitype Dewar component - Google Patents

Exhausting device for testing performance of infrared detector minitype Dewar component Download PDF

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Publication number
CN101408461B
CN101408461B CN2008102033894A CN200810203389A CN101408461B CN 101408461 B CN101408461 B CN 101408461B CN 2008102033894 A CN2008102033894 A CN 2008102033894A CN 200810203389 A CN200810203389 A CN 200810203389A CN 101408461 B CN101408461 B CN 101408461B
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infrared detector
valve
vacuum
transition conduit
dewar
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CN101408461A (en
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王小坤
张亚妮
曾智江
朱三根
龚海梅
郝振贻
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Shanghai Institute of Technical Physics of CAS
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Shanghai Institute of Technical Physics of CAS
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Abstract

The invention discloses an exhaust unit used for testing the function of an infrared receiver micro Dewar component. The structure thereof mainly consists of a micro sorb-pump, a bi-pass two-position quick switching vacuum value, a coupling tube, a high air-proof vacuum butt joint and an infrared receiver Dewar component. In the invention, a low-temperature medium is used for cooling the active carbon in the micro sorb-pump with no power supply, and exhaust is carried out on the infrared receiver Dewar component by the low-temperature active carbon; the bi-pass two-position quick switching vacuum value can be used for realizing the alternative connection between the micro sorb-pump and a plurality of infrared receiver Dewar components with high speed and high air-proof, so as to obtain the degree of vacuum needed by functional testing before the high vacuum exhaust clamp of the infrared receiver micro Dewar component. The exhaust unit of the invention avoids the electromagnetic interference thereof to the function testing of the infrared receiver Dewar component, solves the problem that the pollution to an infrared receiver chip and a corresponding optical element thereof caused by the exposure of the low-temperature infrared receiver to the air and improves the testing efficiency.

Description

A kind of exhausting device for testing performance of infrared detector minitype Dewar component
Technical field
The present invention relates to the infrared eye measuring technology, specifically be meant a kind of exhaust apparatus that is used for the preceding performance test of infrared detector minitype Dewar component high vacuum exhaustion clamp.
Background technology
Vacuum life is one of important performance indexes of infrared detector dewar assembly.In order to obtain long vacuum life, last technology of infrared detector dewar encapsulation technology is carried out for a long time the baking of (above two weeks) and high vacuum to infrared detector module often, and (vacuum tightness is better than 10 -6Pa) exhaust.For the performance of infrared detector dewar assembly is screened and is detected, improve the yield rate of infrared detector dewar assembly and reduce cost, before infrared detector dewar assembly high vacuum exhaustion clamp, need once test the detector performance of infrared detector dewar assembly.This moment, test had following characteristics; When 1) detector performance of infrared detector dewar assembly was tested, infrared eye need be in profound hypothermia work, and this just requires that certain vacuum tightness is arranged in the infrared detector dewar assembly Dewar in the test process; 2) the performances of IR test belongs to Detection of Weak Signals, is easy to be interfered.
In general, in measuring process, provide infrared eye work needed low temperature to injecting certain cryogenic media (as liquid nitrogen or liquid argon etc.) in the cold finger of infrared detector dewar assembly.Because it is less that the cold finger of infrared detector dewar assembly holds the volume of cryogenic media, wish that the vacuum tightness in the Dewar is high more good more, can reduce like this because the loss of the cryogenic media that the convection current conduction is caused.Vacuum tightness in the Dewar then needs certain exhaust apparatus that infrared detector dewar assembly is carried out exhaust.Someone adopts mechanical pump or mechanical pump and molecular pump combination exhaust unit, be connected with exhaust apparatus with infrared detector dewar assembly respectively by rubber tube two, Dewar component is carried out dynamic exhaust to be realized, this method is simple, but there are the following problems: 1) conductance of proofed sleeve and venting are bigger, and obtainable vacuum tightness is subjected to certain limitation in the Dewar component cavity; 2) no matter even more important is that mechanical pump or mechanical pump make up unit with molecular pump a bit, and they all can cause certain electromagnetic interference (EMI) to the infrared detector dewar assembly performance test; 3) after test is finished,, expose air suddenly and cause infrared detector chip and its corresponding optical element contaminated, have only and wait it to get back to fully could to change another infrared detector dewar assembly after the room temperature and test because infrared eye still is in low temperature.When thermal capacity was big on the Dewar cold platform, this problem was more outstanding; When 4) each infrared detector dewar assembly being tested, the exhaust unit all needs switch once.Therefore be necessary the required exhaust mode of performance test before the infrared detector minitype Dewar component high vacuum exhaustion clamp is designed, should obtain higher vacuum tightness and drop to minimum to the interference of infrared detector dewar assembly performance test exhaust apparatus again.
Summary of the invention
Purpose of the present invention is exactly that a kind of exhaust apparatus that is used for the preceding performance test of infrared detector minitype Dewar component high vacuum exhaustion clamp will be provided, it can provide higher vacuum tightness to the infrared detector dewar assembly test, has avoided the electromagnetic interference (EMI) of exhaust apparatus to the infrared detector dewar assembly performance test again.
A kind of exhaust apparatus that is used for performance test before the infrared detector minitype Dewar component high vacuum exhaustion clamp of the present invention as shown in Figure 1, mainly change vacuum valve 2 fast by miniature adsorption pump 1, two of bilaterals, transition conduit 3, high airtight vacuum open joint 4, infrared detector dewar assembly 5 are formed.Exhaust end 101 with miniature adsorption pump 1 is connected with secondary 206 on the valve that two of bilaterals are changed vacuum valve 2 fast earlier, gas outlet 501 with infrared detector dewar assembly 5 is connected with the metal copper pipe 301 of transition conduit 3 by high airtight vacuum open joint 4 again, at last with two of bilaterals fast the valve master 201 of conversion vacuum valves 2 connect together with the metal joint 302 of transition conduit 3.
Miniature adsorption pump 1 such as patent 200420082697 narration, it is the Dewar flask that accompanies vacuum interlayer in the middle of being made of shell body and inner bag, its top, shell body side has two to be respectively applied for the bleeding point 101 that connects with minitype Dewar and vacuum pump by two two logical keys, in inner bag 102 inner chambers liquid nitrogen is housed, in vacuum interlayer, have one to be enclosed within the charcoal cover that activated charcoal is housed in the outer bottom of inner bag, have a plurality of apertures that are used to adsorb residual gas on the charcoal cover wall, charcoal cover inwall is lined with the wire netting that prevents that activated charcoal is scattered from aperture.Its principle of work is to come activated charcoal refrigeration, a large amount of adsorbed gases of activated charcoal under the low temperature by add cryogenic media (as liquid nitrogen or liquid argon) at inner bag 102 inner chambers.
Two of bilaterals are changed vacuum valve 2 as shown in Figure 2 fast, and it mainly is made up of O-ring seal 209 and handle 210 behind 208,2 valve bodies of O-ring seal before valve master 202,2 bank of rubber rings 203 of 201,2 nut mouths, 204,2 rubber bands 205 of pull bar, secondary 206 on valve, 207,2 valve bodies of valve body.Wherein: bank of rubber ring 203 is selected brass material for use; O-ring seal is all selected fluororubber " O " type circle for use behind rubber band 205, the preceding O-ring seal 208 of valve body and the valve body; Other all adopts stainless steel.The sharp processing of nut mouth 202 is the outer-hexagonal type.Secondary 206 on valve be a hollow circular cylinder, and valve pair 206 radially is welded on the valve body 207 by soldering processes.Valve master 201 and the hollow circular cylinder that valve body 207 is formed in one are equipped with pull bar 204 in their cavity.The external thread that the leading portion of pull bar 204 has the internal thread 303 on the vent plug 304 with transition conduit 3 to cooperate, certain after a while locational two near rectangular channel in O-ring seal 208 before two valve bodies is installed.When pull bar was in different shift positions, O-ring seal 208 was realized the switch of the gas circuit between valve master 201 and the valve pair 206 before the valve body.After pull bar 204 assembled, O-ring seal 209 after two valve bodies are installed in the rear end of valve body 207 was separating with becket between the O-ring seal 209 behind two valve bodies, compresses with the threaded metal ring again.O-ring seal 209 is used for guaranteeing two quick gas path pipes of changing in the vacuum valves 2 and extraneous seal isolation of bilateral behind two valve bodies.Handle 210 by screw retention in the flat rear end of pull bar 204.The profile that valve master 201 and valve are secondary 206 all is processed into a stairstepping, and the end face of its little ladder is connected with rubber band 205, requires smoothly and smooth, processes external thread at the cylindrical of ladder greatly.Earlier be on the metal joint 302 of the nut mouth 202 of hexangle type and bleeding point 101 that bank of rubber ring 203 is set to miniature adsorption pump 1 or transition conduit 3 with sharp processing, then rubber band 205 is set in the semi-circular recesses on the metal joint 302 of the bleeding point 101 of miniature adsorption pump 1 or transition conduit 3, again the cylindrical of the metal joint 302 of the bleeding point 101 of miniature adsorption pump 1 or transition conduit 3 is inserted two of bilaterals fast in secondary 206 on the valve of conversion vacuum valves 2 or valve master 201 the cavity, last rotary nut mouth 202, internal thread by nut mouth 202 and secondary 206 on valve and valve master 201 external thread cooperates allows rubber band 205 distortion, realizes that two of bilaterals change vacuum valves 2 fast and be connected with vacuum between miniature adsorption pump 1 or the transition conduit 3.The effect of bank of rubber ring 203 is to prevent relative rotation between secondary 206 on nut mouth 202 and valve master 201 or the valve and rubber band 205 is damaged and influence sealing effectiveness.Accompanying drawing 2 (a) is depicted as that a valve master front end gas circuit is opened, the secondary rear end gas circuit of valve is opened; Accompanying drawing 2 (b) is depicted as a valve master front end gas circuit pass, secondary rear end gas circuit of valve closed.
Transition conduit 3 mainly comprises as shown in Figure 1: metal copper pipe 301, metal joint 302, the vent plug 304 that has internal thread 303 and rubber band 305.Metal copper pipe 301 adopts oxygenless copper material, and carries out annealing in process, and this helps being tightly connected of metal copper pipe 301 and high airtight vacuum open joint 4.Metal joint 302 adopts stainless steel materials, and inner chamber is processed as " worker " type shoulder hole, below one cooperate with the metal copper pipe, justify requiring mechanical buffing in the top hole.The cylindrical of metal joint 302 is a right cylinder, and the groove of a semicircle is arranged on it.Earlier annealed metal copper pipe 301 is welded on the metal joint 302, then rubber band 305 is set in the groove of vent plug 304 cylindricals, at last vent plug 304 is inserted in metal joint 302 inner chambers.Whether vent plug 304 by band rubber band 305 realizes the switch with metal copper pipe gas circuit over there in the cavity on metal joint 302.
High airtight vacuum open joint 4 as shown in Figure 3, it by 401,2 tapers of 2 hexagonal (hexagon)nuts after before 402,2 tapers of cutting ferrule cutting ferrule 403 and a fittings body 404 form, whole joint is all made with stainless steel material.The gas outlet 501 of high airtight vacuum open joint 4 and infrared detector dewar assembly 5 or metal copper pipe 301 seal connecting methods of transition conduit 3 are as follows: the intermediate case of nut 401 shells and fittings body 404 is made hexagon, by external thread relative rotary motion on internal thread on the nut 401 and the fittings body 404, thereby cutting ferrule 403 travels forward before allowing back cutting ferrule 402 promote, and obtains hermetically-sealed construction I and II because metal copper pipe 301 local pressures of the gas outlet of preceding cutting ferrule 403 and infrared detector dewar assembly or transition conduit 3 are out of shape.
A kind of method of operating that is used for the exhaust apparatus of performance test before the infrared detector minitype Dewar component high vacuum exhaustion clamp of the present invention is as follows:
1) miniature adsorption pump 1, two of bilaterals are changed vacuum valve 2 fast, transition conduit 3, high airtight vacuum open joint 4, infrared detector dewar assembly 5 are pressed connection shown in the accompanying drawing 1;
2) fill with cryogenic media in the inner chamber 102 to miniature adsorption pump 1, treat to begin next-step operation after the liquid level calmness;
3) two of bilaterals of the rotation handles 210 of conversion vacuum valves 2 fast allow on the vent plug 304 of external thread and transition conduit 3 on the pull bar 204 internal thread 303 cooperate and link to each other.After spurring the handle 210 of two quick conversion vacuum valves 2 of bilateral again, the O-ring seal and the vent plug 304 of transition conduit 3 and the rubber band 305 that is overlapping above it also play motion with one before 204,2 valve bodies of pull bar, when the position that moves to shown in accompanying drawing 2 (a), miniature adsorption pump 1 begins infrared detector dewar assembly is carried out exhaust;
4) the cryogenic media liquid level in the inner chamber 102 of miniature adsorption pump 1 is once more after the calmness, promptly can test behind the injection cryogenic medias in the cold finger inner chamber 502 of infrared detector dewar assembly 5;
5) after test is finished, after promoting the handle 210 of two quick conversion vacuum valves 2 of bilateral, the O-ring seal 208 and the vent plug 304 of transition conduit 3 and the rubber band 305 that is overlapping above it also play motion with one before 204,2 valve bodies of pull bar, when the position that moves to shown in accompanying drawing 2 (b), miniature adsorption pump 1 stops the infrared detector dewar assembly exhaust;
6) two handles 210 of changing vacuum valve 2 fast of rotation bilateral, allow the internal thread 303 on the vent plug 304 of the external thread of pull bar 204 fronts and transition conduit 3 break away from, after allowing vent plug 304 be parked in the metal joint 302 of transition conduit 3, by two nut mouths 202 that link to each other with transition conduit 3 of changing vacuum valve 2 fast of rotation bilateral, allow two of bilaterals change vacuum valves 2 fast and break away from transition conduit 3;
7) change another infrared detector dewar assembly 5, another one transition conduit 3, the high airtight vacuum open joint 4 of another one are connected by installing shown in the accompanying drawing 1 with infrared detector dewar assembly 5, and 6 opposite operations allow two quick conversion vacuum valves 2 of itself and the bilateral that has linked together and miniature adsorption pump 1 couple together set by step again;
8) carry out exhaust according to step 3-6 to another infrared detector dewar assembly 5.
Advantage of the present invention is as follows:
1. the present invention is simple in structure, easy to operate, realizes with low cost;
2. gas exhaust duct of the present invention adopts metallic conduit, and this helps the acquisition of high vacuum in the infrared detector dewar assembly;
3. the present invention has adopted power free miniature adsorption pump, has avoided the electromagnetic interference (EMI) of exhaust apparatus to the Dewar component performance test;
4. by having a plurality of transition conduit and a plurality of high airtight vacuum open joint, just can realize the conversation test of a plurality of infrared detector dewar assemblies fast, solved and be in low-temperature infrared detector and expose air suddenly and can cause infrared detector chip and the contaminated problem of its corresponding optical element, improved testing efficiency.
5, in the process of infrared detector dewar assembly conversation test, two quick conversion vacuum valves of bilateral can be realized the vacuum protection to miniature adsorption pump, have avoided the waste of vacuum resource.
Description of drawings
Fig. 1 is the exhaust apparatus structural representation that is used for the preceding performance test of infrared detector minitype Dewar component high vacuum exhaustion clamp of the present invention,
Among the figure: the miniature adsorption pump of 1-;
The 101-bleeding point;
The 102-inner bag;
Two of 2-bilaterals are changed vacuum valve fast;
201-valve master head;
202-nut mouth;
203-bank of rubber ring;
The 204-pull bar;
The 205-rubber band;
The secondary head of 206-valve;
The 207-valve body;
O-ring seal before the 208-valve body;
O-ring seal behind the 209-valve body;
The 210-handle
The 3-transition conduit;
301-metal copper pipe;
The 302-metal joint;
Internal thread on the 303-vent plug;
The 304-vent plug;
The 305-rubber band;
The high airtight vacuum open joint of 4-
The 401-hexagonal (hexagon)nut;
Cutting ferrule after the 402-taper;
Cutting ferrule before the 403-taper;
The 404-fittings body;
The 5-infrared detector dewar assembly
The 501-gas outlet;
502-cold finger inner chamber.
Two of Fig. 2 bilaterals are conversion vacuum valve structural representations fast, and wherein (a) valve master front end gas circuit is opened, the secondary rear end gas circuit of valve opens synoptic diagram; (b) a valve master front end gas circuit pass, secondary rear end gas circuit of valve are closed synoptic diagram.
Fig. 3 high airtight vacuum open joint structural representation, wherein (a) stressed pre-structure synoptic diagram; (b) stressed back structural representation
Embodiment
Below in conjunction with accompanying drawing the specific embodiment of the present invention is described in further detail:
Embodiment is the exhaust apparatus of certain space flight project with the preceding performance test of infrared detector minitype Dewar component high vacuum exhaustion clamp, elaborates below:
1, the preparation of miniature adsorption pump:
Miniature adsorption pump 1 such as patent 200420082697 narration, it is the Dewar flask that is accompanied vacuum interlayer by shell body and inner bag in the middle of constituting.Its top, shell body side is respectively by there being two to be respectively applied for the bleeding point 101 that connects with minitype Dewar and vacuum pump by two two logical keys, in vacuum interlayer, have one to be enclosed within the charcoal cover that activated charcoal is housed in the outer bottom of inner bag, have a plurality of apertures that are used to adsorb residual gas on the charcoal cover wall, charcoal cover inwall is lined with the wire netting that prevents that activated charcoal is scattered from aperture.Its principle of work is to come activated charcoal refrigeration, a large amount of adsorbed gases of activated charcoal under the low temperature by add liquid nitrogen at inner bag 102 inner chambers.Following requirement is arranged during design: (1) leaks heat for the solid conduction that reduces liner material, selects the cheap stainless steel material of thermal conductivity and low price for use.Simultaneously inner bag 102 is processed as the stainless steel cylinder that thickness is 0.25mm; (2) the main frame material of whole miniature adsorption pump adopts and selects stainless steel for use, carries out mechanical buffing towards the surface of vacuum, and all need adopt the argon arc welding in the place of being tightly connected, and strict leak detection, require leak rate to be better than 1 * 10 -10Pa.m 3/ S; (3) activated charcoal in the miniature adsorption pump 1 carries out high-temperature baking before assembling, and machines at miniature adsorption pump 1 and to carry out long-time high vacuum exhaustion and high-temperature baking; (4) quantity of the activated charcoal in the miniature adsorption pump 1 according to the infrared detector dewar assembly cavity volume, test needed pressure, charcoal absorption coefficient and certain surplus design and choose.
2, two preparations of conversion vacuum valve fast of bilateral:
Two of bilaterals are changed vacuum valve 2 as shown in Figure 2 fast, and it mainly is made up of O-ring seal 209 and handle 210 behind 208,2 valve bodies of O-ring seal before valve master 202,2 bank of rubber rings 203 of 201,2 nut mouths, 204,2 rubber bands 205 of pull bar, secondary 206 on valve, 207,2 valve bodies of valve body.Wherein: the bank of rubber ring is selected brass material for use; O-ring seal is all selected fluororubber " O " type circle for use behind rubber band 205, the preceding O-ring seal 208 of valve body and the valve body; Other all adopts stainless steel.The sharp processing of nut mouth 202 is the outer-hexagonal type.The secondary head of valve is that 1055 ℃, iron-nickel alloy pulpous state scolder carry out soldering and form, and carry out airtight test by temperature.Valve insertion carries out mechanical buffing towards the part of vacuum.Valve master 201 and the hollow circular cylinder that valve body 207 is formed in one are equipped with pull bar 204 in their cavity.The external thread that the leading portion of pull bar 204 has the internal thread 303 on the vent plug 304 with transition conduit 3 to cooperate, certain after a while locational two near rectangular channel in O-ring seal 208 before two valve bodies is installed.After pull bar 204 assembled, O-ring seal 209 after two valve bodies are installed in the rear end of valve body 207 was separating with becket between the O-ring seal 209 behind two valve bodies, compresses with the threaded metal ring again.Handle 210 by screw retention in the flat rear end of pull bar 204.The profile that valve master 201 and valve are secondary 206 all is processed into a stairstepping, and the end face of its little ladder is connected with rubber band 205, processes external thread at the cylindrical of ladder greatly.Earlier be on the metal joint 302 of the nut mouth 202 of hexangle type and bleeding point 101 that bank of rubber ring 203 is set to miniature adsorption pump 1 or transition conduit 3 with sharp processing, then rubber band 205 is set in the semi-circular recesses on the metal joint 302 of the bleeding point 101 of miniature adsorption pump 1 or transition conduit 3, again the cylindrical of the metal joint 302 of the bleeding point 101 of miniature adsorption pump 1 or transition conduit 3 is inserted two of bilaterals fast in secondary 206 on the valve of conversion vacuum valves 2 or valve master 201 the cavity, last rotary nut mouth 202, internal thread by nut mouth 202 and secondary 206 on valve and valve master 201 external thread cooperates allows rubber band 205 distortion, realizes that two of bilaterals change vacuum valves 2 fast and be connected with vacuum between miniature adsorption pump 1 or the transition conduit 3.
3, the preparation of transition conduit:
Transition conduit 3 mainly comprises: metal copper pipe 301, metal joint 302, the vent plug 304 that has internal thread 303 and rubber band 305.Be that 1055 ℃, the soldering of iron-nickel alloy pulpous state scolder are welded on the metal joint 302 by temperature earlier, then rubber band 305 be set in the vent plug 304 outer round recesseds, at last with in vent plug 304 insertion metal joints 302 inner chambers with annealed metal copper pipe 301.The outside cylinder of metal joint 302 inner chambers and vent plug 304 needs mechanical buffing to handle.
4, the preparation of high airtight vacuum open joint:
High airtight vacuum open joint 4 by 401,2 tapers of 2 hexagonal (hexagon)nuts after before 402,2 tapers of cutting ferrule cutting ferrule 403 and a fittings body 404 form, whole joint is all made with stainless steel material.The intermediate case of nut 401 shells and fittings body 404 is made hexagon.
5, structure connection of the present invention and operation steps are as follows:
1) earlier with two of miniature adsorption pumps 1, bilateral fast shown in conversion vacuum valve 2 accompanying drawings 1 after the connection, the another one bleeding point 101 of miniature adsorption pump is carried out high vacuum exhaustion by certain frock, make that vacuum tightness is better than 10 in the miniature adsorption pump vacuum interlayer -3Pa.Again transition conduit 3, high airtight vacuum open joint 4, infrared detector dewar assembly 5 are pressed connection shown in the accompanying drawing 1;
2) fill with liquid nitrogen in the inner chamber 102 to miniature adsorption pump 1, treat to begin next-step operation after the liquid level calmness;
3) two of bilaterals of the rotation handles 210 of conversion vacuum valves 2 fast allow on the vent plug 304 of external thread and transition conduit 3 on the pull bar 204 internal thread 303 cooperate and link to each other.After spurring the handle 210 of two quick conversion vacuum valves 2 of bilateral again, the O-ring seal and the vent plug 304 of transition conduit 3 and the O-ring seal that is overlapping above it also play motion with one before 204,2 valve bodies of pull bar, when the position that moves to shown in accompanying drawing 2 (a), miniature adsorption pump 1 begins infrared detector dewar assembly is carried out exhaust;
4), promptly can test after injecting liquid nitrogen in the cold finger inner chamber 502 of infrared detector dewar assembly 5 when the liquid nitrogen liquid level in the inner chamber 102 of miniature adsorption pump 1 once more after the calmness;
5) after test is finished, after promoting the handle 210 of two quick conversion vacuum valves 2 of bilateral, the O-ring seal and the vent plug 304 of transition conduit 3 and the rubber band 305 that is overlapping above it also play motion with one before 204,2 valve bodies of pull bar, when the position that moves to shown in accompanying drawing 2 (b), miniature adsorption pump 1 stops the infrared detector dewar assembly exhaust;
6) two handles 210 of changing vacuum valve 2 fast of rotation bilateral, allow the internal thread 303 on the vent plug 304 of the external thread of pull bar 204 fronts and transition conduit 3 break away from, after allowing vent plug 304 be parked in the metal joint 302 of transition conduit 3, by two nut mouths 202 that link to each other with transition conduit 3 of changing vacuum valve 2 fast of rotation bilateral, allow two of bilaterals change vacuum valves 2 fast and break away from transition conduit 3;
7) change another infrared detector dewar assembly 5, another one transition conduit 3, the high airtight vacuum open joint 4 of another one, infrared detector dewar assembly 5 are pressed the connection of installation shown in the accompanying drawing 1, and 6 opposite operations allow two quick conversion vacuum valves 2 of itself and the bilateral that has linked together and miniature adsorption pump 1 couple together set by step again;
8) carry out exhaust according to step 3-6 to another infrared detector dewar assembly 5.
The installation of below just having finished exhaust apparatus of the present invention connect with and to the operation of performance test exhaust before the infrared detector minitype Dewar component high vacuum exhaustion clamp.

Claims (10)

1. exhausting device for testing performance of infrared detector minitype Dewar component, it is by miniature adsorption pump (1), two of bilaterals are changed vacuum valve (2) fast, transition conduit (3), high airtight vacuum open joint (4) and infrared detector dewar assembly (5) are formed, it is characterized in that: described exhaust apparatus construction method is that the exhaust end (101) of described miniature adsorption pump (1) and two quick valves secondary (206) of changing vacuum valves (2) of described bilateral are connected, gas outlet (501) with described infrared detector dewar assembly (5) is connected with the metal copper pipe (301) of described transition conduit (3) by the airtight vacuum open joint of described height (4) again, at last two valve master heads (201) of changing vacuum valve (2) fast of described bilateral is connected together with the metal joint (302) of described transition conduit (3).
2. a kind of exhausting device for testing performance of infrared detector minitype Dewar component according to claim 1, it is characterized in that: two of said bilaterals are changed vacuum valve (2) fast by valve master head (201), two nut mouths (202), two bank of rubber rings (203), pull bar (204), two rubber bands (205), the secondary head of valve (206), valve body (207), O-ring seal (208) before two valve bodies, O-ring seal (209) and handle (210) are formed behind two valve bodies, valve body (207) is a hollow circular cylinder, the one end is a valve master head (201), the secondary head of valve (206) radially is welded on the middle part of valve body (207), valve body (207) hollow space is equipped with two ends respectively by the connecting rod (204) of O-ring seal (209) sealing behind O-ring seal (208) before two valve bodies and two valve bodies, connecting rod (204) is pressed in the valve body (207) by the threaded metal ring, the one end links to each other with piston (303), and the other end links to each other with handle (210).
3. a kind of exhausting device for testing performance of infrared detector minitype Dewar component according to claim 1, it is characterized in that: said transition conduit (3) is made up of metal copper pipe (301), metal joint (302), the vent plug (304) that has internal thread (303) and rubber band (305), and vent plug (304) is by realizing being tightly connected between rubber band (305) and the metal joint (302).
4. a kind of exhausting device for testing performance of infrared detector minitype Dewar component according to claim 2 is characterized in that: said two rubber bands (205) are the fluororubber O-type O-ring seals.
5. a kind of exhausting device for testing performance of infrared detector minitype Dewar component according to claim 2 is characterized in that: O-ring seal (208) is the fluororubber O-type O-ring seal before said two valve bodies.
6. a kind of exhausting device for testing performance of infrared detector minitype Dewar component according to claim 2 is characterized in that: O-ring seal (209) is the fluororubber O-type O-ring seal behind said two valve bodies.
7. a kind of exhausting device for testing performance of infrared detector minitype Dewar component according to claim 2 is characterized in that: an end of said pull bar (204) has the external thread that can be connected with vent plug (304) internal thread (303).
8. a kind of exhausting device for testing performance of infrared detector minitype Dewar component according to claim 2, it is characterized in that: an end of said pull bar (204) and handle (210) connect firmly, and rotary handle (210) can make pull bar (204) other end and vent plug (304) internal thread (303) interconnect or break away from mutually.
9. a kind of exhausting device for testing performance of infrared detector minitype Dewar component according to claim 3 is characterized in that: said rubber band (305) is the fluororubber O-type O-ring seal.
10. the job step of the described device of claim 1 is characterized in that job step is as follows:
1) miniature adsorption pump (1), two of bilaterals are changed vacuum valve (2) fast, transition conduit (3), high airtight vacuum open joint (4), infrared detector dewar assembly (5) are by the described construction method connection of claim 1;
2) fill with the cryogenic media liquid nitrogen in the inner chamber (102) to miniature adsorption pump (1), treat to begin next-step operation after the liquid level calmness;
3) two handles (210) of changing vacuum valve (2) fast of rotation bilateral, allowing external thread and the vent plug (304) of transition conduit (3) on the pull bar (204) go up internal thread (303) cooperates and links to each other, after spurring the handle (210) of two quick conversion vacuum valves of bilateral (2) again, the vent plug (304) and the top rubber band that is overlapping (305) thereof of O-ring seal and transition conduit (3) also play motion with one before pull bar (204), two valve bodies, when moving to exhaust position, miniature adsorption pump (1) begins infrared detector dewar assembly is carried out exhaust;
4) the cryogenic media liquid level in the inner chamber (102) of miniature adsorption pump (1) is once more after the calmness, promptly can test behind the injection cryogenic media liquid nitrogen in the cold finger inner chamber (502) of infrared detector dewar assembly (5);
5) after test is finished, after promoting the handle (210) of two quick conversion vacuum valves of bilateral (2), the vent plug (304) and the top rubber band that is overlapping (305) thereof of O-ring seal (208) and transition conduit (3) also play motion with one before pull bar (204), two valve bodies, when moving to initial position, miniature adsorption pump (1) stops the infrared detector dewar assembly exhaust;
6) two handles (210) of changing vacuum valve (2) fast of rotation bilateral, allow internal thread (303) disengaging mutually on the vent plug (304) of external thread and transition conduit (3) of pull bar (204) end, after allowing vent plug (304) be parked in the metal joint (302) of transition conduit (3), by two nut mouths (202) that link to each other with transition conduit (3) of changing vacuum valve (2) fast of rotation bilateral, allow two of bilaterals change vacuum valves (2) fast and break away from transition conduit (3);
7) change another infrared detector dewar assembly (5), the high airtight vacuum open joint of another one transition conduit (3), another one (4) is installed with infrared detector dewar assembly (5) is connected, more set by step 6) opposite operation allows two of itself and the bilaterals that has linked together are quick changes vacuum valves (2) and miniature adsorption pump (1) couples together;
8) according to step 3)-6) carry out exhaust to another infrared detector dewar assembly (5).
CN2008102033894A 2008-11-26 2008-11-26 Exhausting device for testing performance of infrared detector minitype Dewar component Active CN101408461B (en)

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CN101408461B true CN101408461B (en) 2010-06-09

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CN102353456B (en) * 2011-08-30 2013-08-14 中国科学院上海技术物理研究所 Infrared detector Dewar component space on-track vacuum processing device and realization method thereof
CN103089592B (en) * 2013-01-31 2015-07-29 中国科学院上海技术物理研究所 A kind of Infrared detector multi-station vacuum air exhaust device
CN103706415B (en) * 2013-12-24 2015-06-17 华中科技大学 Sample rod for low-temperature storage of Dewar
CN105156888B (en) * 2015-09-22 2017-03-15 中国科学院上海技术物理研究所 A kind of dual temperature area apparatus for baking and implementation method for separated type Dewar aerofluxuss

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