CN101399149B - Discharge lamp device - Google Patents
Discharge lamp device Download PDFInfo
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- CN101399149B CN101399149B CN2008101662827A CN200810166282A CN101399149B CN 101399149 B CN101399149 B CN 101399149B CN 2008101662827 A CN2008101662827 A CN 2008101662827A CN 200810166282 A CN200810166282 A CN 200810166282A CN 101399149 B CN101399149 B CN 101399149B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H01J61/0735—Main electrodes for high-pressure discharge lamps characterised by the material of the electrode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
- H01J61/366—Seals for leading-in conductors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
- H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
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- Discharge Lamp (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
Abstract
The present invention provides an electric discharge lamp device which is sufficiently actualized with the countermeasure which is used for preventing the high temperature generated by the large ouput of electric discharge lamp and is sufficiently actualized with the countermeasure that is used for preventing the electrode loss. The electric discharge lamp device according to the invention is characterized by comprising the following components: the electric discharge lamp (10) which is relatively configured with a pair of electrodes (2, 3) in the luminous tube, and a measuring unit (30) which monitors the lighting state of electric discharge lamp (10). The measuring unit (30) monitors the light radiation generated by the heat transmission object (M) from the inner part caused by the attrition or dilapidation of electrode along with the lighing of electric disharge lamp (10).
Description
Technical field
The present invention relates to a kind of discharge lamp deivce.Especially the discharge lamp deivce that relates to the short arc discharge lamp that uses on the exposure device of liquid crystal or semiconductor wafer.
Background technology
Discharge lamp can be categorized into several lamps on the viewpoint of luminescent substance, interelectrode distance, luminous tube internal pressure, wherein aspect luminescent substance, can be categorized into xenon-133 gas as the xenon lamp of luminescent substance, with mercury as the mercury vapor lamp of luminescent substance, with the rare earth metal beyond the mercury as the metal halide lamp of luminescent substance etc.In addition, on the viewpoint of interelectrode distance, can be categorized into the short short arc discharge lamp of interelectrode distance, the long long arc type discharge lamp of interelectrode distance.And then, on the viewpoint of the vapour pressure in luminous tube, can be categorized into low-pressure discharge lamp, high-pressure discharge lamp, ultra-high pressure discharge lamp.
Wherein, for the short-arc type high-pressure mercury-vapor lamp, as luminous tube, the gap configuration of tungsten system electrode about with 2～12mm be in luminous tube inside with the high quartz glass of heat resisting temperature, and then enclose as luminescent substance in luminous tube inside that vapour pressure is 10 when lighting
5Pa～10
7Rare gas such as the mercury of Pa, argon.
This short-arc type high-pressure mercury-vapor lamp, it is short and obtain the advantage of high brightness to have an interelectrode distance, therefore uses the exposure light source in lithography widely all the time.
On the other hand, in recent years, be not only semiconductor wafer, also receive publicity as being used in the exposure light source of the crystal liquid substrate on crystal liquid substrate, especially the large-area liquid crystal display, the viewpoint of the output from improve manufacturing process also requires the big outputization as the lamp of light source consumingly.
Because the big outputization of discharge lamp makes when specified power consumption changes, though the current value that flows through on the discharge lamp depends on the design load of current/voltage, can become big substantially.
Therefore, it is many to cause that electrode (especially direct current light anode) is subjected to the quantitative change of electron collision, heats up and the problem of fusion easily.In addition, be not only anode, in vertical direction in Pei Zhi the discharge lamp, the electrode that is positioned at upside is subjected to influences such as the thermal convection of luminous tube and is subjected to heat from electric arc easily, understands high temperatureization and fusion equally.
In addition, if electrode, especially its fore-end fusion, electric arc instability not only then, but also produce the material evaporation that constitutes electrode and the inner surface that is attached to luminous tube causes radiating the problem that output descends.
This phenomenon is not limited to the short-arc type high-pressure mercury-vapor lamp, but the problem that when making the big output of discharge lamp, generally produces, proposed to force to give air cooled structure or method in the past, and proposed in addition on the bigger discharge lamp of output the so-called water-cooling type discharge lamp (for example No. the 3075094th, Japan Patent) that the stream of cooling water makes cooling water flow in electrode interior to be set in electrode interior in the outer setting air cooling mechanism of discharge lamp.
And then, the structure (the Japan Patent spy opens 2004-6246 number) of thermal conductors such as inclosure silver, copper in this space has been proposed as be provided with empty confined space in electrode interior.Thermal conductor is made of the fusing point metal lower than the metal that constitutes electrode body, when lamp is lighted, utilizes convection action, the boiling reception and registration effect of the thermal conductor of liquid condition, and the heat of electrode front end is delivered to the rear portion effectively.
Yet, adopt the electrode of above-mentioned structure, though compare the problem that can solve export license, be not that export license is suppressed fully with electrode in the past.When export license, discharge is subjected to the influence of loss shape and obviously unstable, in the worst case, also can cause to form perforate and make the problem that thermal conductor spills on electrode body.In addition, also exist because the crack that the electrode body raw material cause etc. cause the electrode body breakage to spill the possibility of thermal conductor.
Patent documentation 1: the Japan Patent spy opens 2004-6246 number
Summary of the invention
The problem that the present invention solves is, point in view of the above problems, a kind of discharge lamp deivce is provided, the countermeasure of the high temperatureization of fully implementing reply to be accompanied by the big outputization of discharge lamp and producing, and also fully possess the situation, electrode body of reply export license countermeasure because of the damaged situation of raw material.
In order to solve above-mentioned problem, discharge lamp deivce of the present invention is characterised in that, comprise: the discharge lamp that disposes pair of electrodes in the inside of luminous tube relatively, measuring unit with the illuminating state that monitors this discharge lamp, at least one electrode of above-mentioned discharge lamp, by the electrode body that is formed with confined space in inside, constitute with the metal that has than the low-melting fusing point of the metal that constitutes this electrode body that is enclosed in this confined space, and above-mentioned measuring unit is accompanied by lighting of this discharge lamp to above-mentioned thermal conductor and produces when above-mentioned electrode body spills, the luminous detection that causes by the metal that constitutes thermal conductor.
And then be characterised in that above-mentioned measuring unit detects by cause luminous of the metal that constitutes thermal conductor and can be by the light of the luminous wavelength of the metal that constitutes this thermal conductor, thereby detect the variation of its ratio.
And then be characterised in that above-mentioned electrode body is made of the metal that with tungsten is principal component.
And then be characterised in that above-mentioned thermal conductor contains any metal of gold, silver and copper.
Discharge lamp deivce of the present invention is according to above-mentioned structure, even under situation because of export license or the damaged thermal conductor that spills electrode interior, detect the luminous of the metal constitute thermal conductor by measuring unit, thereby also can detect the unusual of this discharge lamp deivce, stop discharge tube lighting, prevent to continue to light under the abnormality.
Description of drawings
Fig. 1 represents the whole pie graph of discharge lamp deivce of the present invention.
Fig. 2 represents the overall diagram of discharge lamp of the present invention.
Fig. 3 represents the electrode of discharge lamp of the present invention.
Fig. 4 represents the illumination change of discharge lamp.
Fig. 5 represents the illumination change of discharge lamp.
Fig. 6 represents to be detected by the present invention the flow chart of illumination change.
Embodiment
Fig. 1 is the skeleton diagram of the unitary construction of expression discharge lamp deivce of the present invention.Discharge lamp deivce of the present invention serve as necessaryly to constitute with discharge lamp 10 and the measuring unit 30 that detects the radiating light of discharge lamp, and then has the electric supply installation of lighting 40 of controlling discharge lamp 10.Electric supply installation 40 is the devices to discharge lamp 10 supplying electric currents, also has the illuminating state that detects discharge lamp 10, for example lights the mechanism that electric power carries out FEEDBACK CONTROL.Concave mirror 50 is installed on discharge lamp 10.
Fig. 2 represents the enlarged drawing of discharge lamp 10.The luminous tube of discharge lamp 10 is made of quartz glass, is connected with closure 12 integratedly at the two ends of roughly spherical illuminating part 11.Dispose anode 2 and negative electrode 3 in this illuminating part 11 relatively, each electrode (2,3) is kept by closure 12 respectively, wherein is connected to outer lead rod 13 via not shown metal forming, is connected to the electric supply installation 40 of Fig. 1.
In addition, enclosing luminescent substances such as mercury that scheduled volume is arranged, xenon, argon in illuminating part 11 has reached and has employed gas.In addition, discharge lamp is from electric supply installation 40 supply capabilities the time, and is luminous by carrying out arc discharge by anode 2 and negative electrode 3.In addition, this discharge lamp is the so-called discharge lamp of vertically lighting type, is last with anode 2, is that the tubular axis of illuminating part 11 is supported on the direction with respect to the earth approximate vertical and is lighted down with negative electrode 3.
Fig. 3 represents the cross-section structure of anode 2.Anode 2 has the electrode body 20 and the thermal conductor M of portion within it.Electrode body 20 is that the alloy of principal component constitutes by refractory metal or with the refractory metal, has the container shapes that is formed with confined space S (after, be also referred to as " inner space ") in inside.Thermal conductor M is the metal that is enclosed in the inside of electrode body 20 airtightly, and the metal lower than the metal that constitutes electrode body 20 by fusing point constitutes.
As the metal that constitutes electrode body 20, adopt the refractory metals of fusing point more than 3000 (K) such as tungsten, rhenium, tantalum.Especially, tungsten because of the thermal conductor M with inside be not easy reaction preferably it, and then preferred purity is at the so-called pure tungsten more than 99.9%.
In addition, as being the alloy of principal component with the refractory metal, for example can adopt with tungsten is the tungsten-rhenium alloy of principal component.The patience height of the repeated stress of reply during high temperature can be realized the long lifetime of electrode.
Thermal conductor M is made of the fusing point metal lower than the metal that constitutes electrode body 20.Particularly, with tungsten during, can adopt gold, silver, copper or as the alloy of principal component as thermal conductor M as the constituent material of electrode body 20.Above-mentioned gold, silver, copper can not become alloy with tungsten, thereby are preferred metals on the meaning of working as the heat transfer body yet.Wherein, gold is a high price, thereby silver, copper are preferable material on reality is used.
In addition, as other concrete example, when using rhenium, can use tungsten as thermal conductor M as the metal that constitutes electrode body 20.
Adopt the advantage of rhenium to be as the metal that constitutes electrode body 20, have in inclosure under the situation of the mercury vapor lamp of halogen or metal halide lamp, can prevent electrode corrosion, realize the long lifetime of discharge lamp thus.
Therefore, discharge lamp of the present invention, need supply the mechanism of coolant, discharge coolant from the outside unlike the water-cooling type discharge lamp, not only can keep cooling body with very simple structure, and if make the single step of releasing electric light, then reach till the life-span of discharge lamp, do not need supply of carrying out thermal conductor etc., can make cooling body bring into play function constantly.
That is, the outside of the big output power type discharge lamp of Ti Chuing beyond discharge lamp depended on cooling body in the past, and be relative therewith, and discharge lamp of the present invention has on the refrigerating function this point with very simple structure at lamp itself a great difference is arranged.
Measuring unit 30 by near the input lens the opening that is installed in concave mirror 31, be conveyed into the light that is mapped to input lens 31 conveyer lines such as optical fiber 32, be arranged at the terminal of conveyer line 32 and radiating light testing agency 33 that the radiating light of discharge lamp 10 is analyzed, and signal processing mechanism 34 constitute.
Conveyer line 32 adopts optical fiber etc., and the light of serving as the predetermined wavelength that will receive at input lens 31 is sent to the effect of radiating light testing agency 33.
Radiating light testing agency 33 comprises the transducer of reception by the light of the predetermined wavelength of conveyer line 32 guiding, serves as the light quantity that transducer is received and converts suitable action of electric signals to.Signal processing mechanism 34 is the signal of telecommunication and the reference level mechanisms relatively that will be received by radiating light testing agency 33, display abnormality state when the signal of telecommunication of guiding surpasses reference level.In addition, input lens 31, conveyer line 32 are not integral formation, can directly receive light by conveyer line 32 yet, or radiating light testing agency 33 is configured in the position of direct reception from the radiating light of lamp, omit input lens 31, conveyer line 32.
The light of the predetermined wavelength that should detect in radiating light testing agency 33 is necessary for the light of the luminous wavelength of the metal that constitutes the thermal conductor in the confined space that is enclosed in electrode body.For example, when adopting gold as thermal conductor, at only wavelength 460nm, the wavelength 479nm of radiating light testing agency 33 detections, the light of wavelength 751nm, when adopting silver as thermal conductor is the light of wavelength 521nm, wavelength 769nm, wavelength 827nm, is the light of wavelength 325nm, wavelength 465nm, wavelength 511nm, wavelength 522nm when adopting copper as thermal conductor.
In addition, measuring unit 30 not only detects the light of the wavelength that is produced by the metal that constitutes thermal conductor, also can detect not the light of the wavelength that can be produced by the metal that constitutes this thermal conductor on the contrary in the lump.This wavelength is the light of wavelength 500nm when enclosing gold as thermal conductor for example, the light of wavelength 520nm, the light of wavelength 600nm, the light of wavelength 650nm, when enclosing silver as thermal conductor is the light of wavelength 460nm, the light of wavelength 600nm, the light of wavelength 650nm, when enclosing copper as thermal conductor is the light of wavelength 600nm, the light of wavelength 650nm, the light of wavelength 490nm, the reason that detects above-mentioned light as described later, obtain originally by the metal that constitutes thermal conductor cause luminous, light quantity ratio with the light of the wavelength of the influence of the metal that is not constituted thermal conductor helps the change-detection abnormality from this irradiation ratio.
At this, to because the phenomenon of anode 2 losses of discharge lamp 10 and discharge instability, the disrepair phenomenon that causes by the electrode body raw material, and the phenomenon that spills from the inner space of electrode body of thermal conductor describe.Though anode is made of refractory metals such as tungsten, along with the process of the time of lighting, the material that constitutes this anode can evaporate, loss.Especially, concentrate on locally at electric arc under the situation of a part etc. of anode surface, it is fierce that the loss at this position becomes, and finally breaks electrode body.In addition, when slight crack, cavity etc. are arranged on electrode body, can descend, thereby damaged possibility is arranged in local strength.No matter under any circumstance, all can form and be enclosed in the path that inner thermal conductor spills to discharge space, therefore produce the spilling of thermal conductor of liquid or gaseous state.
The illumination change of the discharge lamp when Fig. 4 represents that discharge lamp 10 is absorbed in unusual illuminating state.That is, be used to illustrate how discharge lamp deivce of the present invention detects the figure of unusual illuminating state.In the drawings, the longitudinal axis is represented the illumination of the light of sensor wavelength 521nm, is promptly radiated illumination, and transverse axis represents to light the elapsed time (branch).Radiation illumination is represented being the relative value of benchmark in the illumination of stablizing the wavelength 521nm that observes under the illuminating state.Particularly, light discharge lamp 10, for example can select the brightness value under the stable state of lighting after 60 minutes.In addition, the example of Fig. 4 is following example, and discharge lamp 10 is a structure shown in Figure 2, and inclosure has mercury and xenon as luminescent substance in illuminating part 11, and inclosure has silver as thermal conductor M in electrode body 20.
In the drawings, time-20～time 0 is the discharge lamp 10 stable time bands of lighting.And,, be enclosed in inner silver and in emitting space, spill from electrode body 20 beginnings in the time 0.This moment, in emitting space, except the mercury of original luminescent substance, xenon, newly sneak into silver, as the luminous light that radiates wavelength 521nm consumingly of silver, the result is radiated illumination and is sharply risen.In addition, the radiation illumination of wavelength 521nm reduces after sharply rising in the time 0 gradually.This is to decay because the silver of thermal conductor formation metal is attached to the luminous tube inner surface to emit to the light quantity of lamp outside.
Radiating light testing agency 33 is judged as abnormality when the relative value that detects light surpasses predetermined thresholding.Even thresholding should be taken into account stablizing the situation that detection light also can change under the illuminating state and is set at than the high a certain degree of common stable state.In addition, when detecting above-mentioned abnormality, preferably set lasting detection time.Particularly, detected relative illumination continues the scheduled time (t1) at least and is identified as unusual illuminating state when surpassing thresholding.This is owing to the illumination change with moment property is considered as error.
In addition, the duration that preferably surpasses thresholding for the relative illumination value that detects is provided with higher limit (t2).At this moment, even surpass the scheduled time (t1) and surpass thresholding with detected relative illumination value, can not arrive yet and continue to surpass thresholding as condition till surpassing upper limit time t2 (t2〉t1), in other words, the relative illumination value that detects with through time (t2) of higher limit the time is lower than thresholding as the condition of lighting unusually.
This point is based on the distinctive reason of discharge lamp of the present invention.That is, constitute metal from thermal conductor and sneak into emitting space when beginning time through a certain degree, this thermal conductor constitutes the inner surface that metal begins to be attached to luminous tube.So, though the original light that produces the wavelength 521nm that should be detected by radiating light testing agency 33 in emitting space is constituted the metal shading and is not radiated to the lamp outside by the thermal conductor that is attached to inner surface, the illumination decline that the result is detected.
At this, the lower limit (t1) that continues detection time less is subjected to the influence of lamp kind, can be not according to the lamp kind for example be set at 0.5 second～10 seconds.But, continue kind or the environment for use of the higher limit (t2) of detection time according to lamp, for example kind of the enclosed volume of the physics size of emitting space, thermal conductor, thermal conductor, lamp environment temperature, optimum value can be inequality.Enumerate an example, begin to be set at 15 minutes from surpassing thresholding～20 minutes.In Fig. 4, thresholding is 20, and higher limit t2 for example was set to 20 minutes.Therefore, the time that the relative illumination value that preferred radiating light testing agency 33 is detected surpasses threshold value is no more than higher limit (t2) more than lower limit (t1).
In addition, when the relative illumination value that detects surpasses higher limit (t2), will consider because other except thermal conductor spills is former thereby abnormity point is bright.Therefore, when the relative illumination value that detects continues to surpass thresholding during upper limit time t2, can discern or be speculated as by with it is considered herein that it is lighting unusually of causing of other different reason of lighting unusually of problem, and tackled.
Fig. 5 also represents the illumination change of discharge lamp, expression based on the situation of Fig. 4 detection method inequality.Particularly, the detection method that Fig. 4 represents is directly to detect the method that is made of the radiating light that spilling of metal cause thermal conductor, relative therewith, the detection method that Fig. 5 represents is to detect the method that is constituted the illumination of radiating light that spilling of metal cause and light relatively, the variation of the illumination ratio of two light is detected by thermal conductor.In the drawings, the left longitudinal axis is represented to constitute the radiation illumination of the radiating light that spilling of metal cause and the radiation illumination of light relatively by thermal conductor, and the right longitudinal axis is represented two ratios of radiation illumination relatively, and transverse axis represents to light the elapsed time (branch).Radiation illumination represents that with the radiation illumination of stablizing illuminating state be the relative value of benchmark.Discharge lamp 10 is structures shown in Figure 2, and enclosing silver with inclosure mercury and xenon in illuminating part 11 as luminescent substance, in electrode body 20 is example as thermal conductor M.The light that radiating light testing agency sets wavelength 521nm is as the detection that is made of the radiating light that spilling of metal cause thermal conductor, and the light of setting wavelength 420nm is light as a comparison.
In the time 0, time-20～time 0 is the discharge lamp 10 stable time bands of lighting.And in the time 0, in the part generation be full of cracks of electrode body 20, the silver that is enclosed in electrode body 20 inside begins to spill in emitting space.In this moment, in emitting space, except the mercury of original luminescent substance, xenon, newly sneak into silver, as the luminous light that radiates wavelength 521nm consumingly of silver, the result is radiated illumination and is sharply risen.
As mentioned above, the radiation illumination of wavelength 521nm reduces after sharply rising in the time 0 gradually.On the other hand, relatively the radiation illumination of the 460nm of light the time 0 (thermal conductor spills the time started) before the relative illumination value be 10, if the elapsed time 0 then reduces gradually.The reason that illumination reduces is identical with the reduction reason of wavelength 521nm, be since the silver-colored inner surface that is attached to luminous tube and comparison light also by shading.Therefore, under the situation of this detection method,, can keep the constant value afterwards, therefore detect unusual illuminating state easily though the illumination ratio sharply rose in the time 0.In addition, radiation illumination ratio begins to reduce gradually in the time of about 50 minutes from process.This is almost completely to spill the exit dose of the light of wavelength 521nm minimizing itself owing to be enclosed in the thermal conductor M of electrode body.
Like this, directly do not detect by thermal conductor and constitute the luminous variation that metal causes, but detect and the method for the variation of the illumination ratio of light relatively, can continue to represent the state of abnormality for a long time, thereby detect and carry out easily, maybe can guarantee the time that operating personnel can judge.In addition, even under the situation that is subjected to electromagnetic interference etc. from the outside, because detect luminous signal system that thermal conductor constitutes metal, the luminous signal of light is that the two is affected under the same conditions with detecting relatively, thereby both ratios also can be considered and are difficult to affected numerical value.And then, the increase and decrease lamp light power the time etc., thermal conductor constitutes the luminous of metal and relatively luminous the two increase and decrease of light, thereby both ratios also can be considered and are difficult to affected numerical value.
In addition, the wavelength that needs radiating light testing agency 33 to detect is the radiation wavelength that the metal as thermal conductor causes.On the other hand, relatively light not to be the thermal conductor emission wavelength that constitutes metal, and not react affected wavelength as condition with luminescent substances such as mercury, xenons because of thermal conductor constitutes metal.In addition, 33 uses of preferred radiating light testing agency detect detecting light with the relative value of the illumination of the identical wavelength of stable illuminating state.Even this is because stablizing under the illuminating state also the light of radiation detection wavelength to a certain extent.In the above-described embodiments, discern relative value as benchmark, when thresholding is above, be identified as abnormality in this relative value with the illumination of stablizing under the illuminating state.
In addition, when detecting above-mentioned abnormality, it is identical with the detection method of above-mentioned Fig. 4 to set the lower limit (t1) that continues detection time.On the other hand, the necessity of the higher limit (t2) that setting continues detection time in this detection method is less.This be because, the illumination ratio is constant to keep for a long time at high proportion as shown in Figure 5.Keeping constant example like this is the less situation of change of leakage, even when leakage has very cataclysm, produces change though thermal conductor constitutes the luminous variation of metal, and ratio also has change thus, but also keeps high level easily for a long time.
Fig. 6 is a detection method shown in Figure 5, is that expression detects by thermal conductor and constitutes the radiating light that spilling of metal cause and the illumination of light relatively, detects the flow chart of method of variation of the illumination ratio of two light.
In step 1, input is from the signal S1 and the signal S2 of measuring unit 30.Signal S1 is the signal that is made of the relative radiation brightness value of the radiating light that spilling of metal cause thermal conductor, and signal S2 is the signal of the relative radiation brightness value of comparison light.Above-mentioned action is undertaken by signal processing mechanism 34.
In step 2, form illumination scaling signal S3 (S1/S2) by signal S1 and signal S2.This action is for example undertaken by the illumination ratio generation mechanism of signal processing mechanism 34.
In step 3, carry out the comparison of illumination scaling signal S3 and thresholding.When illumination scaling signal S3 is lower than thresholding, get back to step 1.On the other hand, when illumination scaling signal S3 is higher than thresholding, enter next step.This action is for example undertaken by the comparison mechanism of signal processing mechanism 34.
In step 4, when illumination scaling signal S3 is higher than thresholding, give the alarm.This alarm can be a sound, also can be the sense of vision technique of expression, perhaps also can be that vibration waits other method.
In step 5, operating personnel stop alarm, or make it to stop automatically when alarm continues.
As mentioned above, discharge lamp deivce of the present invention, be included in luminous tube inside and dispose the discharge lamp of pair of electrodes relatively, measuring unit with the illuminating state that monitors this discharge lamp, at least one electrode of above-mentioned discharge lamp, by the electrode body that is formed with confined space in inside, constitute with the metal that has than the low-melting fusing point of the metal that constitutes this electrode body that is enclosed in this confined space, and above-mentioned measuring unit has following structure, to being accompanied by lighting of this discharge lamp and loss owing to above-mentioned electrode body, or damaged produce when causing above-mentioned thermal conductor to spill, the luminous detection that causes by the metal that constitutes thermal conductor, by above-mentioned structure, even when the thermal conductor of electrode interior spills, detect the luminous of the metal constitute thermal conductor by measuring unit, thereby also can detect the unusual of this discharge lamp deivce, stop discharge tube lighting, prevent to continue to light under the abnormality.
Claims (4)
1. discharge lamp deivce comprises: disposes the discharge lamp of pair of electrodes in the inside of luminous tube relatively and monitors the measuring unit of the illuminating state of this discharge lamp, it is characterized in that,
At least one electrode of above-mentioned discharge lamp, be included in inside be formed with confined space electrode body, be enclosed in the thermal conductor of having in this confined space than the low-melting fusing point of the metal that constitutes this electrode body, and
The luminous detection that produces when above-mentioned measuring unit spills above-mentioned thermal conductor, cause by the metal that constitutes thermal conductor.
2. discharge lamp deivce as claimed in claim 1 is characterized in that,
Above-mentioned measuring unit detects by cause luminous of the metal that constitutes thermal conductor and can not detect the variation of its ratio by the light of the luminous wavelength of the metal that constitutes this thermal conductor.
3. discharge lamp deivce as claimed in claim 1 or 2 is characterized in that,
Above-mentioned electrode body is made of the metal that with tungsten is principal component.
4. discharge lamp deivce as claimed in claim 1 or 2 is characterized in that,
Above-mentioned thermal conductor contains any metal of gold, silver and copper.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007-254074 | 2007-09-28 | ||
| JP2007254074A JP4396752B2 (en) | 2007-09-28 | 2007-09-28 | Discharge lamp device |
| JP2007254074 | 2007-09-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101399149A CN101399149A (en) | 2009-04-01 |
| CN101399149B true CN101399149B (en) | 2011-12-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101662827A Expired - Fee Related CN101399149B (en) | 2007-09-28 | 2008-09-25 | Discharge lamp device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4396752B2 (en) |
| KR (1) | KR100954660B1 (en) |
| CN (1) | CN101399149B (en) |
| TW (1) | TWI412059B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103165398A (en) * | 2013-04-09 | 2013-06-19 | 连云港锦绣光电有限公司 | Thorium-free tungsten electrode for halogen lamp |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001075177A (en) * | 1999-09-03 | 2001-03-23 | Sony Corp | Light source device and video projection device |
| CN1453820A (en) * | 2002-04-26 | 2003-11-05 | 优志旺电机株式会社 | Discharge tube |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10222100A1 (en) * | 2002-05-17 | 2003-11-27 | Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh | Dielectric barrier discharge lamp for producing visible, ultraviolet, vacuum ultraviolet and infrared radiation has base with tube fitted to lamp foot end of discharge vessel and enclosing lamp foot |
| JP4815839B2 (en) * | 2005-03-31 | 2011-11-16 | ウシオ電機株式会社 | High load high intensity discharge lamp |
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2007
- 2007-09-28 JP JP2007254074A patent/JP4396752B2/en not_active Expired - Fee Related
-
2008
- 2008-06-13 TW TW097122279A patent/TWI412059B/en not_active IP Right Cessation
- 2008-07-10 KR KR1020080066981A patent/KR100954660B1/en not_active IP Right Cessation
- 2008-09-25 CN CN2008101662827A patent/CN101399149B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001075177A (en) * | 1999-09-03 | 2001-03-23 | Sony Corp | Light source device and video projection device |
| CN1453820A (en) * | 2002-04-26 | 2003-11-05 | 优志旺电机株式会社 | Discharge tube |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009087640A (en) | 2009-04-23 |
| KR100954660B1 (en) | 2010-04-27 |
| CN101399149A (en) | 2009-04-01 |
| KR20090032944A (en) | 2009-04-01 |
| TWI412059B (en) | 2013-10-11 |
| TW200915376A (en) | 2009-04-01 |
| JP4396752B2 (en) | 2010-01-13 |
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