CN101369051B - Metallographic microscope with high signal-to-noise ratio - Google Patents
Metallographic microscope with high signal-to-noise ratio Download PDFInfo
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- CN101369051B CN101369051B CN2008102008888A CN200810200888A CN101369051B CN 101369051 B CN101369051 B CN 101369051B CN 2008102008888 A CN2008102008888 A CN 2008102008888A CN 200810200888 A CN200810200888 A CN 200810200888A CN 101369051 B CN101369051 B CN 101369051B
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- light
- wave plate
- objective lens
- light source
- polarization
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- 238000003384 imaging method Methods 0.000 abstract description 4
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Abstract
A metallographic microscope with high signal-to-noise ratio comprises a light source, an objective lens group, a subsequent light path system and an eyepiece group, and is characterized in that: the light path between the objective lens group and the subsequent light path system is provided with a corner mirror, the corner mirror is composed of a polarization beam splitter and a quarter wave plate, the included angle between the polarization beam splitter and the light path between the objective lens group and the subsequent light path system is 45-55 degrees, the quarter wave plate is perpendicular to the light path between the objective lens group and the subsequent light path system, the optical axis direction of the quarter wave plate forms an angle of 45 degrees with the polarization direction of incident linearly polarized light, and the light source is a monochromatic collimation polarized light source. The invention is superior to the prior art by more than 10 times of signal-to-noise ratio, thereby obviously improving the imaging quality and contrast of the instrument.
Description
Technical field
The present invention relates to microscope, particularly a kind of metaloscope of high s/n ratio.
Background technology
Metaloscope is the basic tool of tissues observed details and defective in the material analysis.Effective magnification of the metaloscope of making based on geometrical optics and diffraction optics principle is 1500～1600 times to the maximum, can observe little tissue to 200nm.The microscopical image quality of this class depends on the quality of object lens to a great extent.Because object lens should be gathered the information from object as much as possible, again signal is passed to eyepiece without distortion.In order to reach this purpose, people designed large-numerical aperture object lens, apochromatic objective, look squarely object lens or the like ....Eyepiece then is responsible for the signal of object lens is passed to human eye with the magnification that is fit to.
In addition, illuminator and light path also are one of principal elements that influences the metaloscope image quality.People have taked all measures, improve lighting source, light path system reasonable in design arrives eyepiece as much as possible in order to make the light signal from object, background stray light is got rid of as much as possible, made it under 1500 times magnification, still can keep high imaging definition and contrast.
No matter microscope commonly used is bright field or dark field illumination, the critical piece of light path all uses the flat glass that becomes miter angle to place with source light to make vertical illuminator usually, effect is to allow light from light source turn 90 degrees arrive sample 3, arrive eyepiece after making the light transmission illumination device that comes out from sample 3 and subsequent optical path system again, the structure diagram of light path as shown in Figure 1.Constitute by light source 1, collimation lens 2, sample 3, objective lens 4, flat glass 5, subsequent optical path system 6 and eyepiece group 7, the advantage of this light path system is that imaging is smooth, clear, it is the light path system (referring to Sun Yeying, publishing house of " optical micro analysis " Tsing-Hua University) that generally uses at present.Yet, the weak point of this light path system is: the vertical illuminator made from flat glass 5 can't satisfy high reflectivity and transmissivity simultaneously, the light that comes out from light source 1 is every wants loss 50% through a flat glass, it is original 25% that the light that arrives eyepiece at last has only at most, influenced the quality and the sharpness of imaging.
Summary of the invention
The objective of the invention is to overcome the deficiency of above-mentioned technology formerly, a kind of metaloscope of high s/n ratio is provided, to significantly improve the light signal utilization factor of metaloscope, can obtain to be better than the signal to noise ratio (S/N ratio) of technology more than 10 times formerly in theory, thereby significantly improve image quality and contrast.
Technical solution of the present invention is as follows:
A kind of metaloscope of high s/n ratio, comprise light source, objective lens, subsequent optical path system and eyepiece group, be characterized in: be provided with the corner mirror in the light path between described objective lens and subsequent optical path system, this corner mirror is made of a slice polarization spectro sheet and quarter-wave plate, the angle of the light path between described polarization spectro sheet and described objective lens and the subsequent optical path system is 45 °～55 °, described quarter-wave plate is vertical with the light path between described objective lens and the subsequent optical path system, the polarization direction of the linearly polarized light of the optical axis direction of this quarter-wave plate and institute's incident is 45, described light source is a monochromatic collimation polarized light source, the light beam that is sent by described monochromatic collimation polarized light source is radiated on the described polarization spectro sheet, this polarization spectro sheet to from the polarization direction of light source incident perpendicular to the light beam of plane of incidence with high reflectance reflection and normal incidence to described quarter-wave plate, become circularly polarized light after seeing through this quarter-wave plate, light is through described objective lens irradiation sample, circularly polarized light by the reflection of this sample modulation, through described objective lens, after passing through described quarter-wave plate once more, the polarization direction of light is converted to former polarization of incident light direction perpendicular, high permeability ground sees through described polarization spectro sheet and enters described eyepiece group through described subsequent optical path system.
Described monochromatic collimation polarized light source is made up of successively monochromatic illumination light source, collimation lens and polaroid.
Described monochromatic illumination light source is the monochromatic semiconductor light-emitting-diode of high brightness.
Technique effect of the present invention is as follows:
The light beam that is sent by described monochromatic collimation polarized light source is radiated on the described polarization spectro sheet, this polarization spectro sheet turns over incident polarization light 90 degree or arrives described quarter-wave plate greater than an angle of 90 degrees normal incidence, linear polarization light becomes circularly polarized light through behind the described quarter-wave plate, arrives objective lens again to sample.The circularly polarized light that reflects through object lens 4 from sample, during for the second time by described quarter-wave plate, become linearly polarized light again, its polarization direction is perpendicular with the direction of vibration of the polarized light that originally shone sample, therefore, this light will finally arrive eyepiece by the corner mirror through the subsequent optical path system to be higher than 90% transmissivity.
The present invention compares with technology formerly, avoided per pass flat glass in the technology formerly catadioptric after, half becomes the situation of parasitic light the energy loss of light.The present invention has reduced bias light significantly, has significantly increased flashlight, is better than the signal to noise ratio (S/N ratio) of technology more than 10 times formerly, thereby significantly improves image quality and contrast.
Description of drawings
Fig. 1 is the microscopic structure synoptic diagram of existing use flat glass element as vertical illuminator.
Fig. 2 is the structural representation of the metaloscope embodiment of high s/n ratio of the present invention.
Fig. 3 is the optical axis direction synoptic diagram of quarter-wave plate of the present invention.
Embodiment
The invention will be further described below in conjunction with embodiment and accompanying drawing, but should not limit protection scope of the present invention with this.
See also Fig. 2 earlier, Fig. 2 is the structural representation of the metaloscope embodiment of high s/n ratio of the present invention.As seen from the figure, the metaloscope of embodiment of the invention high s/n ratio, comprise light source, objective lens 4, subsequent optical path system 6 and eyepiece group 7, it is characterized in that: be provided with corner mirror 11 in the light path between described objective lens 4 and subsequent optical path system 6, this corner mirror 11 is made of polarization spectro sheet 8 and quarter-wave plate 9, the angle of the light path between described polarization spectro sheet 8 and described objective lens 4 and the subsequent optical path system 6 is 45 °～55 °, described quarter-wave plate 9 is vertical with the light path between described objective lens 4 and the subsequent optical path system 6, the polarization direction of the linearly polarized light of the optical axis direction of this quarter-wave plate 9 and institute's incident is 45, described light source is a monochromatic collimation polarized light source, and described monochromatic collimation polarized light source is by successively monochromatic illumination light source 12, collimation lens 2 and polaroid 10 are formed.The monochromatic light that is sent by described monochromatic illumination light source 12 is penetrated on polaroid 10 behind collimation lens 2 collimations and is formed linearly polarized light, hang down as for the plane of incidence of polarization spectro sheet in its polarization direction, be the paper among Fig. 2, this light beam is radiated on the described polarization spectro sheet 8.This polarization spectro sheet 8 is by to the polarized light total reflection of polarization direction perpendicular to the plane of incidence, and the polarized light total transmissivity that the polarization direction is parallel to the plane of incidence is carried out beam splitting.Described quarter-wave plate 9 is arrived perpendicular to the light beam reflection back normal incidence of plane of incidence in the polarization direction of 8 pairs of incidents of this polarization spectro sheet, become circularly polarized light after seeing through, through described objective lens 4 irradiation samples 3, by this sample circular polarization light 3 modulation and reflection, after described objective lens 4, circularly polarized light is converted to the light beam that the polarization direction is parallel to described polarization spectro sheet 8 plane of incidences by described quarter-wave plate 9, see through described polarization spectro sheet 8 with high permeability, enter described eyepiece group 7 through described subsequent optical path system 6.
Described monochromatic illumination light source 12 is monochromatic semiconductor light-emitting-diodes of high brightness.
The optical axis direction of described quarter-wave plate 9 places the polarization direction folder miter angle with incident polarized light, plays the effect that changes the polarization of incident light state, and is detailed in Fig. 3.Among the figure: (a) be front view (FV), the surface of light normal incidence just, dotted line group AA ' is illustrated in the orientation of the optical axis of crystal in the paper plane.(b) be the quarter-wave plate outboard profile, arrow is the incident ray direction.
Described polarization spectro sheet 8 is a kind of through specially designed plated film lens, is coated with the multilayer complex films of refractive index height alternate on glass substrate, obtains vertical and be parallel to the polarisation of light beam splitting of the both direction of the plane of incidence.If the wavelength of the design of composite film refractive index and lighting source and incident angle coupling when rete is abundant, can obtain very high polarization spectro efficient so.If the film of wavelength and incident angle and design system does not match, the polarization spectro rate will not reach optimum setting value so, cause the polarized reflectance of light or polarization transmitance significantly to reduce, and just signal intensity reduces.
The present invention can be reflected the light from monochromatic polarized light source more than 90% through the careful corner mirror 11 of adjusting, and will be from the light of sample 3 and objective lens 4 to be higher than 90% transmitance outgoing, like this behind twice process of light corner mirror, as if the words of not considering to absorb, the total losses that produce are below 20%, and just bias light has dropped to below 20%.Compare with the each loss of flat glass element 50% in the technology formerly, signal to noise ratio (S/N ratio) has obtained the raising of the order of magnitude.
Described quarter-wave plate 9, be meant former and later two surfaces single-chips parallel made from uniaxial crystal commonly used with the optical axis of crystal, wave plate is placed the polarization direction folder miter angle with its optical axis direction and incident ray polarized light, and shown in Fig. 3 (a), purpose is the inclined to one side state of line that changes light.
Monochromatic illumination light source 12 is behind collimation lens 2 collimations of routine, pass through polaroid 10 again, become polarized light and incide corner mirror 11, the placement direction of described polaroid 10 select to make light by after become the polarization light of direction of vibration perpendicular to the plane of incidence of polarization spectro sheet.The plane of incidence of so-called polarization spectro sheet is meant the plane that the optical surface normal vector of the working direction vector of incident ray and polarization spectro sheet is constituted, it among Fig. 2 the paper plane, be direction perpendicular to the polarization direction of the plane of incidence perpendicular to paper plane, indicate with round dot among Fig. 2, the polarization state that is parallel to the plane of incidence then marks with little horizontal line.The angle is oblique when being mapped to polarization spectro sheet 8 with 45 degree (or near 45 degree) when light, is turned over the angle outgoing of 90 degree (or near 90 degree), finally arrives sample 3.From the circular polarization light of sample 3 through objective lens 4 reflected backs, when for the second time through quarter-wave plate 9, become linearly polarized light again, the polarization direction is vertical mutually with original polarization of incident light direction, promptly in the paper plane direction, therefore, this polarized light will be with very high transmissivity by the polarization spectro sheet, after subsequent optical path system 6 arrives eyepiece group 7.
The monochromatic light that monochromatic illumination light source 12 sends is behind collimating mirror 2 collimations of routine, again through polaroid 10 outgoing, polarization spectro sheet 8 is just incided perpendicular to the direction of paper with the plane of incidence perpendicular to polarization spectro sheet 8 in the polarization direction of emergent light, and then by quarter-wave plate 9, because the optical axis of crystal direction of quarter wave plate 14 9 and the direction of vibration of incident ray polarized light folder miter angle, shown in Fig. 3 (a), light is through quarter-wave plate 9 time, be divided into two parts that o light and e light equate, the thickness d of wave plate satisfies: (n
e-n
o) d=(2k+1) λ/4, wherein k is an arbitrary integer, λ is the illumination light wavelength, n
eAnd n
oFor e light and.The refractive index of light, like this, normal incidence also with the linearly polarized light of 45 ° on the wave plate optical axis folder optical path difference of o light and e light when the outgoing be ± λ/4, then form the circularly polarized light outgoing, through objective lens 4 arrival samples 3.
When the circularly polarized light that returns through objective lens 4 from sample 3 passes through quarter-wave plate 9 once more, become from circularly polarized light and to be linearly polarized light, because space reflexed, from circularly polarized light become for linearly polarized light vertical mutually with the linearly polarized light of original incident, therefore pass through polarization spectro sheet 8 with high transmitance, through subsequent optical path system 6 last eyepieces 7 or the record planes of arriving.
The design of described polarization spectro sheet 8 and making, be to realize by the multilayer complex films of plating refractive index height alternate on glass substrate, every layer of the multilayer film that rete enters according to incident ray all is the Brewster angle design, the thickness of rete satisfies certain light and interferes the condition of strengthening, and the thickness of each tunic can have tens atomic layers.When the wavelength of the lighting source of composite film and design and incident angle are complementary, can obtain to be higher than 90% polarization ratio.If when both do not match, will not reach the optimal design value.
Claims (3)
1. the metaloscope of a high s/n ratio, comprise light source, objective lens (4), subsequent optical path system (6) and eyepiece group (7), it is characterized in that: be provided with corner mirror (11) in the light path between described objective lens (4) and subsequent optical path system (6), this corner mirror (11) is made of a slice polarization spectro sheet (8) and quarter-wave plate (9), the angle of the light path between described polarization spectro sheet (8) and described objective lens (4) and the subsequent optical path system (6) is 45 °～55 °, described quarter-wave plate (9) is vertical with the light path between described objective lens (4) and the subsequent optical path system (6), the polarization direction of the linearly polarized light of the optical axis direction of this quarter-wave plate (9) and institute's incident is 45, described light source is a monochromatic collimation polarized light source, the light beam that is sent by described monochromatic collimation polarized light source is radiated on the described polarization spectro sheet (8), this polarization spectro sheet (8) to the polarization direction of incident perpendicular to the light beam of plane of incidence with high reflectance reflection and normal incidence to described quarter-wave plate (9), become circularly polarized light after seeing through this quarter-wave plate (9), light is through described objective lens (4) irradiation sample (3), circularly polarized light by the reflection of this sample (3) modulation, through described objective lens (4), after passing through described quarter-wave plate (9) once more, the polarization direction of light is converted to former polarization of incident light direction perpendicular, high permeability ground sees through described polarization spectro sheet (8) and enters described eyepiece group (7) through described subsequent optical path system (6).
2. the metaloscope of high s/n ratio according to claim 1 is characterized in that described monochrome collimates polarized light source and is made up of successively monochromatic illumination light source (12), collimation lens (2) and polaroid (10).
3. the metaloscope of high s/n ratio according to claim 2 is characterized in that described monochromatic illumination light source (12) is the monochromatic semiconductor light-emitting-diode of high brightness.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008102008888A CN101369051B (en) | 2008-10-08 | 2008-10-08 | Metallographic microscope with high signal-to-noise ratio |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008102008888A CN101369051B (en) | 2008-10-08 | 2008-10-08 | Metallographic microscope with high signal-to-noise ratio |
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| Publication Number | Publication Date |
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| CN101369051A CN101369051A (en) | 2009-02-18 |
| CN101369051B true CN101369051B (en) | 2010-08-11 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| EP3336597A1 (en) * | 2016-12-19 | 2018-06-20 | Leica Instruments (Singapore) Pte. Ltd. | Microscope or endoscope assembly and method for reducing specular reflections |
| TWI668471B (en) * | 2018-09-14 | 2019-08-11 | 量子光電股份有限公司 | Head mounted display and optical device thereof |
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Granted publication date: 20100811 Termination date: 20121008 |