CN101387889A - Three-degree-of-freedom pose adjustment error compensation device - Google Patents
Three-degree-of-freedom pose adjustment error compensation device Download PDFInfo
- Publication number
- CN101387889A CN101387889A CNA200810201246XA CN200810201246A CN101387889A CN 101387889 A CN101387889 A CN 101387889A CN A200810201246X A CNA200810201246X A CN A200810201246XA CN 200810201246 A CN200810201246 A CN 200810201246A CN 101387889 A CN101387889 A CN 101387889A
- Authority
- CN
- China
- Prior art keywords
- plate
- adjustment
- bolt
- adjusting
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 230000001105 regulatory effect Effects 0.000 claims 10
- 238000000034 method Methods 0.000 abstract description 16
- 125000006850 spacer group Chemical group 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 abstract description 2
- 230000036544 posture Effects 0.000 description 8
- 238000013528 artificial neural network Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
一种三自由度位姿调整误差补偿装置,属于机械技术领域。本发明中,基板上有两个螺纹孔,第一调整板两端外侧的有两个通孔,第一和第二调整螺栓通过第一调整板的通孔固定在基板上的两个螺纹孔中,第一调整板两端内侧的对称位置有两个螺纹孔,固定第三和第四调整螺栓,第二调整板中间有凸台,凸台有通孔,第二调整板两端有通孔,该通孔形状与两个调整塞形状相同,两个调整塞中心有通孔,第三和第四调整螺栓通过该通孔和第二调整板的通孔固定于第一调整板的螺纹孔中,垫片设于第一和第二调整板间。本发明结构简单,操作方便。只需依靠简单的机械操作即可实现三自由度位姿调整,实现误差补偿,且三个自由度的调整过程相对独立。
A three-degree-of-freedom position and posture adjustment error compensation device belongs to the field of mechanical technology. In the present invention, there are two threaded holes on the base plate, and there are two through holes outside the two ends of the first adjusting plate, and the first and second adjusting bolts are fixed to the two threaded holes on the base plate through the through holes of the first adjusting plate. Among them, there are two threaded holes at the inner symmetrical positions of the two ends of the first adjusting plate to fix the third and fourth adjusting bolts; The shape of the through hole is the same as that of the two adjustment plugs. There is a through hole in the center of the two adjustment plugs. The third and fourth adjustment bolts are fixed to the threads of the first adjustment plate through the through hole and the through hole of the second adjustment plate. In the hole, the spacer is arranged between the first and the second adjusting plate. The invention has simple structure and convenient operation. The three-degree-of-freedom pose adjustment and error compensation can be realized only by simple mechanical operation, and the adjustment process of the three-degree-of-freedom is relatively independent.
Description
技术领域 technical field
本发明涉及的是一种机械技术领域的装置,具体的说,是一种三自由度位姿调整误差补偿装置。The invention relates to a device in the field of mechanical technology, specifically, a three-degree-of-freedom pose adjustment error compensation device.
背景技术 Background technique
在现有位姿调整误差补偿装置中,大多采用软硬件相结合的方式,即在得到位姿误差的情况下,通过预定程序控制机械结构的运动,实现位姿调整。大多机械结构采用电机齿轮、电机导轨滑块、电机丝杠等组合方式,通过电机提供的驱动力,带动齿轮,丝杠等传动结构,最后实现末端位姿的调整。这些装置普遍特点是程序算法及机械结构复杂,控制过程对软件的依赖较高,实现成本较高;另外,多为单自由度位姿调整,即只能实现单个自由度的误差补偿。Most of the existing pose adjustment error compensation devices use a combination of software and hardware, that is, when the pose error is obtained, the movement of the mechanical structure is controlled through a predetermined program to achieve pose adjustment. Most of the mechanical structure adopts the combination of motor gear, motor guide rail slider, motor lead screw, etc., through the driving force provided by the motor, it drives the gear, lead screw and other transmission structures, and finally realizes the adjustment of the end pose. The general characteristics of these devices are that the program algorithm and mechanical structure are complex, the control process is highly dependent on software, and the implementation cost is high; in addition, most of them are single-degree-of-freedom pose adjustments, that is, only single-degree-of-freedom error compensation can be realized.
经对现有技术的文献检索发现,苗荣霞等在《弹箭与制导学报》(2005年)上发表的《分步式压印的空间位姿调整研究》,提出一套由弹簧导轨承片台结构、驱动器及激光干涉仪构成的超高精度对准定位系统,以及为消除由于压印力引起承片台空间位姿的变化,系统采用宏微两级驱动和优化的压印工艺实现承片台的超高精度定位和空间位姿的调整。具体为:空间位姿的三自由度主动调节采用三个PZT驱动器,借助压印机构中的PZT的运动来实现承片台的空间位姿恢复。系统采用RBF神经网络模糊PID控制器的结构实现宏驱动的控制,微驱动通过超高精度电容传感器实现位置控制。采用宏微两级定位,通过宏微两级超高精度运动,实现超高精度定位。该系统所采用的位姿调整方法为目前大多数位姿调整装置中普遍采用的方法,即通过传感器,控制器,驱动器实现高精度的位姿调整。其不足在于:正如大多数位姿调整装置一样,控制过程复杂,操作不变,成本较高,在一些精度要求相对不要的情况下,不能简便快捷的实现位姿调整。After searching the literature of the prior art, it was found that Miao Rongxia et al. published "Research on Spatial Pose Adjustment of Step-by-Step Imprinting" in "Journal of Missiles and Guidance" (2005), and proposed a set of spring guide rail bearings. Ultra-high-precision alignment and positioning system composed of film stage structure, driver and laser interferometer, and in order to eliminate the change of space pose of the film stage caused by imprinting force, the system adopts macro-micro two-stage drive and optimized imprinting process to realize Ultra-high-precision positioning of the film holder and adjustment of spatial posture. Specifically, the three-degree-of-freedom active adjustment of the space pose adopts three PZT drivers, and the space pose recovery of the film carrier is realized by means of the movement of the PZT in the imprinting mechanism. The system adopts the structure of RBF neural network fuzzy PID controller to realize the control of the macro drive, and the micro drive realizes the position control through the ultra-high precision capacitive sensor. It adopts macro-micro two-level positioning, and realizes ultra-high-precision positioning through macro-micro two-level ultra-high-precision movement. The pose adjustment method adopted by the system is a method commonly used in most pose adjustment devices at present, that is, high-precision pose adjustment is realized through sensors, controllers, and drivers. Its disadvantages are: just like most pose adjustment devices, the control process is complicated, the operation remains unchanged, and the cost is high. In some cases where the accuracy requirements are relatively unnecessary, the pose adjustment cannot be realized simply and quickly.
发明内容 Contents of the invention
本发明针对现有技术的不足,提供一种三自由度位姿调整误差补偿装置,使其解决现今大多数位姿调整误差补偿装置硬件结构复杂、过度依赖软件、操作不够简单、可调自由度相对局限的问题。本发明具有机械结构简单,操作过程不需要软件参与,只需简单的机械操作且操作过程简易方便,另外可实现三自由度位姿调整的特点。Aiming at the deficiencies of the prior art, the present invention provides a three-degree-of-freedom pose adjustment error compensation device, which solves the complex hardware structure, excessive reliance on software, unsimple operation, and adjustable degrees of freedom of most pose adjustment error compensation devices today. relatively limited problem. The invention has the characteristics of simple mechanical structure, no need for software participation in the operation process, only simple mechanical operation and simple and convenient operation process, and can realize three-degree-of-freedom pose adjustment.
本发明是通过以下技术方案来实现的,本发明包括:第一调整板、第二调整板、两个调整塞、第一调整螺栓、第二调整螺栓、第三调整螺栓、第四调整螺栓、垫片、基板。其中:基板上有两个螺纹孔,第一调整板两端外侧的对称位置沿板长方向有两个通孔,第一调整螺栓和第二调整螺栓通过第一调整板两端的通孔固定在基板上的两个螺纹孔中。第一调整板两端内侧的对称位置有两个螺纹孔,用于固定第三调整螺栓和第四调整螺栓。第二调整板中间位置有一凸台,垂直于板长方向,在凸台中心有通孔,在第二调整板两端的对称位置垂直于板长方向有两个通孔,两个调整塞与第二调整板两端通孔的形状相同,在两个调整塞的中心有通孔,第三调整螺栓和第四调整螺栓通过该通孔和第二调整板两端的通孔固定于第一调整板的螺纹孔中。垫片设于第一调整板和第二调整板之间。The present invention is achieved through the following technical solutions, the present invention includes: a first adjustment plate, a second adjustment plate, two adjustment plugs, a first adjustment bolt, a second adjustment bolt, a third adjustment bolt, a fourth adjustment bolt, Spacers, substrates. Among them: there are two threaded holes on the base plate, and there are two through holes at the symmetrical position outside the two ends of the first adjustment plate along the length direction of the plate, and the first adjustment bolt and the second adjustment bolt are fixed on the two tapped holes on the base plate. There are two threaded holes at the symmetrical positions inside the two ends of the first adjusting plate for fixing the third adjusting bolt and the fourth adjusting bolt. There is a boss in the middle of the second adjustment plate, which is perpendicular to the length direction of the plate. There is a through hole in the center of the boss. There are two through holes at the symmetrical positions of the two ends of the second adjustment plate perpendicular to the length direction of the plate. The two adjustment plugs are connected with the first adjustment plate. The through holes at both ends of the second adjustment plate have the same shape, and there is a through hole in the center of the two adjustment plugs. The third adjustment bolt and the fourth adjustment bolt are fixed to the first adjustment plate through the through hole and the through holes at both ends of the second adjustment plate. in the threaded hole. The spacer is arranged between the first adjusting plate and the second adjusting plate.
所述第一调整板上的两个通孔,形状为两端半圆形,中间矩形。The two through holes on the first adjustment plate are in the shape of semicircles at both ends and a rectangle in the middle.
所述第二调整板,其凸台为半圆柱形,在凸台中心的通孔为圆柱形。The boss of the second adjustment plate is semi-cylindrical, and the through hole in the center of the boss is cylindrical.
所述第二调整板两端的通孔,形状为一面锥形,三面矩形。The through holes at both ends of the second adjusting plate are in the shape of a cone on one side and a rectangle on three sides.
所述垫片为缺口的圆环,缺口小于四分之一圆环。The spacer is a ring with a gap, and the gap is smaller than a quarter of the ring.
所述两个调整塞形状为一面锥形,三面矩形,中心的通孔为圆柱形。The shape of the two adjustment plugs is conical on one side, rectangular on three sides, and the through hole in the center is cylindrical.
第二调整板中部的圆柱形通孔用于固定待调整的部件,而本发明最终的目标是通过三个自由度位姿调整,实现部件的实际位姿与目标位姿的误差补偿。The cylindrical through hole in the middle of the second adjustment plate is used to fix the component to be adjusted, and the ultimate goal of the present invention is to realize the error compensation between the actual pose and the target pose of the component through three-degree-of-freedom pose adjustment.
第一调整螺栓、第二调整螺栓通过第一调整板两端的通孔固定在基板的螺纹孔中,由于第一调整板两端通孔的形状,决定了在螺栓固定的情况下,第一调整板可相对基板沿板长方向左右微调,即实现装置第一个自由度的位姿调整。The first adjustment bolt and the second adjustment bolt are fixed in the threaded holes of the base plate through the through holes at both ends of the first adjustment plate. Due to the shape of the through holes at both ends of the first adjustment plate, it is determined that when the bolts are fixed, the first adjustment The plate can be fine-tuned left and right along the length direction of the plate relative to the base plate, that is, the pose adjustment of the first degree of freedom of the device can be realized.
第三调整螺栓、第四调整螺栓通过调整塞和第二调整板两端的通孔固定在第一调整板两端的螺纹孔中,当两个螺栓的旋入深度相同时,不同的旋入深度对应不同的位姿,通过控制螺栓的旋入深度,调整调整塞沿螺栓轴线方向的压入深度,在螺栓固定的情况下,调整塞推动第二调整板在板平面内沿垂直于板长方向的移动,实现第二调整板相对于第一调整板在板平面内沿垂直于板长方向的位姿微调,即第二个自由度的位姿调整。The third adjustment bolt and the fourth adjustment bolt are fixed in the threaded holes at both ends of the first adjustment plate through the adjustment plug and the through holes at both ends of the second adjustment plate. When the screw-in depths of the two bolts are the same, different screw-in depths correspond to For different postures, by controlling the screw-in depth of the bolt, adjust the press-in depth of the adjustment plug along the direction of the bolt axis. When the bolt is fixed, the adjustment plug pushes the second adjustment plate in the plane of the plate along the direction perpendicular to the length of the plate. Move to realize fine-tuning of the pose of the second adjustment board relative to the first adjustment board in the plane of the board along the direction perpendicular to the length of the board, that is, the pose adjustment of the second degree of freedom.
固定在第一调整板上的第三调整螺栓、第四调整螺栓相对第二调整板中心位置左右对称,当第三调整螺栓、第四调整螺栓的旋入深度不同时,通过控制两螺栓的旋入深度差,可实现第二调整板相对于第一调整板绕其中心圆柱形通孔轴线的旋转角度微调,即实现第三个自由度的位姿调整。The third adjusting bolt and the fourth adjusting bolt fixed on the first adjusting plate are left-right symmetrical with respect to the center position of the second adjusting plate. The difference in penetration depth can realize fine-tuning of the rotation angle of the second adjustment plate relative to the first adjustment plate around the axis of the central cylindrical through hole, that is, the adjustment of the pose of the third degree of freedom.
在第二,第三自由度位姿调整过程中,由于第三调整螺栓、第四调整螺栓的不同旋入深度对应第二调整板不同的位姿,为使第二调整板在任一位姿时相对于第一调整板固定,且螺栓处于拧紧状态,需要在第一调整板和第二调整板之间加入垫片。垫片的加入操作过程如下:During the adjustment process of the second and third degree of freedom poses, since the different screw-in depths of the third adjusting bolt and the fourth adjusting bolt correspond to different poses of the second adjusting plate, in order to make the second adjusting plate in any pose It is fixed relative to the first adjustment plate, and the bolts are in a tightened state, and a gasket needs to be added between the first adjustment plate and the second adjustment plate. The process of adding gaskets is as follows:
当第三调整螺栓、第四调整螺栓的旋入深度同时等于第一调整板中螺纹孔的深度时,此时第一调整板与第二调整板之间没有间隙,位姿调整处于极限位置,螺栓已处于拧紧状态,所以不需要加入垫片,且第二调整板相对于第一调整板固定。When the screw-in depths of the third adjusting bolt and the fourth adjusting bolt are equal to the depth of the threaded hole in the first adjusting plate, there is no gap between the first adjusting plate and the second adjusting plate, and the pose adjustment is at the limit position. The bolts are already in a tightened state, so there is no need to add gaskets, and the second adjusting plate is fixed relative to the first adjusting plate.
当第三调整螺栓、第四调整螺栓的旋入深度不同时等于第一调整板中螺纹孔的深度时,对应不同的位姿,第一调整板与第二调整板之间产生不同的间隙,需要根据间隙的大小确定加入垫片的个数,用垫片填补间隙,使两个螺栓均处于拧紧状态,第二调整板相对于第一调整板固定。When the screw-in depths of the third adjusting bolt and the fourth adjusting bolt are different and equal to the depth of the threaded hole in the first adjusting plate, corresponding to different postures, different gaps are generated between the first adjusting plate and the second adjusting plate, It is necessary to determine the number of gaskets to be added according to the size of the gap, and fill the gap with gaskets so that both bolts are in a tightened state, and the second adjustment plate is fixed relative to the first adjustment plate.
本发明的另外一个特点是第一调整板上的螺纹孔位于第一调整板上通孔的内侧,这样能够实现三自由度位姿调整的独立性,如利用第一调整板实现第一个自由度的位姿调整时不需要拆卸第二调整板,在利用第二调整板实现第二个自由度的位姿调整时不影响第一调整板,从而保证三自由度位姿调整的相对独立性。Another feature of the present invention is that the threaded hole on the first adjustment plate is located inside the through hole on the first adjustment plate, so that the independence of the three-degree-of-freedom pose adjustment can be realized, such as using the first adjustment plate to realize the first freedom There is no need to disassemble the second adjustment plate when adjusting the pose of the first degree of freedom, and the first adjustment plate is not affected when the second adjustment plate is used to adjust the pose of the second degree of freedom, thereby ensuring the relative independence of the three-degree-of-freedom pose adjustment .
本发明的三自由度位姿调整误差补偿装置结构简单,操作方便。只需要依靠简单的机械操作即可实现三自由度位姿调整,实现误差补偿,且三个自由度的调整过程相对独立。The three-degree-of-freedom position and posture adjustment error compensation device of the present invention has simple structure and convenient operation. It only needs to rely on simple mechanical operation to realize the three-degree-of-freedom pose adjustment and realize error compensation, and the adjustment process of the three-degree-of-freedom is relatively independent.
附图说明 Description of drawings
图1为本发明结构示意图;Fig. 1 is a structural representation of the present invention;
图中:第一调整板1、第二调整板2、两个调整塞3、4、第一调整螺栓5、第二调整螺栓6、第三调整螺栓7、第四调整螺栓8、垫片9、基板10。In the figure: first adjustment plate 1, second adjustment plate 2, two adjustment plugs 3, 4, first adjustment bolt 5, second adjustment bolt 6, third adjustment bolt 7, fourth adjustment bolt 8, gasket 9 , Substrate 10 .
具体实施方式 Detailed ways
下面结合附图对本发明的实施例作详细说明:本实施例是在以本发明技术方案为前提下进行实施,给出了详细的实施方式和具体的操作过程,但本发明的保护范围不限于下述的实施例。Embodiments of the present invention are described in detail below in conjunction with accompanying drawings: the present embodiment is implemented under the premise of the technical solution of the present invention, and detailed implementation methods and specific operating procedures are provided, but the scope of protection of the present invention is not limited to Examples described below.
如图1所示,本实施例包括:第一调整板1、第二调整板2、两个调整塞3、4、第一调整螺栓5、第二调整螺栓6、第三调整螺栓7、第四调整螺栓8、垫片9、基板10。As shown in Figure 1, this embodiment includes: a first adjustment plate 1, a second adjustment plate 2, two adjustment plugs 3, 4, a first adjustment bolt 5, a second adjustment bolt 6, a third adjustment bolt 7, a first adjustment bolt Four adjustment bolts 8, gaskets 9, base plate 10.
基板10上有两个螺纹孔,用于固定第一调整螺栓5和第二调整螺栓6。There are two threaded holes on the base plate 10 for fixing the first adjusting bolt 5 and the second adjusting bolt 6 .
第一调整板1两端外侧的对称位置沿板长方向有两个通孔,形状为两端半圆形,中间矩形。There are two through holes along the length direction of the plate at the symmetrical positions outside the two ends of the first adjustment plate 1, and the shape is semicircular at both ends and rectangular in the middle.
第一调整螺栓5和第二调整螺栓6通过第一调整板1两端的通孔固定在基板10上的两个螺纹孔中。The first adjusting bolt 5 and the second adjusting bolt 6 are fixed in two threaded holes on the base plate 10 through through holes at both ends of the first adjusting plate 1 .
第一调整板1两端内侧的对称位置有两个螺纹孔,用于固定第三调整螺栓7和第四调整螺栓8。There are two threaded holes at symmetrical positions inside both ends of the first adjusting plate 1 for fixing the third adjusting bolt 7 and the fourth adjusting bolt 8 .
第二调整板2中间位置有一半圆柱形凸台,垂直于板长方向,在凸台中心有圆柱形通孔。The middle position of the second adjustment plate 2 has a half-cylindrical boss, perpendicular to the plate length direction, and a cylindrical through hole in the center of the boss.
第二调整板2两端的对称位置垂直于板长方向有两个通孔,形状为一面锥形,三面矩形。The two ends of the second adjustment plate 2 have two through holes perpendicular to the length direction of the plate at symmetrical positions, and the shape is conical on one side and rectangular on three sides.
两个调整塞3、4与第二调整板2两端通孔的形状相同,为一面锥形,三面矩形,在两个调整塞3、4的中心有圆柱形通孔,第三调整螺栓7和第四调整螺栓8通过该通孔和第二调整板2两端的通孔固定于第一调整板1的螺纹孔中。The two adjustment plugs 3, 4 have the same shape as the through holes at both ends of the second adjustment plate 2, which is conical on one side and rectangular on three sides. There is a cylindrical through hole in the center of the two adjustment plugs 3, 4, and the third adjustment bolt 7 And the fourth adjusting bolt 8 is fixed in the threaded hole of the first adjusting plate 1 through the through hole and the through holes at the two ends of the second adjusting plate 2 .
垫片9为缺口的圆环,缺口小于四分之一圆环。垫片9设于第一调整板1和第二调整板2之间。Gasket 9 is a circular ring with a gap, and the gap is less than a quarter of the circular ring. The gasket 9 is arranged between the first adjusting plate 1 and the second adjusting plate 2 .
所述第一调整板1与基板10平行。第一调整螺栓5和第二调整螺栓6通过第一调整板1两端的通孔固定在基板10上的两个螺纹孔中。在螺栓的约束下,第一调整板1可依靠其两端的通孔,沿板长方向左右移动。The first adjustment plate 1 is parallel to the base plate 10 . The first adjusting bolt 5 and the second adjusting bolt 6 are fixed in two threaded holes on the base plate 10 through through holes at both ends of the first adjusting plate 1 . Under the constraint of the bolts, the first adjusting plate 1 can move left and right along the length direction of the plate by relying on the through holes at its two ends.
所述第一调整板1上的两个螺纹孔必须位于两个通孔的内侧。The two threaded holes on the first adjusting plate 1 must be located inside the two through holes.
所述两个调整塞3、4的形状为一面锥形,三面矩形,在第三调整螺栓7、第四调整螺栓8的挤压下沿螺栓轴线方向移动。The two adjusting plugs 3 and 4 are in the shape of a cone on one side and a rectangle on three sides, and they move along the direction of the bolt axis under the extrusion of the third adjusting bolt 7 and the fourth adjusting bolt 8 .
所述第二调整板2在第三调整螺栓7、第四调整螺栓8及两个调整塞3、4的约束下,可依靠其两端的通孔,在板平面内沿垂直于板长方向移动。Under the constraints of the third adjusting bolt 7, the fourth adjusting bolt 8 and the two adjusting plugs 3, 4, the second adjusting plate 2 can move in the plane of the plate along the direction perpendicular to the length of the plate by means of the through holes at both ends. .
所述两个调整塞3、4的形状和第二调整板2的通孔形状相同,锥顶均朝下。The shape of the two adjustment plugs 3, 4 is the same as the shape of the through hole of the second adjustment plate 2, and the cone tops are all facing downward.
所述第一调整板1、第二调整板2两端通孔的形状为本实施例实现时的一种形状,但所述形状不是本发明的必要特征,在实际实现时可根据需要选择其它形状。The shape of the through holes at both ends of the first adjustment plate 1 and the second adjustment plate 2 is a shape when this embodiment is realized, but the shape is not an essential feature of the present invention, and other shapes can be selected according to needs during actual implementation. shape.
所述第二调整板2中间位置的半圆柱形凸台为本实施例实现时固定待调整装置的一种结构形式,但所述结构形式不是本发明的必要特征,在具体实现时可根据需要选择其它的固定形式,最终实现将待调整装置固定在第二调整板2上。The semi-cylindrical boss at the middle position of the second adjustment plate 2 is a structural form for fixing the device to be adjusted when this embodiment is realized, but the structural form is not an essential feature of the present invention, and it can be realized according to the actual needs Other fixing forms are selected to finally fix the device to be adjusted on the second adjusting plate 2 .
本实施例工作时,三个自由度位姿调整的过程如下:When the present embodiment is working, the process of three degrees of freedom pose adjustment is as follows:
一、自由度1位姿调整1. Degree of freedom 1 pose adjustment
第一调整螺栓5、第二调整螺栓6通过第一调整板1两端的通孔固定在基板10的螺纹孔中,由于第一调整板1两端通孔的形状,决定了在第一调整螺栓5、第二调整螺栓6固定的情况下,第一调整板1可相对基板10沿板长方向左右微调,实现装置第一个自由度的位姿调整。The first adjustment bolt 5 and the second adjustment bolt 6 are fixed in the threaded holes of the base plate 10 through the through holes at the two ends of the first adjustment plate 1. Due to the shape of the through holes at the two ends of the first adjustment plate 1, it is determined that the first adjustment bolt 5. When the second adjustment bolt 6 is fixed, the first adjustment plate 1 can be finely adjusted left and right relative to the base plate 10 along the length direction of the plate, so as to realize the pose adjustment of the first degree of freedom of the device.
二、自由度2位姿调整2. Degree of freedom 2 pose adjustment
第三调整螺栓7、第四调整螺栓8分别通过两个调整塞3、调整塞4和第二调整板2两端的通孔固定在第一调整板1两端的螺纹孔中,当第三调整螺栓7、第四调整螺栓8的旋入深度相同时,不同的旋入深度对应不同的位姿,通过控制两个螺栓的旋入深度,调整两个调整塞3、4沿螺栓轴线方向的压入深度,在第三调整螺栓7、第四调整螺栓8固定的情况下,两个调整塞3、调整塞4推动第二调整板2在板平面内沿垂直于板长方向的移动,实现第二调整板2相对于第一调整板1在板平面内沿垂直于板长方向的位姿微调,即第二个自由度的位姿调整。The third adjustment bolt 7 and the fourth adjustment bolt 8 are respectively fixed in the threaded holes at the two ends of the first adjustment plate 1 through the two adjustment plugs 3, the adjustment plug 4 and the through holes at the two ends of the second adjustment plate 2. When the third adjustment bolt 7. When the screw-in depth of the fourth adjusting bolt 8 is the same, different screw-in depths correspond to different postures. By controlling the screw-in depth of the two bolts, adjust the press-in of the two adjusting plugs 3 and 4 along the axis of the bolts. depth, when the third adjusting bolt 7 and the fourth adjusting bolt 8 are fixed, the two adjusting plugs 3 and 4 push the second adjusting plate 2 to move in the plate plane along the direction perpendicular to the length of the plate to realize the second The fine adjustment of the pose of the adjustment board 2 relative to the first adjustment board 1 in the board plane along the direction perpendicular to the length of the board, that is, the pose adjustment of the second degree of freedom.
三、自由度3位姿调整3. 3 degrees of freedom pose adjustment
固定在第一调整板1上的第三调整螺栓7、第四调整螺栓8相对第二调整板中心位置左右对称,当第三调整螺栓7、第四调整螺栓8的旋入深度不同时,通过控制两螺栓的旋入深度差,可实现第二调整板2相对于第一调整板1绕其中心圆柱形通孔轴线的旋转角度微调,即实现第三个自由度的位姿调整。The third adjusting bolt 7 and the fourth adjusting bolt 8 fixed on the first adjusting plate 1 are left-right symmetrical with respect to the center position of the second adjusting plate. When the third adjusting bolt 7 and the fourth adjusting bolt 8 have different screw-in depths, by By controlling the screw-in depth difference of the two bolts, fine-tuning of the rotation angle of the second adjustment plate 2 relative to the first adjustment plate 1 around the axis of the central cylindrical through hole can be realized, that is, the pose adjustment of the third degree of freedom can be realized.
在上述第二,第三自由度位姿调整过程中,由于第三调整螺栓7、第四调整螺栓8的不同旋入深度对应第二调整板2不同的位姿,为使第二调整板2在任一位姿时相对于第一调整板1固定,且螺栓处于拧紧状态,需要在第一调整板1和第二调整板2之间加入垫片9。垫片9的加入操作过程如下:In the above-mentioned second and third degrees of freedom posture adjustment process, because the different screw-in depths of the third adjustment bolt 7 and the fourth adjustment bolt 8 correspond to different postures of the second adjustment plate 2, in order to make the second adjustment plate 2 When it is fixed relative to the first adjusting plate 1 in any posture, and the bolts are in a tightened state, a gasket 9 needs to be added between the first adjusting plate 1 and the second adjusting plate 2 . The process of adding gasket 9 is as follows:
当第三调整螺栓7、第四调整螺栓8的旋入深度同时等于第一调整板1中螺纹孔的深度时,此时第一调整板1与第二调整板2之间没有间隙,位姿调整处于极限位置,螺栓已处于拧紧状态,所以不需要加入垫片9,且第二调整板2相对于第一调整板1固定。When the screw-in depths of the third adjusting bolt 7 and the fourth adjusting bolt 8 are equal to the depth of the threaded hole in the first adjusting plate 1 at the same time, there is no gap between the first adjusting plate 1 and the second adjusting plate 2. The adjustment is at the extreme position, and the bolts are already in the tightened state, so the gasket 9 does not need to be added, and the second adjustment plate 2 is fixed relative to the first adjustment plate 1 .
当第三调整螺栓7、第四调整螺栓8的旋入深度不同时等于第一调整板1中螺纹孔的深度时,对应不同的位姿,第一调整板1与第二调整板2之间产生不同的间隙,需要根据间隙的大小确定加入垫片9的个数,用垫片9填补间隙,使两个螺栓均处于拧紧状态,第二调整板2相对于第一调整板1固定。When the screw-in depths of the third adjusting bolt 7 and the fourth adjusting bolt 8 are different and equal to the depth of the threaded hole in the first adjusting plate 1, corresponding to different poses, the gap between the first adjusting plate 1 and the second adjusting plate 2 To generate different gaps, it is necessary to determine the number of gaskets 9 to be added according to the size of the gap, and fill the gap with gaskets 9 so that both bolts are in a tightened state, and the second adjustment plate 2 is fixed relative to the first adjustment plate 1 .
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200810201246A CN100587642C (en) | 2008-10-16 | 2008-10-16 | Three-degree-of-freedom pose adjustment error compensation device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200810201246A CN100587642C (en) | 2008-10-16 | 2008-10-16 | Three-degree-of-freedom pose adjustment error compensation device |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101387889A true CN101387889A (en) | 2009-03-18 |
CN100587642C CN100587642C (en) | 2010-02-03 |
Family
ID=40477342
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200810201246A Expired - Fee Related CN100587642C (en) | 2008-10-16 | 2008-10-16 | Three-degree-of-freedom pose adjustment error compensation device |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN100587642C (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105953666A (en) * | 2016-01-08 | 2016-09-21 | 璧电函 | Space docking error compensation mechanism |
CN107255462A (en) * | 2011-07-08 | 2017-10-17 | 卡尔蔡司工业测量技术有限公司 | Measure workpiece coordinate when error correction and/or avoid |
CN108100276A (en) * | 2017-12-03 | 2018-06-01 | 中国直升机设计研究所 | A kind of multiple degrees of freedom error-compensating apparatus |
-
2008
- 2008-10-16 CN CN200810201246A patent/CN100587642C/en not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107255462A (en) * | 2011-07-08 | 2017-10-17 | 卡尔蔡司工业测量技术有限公司 | Measure workpiece coordinate when error correction and/or avoid |
CN107255462B (en) * | 2011-07-08 | 2019-07-23 | 卡尔蔡司工业测量技术有限公司 | Measure workpiece coordinate when error correction and/or avoid |
US10429178B2 (en) | 2011-07-08 | 2019-10-01 | Carl Zeiss Industrielle Messtechnik Gmbh | Correcting and/or preventing errors during the measurement of coordinates of a work piece |
CN105953666A (en) * | 2016-01-08 | 2016-09-21 | 璧电函 | Space docking error compensation mechanism |
CN108100276A (en) * | 2017-12-03 | 2018-06-01 | 中国直升机设计研究所 | A kind of multiple degrees of freedom error-compensating apparatus |
CN108100276B (en) * | 2017-12-03 | 2021-07-23 | 中国直升机设计研究所 | Multi freedom error compensation device |
Also Published As
Publication number | Publication date |
---|---|
CN100587642C (en) | 2010-02-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US11342864B2 (en) | Three-degrees-of-freedom angle adjustment device driven by piezoelectric ceramics and adjusting method thereof | |
CN109947140B (en) | A 5-degree-of-freedom laser alignment fine-tuning device and its adjustment method | |
US9877576B2 (en) | Table device and conveyance device | |
WO2017041645A1 (en) | Flexible unit and flexible wrist for precision assembly of industrial robots | |
JP5541398B1 (en) | Table device and transfer device | |
KR20140015197A (en) | Kinematic holding system for a placement head of a placement apparatus | |
CN101387889A (en) | Three-degree-of-freedom pose adjustment error compensation device | |
US20170173939A1 (en) | Transfer apparatus and transfer method | |
CN103472555A (en) | Dual-motor optical element axial adjustment device | |
CN102141741B (en) | Micro leveling mechanism of projection objective of lithography machine | |
CN104742115B (en) | A kind of flexible parallel alignment device of two degrees of freedom with long-range center of rotation | |
CN104002266A (en) | Floating-type four-degree-of-freedom aligning device and application method thereof | |
EP3062333A1 (en) | Normal temperature bonding device | |
CN112610810A (en) | Parallel two-degree-of-freedom micro-displacement manual adjusting platform based on flexible hinge mechanism | |
CN107807431A (en) | A kind of heavy caliber high power laser light frequency-doubling crystal edge self-locking clamping apparatus and method | |
CN207833315U (en) | A kind of macro micro- compound positioning system of the planar three freedom of visual servo | |
CN101907757A (en) | Precision adjustment device and method for flexible hinge driven by piezoelectric ceramics in ultra-high vacuum | |
CN201754648U (en) | Two-dimension positioning adjustment device | |
CN106838566A (en) | The two-dimensional parallel precision positioning mechanism that a kind of three-way piezoelectric drives | |
CN102496391B (en) | An assembled two-dimensional micro-displacement stage | |
US20220250255A1 (en) | Blade interval adjusting device | |
CN102829816B (en) | Lever type micrometric displacement regulating mechanism | |
CN113917646B (en) | A three-degree-of-freedom fine-tuning device for a moving mirror | |
CN206504074U (en) | A Two-Dimensional Parallel Precision Positioning Mechanism Driven by Three-way Piezoelectric | |
CN104459977A (en) | Secondary mirror adjusting mechanism used for vehicle-mounted adaptive optical imaging telescope |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100203 Termination date: 20121016 |