CN101403388A - Miniature molecular pump utilizing leaf disc rotor - Google Patents
Miniature molecular pump utilizing leaf disc rotor Download PDFInfo
- Publication number
- CN101403388A CN101403388A CNA2008101758270A CN200810175827A CN101403388A CN 101403388 A CN101403388 A CN 101403388A CN A2008101758270 A CNA2008101758270 A CN A2008101758270A CN 200810175827 A CN200810175827 A CN 200810175827A CN 101403388 A CN101403388 A CN 101403388A
- Authority
- CN
- China
- Prior art keywords
- blade
- moving vane
- rotor
- molecular pump
- stator blade
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Abstract
The invention relates to the improvement of the rotor structure of a small molecular pump and enables the top face of a rotor to increase layers of moving blades (usually 1-3 layers) from the inside to the outside, which take the shape of radial upwards and being vertical to top surfaces and is shown as the following graph structure: the part provided with a spiral groove is a Holweck rotor which rotates at a high speed; on the top of the Holweck rotor, a first stage moving blade has the smallest radius, a third stage moving blade has the largest radius, and a second stage moving blade is in the middle. Part of the third stage moving blade is vertical to the top surface in the internal part thereof; part of the third stage moving blade extends out of the top surface and is a cantilever structure. The part of the moving blade which extends outside extends downwards, with the extending height larger than the moving blade in the internal part of the top surface; the blade on a tectum static blade disc is a second stage static blade and is turned over for being inserted among the rotor blades, thereby forming a fifth stage pumping structure so as to improve the pumping speed of molecular pumps.
Description
Technical field:
The present invention relates to vacuum and obtain and the gas flow field, utilize the space availability ratio of leaf disc rotor raising rotor structure, take into account reliability, pumping speed and the compression ratio of molecular pump simultaneously.
Background technique:
Molecular pump is that a kind of ultrahigh vacuum obtains equipment, is mainly used to obtain 10
-3Pa was mainly used in scientific research field in the past with interior clean vacuum.Along with the develop rapidly in vacuum application field, molecular pump is more and more used and industrial field, and industrial field generally needs molecular pump that bigger pumping speed or higher compression ratio are arranged, so that work under molecular pump prime outlet pressure condition with higher.The existing miniature molecular pump structures that adopt have two kinds more: one, what (general 6-8 level) blade structure is upper half part be, lower half portion is the light barrel structure, and Hall dimension gram groove is the static inner spiral groove that cooperates with the light tube, and in order to guarantee compression ratio, the rotating speed that this structure is generally chosen is higher; Two, simple light barrel structure is equipped with static Hall dimension gram inner spiral groove, and the rotating speed that this structure is generally chosen is lower.These two kinds of structures, preceding a kind of structure can guarantee pumping speed and compression ratio, but because rotating speed is higher, reliability of products reduces greatly; The compression ratio and the reliability of a kind of structure in back can guarantee, still owing to lack blade structure, only depend on dragging of light tube, and pumping speed is less.Therefore, existing two kinds of structures can't satisfy these three molecular pump important index of reliability, pumping speed and compression ratio simultaneously.
Summary of the invention:
The object of the present invention is to provide a kind of under the prerequisite that guarantees reliability and compression ratio, improve the novel rotor of molecular pump pumping speed, blisk rotor configuration combines the advantage of above-mentioned two kinds of molecular pumps and has abandoned its shortcoming, make the back pressure of molecular pump in higher scope, still have bigger pumping speed, thereby better adapt to the requirement of industry now.
To achieve these goals, patent of the present invention is improved existing rotor structure.At first, process 1～3 grade of moving vane of vertical end face downwards at the end face of rotor, moving vane is with diametric(al) angled (0 °～90 °), two-stage moving vane spacing freedom, the effect of bleeding of the existing traditional blade of such structure, have again similar Hall dimension gram cartridge type short groove drag effect, pumping speed will be both comprehensively.Secondly, for the limited shortcoming of simple moving vane compressed capability, designed in the interval of every grade of moving vane with the similar stator blade of moving vane shape, the total progression of stator blade lacks one-level than moving vane.The back one-level blade number average of all blades is not less than the number of blade of previous stage, and such structure can improve the compressed capability of molecular pump to gas.Once more, afterbody moving vane at the end face excircle part place of rotor, its front half part (from the center of circle near part) is similar with first order blade all to be on the disk top upwards, latter half part becomes cantilever structure in the outside of cylinder with cylinder, its end circular diameter is identical with the diameter of Hall dimension gram tube, the assurance path change of bleeding is even, not sudden change.Latter half part and front half part end face are in plane one by one, and height ratio is between 1/1～3/1.At last, Hall dimension gram groove is opened on cylinder outer wall, improved pumping efficiency, reduced difficulty of processing.
After adopting above-mentioned leaf dish, pumping speed has had bigger lifting, the forepressure tolerance ability strengthens greatly, compares with traditional structure, has promptly guaranteed compression ratio, improved pumping speed again, and simple in structure, advantages such as raw material, load reduction are saved in the installation aspect, illustrate now that following (moving vane is three grades in this example, and the number of teeth is respectively 8,10,16; Stator blade is an one-level, and the number of teeth is 16,16, distinguishes as shown in the figure with diametric angle):
Description of drawings:
Fig. 1 is the stereogram of leaf disc rotor;
The planimetric map of the moving vane that Fig. 2 processes for the leaf disc rotor end face;
Fig. 3 is the planimetric map of stator blade;
Fig. 4 is the assembly relation schematic representation of dynamic and static blade;
Embodiment:
The invention will be further described below in conjunction with accompanying drawing.
Shown in Fig. 1-4, rotor provided by the invention is the end face increase blade at traditional rotor, satisfies these three indexs of reliability, pumping speed and compression ratio by the isoparametric improvement of progression, inclination angle, thickness of blade, and is specific as follows:
Fig. 1 is the stereogram of leaf disc rotor.Among the figure: 11 is first order moving vane, and 12 is second level moving vane, and 13 is third level moving vane.
Fig. 2 is the planimetric map of leaf disc rotor end face moving vane.At first, cylindrical aluminium ingot is processed a cylindrical body on lathe, external diameter is R26.On the end face of this cylinder, mill out the moving vane that vertical end face makes progress downwards, wherein first, second and third grade moving vane and diametric angle are respectively θ 1, θ 2, θ 3, wherein θ 1 is 76.37 °, θ 2 is 64.80 °, θ 3 is 55.80 °, R25, R24 are the interior external diameter of first order moving vane, R25=20mm, R24=30mm; R23, R22 are the interior external diameter of second level moving vane, R23=42mm, R22=52mm; R21, R26 are the interior external diameter of third level moving vane, R21=68mm, and R26=80mm, the latter half part of third level moving vane is protruding, forms cantilever structure; B21, B22, B23 are the thickness of first, second and third grade blade, are 2mm in this example.
Concrete processing is as follows: go out three outstanding round platforms with lathe tool at the blade position of leaf disc rotor end face car, size as shown in Figure 2, promptly earlier the part car of radius less than R25 gone, car removes the dark 5mm of being of part, and then radius gone less than the part car of R23 greater than R24, the degree of depth still is 5mm, at last radius is gone less than the part car of R21 greater than R22.Work in-process processes first and second grade moving vane with the rod milling cutter in the heart, and the moving plate height is 5mm.Work in-process processes the shape integral body of third level blade according to first order blade with the rod milling cutter in the heart, and the degree of depth is 5mm; Begin to mill out cantilever structure then, and with cantilever structure root rounding; At last at the bull lathe Hall dimension gram spiral chute of getting on the bus out.
Fig. 3 is the planimetric map of stator blade, and wherein R31, R32 are the interior external diameter of first order stator blade, and R31=32, R32=40, R33, R34 are the interior external diameter of second level stator blade, R33=54, R34=66; θ 31, θ 32 are first and second grade stator blade and diametric angle, θ 31=62 °, θ 32=75 °; B31, B32 are the thickness of first and second grade blade, are 2mm in this example.The same moving vane of the processing mode of stator blade.
Fig. 4 is the schematic representation of dynamic and static blade assembly relation.Wherein, 41 is that top cover stator blade dish, 42 is leaf disc rotor, 43 pump cases for support top cover stator blade dish.During assembling, at first leaf disc rotor is installed, load onto pump case in its outside then, at last the top cover stator blade is anchored on the pump case, make stator blade and moving vane cross-distribution on diametric(al), the height that can change pump case is adjusted the intersection length of moving vane and stator blade.
Claims (6)
1. miniature molecular pump, wherein process the moving vane of vertical end face downwards at the rotor end face, moving vane is angled with diametric(al), this rotor is called leaf disc rotor, the leaf disc rotor top part of collocation with it is a top cover stator blade dish, top cover stator blade dish is supported on above the rotor by pump case, lower half portion of top cover stator blade dish is a stator blade, stator blade and diametric(al) are angled, there are assembly relation in stator blade and moving vane: stator blade is in the middle of the spaced radial that is inserted in moving vane from top to bottom, be not in contact with one another between the sound blade, intersection exists on diametric(al), adjusts the degree of depth that stator blade inserts moving vane by the height of regulating pump case.
2. according to the miniature molecular pump in the claim 1, wherein the progression of moving vane is 1～3 grade, and stator blade lacks one-level than moving vane.
3. according to the miniature molecular pump in the claim 1, wherein dynamic and static blade and diametric angle are 0 °～90 °.
4. according to the miniature molecular pump in the claim 1, wherein the from inside to outside back one-level number of blade of blade is no less than the number of blade of previous stage blade.
5. according to the miniature molecular pump in the claim 4, wherein the front half part of afterbody moving vane is on end face, and latter half part is a cantilever structure.
6. according to the miniature molecular pump in the claim 5, the ratio of afterbody moving vane cantilever structure latter half part blade height and front half part blade height is between 1/1～3/1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2008101758270A CN101403388A (en) | 2008-11-05 | 2008-11-05 | Miniature molecular pump utilizing leaf disc rotor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2008101758270A CN101403388A (en) | 2008-11-05 | 2008-11-05 | Miniature molecular pump utilizing leaf disc rotor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101403388A true CN101403388A (en) | 2009-04-08 |
Family
ID=40537498
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2008101758270A Pending CN101403388A (en) | 2008-11-05 | 2008-11-05 | Miniature molecular pump utilizing leaf disc rotor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101403388A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108678975A (en) * | 2018-07-17 | 2018-10-19 | 中国工程物理研究院机械制造工艺研究所 | A kind of anti-vibration molecular pump |
| CN112160919A (en) * | 2020-09-28 | 2021-01-01 | 东北大学 | Turbo molecular pump and composite molecular pump comprising same |
-
2008
- 2008-11-05 CN CNA2008101758270A patent/CN101403388A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108678975A (en) * | 2018-07-17 | 2018-10-19 | 中国工程物理研究院机械制造工艺研究所 | A kind of anti-vibration molecular pump |
| CN112160919A (en) * | 2020-09-28 | 2021-01-01 | 东北大学 | Turbo molecular pump and composite molecular pump comprising same |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10400778B2 (en) | Pump with front deflector vanes, wear plate, and impeller with pump-out vanes | |
| CN101523056B (en) | Centrifugal compressor | |
| CN1854529A (en) | A centrifugal pump and an impeller thereof | |
| US10344866B2 (en) | Seal assembly for abrasion resistant bearing of centrifugal pump | |
| CN101403388A (en) | Miniature molecular pump utilizing leaf disc rotor | |
| CN102182691A (en) | Modular pump unit used in multi-stage pump | |
| CN106489034B (en) | Thrust bearing and rotating machinery | |
| CN201318296Y (en) | Small-sized molecular pump adopting blade disc rotor | |
| CN102182703A (en) | Efficient non-plugging discontinuous impeller of vane pump | |
| CN1142017A (en) | Multi-stage centrifugal compressor, impeller and production method of same | |
| CN204384296U (en) | A kind of rigid impeller feeding machine with roller | |
| CN1120937C (en) | Thrust balance device | |
| CN103939367A (en) | Rotary vacuum pump | |
| CN105324578A (en) | Vacuum pump | |
| US10670025B2 (en) | Centrifugal compressor | |
| CN104047871B (en) | Vavuum pump | |
| CN1862029A (en) | Bucket screw centrifugal vane of fan and application method of said vane in fluid delivering thereof | |
| CN105090019A (en) | Shaft center axis centering sliding plate rotor pump | |
| CN202065242U (en) | Intermediate stage blade of air compressor with hub diameter of Phi 762 | |
| CN108331749B (en) | Vortex compressor for correcting head root chamfer of dynamic and static disc molded line and correction method | |
| CN1896528A (en) | Rotary compressor with supporting rotation-axis at both ends | |
| JP4457008B2 (en) | Exhaust system | |
| CN2701807Y (en) | Material block proof device for screw conveyer | |
| CN1928369A (en) | Magnetic centrifugal pump | |
| CN202510360U (en) | Roller oil pump |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20090408 |