CN101391757A - Process for preparation of nitrogen gas - Google Patents

Process for preparation of nitrogen gas Download PDF

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Publication number
CN101391757A
CN101391757A CNA2008101549241A CN200810154924A CN101391757A CN 101391757 A CN101391757 A CN 101391757A CN A2008101549241 A CNA2008101549241 A CN A2008101549241A CN 200810154924 A CN200810154924 A CN 200810154924A CN 101391757 A CN101391757 A CN 101391757A
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CN
China
Prior art keywords
nitrogen
air
adsorption tower
molecular sieve
adsorption
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2008101549241A
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Chinese (zh)
Inventor
何永成
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Changzhou Xinghai Semiconductor Device Co Ltd
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Changzhou Xinghai Semiconductor Device Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Changzhou Xinghai Semiconductor Device Co Ltd filed Critical Changzhou Xinghai Semiconductor Device Co Ltd
Priority to CNA2008101549241A priority Critical patent/CN101391757A/en
Publication of CN101391757A publication Critical patent/CN101391757A/en
Pending legal-status Critical Current

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Abstract

The invention relates to a nitrogen gas preparation method comprising an air compressor, a filter and an absorbing tower. The method adopts air as an material and the air compressor for controlling the air pressure to be 0.76MPa to 0.8MPa; the compressed air is filtered by the filter for removing oil and being dried and then the filtered air is transferred to the absorbing tower in which the adsorbent formed by carbon molecules is arranged and adopted to effectively absorb the oxygen from air so as to obtain the nitrogen gas. The method has the benefits that the cost is low and the purity of prepared nitrogen is high.

Description

The preparation method of nitrogen
Technical field
The present invention relates to a kind of preparation method of nitrogen.
Background technology
In the semicon industry, use nitrogen very universal as shielding gas.Nitrogen colorless and odorless non-combustible gas is insoluble in water, and chemical property is highly stable, is difficult for reacting with other materials.Most of in the past enterprises use liquid nitrogen, place large-scale liquid nitrogen tank and store, and regular groove tank car replenishes liquid nitrogen.Because high pressure gas are stored, transportation all is to beat very much big trouble, if can own aerogenesis will be very welcome.Use Asia Xiao Suan Na and Lvization reflection can prepare nitrogen, but the input of this kind method is too big, cost is surprising, also can make liquefaction of air become liquid-air, utilize the boiling point (low) of nitrogen different with other gases, with a minute slide method Will nitrogen separation, but the oxygen that often contains trace in the nitrogen of gained, the purity of this nitrogen does not reach service requirements, and the content of nitrogen is 78% in air, if can extract nitrogen from air, and be highly purified nitrogen, be that most of companies wish the problem that solves can reduce cost the influence of not transported again, storing.
Summary of the invention
The present invention is directed to the cost that exists in above-mentioned technology problem big, that purity is not high provides a kind of energy to extract highly purified nitrogen method, and the cost input ratio of this method is less.
Realize that technical scheme of the present invention is as follows:
The preparation method of nitrogen comprises air compressor, strainer, and this method is provided with left and right two adsorption towers, is provided with carbonaceous molecular sieve in this adsorption tower, and the step of preparation nitrogen is as follows:
The air admission air compressor compresses, and output pressure is 0.76MPa---the pressurized air of 0.8MPa;
Pressurized air is input in the strainer, removes airborne dust, oil gas and aqueous vapor;
Pressurized air is imported the carbonaceous molecular sieve that left adsorption tower is interior and left adsorption tower is interior and is contacted fully, under the pressure effect of air compressor, oxygen spreads adsorption rate much larger than the diffusion adsorption rate of nitrogen in the carbonaceous molecular sieve micropore in the carbonaceous molecular sieve micropore, carbonaceous molecular sieve adsorbs to fall airborne oxygen, discharges nitrogen;
When left adsorption tower adsorption of oxygen reaches balance, will import in the right adsorption tower through filtering pressurized air, when right adsorption tower adsorbed, left adsorption tower carried out regenerative operation, and this regenerative operation is that decompression discharges oxygen molecule.
Use the preparation method of the nitrogen of above-mentioned technology, with the air is that raw material is inexhaustible, nexhaustible, can be used alternatingly between two adsorption towers, using sorbent material is the molecular carbonaceous molecular sieve of high-quality carbon, the oxygen molecule under pressure change in the energy absorbed air, before reaching balance, the absorption oxygen molecule extracts nitrogen, this nitrogen gas purity height, adsorption tower can be reused, and cost is low.
Embodiment
The present invention is raw material with the air, utilize the high-quality carbonaceous molecular sieve of alternative adsorption of oxygen to be sorbent material, and applying pressure variation absorption method prepares nitrogen, principle is under the pressure effect, and oxygen spreads adsorption rate much larger than the diffusion adsorption rate of nitrogen in the carbonaceous molecular sieve micropore in the carbonaceous molecular sieve micropore.
Air is after the air compressor compression, after strainer dedusting, oil removing, drying, enter air accumulator, enter left adsorption tower through air inlet valve, left inspiration air valve, the carbonaceous molecular sieve layer is housed in the adsorption tower, the tower internal pressure raises, and pressure of compressed air is 0.76MPa, and the oxygen molecule in the pressurized air is adsorbed by carbonaceous molecular sieve, Xi Fu nitrogen does not pass adsorption bed, enter nitrogen storage tank through left sucking-off air valve, nitrogen aerogenesis valve, this process is referred to as a left side and inhales, and the time length is tens seconds.After end of processing was inhaled on a left side, left adsorption tower was communicated with by upper and lower equalizing valve with right adsorption tower, made two pressure towers reach balanced, and this process is referred to as all to press, and the time length is 2 ~ 3 seconds.After all pressing end, pressurized air enters right adsorption tower through air inlet valve, right inspiration air valve, and the oxygen molecule in the pressurized air is adsorbed by carbonaceous molecular sieve, and the nitrogen of enrichment enters nitrogen storage tank through right sucking-off air valve, nitrogen aerogenesis valve, this process is referred to as right the suction, and the time length is tens seconds.The oxygen of carbonaceous molecular sieve absorption discharges back in the middle of the atmosphere by the step-down of left bank air valve in the left adsorption tower simultaneously, and this process is referred to as desorb.Right tower was simultaneously also in desorb when otherwise left tower adsorbed.For the oxygen that step-down discharges in the molecular sieve is fully discharged in the atmosphere, nitrogen purges just at the adsorption tower of desorb by a back-flushing valve of often opening, and the oxygen in the tower is blown out adsorption tower.This process is referred to as blowback, and it and desorb are carried out simultaneously.After right suction finishes, enter pressure equalizing, switch to left suction process again, circulation always goes on.

Claims (1)

  1. The preparation method of nitrogen comprises air compressor, strainer, it is characterized in that, this method is provided with left and right two adsorption towers, is provided with carbonaceous molecular sieve in this adsorption tower, and the step of preparation nitrogen is as follows:
    The air admission air compressor compresses, and output pressure is 0.76MPa----the pressurized air of 0.8MPa;
    Pressurized air is input in the strainer, removes airborne dust, oil gas and aqueous vapor;
    Pressurized air is imported the carbonaceous molecular sieve that left adsorption tower is interior and left adsorption tower is interior and is contacted fully, under the pressure effect of air compressor, oxygen spreads adsorption rate much larger than the diffusion adsorption rate of nitrogen in the carbonaceous molecular sieve micropore in the carbonaceous molecular sieve micropore, carbonaceous molecular sieve adsorbs to fall airborne oxygen, discharges nitrogen;
    When left adsorption tower adsorption of oxygen reaches balance, will import in the right adsorption tower through filtering pressurized air, when right adsorption tower adsorbed, left adsorption tower carried out regenerative operation, and this regenerative operation is that decompression discharges oxygen molecule.
CNA2008101549241A 2008-10-30 2008-10-30 Process for preparation of nitrogen gas Pending CN101391757A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNA2008101549241A CN101391757A (en) 2008-10-30 2008-10-30 Process for preparation of nitrogen gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNA2008101549241A CN101391757A (en) 2008-10-30 2008-10-30 Process for preparation of nitrogen gas

Publications (1)

Publication Number Publication Date
CN101391757A true CN101391757A (en) 2009-03-25

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Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2008101549241A Pending CN101391757A (en) 2008-10-30 2008-10-30 Process for preparation of nitrogen gas

Country Status (1)

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CN (1) CN101391757A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103641102A (en) * 2013-12-24 2014-03-19 上海同助化工科技有限公司 Preparation method of coke oven gas debenzolization agent

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103641102A (en) * 2013-12-24 2014-03-19 上海同助化工科技有限公司 Preparation method of coke oven gas debenzolization agent

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Open date: 20090325