CN101405625A - Composite layer having improved adhesion, and fluid focus lens incorporating same - Google Patents

Composite layer having improved adhesion, and fluid focus lens incorporating same Download PDF

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Publication number
CN101405625A
CN101405625A CNA2006800343950A CN200680034395A CN101405625A CN 101405625 A CN101405625 A CN 101405625A CN A2006800343950 A CNA2006800343950 A CN A2006800343950A CN 200680034395 A CN200680034395 A CN 200680034395A CN 101405625 A CN101405625 A CN 101405625A
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CN
China
Prior art keywords
layer
insulating material
fluid
substrate
focus lens
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Pending
Application number
CNA2006800343950A
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Chinese (zh)
Inventor
R·R·M·蒂伯格
P·范德米尔
G·J·弗霍克克斯
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Koninklijke Philips NV
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Koninklijke Philips Electronics NV
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Publication of CN101405625A publication Critical patent/CN101405625A/en
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/12—Fluid-filled or evacuated lenses
    • G02B3/14—Fluid-filled or evacuated lenses of variable focal length
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor

Abstract

A composite material (10, 20) includes a substrate (12, 22) with an electrically conducting metal or metal oxide surface (22B), a layer (14, 24) of an electrically insulating material such as parylene, and an intermediate adhesion-improving metal layer (16, 26) between the substrate and the electrically insulating layer. A fluid focus lens (30) has first and second fluids (32, 34) and first and second electrodes, the first electrode comprising a core (38) of the composite material (10, 20) with the electrically insulating layer (41) positioned between the core (38) and the fluids (32, 34), and the second electrode (50) in contact with the second fluid (34).

Description

Has the composite bed of improved tack and in conjunction with the fluid focus lens of this composite bed
The application requires the U.S. Provisional Application 60/718 submitted September 19 in 2005, the right of priority of 476 (attorney docket 001697) and the EP provisional application 05102398.4 (attorney docket NL050252) submitted March 24 in 2005, and be to be the partial continuous case of the application of PCT/WO/IB2005/051435 (attorney docket NL050252) in the application number that May 3 in 2005 submitted.
Technical field
The present invention relates to compound substance, this compound substance has the insulating material layer on metal or the metallization core, the invention still further relates to the fluid focus lens in conjunction with this compound substance.
Background technology
Fluid focus lens is the lens that light is reflected by the meniscus (meniscus) between two kinds of non-miscible fluids therein.In general, a kind of electric insulation in these two kinds of fluids, one other fluid conduction.Under the influence of the voltage between two electrodes, the shape of meniscus can change, and one of them electrode is connected to conductive fluid, and another electrode is connected to a kind of surface, and this surface is by fluid contact layer and fluid separation.This voltage causes that electricity is wetting, thereby changes the shape of meniscus.
For example, can know this fluid focus lens from disclosed PCT patented claim WO-A 03/069380.In this patented claim, lens arrangement is cylindrical basically, and fluid containment is surrounded by the endless core of metal electrode material by fluid contact layer within the space and at first in cylindrical then, this endless core applies with the electric insulation material layer, this insulating material layer such as parylene (parylene).
Parylene is the trade name of Parylene, and this parylene forms the ability of thin conformal deposited coating with it and famous usually on multiple substrate in multiple different purposes.For example, referring to US 4,173,664.
EP 0785073 has described the parylene coatings with more smooth relatively non-wetting surface, this parylene coatings is difficult for being attached to other material, and this patent adopts tantalum layer as parylene coatings and the adhesion layer that is used between the another kind of polymeric material of formation ink flow passage on the ink jet-print head.
US 6,270, and 872 adopt pressure sensitive adhesive, are attached to people's skin with the snubber assembly that will scribble parylene.
US 2005/0112817 has described integrated device electronics, and in these equipment, cross tie part extends through one or more dielectric layers and arrives one or more semiconductor equipments.This dielectric layer can comprise silicon dioxide, mix fluorosilicate glass (FSG), black diamond (BlackDiamond) RTM(a kind of product of Santa Clara city Applied Materials company), xerogel, aerogel, agraphitic carbon fluorine compounds, parylene, BCB (benzocyclobutene) and SiLK TM(a kind of product of the Dow Chemical company in Milan, state of Michigan city) and/or other material, and can pass through CVD, PECVD, PDL, ALD, PVD, gathering ion beam (FIB), Langmuir-Blodgett (LB) molecular combination, rotation coating (spin-on coating) and/or the formation of other technology.These cross tie parts can comprise alloy and/or other material of copper (Cu), tungsten (W), gold (Au), aluminium, carbon nano-tube, carbon fullerene (carbon fullerene), refractory metal, these materials, and can pass through CVD, PECVD, ALD, PVD and/or the formation of other technology.These cross tie parts also can comprise more than one layer.For example, each cross tie part can comprise adhesion layer, this adhesion layer can comprise titanium (Ti), titanium nitride (TiN), tantalum (Ta) or tantalum nitride (TaN), silit (SiC), silicon oxide carbide (SiOC), restraining barrier and body effect conductive layer, the restraining barrier can comprise titanium nitride (TiN) and/or tantalum nitride (TaN), silit (SiC) and silicon oxide carbide (SiOC), and body is imitated conductive layer and comprised copper (Cu), tungsten (W), aluminium (Al) or aluminium alloy.
Summary of the invention
The objective of the invention is to improve the tack between the electric insulation layer of the conductive electrode material of core and fluid focus lens.
Another object of the present invention is to improve usually in the conductive material of compound substance and the tack between the electric insulation layer.
According to an aspect of the present invention, a kind of compound substance is provided, this compound substance comprises substrate and the insulating material layer at least a portion of this substrate, this substrate comprises at least one superficial layer of conducting metal or metal oxide, it is characterized in that, this compound substance comprises the middle layer, and this middle layer is included in the improved metal material of tack between substrate and the insulating material layer, thereby improves the tack between substrate and the insulating material.
According to another aspect of the present invention, a kind of fluid focus lens is provided, this fluid focus lens comprises fluid chamber, first and second non-miscible fluids in the fluid chamber, first electrode, at least one the insulating material layer and second electrode, first and second non-miscible fluids in the fluid chamber are separated by meniscus, first electrode is the form of core, this core has at least one superficial layer of conducting metal or metal oxide, described at least one insulating material layer is between first and second fluids on the described core and in core and fluid chamber, and this second electrode contacts with second fluid, it is characterized in that, the middle layer that comprises the improved metal level of tack is between at least a portion of core and insulating material layer, thus the tack between improvement core and the insulating material layer.
According to one embodiment of present invention, the metal of substrate or metal oxide are selected from the group of being made up of stainless steel, copper, brass and indium tin oxide (ITO).
According to another embodiment of the invention, the material of electric insulation layer is selected from by parylene, silicon dioxide (SiO 2), silicon nitride (Si 3N 4), the group formed of paraffin, barium titanate and agraphitic carbon fluoropolymer, wherein, preferable material is a parylene, agraphitic carbon fluoropolymer such as Teflon AF 1600, Teflon AF 1600 are a kind of products of E.I.Du Pont Company.
Preferred parylene is not because there is charging effect.And parylene can be used as conformal coating and relatively easily applies, and has the thickness of smooth surface and well-controlled.These characteristics are important to electric wettability, because these characteristics are determined the driving voltage of final products.When must provide the coating of controlled thickness on the inwall of endless metal core the time, conformal is particularly important.
According to another embodiment of the invention, intermediate metal layer comprises at least a metal that is selected from the group of being made up of zinc, lead, copper, indium and chromium.Preferred these metals are because can arrive these washings metal-cored by the relatively low galvanic process of cost.
According to the aspect of the embodiment of fluid focus lens of the present invention, fluid contact layer contacts with electric insulation layer on the side relative with intermediate metal layer.Preferred this fluid contact layer is Teflon AF 1600.
Fluid focus lens of the present invention can other lens, optical recording device or other any optical device in video camera use or be used in combination.This fluid focus lens can with other entirety of lens package, to obtain optical path, perhaps even obtain zoom lens.Perhaps, this fluid focus lens can be used in the display, and in reflective display, in this case, it optically is transparent only needing one in these substrates.This fluid focus lens also can be used as sensor.
Description of drawings
These and other aspect to compound substance of the present invention, fluid focus lens and method is with reference to the accompanying drawings described, in these figure:
Fig. 1 shows the schematic sectional view of an embodiment of compound substance of the present invention;
Fig. 2 shows the schematic sectional view of another embodiment of compound substance of the present invention;
Fig. 3 shows the schematic sectional view of the preferred embodiment of fluid focus lens of the present invention;
Fig. 4 shows the more detailed view of the part in the left side that is shown in the embodiment among Fig. 3;
Fig. 5 A, 5B and 5C are the more detailed views of a part that is shown in the left side of the core among Fig. 3, the figure shows the various combination of the layer on the inside surface of core.
Accompanying drawing is schematically, does not proportionally draw, and the same reference numerals in the different accompanying drawings is represented components identical.
Embodiment
Referring to Fig. 1, schematically show the front elevation of an embodiment of compound substance 10 of the present invention among the figure.Substrate 12 is a kind of conductive materials, as stainless steel, copper, brass or indium tin oxide (ITO).Electric insulation layer 14 is supported by substrate 12, and this electric insulation layer 14 is as parylene, SiO2, paraffin, barium titanate or Teflon AF 1600.Be the metal level 16 that improves tack between substrate 12 and the electric insulation layer 14, as zinc, lead, brass, indium or other thin metal layer, these metals have and good adhesion substrate 12 identical with insulation course 14.The paint-on technique of available standards applies intermediate metal layer, these technology such as vapor deposition or electrodeless plating or plating.This intermediate metal layer improves the tack of substrate 12 and insulation course 10, especially when insulation course is parylene.
Referring to Fig. 2, there is shown another embodiment of compound substance 20 of the present invention, this embodiment is similar to and is shown in the embodiment among Fig. 1 and comprises substrate 22, insulation course 24 and middle promoting layer 26.But, again among this embodiment, substrate itself is a kind of compound substance made from electrical insulator or core segment 22A and conductive surface layer 22B.Conductive surface layer 22B can be metal or metal oxide, as stainless steel, copper, brass indium tin oxide (ITO).Non-conductive core or body 22A can be as polymethylmethacrylate (PMMA), glass or pottery, as long as satisfy the requirement of special-purpose, as tack, expansion coefficient, surface flatness and the manufacturing cost etc. of coating.
Referring to Fig. 3, there is shown fluid focus lens 30 according to another embodiment of the invention.Lens 30 comprise first electrical insulation fluid 32 and second conductive fluid 34, and these two kinds of fluids all are contained in the fluid chamber 36.The first fluid 32 and second fluid 34 are non-miscible and be in contact with one another on meniscus 33.In this example, first fluid 32 is a kind of silicone oil, alkane or another kind of suitable electrical insulation fluid.In this example, the water or the another kind of conductive fluid of second fluid, 34 saline solns.
By being clipped in, endless core 38 forms fluid chamber 36 between cover plate 40 and 42.The sidewall of chamber 36 is formed by the cylindrical basically inwall or the surperficial 38A of endless core 38, and roof and diapire are formed by cover plate transparent on the optics 40 and 42.
Cylindrical wall portion 44 is surrounded endless core 38 and is formed the outer wall of this equipment.Annular closed member 46 and 48 remains on this core/cover plate assembly in the outer wall.Endless core 38 is isolated with the mode described in this instructions and fluid 34 and is formed first electrode, and button 50 and fluid 34 contact and form second electrode 50 of fluid focus lens equipment 30.
Referring to Fig. 4, there is shown the more detailed view of the equipment 30 that is shown among Fig. 3, as can be seen from Figure 4, in cylindrical wall portion 44 and the enclosed member 46 and 48 each has with conduction respectively and has the material of toughness or the electrically conductive composite of plastics and metal is made layers 52,54 and 56, this conduction and material such as metal with toughness, this metal such as indium or copper, this electrically conductive composite such as Ni Fulong (niflon).
Sealant 58 is respectively with layer 52,54 and 56 and the part protectiveness of cover plate 40 and 42 applies and encapsulation, to finish assembling.
Sealant 58 can be the polymer coating of known rubber as protective coating own, epoxy resin etc.But, because layer 52,54 and 56 conduction, so preferably sealant 58 also conducts electricity, as metal.This just allows a kind of formation of packing, and this packaging closures sealing is not vulnerable to the diffusion influence of air, water or other fluid.In addition, can be by electroplating or zinc-plated formation metallic seal layer 58, this is favourable, because except other factor, can carry out this plating or zinc-plated at three-dimensional surface, for example, by packing is immersed in the immersion trough.
Fig. 5 A to 5C is the more detailed view of a part in the left side of endless core 38, and this endless core 38 comprises inwall 38A.In the embodiment that is shown in Fig. 5 A, endless core 38 is conductive materials, and inwall 38A uses the layer 39 of insulating material to apply this insulating material such as parylene.Relatively thin intermediate adhesion promotes that metal level 41 is inserted between inwall 38A and the insulation course 39.
Thin intermediate metal layer 41 can be coated on core 38 all or part of.The metal of intermediate metal layer 41 can be Zn, Pb, Cu, In, Cr or have other metal with the good tack of core 38 and insulation course 39.
On the whole, intermediate metal layer 41 should relatively approach (＜5 microns) and smooth.The paint-on technique of available standards applies intermediate metal layer 41, and these technology such as plating, electrodeless plating, chemical vapour deposition, colloidal sol and gel deposition, sputter perhaps also can be adopted the combination of any of these deposition process, but preferred electro-plating method.
Intermediate metal layer 41 improves the tack of core 38 and insulation course 39, especially when insulation course is parylene.But, fluid focus lens of the present invention depends on the parylene layer, can use any insulating layer material, as paraffin, silicon dioxide, barium titanate or agraphitic carbon fluoropolymer, as Teflon AF 1600.
In the embodiment that is shown in Fig. 5 B, endless core 38 itself is a kind of compound substance made from electric insulation core material and superficial layer, and this superficial layer is made with conductive material, as metal or metal oxide.A kind of possible combination of having adopted is the polymethylmethacrylate (PMMA) that applies with indium tin oxide (ITO).In embodiment in front, inwall 38A applies with layer 39, and layer 39 usefulness insulating material are made, and as parylene, and intermediate adhesion promotes that metal level 41 is inserted between inwall 38A and the insulation course 39.If adopt non-conductive core, then intermediate adhesion promotes metal level 41 also can play the effect of conductor.
Except additional electrical dielectric fluid contact layer 43, the embodiment that is shown in Fig. 5 C is similar to the embodiment that is shown in Fig. 5 A.Preferably form fluid contact layer 43 with agraphitic carbon fluoropolymer such as Teflon AF 1600, and by applying as dip-coating.Also can adopt alternative form, as Cytop, this Cytop is made by Asahi Glass Co., Ltd..
Embodiment with limited quantity has carried out necessary description to the present invention.Those of skill in the art can understand the version of other embodiment and embodiment from this instructions, and the version of other these embodiment and embodiment is intended to be included within scope of the present invention and claims.

Claims (19)

1. compound substance (10,20), described compound substance (10,20) comprise substrate (12,22) with at described substrate (12,22) the insulating material layer (14 at least a portion, 24), described substrate (12,22) comprise at least one superficial layer (22B) of conducting metal or metal oxide, it is characterized in that: described compound substance (10,20) comprise middle layer (16,26), described middle layer (16,26) be included in described substrate (12,22) with described insulating material layer (14,24) the improved metal material of the tack between, thus described substrate (12 improved, 22) with described insulating material layer (14,24) tack between.
2. compound substance as claimed in claim 1 is characterized in that: described substrate mainly comprises metal material.
3. compound substance as claimed in claim 1 is characterized in that: the described metal material of described substrate is selected from the group of being made up of stainless steel, copper, brass and indium tin oxide (ITO).
4. compound substance as claimed in claim 1 is characterized in that: described insulating material layer is selected from by parylene, SiO 2, the group formed of paraffin, barium titanate and agraphitic carbon fluoropolymer.
5. compound substance as claimed in claim 4 is characterized in that: described insulating material is a parylene.
6. compound substance as claimed in claim 1 is characterized in that: the improved metal material of described tack in described middle layer is to be selected from least a in the group of being made up of Zn, Pb, Cu, In, Cr.
7. a fluid focus lens (30), described fluid focus lens (30) comprises fluid chamber (36), first and second non-miscible fluids (32 in the described fluid chamber (36), 34), first electrode, at least one insulating material layer (39) and second electrode (50), first and second non-miscible fluids (32 in the described fluid chamber (36), 34) separate by meniscus (33), described first electrode is the form of core (38), described core (38) has at least one superficial layer (38C) of conducting metal or metal oxide, described at least one insulating material layer (39) and first and second fluids (32 described core (38) and described fluid chamber (36) in last at described core (38), 34) between, and described second electrode (50) contacts with described second fluid (34), it is characterized in that: the middle layer (41) that comprises the improved metal material of tack is positioned between at least a portion of described core (38) and described at least one insulating material layer (39), thereby improves the tack of (39) between described core (38) and the described insulating material layer.
8. fluid focus lens as claimed in claim 7 is characterized in that: described substrate mainly comprises metal material.
9. fluid focus lens as claimed in claim 8 is characterized in that: the described metal material of described substrate is selected from the group of being made up of stainless steel, copper, brass and indium tin oxide (ITO).
10. fluid focus lens as claimed in claim 7 is characterized in that: described insulating material layer is selected from by parylene, SiO 2, the group formed of paraffin, barium titanate and agraphitic carbon fluoropolymer.
11. fluid focus lens as claimed in claim 10 is characterized in that: described insulating material is a parylene.
12. fluid focus lens as claimed in claim 7 is characterized in that: the improved metal material of described tack in described middle layer is to be selected from the group of being made up of Zn, Pb, Cu, In, Cr.
13. fluid focus lens as claimed in claim 7 is characterized in that: fluid contact layer (43) is positioned at least a portion of the described electric insulation layer on the opposite flank of described intermediate metal layer.
14. fluid focus lens as claimed in claim 13 is characterized in that: described fluid contact layer is a kind of agraphitic carbon fluoropolymer
15. device, described device comprises substrate (12,22) with at described substrate (12,22) the insulating material layer (14 at least a portion, 24), described substrate (12,22) comprise at least one superficial layer (22B) of conductive material, wherein, described compound substance (10,20) comprise middle layer (16,26), described middle layer (16,26) be included in described substrate (12,22) with described insulating material layer (14,24) the improved metal material of the tack between, thus described substrate (12 improved, 22) with described insulating material layer (14,24) tack between.
16. device as claimed in claim 15 is characterized in that: described device is a kind of device of optical system.
17. device as claimed in claim 16 is characterized in that: described device is the device of a kind of fluid focus lens (30).
18. method that is used to improve the tack between substrate (12,22) and the insulating material layer (14,24), described substrate (12,22) comprises at least one superficial layer (22B) of conductive material, described method is included between described substrate (12,22) and the described insulating material layer (14,24) and forms middle layer (16,26), and described middle layer (16,26) comprise the improved metal material of tack.
19. method as claimed in claim 18 is characterized in that: described method comprises the described superficial layer (22B) that forms metal or metal oxide.
CNA2006800343950A 2005-09-19 2006-09-13 Composite layer having improved adhesion, and fluid focus lens incorporating same Pending CN101405625A (en)

Applications Claiming Priority (2)

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US71847605P 2005-09-19 2005-09-19
US60/718,476 2005-09-19

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US (1) US20080231964A1 (en)
EP (1) EP1943549A2 (en)
JP (1) JP2009509192A (en)
KR (1) KR20080045206A (en)
CN (1) CN101405625A (en)
WO (1) WO2007034377A2 (en)

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WO2007034377A2 (en) 2007-03-29
US20080231964A1 (en) 2008-09-25
WO2007034377A3 (en) 2008-11-06
JP2009509192A (en) 2009-03-05
EP1943549A2 (en) 2008-07-16
KR20080045206A (en) 2008-05-22

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