CN101388618B

CN101388618B - Micro actuator

Info

Publication number: CN101388618B
Application number: CN2007101454228A
Authority: CN
Inventors: 洪银树; 黄义佑
Original assignee: JIANZHUN DYNAMO IND CO Ltd
Current assignee: JIANZHUN DYNAMO IND CO Ltd; Sunonwealth Electric Machine Industry Co Ltd
Priority date: 2007-09-11
Filing date: 2007-09-11
Publication date: 2010-10-20
Anticipated expiration: 2027-09-11
Also published as: CN101388618A

Abstract

The invention relates to a mini-actuator, which is on a base plate and comprises a flat plate and a bushing, wherein the contact between the rear end of the flat plate and the base plate is in non-surface contact. Thereby, the mini-actuator can effectively lower friction, can lower driving voltage and can prolong the service life of components.

Description

Micro-actuator

Technical field

The present invention relates to a kind of micro-actuator, it improves shortcomings such as traditional micro-actuator assembly life-span weak point, driving voltage height by reducing contact area dull and stereotyped and substrate.

Background technology

Mini-fan (Micro Fan) includes two parts, the gentle breeze fan blade that the first is made with self-packaging technology (Self-assembly), and it two is with holding type actuator (Scratch DriveActuator; SDA) or bounce type actuator (Bounce Drive Actuator; BDA) micro motor of forming as rotor (Micro Motor).

As shown in Figure 1, with holding type actuator (Scratch Drive Actuator; SDA) for example its operating principle is described:

Holding type actuator is positioned on the substrate 12, and it includes dull and stereotyped 10 and one axle bush 11.

When flat board 10 and axle bush 11 are formed by capacitive structure, can on dull and stereotyped 10, obtain electrostatic force, when being added on dull and stereotyped 10 outside the periodic electrostatic force of tool, dull and stereotyped 10 just produce step motion on substrate 12, shown in b, c, d among the figure, the flat board 10 of micro-actuator and the stepwise operation between the substrate 12 are promptly described when adding square wave.

When adding a positive bias, dull and stereotyped 10 are attracted by substrate 12 because of electrostatic force, this is referred to as to roll over action in the wrong (snaping), but dull and stereotyped 10 the place aheads have axle bush 11, and whole flat area can't be adsorbed on the substrate 12 fully, therefore have electric charge and are temporary on dull and stereotyped 10, and then cause dull and stereotyped 10 to have elasticity tension, when positive bias strengthen to arrive absorption voltage (Priming Voltage), dull and stereotyped 10 produced moderate finite deformation and large tracts of land contact substrate 12 because of electrostatic force.

When voltage descended, this elasticity tension was released immediately, made dull and stereotyped 10 to return to the original form, and when release voltage, because axle bush 11 contacts with substrate 12 always, can allow whole dull and stereotyped 10 to advance.

When adding a back bias voltage again, dull and stereotyped 10 also can be adsorbed by substrate 12 and produce the action of repetition, make dull and stereotyped 10 continuous actions on substrate 12.

Because, traditional micro-actuator dull and stereotyped 10 and substrate 12 large-area frictions, so the big relative wear of friction area is big therebetween, thereby cause the life-span short and driving voltage is high, power consumption stream greatly, have the reversal development of moment simultaneously.So, the contact area of minimizing dull and stereotyped 10 and substrate 12, the power of reducing friction exactly, the key that reduce driving voltage, prolongs assembly life-span.

Summary of the invention

Main purpose of the present invention is to provide a kind of micro-actuator that can effectively reduce actuator flat board and substrate contacts area.

For achieving the above object, the present invention by the following technical solutions: a kind of micro-actuator, be positioned on the substrate, it comprises dull and stereotyped and an axle bush, it is characterized in that: contacting between described flat back and described substrate is non-contact.

In the technical scheme of the invention described above, be line between described flat back and the described substrate and contact.

In the technical scheme of the invention described above, be between described flat back and the described substrate and contact.

In the technical scheme of the invention described above, described flat back is the triangle kenel of convergent.

In the technical scheme of the invention described above, described flat back is the circular arc kenel.

In the technical scheme of the invention described above, the bottom surface of described flat back has at least more than one prominent point.

Adopt above technical scheme, flat back of the present invention is non-contact therebetween when contact substrate, can effectively fall end friction, reduce driving voltage and prolong assembly life-span.

Description of drawings

Fig. 1 is the action diagram of traditional micro-actuator;

Fig. 2 is first kind of action diagram of implementing kenel of the present invention;

Fig. 3 is second kind of action diagram of implementing kenel of the present invention;

Fig. 4 is the action diagram of the third enforcement kenel of the present invention.

Embodiment

For the effect that describes structure of the present invention, characteristics in detail and reached, existing following preferred embodiment of act and conjunction with figs. are described as follows.

As shown in Figure 2, micro-actuator is positioned on the substrate 22, and it comprises dull and stereotyped 20 and one axle bush 21, and wherein, dull and stereotyped 20 rear end forms the triangle kenel of convergent.

When adding a positive bias, dull and stereotyped 20 are attracted by substrate 22 because of electrostatic force, make dull and stereotyped 20 end points contact substrates 22, and because the frictional force of dull and stereotyped 20 contact substrates 22 is less than the frictional force of 21 pairs of substrates 22 of axle bush, dull and stereotyped 20 only with the minimum area contact substrate 22 of rear end, so cause axle bush 21 to be extruded and in contract and have elasticity tension.

Contact because dull and stereotyped 20 only make non-property with substrate 22, and when bouncing backward, flat board 20 is bent upwards the axle bush 21 and the friction of substrate 22 is reduced, flat board 20 rear ends of adding micro-actuator of the present invention form the triangle kenel of convergent, so when dull and stereotyped 20 rear end contact substrates 22, for being a contact, can effectively falling end friction, reduce driving voltage and prolong assembly life-span therebetween.

Again as shown in Figure 3, be that the present invention implements kenel for second kind, the rear end of its middle plateform 20 forms the circular arc kenel, when dull and stereotyped 20 rear end contact substrates 22, therebetween equally for being a contact, can effectively fall the end to rub, reduce driving voltage and prolong assembly life-span.

And for example shown in Figure 4, the third implements kenel for the present invention, and this micro-actuator is positioned on the substrate 22, and it includes dull and stereotyped 20 and one axle bush 21, and dull and stereotyped 20 bottom surface, rear end has at least more than one prominent point 23.

Utilize the design of prominent point 23, when making dull and stereotyped 20 rear end contact substrates 22, for being a contact, rubbing, reduce driving voltage and prolong assembly life-span therebetween to fall the end.

In sum, the present invention has possessed above every advantage really, also has the obvious effect enhancement than commonly using structure, and this feature is the real initiative that belongs in the middle of like product.

The above only is a preferable enforcement kenel of the present invention, and the equivalent structure that all application specification of the present invention, claims or accompanying drawing are done changes, and all should be included in the scope of patent protection of the present invention.

Claims

1. micro-actuator, be positioned on the substrate, it comprises a dull and stereotyped and axle bush, it is characterized in that: described axle bush is fixed in the front end of described flat board, and be connected to described substrate, when not applying voltage, described flat back and described substrate are contactless state, when applying a voltage, described flat back is attracted by described substrate because of electrostatic force, make contacting between described flat back and described substrate be non-contact, and cause described axle bush to be extruded and in contract and described flat board bounced backward.

2. micro-actuator as claimed in claim 1 is characterized in that: be line between described flat back and the described substrate and contact.

3. micro-actuator as claimed in claim 1 is characterized in that: be between described flat back and the described substrate and contact.

4. micro-actuator as claimed in claim 1 is characterized in that: described flat back is the triangle kenel of convergent.

5. micro-actuator as claimed in claim 1 is characterized in that: described flat back is the circular arc kenel.

6. micro-actuator as claimed in claim 1 is characterized in that: the bottom surface of described flat back has at least more than one prominent point.