CN101373040A - Living water operation chucking tool and its use method - Google Patents

Living water operation chucking tool and its use method Download PDF

Info

Publication number
CN101373040A
CN101373040A CNA2007100450395A CN200710045039A CN101373040A CN 101373040 A CN101373040 A CN 101373040A CN A2007100450395 A CNA2007100450395 A CN A2007100450395A CN 200710045039 A CN200710045039 A CN 200710045039A CN 101373040 A CN101373040 A CN 101373040A
Authority
CN
China
Prior art keywords
running water
water operation
chucking tool
living water
operation chucking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2007100450395A
Other languages
Chinese (zh)
Inventor
龚文卫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Manufacturing International Shanghai Corp
Original Assignee
Semiconductor Manufacturing International Shanghai Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Manufacturing International Shanghai Corp filed Critical Semiconductor Manufacturing International Shanghai Corp
Priority to CNA2007100450395A priority Critical patent/CN101373040A/en
Publication of CN101373040A publication Critical patent/CN101373040A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Pipeline Systems (AREA)

Abstract

The invention provides a running water operation clamp used for the maintenance operation of the running water pipeline, and a using method thereof. The clamp comprises an upper-half clamp and a lower-half clamp, which are connected with each other by an assembling screw hole and a bolt; the upper-half clamp of the running water operation clamp is provided with an air outlet and the lower-half clamp is provided with an air inlet; and a front baffle and a back baffle are respectively arranged at the two ends of the upper-half clamp and the lower-half clamp. The using method of the running water operation clamp is as follows: nitrogen at the temperature of subzero 186 DEG C is introduced into the running water operation clamp through the air inlet to partly freeze the running water pipeline which needs to be maintained, so as to achieve troubleshooting in the way that no running water is produced, thereby eliminating need of turning off the general running water valve when in repair. Furthermore, the running water operation clamp is movable, thereby achieving convenient movement and use when the maintenance of the running water pipeline is needed anywhere.

Description

Living water operation chucking tool and using method thereof
Technical field
The present invention relates to maintenance operation clamping apparatus and using method thereof, specifically, is a kind of living water operation chucking tool and usability methods thereof.
Background technique
Comprise a lot of liquid lines in the makers' environmental control system of IC wafers, the water that flows in the pipeline is exactly running water, controls the temperature of on-site by circulating of water.Yet said here running water is meant the water that does not have the recycle pump effect, and its flow and pressure are very little, so flowing velocity is very slow, even is tending towards static.
Fig. 1 is the general structure schematic representation of temperature control system, the switching of the whole plant area of total valve 10 controls running water pipeline, total valve 10 is connected with water inlet manifold road 12 with total rising pipe 11 respectively, one end of total rising pipe 11 and some water outlet branch roads 21 is connected, one termination of water inlet manifold road 12 and some water inlet branch roads 22 connects, the other end of single water outlet branch road and water inlet branch road is connected to remote control unit (RCU) 20 to form the loop, by the temperature that remote control unit 20 is regulated running water in the pipeline, control the temperature of on-site again by the running water that circulates in the pipeline.Usually at an on-site 14 remote control units are set, with each zone of comprehensive covering.As certain bar house steward 11/12 or leaking appears in branch road 21/22 or failsafe valve need overhaul the time, the total valve 10 that need close whole plant area will cause the intensification of whole plant environment like this, causes the pause of production line, influences the output of wafer greatly.
Summary of the invention
Technical problem to be solved by this invention is, change present maintenance temperature pilot line and will close total valve, influence the unfavorable factor of plant environment temperature, a kind of living water operation chucking tool and using method thereof are provided, when the temperature pilot line breaks down the needs maintenance, can close total valve, only meeting temporary influence fault zone need not influence whole plant environment temperature.
In order to solve the problems of the technologies described above, the present invention has adopted following technological means: a kind of living water operation chucking tool, comprise first plate clamp, second plate clamp, be connected by assembling screw and bolt, be used for clamping running water pipeline, its substantive distinguishing features is: described first plate clamp has an air outlet, second plate clamp has a suction port, and the two ends of upper and lower half plate clamp of described living water operation chucking tool are separately installed with front screen and backboard.
In above-mentioned living water operation chucking tool, described running water is the water that does not have the recycle pump effect.
In above-mentioned living water operation chucking tool, the outer surface of its upper and lower half plate clamp is covered with thermal insulating material.
In above-mentioned living water operation chucking tool, the internal diameter of described upper and lower half plate clamp is greater than the external diameter of described running water pipeline.
In above-mentioned living water operation chucking tool, after described upper and lower half plate clamp and forward and backward baffle plate install, the inner confined space that forms of described living water operation chucking tool.
Another solution of the present invention provides a kind of method that adopts the local freezing running water pipeline of above-mentioned living water operation chucking tool, comprises the following steps: by bolt first plate clamp and second plate clamp to be interfixed with the local freezing running water pipeline of clamping needs; Two ends at two plate clamps are provided with baffle plate respectively, make the inner confined space that forms of living water operation chucking tool; To the inner refrigerant gas that feeds below the zero centigrade of living water operation chucking tool, described refrigerant gas is discharged from the air outlet, to take away the heat in the running water pipeline from suction port.
In above-mentioned method, described refrigerant gas is-186 degrees centigrade a nitrogen.
In above-mentioned method, described running water pipeline comprises an inlet pipeline and rising pipe that is in the same loop, and it is freezing to adopt the described living water operation chucking tool of two covers respectively it to be carried out the part.
Adopt living water operation chucking tool of the present invention can realize the local freezing of running water pipeline, when the running water pipeline breaks down the needs maintenance, can close total valve, only need the minor loop of a certain remote control unit of influence, and local when freezing, produce the effect of similar valve closing, also can utilize other contiguous remote control units of same on-site to compensate, less to Temperature Influence, can not cause the environment of whole plant area to heat up.
Description of drawings
Living water operation chucking tool of the present invention and using method thereof are provided by following embodiment and accompanying drawing.
Fig. 1 is the general structure schematic representation of temperature control system.
Fig. 2 a and Fig. 2 b are respectively the plan view and the side view of first chip architecture of living water operation chucking tool of the present invention.
Fig. 3 a and Fig. 3 b are respectively the plan view and the side view of second chip architecture of living water operation chucking tool of the present invention.
Fig. 4 is the mounting structure sectional view of living water operation chucking tool of the present invention.
Embodiment
Below with reference to accompanying drawing living water operation chucking tool of the present invention and using method thereof are described in further detail, are specially following mode of execution:
Living water operation chucking tool of the present invention comprises shown in Fig. 2 a, 2b, 3a, 3b: first plate clamp 30, and second plate clamp 40, both offer assembling screw 32,42 on corresponding position, and are connected by bolt (not shown), are used for clamping running water pipeline.On first plate clamp 30 of living water operation chucking tool an air outlet 31 is arranged, one suction port 41 is arranged on second plate clamp 40, the outer surface of upper and lower half plate clamp 30,40 is covered with thermal insulating material 33,43 respectively, be used for insulation, and the two ends of upper and lower half plate clamp 30,40 are separately installed with front screen 51 and backboard 52, thereby after this living water operation chucking tool installed, portion formed a confined space within it, and supplied gas circulates.
As shown in Figure 4, when certain bar running water pipeline such as water outlet branch road 21 water leakage fault occurs and need overhaul, use the above-mentioned living water operation chucking tool of two covers to be installed in respectively on this water outlet branch road 21 and the corresponding water inlet branch road 22, from the nitrogen of suction port 41 to-186 degrees centigrade of the inner feedings of living water operation chucking tool, nitrogen flows in the formed confined space of living water operation chucking tool, the heat in this water outlet/water inlet branch road 21/22 is taken away in 31 discharges from the air outlet again, to reach local freezing purpose.Need to prove that said running water is the water that does not have the recycle pump effect here, its flow and pressure are very little, so flowing velocity is very slow, can realize freezing.By the running water in the freezing branch road that needs repairing 21/22 in part, produce the effect of similar valve closing, make and do not produce the mode that running water flows in the remote control unit 20 that is attached thereto and investigate fault, only can influence the minor loop of a certain remote control unit 20, and it is local when freezing, also can utilize other contiguous remote control units 20 of same on-site to compensate, can not cause big influence the plant environment temperature.
Another specific embodiment of living water operation chucking tool of the present invention and using method thereof is can be by using the living water operation chucking tool maintenance or changing remote control unit 20, as Fig. 1, shown in Figure 4, when breaking down, remote control unit 20 needs repairing or when changing, also can the freezing water outlet that is attached thereto by the part/water inlet branch road, make not produce running water in this remote control unit 20 and flow, so that maintenance or change.
In sum, adopt living water operation chucking tool of the present invention can realize local freezing to the running water pipeline, when the running water pipeline breaks down the needs maintenance, can close total valve, thereby can not influence the ambient temperature of whole plant area, in addition, this living water operation chucking tool is portable, the running water pipeline that where needs repairing just can conveniently move and take.

Claims (8)

1. living water operation chucking tool, comprise first plate clamp, second plate clamp, be connected by assembling screw and bolt, be used for clamping running water pipeline, it is characterized in that: described first plate clamp has an air outlet, and second plate clamp has a suction port, and the two ends of upper and lower half plate clamp of described living water operation chucking tool are separately installed with front screen and backboard.
2. living water operation chucking tool according to claim 1 is characterized in that, described running water is the water that does not have the recycle pump effect.
3. living water operation chucking tool according to claim 1 is characterized in that, the outer surface of upper and lower half plate clamp of described living water operation chucking tool is covered with thermal insulating material.
4. living water operation chucking tool according to claim 1 is characterized in that the internal diameter of described upper and lower half plate clamp is greater than the external diameter of described running water pipeline.
5. living water operation chucking tool according to claim 1 is characterized in that, after described upper and lower half plate clamp and forward and backward baffle plate install, and the inner confined space that forms of described living water operation chucking tool.
6. a method that adopts the local freezing running water pipeline of living water operation chucking tool as claimed in claim 1 is characterized in that, comprises the following steps:
By bolt first plate clamp and second plate clamp are interfixed with the local freezing running water pipeline of clamping needs;
Two ends at two plate clamps are provided with baffle plate respectively, make the inner confined space that forms of living water operation chucking tool;
To the inner refrigerant gas that feeds below the zero centigrade of living water operation chucking tool, described refrigerant gas is discharged from the air outlet, to take away the heat in the running water pipeline from suction port.
7. the method for the local freezing running water pipeline of living water operation chucking tool according to claim 6 is characterized in that described refrigerant gas is-186 degrees centigrade a nitrogen.
8. the method for the local freezing running water pipeline of living water operation chucking tool according to claim 6, it is characterized in that, described running water pipeline comprises an inlet pipeline and rising pipe that is in the same loop, and it is freezing to adopt the described living water operation chucking tool of two covers respectively it to be carried out the part.
CNA2007100450395A 2007-08-20 2007-08-20 Living water operation chucking tool and its use method Pending CN101373040A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNA2007100450395A CN101373040A (en) 2007-08-20 2007-08-20 Living water operation chucking tool and its use method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNA2007100450395A CN101373040A (en) 2007-08-20 2007-08-20 Living water operation chucking tool and its use method

Publications (1)

Publication Number Publication Date
CN101373040A true CN101373040A (en) 2009-02-25

Family

ID=40447342

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2007100450395A Pending CN101373040A (en) 2007-08-20 2007-08-20 Living water operation chucking tool and its use method

Country Status (1)

Country Link
CN (1) CN101373040A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4433556A (en) * 1981-10-19 1984-02-28 Temp-Control Corporation Pipe freezing device
FR2732093A1 (en) * 1995-03-23 1996-09-27 Gagneraud Pere & Fils System for blocking of pipe by freezing to allow maintenance

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4433556A (en) * 1981-10-19 1984-02-28 Temp-Control Corporation Pipe freezing device
FR2732093A1 (en) * 1995-03-23 1996-09-27 Gagneraud Pere & Fils System for blocking of pipe by freezing to allow maintenance

Similar Documents

Publication Publication Date Title
CN101424472B (en) Water-cooling system for production facility
CN201491450U (en) Cooling constant temperature machine of electron accelerator
CN105682429A (en) Data center air conditioner equipment chilled water distribution device
CN107624032A (en) A kind of liquid cold data center water system and method
CN102749202A (en) Engine running-in rack water circulation system
CN105704986B (en) It is a kind of for return water double loop cooling recirculation system
CN101373040A (en) Living water operation chucking tool and its use method
CN108413530A (en) A kind of water temperature regulation device and its control method for air-conditioner water system
CN109186091B (en) Cooling medium supply device and control method
CN202693313U (en) Water circulation system for engine pedestal test
CN201415135Y (en) Temperature control experiment equipment
CN102721561A (en) Integrated energy-saving test system for various water path tests of heat pump/air condition equipment
CN105780863A (en) Intelligent anti-freeze water pipe
JP5305642B2 (en) Temperature control system for plastic molding machines
CN2879032Y (en) Single-loop anti-freezing water heater and pipeline collector thereof
CN100587361C (en) Solar water heater
CN211903072U (en) A installation and regulation structure for fan coil
CN212713742U (en) Sputter coating cooling water circulation system
KR200391023Y1 (en) Apparatus for cooling roof of building
CN207232050U (en) A kind of stone material roadbed freezing and thawing circulating test device automatically controlled
CN102734938A (en) Water saving system for water heater
CN202024556U (en) Water sprinkling device of ice slicing machine
CN105498019A (en) Bicirculating system of water for injection
CN218956075U (en) Test system
CN201307822Y (en) A water draining device for water-cooling converter

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C12 Rejection of a patent application after its publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20090225