CN101358938A - Nondestructive inspection method and device for internal defect of workpieces by x-ray diffraction x scan - Google Patents

Nondestructive inspection method and device for internal defect of workpieces by x-ray diffraction x scan Download PDF

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CN101358938A
CN101358938A CNA2008102102146A CN200810210214A CN101358938A CN 101358938 A CN101358938 A CN 101358938A CN A2008102102146 A CNA2008102102146 A CN A2008102102146A CN 200810210214 A CN200810210214 A CN 200810210214A CN 101358938 A CN101358938 A CN 101358938A
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ray
detector
measured workpiece
scanning
workpiece
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郑林
何长光
彭正坤
张津
唐伦科
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SOUTH EAST TECHNOLOGIAL ENGINEERING INST
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SOUTH EAST TECHNOLOGIAL ENGINEERING INST
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Abstract

The present invention relates to a nondestructive testing method of X-ray diffraction which is used for detecting the internal defect of a workpiece which is made of crystal material (including single-crystal materials and polycrystalline materials) or material which contains atoms arranged in sequence along the one-dimensional space, and a device thereof, in particular suitable for detecting the internal defect of the workpiece made of material which consists of atoms of low atomic number. The method adopts the nondestructive test to get the intensity distribution map of diffraction of materials in all internal parts of the tested workpiece; then the nondestructive test is adopted to analyze the internal defect, the defect type and distribution of the tested workpiece. The X-ray tube radiation of easily available heavy metal anode target, which can be industrialized and practically applied, can be used in the rapid nondestructive test of the internal defect and the defect type of aluminum and magnesium workpieces which have a thickness of a plurality of millimeters; and the spatial resolution is superior to the existing X-ray detection machine and X-ray CT.

Description

A kind of X-ray diffraction scanning lossless detection method and device of workpiece inherent vice
Technical field
The present invention relates to a kind of employing X-ray diffraction scanning Non-Destructive Testing crystalline material and (comprise monocrystal material and polycrystalline material, or contain atom and arrange orderly material such as fibre-reinforced compound substance along the one-dimensional space) method and apparatus of workpiece inherent vice, be particularly useful for above-mentioned material (hereinafter to be referred as low z material) the workpiece inherent vice than the low atomic number atomic building and the Non-Destructive Testing of distribution thereof.
Background technology
At present, use inherent vice always, as x-ray flaw detector, X ray CT or C super scanning instrument etc. based on the instrument and equipment Non-Destructive Testing workpiece material of X-ray transmission method or supercritical ultrasonics technology.Wherein, X ray CT and C super scanning instrument not only can detect spatial form, the size of defectives such as inner space, snotter, but also can measure the particular location of inherent vice, have the not available advantage of x-ray flaw detector.But, no matter all there are spatial resolution relatively poor (for the about 1.01p/mm of defective spatial resolution of low z materials such as aluminium) in X ray CT or C super scanning instrument and Dynamic Non-Destruction Measurement thereof, and can not Non-Destructive Testing crystalline material (comprising monocrystal material and polycrystalline material) workpiece be mingled with mutually, crystallography defective such as crystal grain distributing homogeneity or crystal orientation difference.
In addition, CN1049496C and CN1588019A disclose long X-ray diffraction measurement mechanism of radiothermy and method respectively, can the fix a point X-ray diffraction spectrum of nondestructive measurement workpiece material crystal inside material, the X-ray diffraction Non-Destructive Testing that is used for low z material workpiece internal stress, inner thing phase, inner texture etc. and distributed in three dimensions thereof is analyzed.Because these two open files are to record the distribution of diffracted intensity along angle of diffraction 2 θ by rotating measured workpiece θ angle or detector 2 θ, the i.e. first X-ray diffraction spectrum of fixed point nondestructive measurement measured workpiece crystal inside material, and then allow measured workpiece move to the diffraction spectra that another point is measured in another some back.Obviously, if can expect adopting said method to come Non-Destructive Testing measured workpiece inherent vice, to such an extent as to its oversize practicality that do not have consuming time.Need to prove that only the diffraction spectra at the inner position of one-point measurement measured workpiece just needs several minutes to tens of minutes.
Summary of the invention
The object of the present invention is to provide a kind of X-ray diffraction scanning lossless detection method that is mainly used in low z material (as materials such as aluminium, magnesium, silicon, titanium, carbonitrides) workpiece inherent vice.This detection method spatial resolution is high and quick.
Another object of the present invention is to provide a kind of X-ray diffraction scanning the cannot-harm-detection device that is used for the workpiece material inherent vice of said method.
The object of the present invention is achieved like this: a kind of X-ray diffraction scanning lossless detection method of workpiece inherent vice, it is characterized in that: it is that the X ray that x-ray source sends becomes the tested position that a branch of parallel X-ray incides measured workpiece after the incident collimating apparatus, and detector and parallel spacing collimating apparatus/detector array and the corresponding parallel spacing tested position that collimator array is also aimed at measured workpiece of accepting thereof accepted thereof, and the x-ray diffraction line that send at the tested position of measured workpiece enters parallel spacing collimating apparatus and the corresponding detector thereof/enter the parallel spacing corresponding probe unit of accepting collimator array and detector array thereof accepted, and the X-ray diffraction wire harness that promptly enters the corresponding probe unit of detector/detector array equals angle of diffraction 2 θ with the angle that incides the incident X-rays bundle of measured workpiece HklWherein, angle of diffraction 2 θ HklEqual the angle of diffraction of diffraction peak correspondence of certain crystalline material (hkl) crystal face of measured workpiece, satisfy Bragg equation 2d HklSin θ Hkl= λ, d wherein HklFor (hkl) interplanar distance from, λBe the diffracted ray wavelength; For monocrystalline, (the following situation that will satisfy these condition angle relations all is referred to as angle of diffraction 2 θ also to satisfy Ewald reciprocal space relation Hkl); Place a three-D displacement platform to move measured workpiece and carry out one-dimensional scanning or two-dimensional scan or 3-D scanning; In this sweep test process, be positioned at angle of diffraction 2 θ HklThe X ray that detects of detector/detector array be to come from the x-ray diffraction line that the material at the tested position of measured workpiece sends, thereby record the diffracted intensity and the distribution thereof of each position material of workpiece, and then record spatial form, size, position and the distribution thereof of measured workpiece inherent vice.
For the diffracted intensity distribution plan that obtains inner each the position material of the better measured workpiece of effect (being similar to inner each position material of workpiece that the X ray CT Non-Destructive Testing obtains absorption coefficient distribution plan) to X ray, can carry out absorption intensity correction and geometric correction to the diffracted intensity and the distribution thereof that record, thus the spatial form, size, position and the distribution thereof that more clearly record the measured workpiece inherent vice; And, according to the space that records in advance, be mingled with the defective border family curve of defectives such as phase, crystal homogeneity or crystal difference, can improve the accuracy of defects detection in conjunction with the diffracted intensity distribution plan of measured workpiece, be beneficial to the type of differentiating each defective, be the space, be mingled with phase, crystallography defective or the like such as, defect type.
In order further to improve the spatial resolution and the accuracy of the method for the invention, the present invention adopts energy analyzer to cooperate the detector/detector array of high energy resolution to use, and then under the control of computing machine, measured workpiece is carried out the X-ray diffraction scanning Non-Destructive Testing of one-dimensional scanning or two-dimensional scan or 3-D scanning, obtain the diffracted intensity distribution plan of inner each the position material of measured workpiece, thereby finish the X-ray diffraction scanning Non-Destructive Testing of measured workpiece inherent vice better.
Below describe with regard to the concrete application of the method for the invention.
When the inherent vice of measured workpiece certain depth scope being carried out X-ray diffraction scanning Non-Destructive Testing, adopt the X-ray diffraction reflectometry more, promptly x-ray source and detector/detector array are listed in the homonymy of measured workpiece; When the inherent vice of measured workpiece whole thickness range being carried out X-ray diffraction scanning Non-Destructive Testing, adopt the X-ray diffraction transmission beam method more, promptly x-ray source and detector/detector array are listed in the both sides of measured workpiece.
X ray in the method for the invention both can stem from X ray intensity by the comparatively uniform x-ray source (as synchronous radiation, electron linear accelerator etc.) of its Wavelength distribution, also can stem from the X-ray production apparatus X-ray tube with characteristic X-ray.
The material of the plate target of above-mentioned X-ray tube can be heavy metals such as tungsten, gold, platinum, rhodium, also can (atomic number of the material of plate target be big more for metals such as cobalt, chromium, copper, molybdenum, silver, the wavelength of the characteristic X-ray that it sends is short more, as wavelength=1.54 dusts of CuK α, and the wavelength of WK α=0.211 dust).As everyone knows, the wavelength of X ray is short more, and the atomic number of measured workpiece material is more little, and the penetration capacity of X ray is just strong more.Therefore, for the workpiece inherent vice of the workpiece inherent vice of using the same thickness of method Non-Destructive Testing of the present invention or the same degree of depth, for the little crystalline material workpiece of atomic number (as material workpiece such as beryllium, boron nitride, carbon fibre reinforced composites), just can adopt x-ray source (X ray that can reach 3 dusts as wavelength) the radiation workpiece of the longer X ray of wavelength, record the diffracted ray intensity distributions of long X ray of this wavelength, crystalline material workpiece inherent vice and distribution thereof that the Non-Destructive Testing atomic number is little; For the bigger crystalline material workpiece of atomic number (as material workpiece such as aluminium, magnesium, silicon, titanium, titanium nitrides), just can adopt x-ray source (can be short to the X ray of 0.1 dust as wavelength) the radiation workpiece of the shorter X ray of wavelength, record the diffracted ray intensity distributions of short X ray of this wavelength, crystalline material workpiece inherent vice and distribution thereof that the Non-Destructive Testing atomic number is bigger.
In order to select better x-ray diffraction line, we can be further according to the Bragg equation of X-ray diffraction, in conjunction with the linear absorption coefficient of the length of the wavelength of the X ray of diffraction and corresponding measured workpiece material thereof with need the workpiece depth range or the thickness of Non-Destructive Testing, and crystal is to the X-ray diffraction ability (X-ray diffraction intensity is directly proportional with the cube of wavelength) of selected wavelength, and the argumentation of front, select the wavelength of the x-ray diffraction line that suits λCharacterize defective.
Accuracy for the Non-Destructive Testing precision that improves defective and defect type are passed judgment on can adopt when X-ray diffraction scanning Non-Destructive Testing workpiece inherent vice, and the method for the X-ray diffraction line strength by measuring the very little a certain wavelength period of wavelength width realizes:
1, for stemming from X ray intensity, selects the feasible suitable wavelength of suitable crystal monochromator by the comparatively uniform x-ray source (as synchronous radiation, electron linear accelerator etc.) of its Wavelength distribution λX ray enter the incident collimating apparatus, the parallel X-ray of a branch of monochrome of coming out from the incident collimating apparatus is radiated the tested position of measured workpiece, and the parallel spacing corresponding probe unit of accepting collimating apparatus and corresponding detector/spacing slit array of parallel acceptance and detector array thereof is placed angle of diffraction 2 θ Hkl, record wavelength and be λX-ray diffraction intensity, mobile measured workpiece carries out the X-ray diffraction scanning Non-Destructive Testing of one-dimensional scanning or two-dimensional scan or 3-D scanning, just can obtain the diffracted intensity distribution plan of inner each the position material of measured workpiece, record spatial form, size, position and the distribution thereof of measured workpiece inherent vice, and the type of differentiating each defective; Certainly, crystal monochromator also can be arranged at before the detector.Perhaps, do not adopt crystal monochromator, but adopt energy analyzer to cooperate the detector of high energy resolution or the way of detector array, from comprising wavelength the X ray monochromatization λThe X ray of various wavelength in filter out wavelength and be λX ray, record wavelength and be λX-ray diffraction intensity, and then mobile measured workpiece carries out the X-ray diffraction scanning Non-Destructive Testing of one-dimensional scanning or two-dimensional scan or 3-D scanning under the control of computing machine, obtain the diffracted intensity distribution plan of inner each the position material of measured workpiece, thereby finish the X-ray diffraction scanning Non-Destructive Testing of measured workpiece inherent vice.
2, for X-ray tube as x-ray source, promptly the wavelength with suitable X-ray tube target is λCharacteristic X-ray radiation measured workpiece, adopt corresponding crystal monochromator or filter plate with the X ray monochromatization, the parallel spacing corresponding probe unit of accepting collimating apparatus and corresponding detector/spacing slit array of parallel acceptance and detector array thereof is placed angle of diffraction 2 θ Hkl, record wavelength and be λX-ray diffraction intensity, and then mobile measured workpiece carries out the X-ray diffraction scanning Non-Destructive Testing of one-dimensional scanning or two-dimensional scan or 3-D scanning, obtain the diffracted intensity distribution plan of inner each the position material of measured workpiece, thereby finish the X-ray diffraction scanning Non-Destructive Testing of measured workpiece inherent vice; When being heavy metal, preferably adopt energy analyzer to cooperate the detector of high energy resolution or the way of detector array, from comprising wavelength for the target of X-ray tube λThe X ray of various wavelength in filter out wavelength and be λX ray, record angle of diffraction 2 θ HklThe wavelength at place is λX-ray diffraction intensity, and then workpiece is carried out the X-ray diffraction scanning Non-Destructive Testing of one-dimensional scanning or two-dimensional scan or 3-D scanning, obtain the diffracted intensity distribution plan of inner each the position material of measured workpiece, thereby finish the X-ray diffraction scanning Non-Destructive Testing of measured workpiece inherent vice; Also can neither adopt crystal monochromator or filter plate with the X ray monochromatization, also not adopt energy analyzer to cooperate the detector of high energy resolution or the way of detector array, directly allow detector or detector array record angle of diffraction 2 θ HklThe wavelength at place is λX-ray diffraction intensity (X-ray diffraction intensity that just records has comprised the X ray scattered ray of other more wavelength, cause the measuring accuracy relatively poor), and then workpiece is carried out the X-ray diffraction scanning Non-Destructive Testing of one-dimensional scanning or two-dimensional scan or 3-D scanning, obtain the diffracted intensity distribution plan of inner each the position material of measured workpiece, thereby finish the X-ray diffraction scanning Non-Destructive Testing of measured workpiece inherent vice.
The accuracy of passing judgment on for the Non-Destructive Testing precision that improves defective and defect type, can also adopt the method for the diffracted intensity distribution plan of many reflections of Non-Destructive Testing measured workpiece inherent vice, embodiment is: both can be with a plurality of detectors and parallel spacing collimating apparatus/a plurality of detector arrays and the corresponding parallel spacing (h that collimator array places measured workpiece respectively that accepts thereof of accepting thereof 1k 1l 1) angle of diffraction 2 θ of crystal face Hlk1l1, (h 2k 2l 2) angle of diffraction 2 θ of crystal face H2k2l2..., finish the diffracted intensity distribution plans that obtain many reflection measured workpiece inherent vices after the detection simultaneously; Also can be with a detector and parallel spacing collimating apparatus/one detector array and the corresponding parallel spacing (h that collimator array places measured workpiece that accepts thereof of accepting thereof 1k 1l 1) angle of diffraction 2 θ of crystal face H1k1l1Just obtain the 1st diffracted intensity distribution plan that reflects the measured workpiece inherent vice after finishing detection, again with this detector and parallel spacing collimating apparatus or a detector array and the corresponding parallel spacing (h that collimator array places measured workpiece that accepts thereof of accepting thereof 2k 2l 2) angle of diffraction 2 θ of crystal face H2k2l2, finish the diffracted intensity distribution plan that just obtains the 2nd reflection measured workpiece inherent vice after the detection ..., obtain many diffracted intensity distribution plans that reflect the measured workpiece inherent vices by the way of such repeated detection.Determine the snotter thing mutually and the Non-Destructive Testing that distributes for needs,, preferably also detect the line (h of three strongest ones of snotter thing phase simultaneously according to three strongest ones' collimation method of material phase analysis then (the Hanawalt method that thing is retrieved mutually) 1k 1l 1) crystal face, (h 2k 2l 2) crystal face and (h 3k 3l 3) the diffracted intensity distribution plan of crystal face, just can reflect the diffracted intensity distribution plan of measured workpiece inner clamps foreign material thing phase.
Obviously, no matter adopt which kind of x-ray source, for the abundant high detector/detector array of energy resolution, thereby the method for the invention optimal scheme is to utilize energy analyzer to cooperate the detector array measured X ray diffraction intensity of the detector of high energy resolution or high energy resolution to finish the X-ray diffraction scanning Non-Destructive Testing of measured workpiece inherent vice, and the X ray monochromatization technology of so just having exempted employing filter plate or crystal monochromator causes the decay of X ray intensity.
Above-mentioned parallel spacing collimating apparatus and the above-mentioned incident collimating apparatus accepted, its endoporus (being light hole) width a is 0.05mm～1mm, its angle of divergence is less than 0.5 °; Its endoporus height is not more than the focal spot length of X-ray tube.The above-mentioned parallel spacing collimator array of accepting, the width of its n (n is the positive integer greater than 1) endoporus (being light hole) is identical, and width is 0.05mm～1mm, and its angle of divergence is less than 0.5 °; Its n endoporus height is all identical, the pore wall thickness that the shielding heavy metal constitutes between adjacent endoporus is t, each endoporus height is b, then [nb+ (n-1) t] is not more than the focal spot length of x-ray source, and the center line on the focal spot length direction of x-ray source is in the plane of angular instrument axis and incident collimating apparatus light hole center line formation.Parallelly spacingly accept collimating apparatus, parallelly spacingly accept collimator array and the incident collimating apparatus is to be made by the heavy metal that can shield X ray, have only the X ray of direct projection light hole not have with blocking and pass through the X ray of all the other scatterings and the equal conductively-closed of x-ray diffraction line that comes from other position.Above-mentioned parallel spacing short transverse and the angular instrument shaft parallel of accepting the endoporus of collimating apparatus and above-mentioned incident collimating apparatus, above-mentioned parallel spacing short transverse and the angular instrument shaft parallel of accepting each endoporus of collimator array.The length direction center line of the above-mentioned parallel spacing endoporus of accepting collimating apparatus and above-mentioned incident collimating apparatus is on plane, diffractometer garden and point to the angular instrument shaft axis, and the above-mentioned parallel spacing length direction center line of accepting each endoporus of collimator array is parallel to plane, diffractometer garden (and be symmetrical plane with plane, diffractometer garden) and points to the angular instrument shaft axis.Need to prove: the implication of the above-mentioned parallel spacing width of accepting the slit in collimating apparatus, the parallel spacing interior hole width of accepting collimator array and incident collimating apparatus and the existing X-ray diffractometer is the same; The focal spot length h of above-mentioned x-ray source refers to the length of focal spot on incident collimating apparatus endoporus short transverse from the direction x-ray source of seeing over of incident collimating apparatus.
Above-mentioned three-D displacement platform is under the instruction that computing machine sends according to process of measurement, drive the three-D displacement platform, the tested workpiece that drives on it carries out the continuous motion mode or the step motion mode of x, y, z direction, thereby realizes one-dimensional scanning or two-dimensional scan or 3-D scanning to tested workpiece.
The incident direction of X-ray beam is defined as the x direction of principal axis, the X-ray beam of incident is defined as the xy plane with the plane (being the diffractometer disk) that determines through the parallel spacing diffracted ray of accepting collimating apparatus, and then collimating apparatus endoporus short transverse is just in the z direction perpendicular to the xy plane.So, adopting detector array and corresponding parallel spacing when accepting collimator array the inherent vice of measured workpiece whole thickness range being carried out X-ray diffraction scanning Non-Destructive Testing, then the z direction just can take the step motion mode to scan, the step-length of z direction is less than or equal to the parallel spacing pore wall thickness a that accepts between the adjacent endoporus of collimator array, guarantees that can not there be not detected position in measured workpiece.
Above-mentioned detector or detector array require fully shielding, avoid the X ray interferometry of scattering.
The step of the inventive method is as follows:
(1), selects the wavelength of suitable X-ray diffraction according to measured workpiece and condition λ
(2) choose x-ray source, and the parameter of x-ray source is (as being example with X-ray tube as x-ray source, then need to select tube voltage, tube current and X-ray tube focal spot size specification, tube voltage is about 2～5 times of characteristic X-ray exciting voltage of plate target metal, choose enough big tube voltage, tube current guarantees that the diffracted intensity that detects is fully big);
(3) choose detector or detector array;
(4) choose energy analyzer and parameter thereof (wide, or upper-level threshold, threshold etc. down) or filter plate or crystal monochromator as baseline, road, perhaps energy analyzer, filter plate, crystal monochromator is not chosen;
(5) choose X-ray diffraction reflectometry or X-ray diffraction transmission beam method;
(6) choose the incident collimating apparatus, and parallel spacing collimating apparatus or the parallel spacing light hole dimensions of accepting collimator array (as the dimensions of the slit of X-ray diffractometer) accepted;
(7) clamping measured workpiece is selected tested scope, i.e. the scope of D translation platform, scan mode and parameter;
(8) the parallel spacing corresponding probe unit of accepting collimating apparatus and corresponding detector or spacing slit array of parallel acceptance and detector array thereof is placed angle of diffraction 2 θ H1k1l1, perhaps a plurality of parallel spacing corresponding probe units of accepting collimating apparatus and corresponding detector or spacing slit array of a plurality of parallel acceptance and detector array thereof are placed angle of diffraction 2 θ respectively H1k1l1, 2 θ H2k2l2,
(9) carry out diffracted intensity and the distribution thereof that scanning survey obtains each position material of workpiece;
(10) carry out computings such as absorption intensity correction and geometric correction, obtain the diffracted intensity distribution plan of inner each the position material of measured workpiece;
(11) according to empirical model, obtain spatial form, size, position and the distribution thereof of measured workpiece inherent vice, differentiate the type of each defective.
Another object of the present invention is achieved in that a kind of device that is used for the X-ray diffraction scanning lossless detection method of above-mentioned workpiece inherent vice, comprise x-ray source, incident collimating apparatus, place three-D displacement platform, angular instrument, the parallel spacing collimating apparatus or parallel spacing collimator array, detector or detector array, the computing machine accepted accepted of measured workpiece, it is characterized in that: it is angle of diffraction 2 θ that the corresponding probe unit of described detector/detector array is placed its X-ray diffraction wire harness that receives and angle that incides the incident X-rays bundle of measured workpiece HklWherein, angle of diffraction 2 θ HklEqual the angle of diffraction of diffraction peak correspondence of certain crystalline material (hkl) crystal face of measured workpiece, satisfy Bragg equation 2d HklSin θ Hkl=λ, wherein d HklFor (hkl) interplanar distance from, λ is the wavelength of x-ray diffraction line; For monocrystalline, also satisfy Ewald reciprocal space relation; When adopting the X-ray diffraction reflectometry, x-ray source and detector or detector array are listed in the homonymy of measured workpiece, and when adopting the X-ray diffraction transmission beam method, x-ray source and detector or detector array are listed in the both sides of measured workpiece, move measured workpiece when measurement it is carried out sweep measuring.
Device of the present invention also comprises energy analyzer; Or count rate meter; Or filter plate and count rate meter; Or monochromator and count rate meter.
When the inherent vice of measured workpiece certain depth scope being carried out X-ray diffraction scanning Non-Destructive Testing, the X-ray diffraction reflectometrys that adopt more, promptly above-mentioned x-ray source and incident collimating apparatus thereof and above-mentioned parallel spacing collimating apparatus and detector thereof or the above-mentioned parallel spacing homonymy that collimator array and detector array thereof are listed in measured workpiece of accepting accepted; When the inherent vice of measured workpiece whole thickness range being carried out X-ray diffraction scanning Non-Destructive Testing, the X-ray diffraction transmission beam methods that adopt more, promptly above-mentioned x-ray source and incident collimating apparatus thereof and above-mentioned parallel spacing collimating apparatus and detector thereof or the above-mentioned parallel spacing both sides that collimator array and detector array thereof are listed in measured workpiece of accepting accepted.
Above-mentioned x-ray source can be an X-ray tube, also can be synchrotron radiation or electron linear accelerator, selects according to physical condition.The material of the plate target of X-ray tube can be heavy metals such as tungsten, gold, platinum, rhodium, also can be metals such as cobalt, chromium, copper, molybdenum, silver, the metal of choosing anode target material with the material and the sensing range thereof of measured workpiece utilizes wavelength to be according to the method described in the present invention λThe X-ray diffraction intensity of target metallicity X-ray measurement measured workpiece each several part.
Above-mentioned energy analyzer accepts to come from the electric impulse signal of detector or detector array output, and energy analyzer according to the parameter of selected energy analyzer (baseline, road wide etc.) to wavelength is λX ray count and obtain diffracted ray counting intensity, and X-ray diffraction counted intensity output to above-mentioned computing machine;
Above-mentioned filter plate both can be placed on X ray and incide before the measured workpiece, before also can being placed on measured workpiece detector or detector array afterwards, the electric impulse signal input said counting rate instrument of detector or detector array output, and X-ray diffraction is counted intensity output to above-mentioned computing machine;
Above-mentioned crystal monochromator both can be placed on X ray and incide before the measured workpiece, before also can being placed on measured workpiece detector or detector array afterwards, the electric impulse signal input said counting rate instrument of detector or detector array output, and X-ray diffraction is counted intensity output to above-mentioned computing machine;
Under the situation that does not have above-mentioned energy analyzer, above-mentioned filter plate, above-mentioned crystal monochromator, the electric impulse signal input said counting rate instrument of detector or detector array output, and will comprise that the counting intensity of X-ray diffraction counting intensity outputs to above-mentioned computing machine.
Above-mentioned detector or detector array all adopt certain thickness heavy metal box that it is fully shielded, and avoid the X ray interferometry of scattering.
Above-mentioned parallel spacing collimating apparatus and the above-mentioned incident collimating apparatus accepted, its endoporus (being light hole) width a is 0.05mm～1mm, its angle of divergence is less than 0.5 °; Its endoporus height is not more than the focal spot length of X-ray tube.The above-mentioned parallel spacing collimator array of accepting, the width of its n (n is the positive integer greater than 1) endoporus (being light hole) is identical, and width is 0.05mm～1mm, and its angle of divergence is less than 0.5 °; Its n endoporus height is all identical, and the pore wall thickness that the shielding heavy metal constitutes between adjacent endoporus is t, and each endoporus height is b, and then [nb+ (n-1) t] is not more than the focal spot length of x-ray source.Parallelly spacingly accept collimating apparatus, parallelly spacingly accept collimator array and the incident collimating apparatus is to be made by the heavy metal that can shield X ray, have only the X ray of direct projection light hole not have with blocking and pass through the X ray of all the other scatterings and the equal conductively-closed of x-ray diffraction line that comes from other position.Above-mentioned detector is fixed on the angular instrument 2 θ swinging mountings near the parallel spacing collimating apparatus of accepting, and can turn to different angles; Above-mentioned detector array is fixed on the angular instrument 2 θ swinging mountings near the parallel spacing collimator array of accepting, and can turn to different angles.Above-mentioned parallel spacing short transverse and the angular instrument shaft parallel of accepting the endoporus of collimating apparatus and above-mentioned incident collimating apparatus, above-mentioned parallel spacing short transverse and the angular instrument shaft parallel of accepting each endoporus of collimator array.The length direction center line of the above-mentioned parallel spacing endoporus of accepting collimating apparatus and above-mentioned incident collimating apparatus is on plane, diffractometer garden and point to the angular instrument shaft axis, and the above-mentioned parallel spacing length direction center line of accepting each endoporus of collimator array is parallel to plane, diffractometer garden (and be symmetrical plane with plane, diffractometer garden) and points to the angular instrument shaft axis.
Angular instrument is fixed on the platform.Detector or detector array can be generally 150mm～500mm according to the actual conditions adjustment to the distance in the diffractometer center of circle.
Above-mentioned three-D displacement platform is fixed on the platform or is fixed on the rotatable platform of angular instrument θ, under the instruction that above-mentioned computing machine sends according to process of measurement, drive the three-D displacement platform, the tested workpiece that drives on it carries out the continuous motion mode or the step motion mode of x, y, z direction, thereby realizes one-dimensional scanning or two-dimensional scan or 3-D scanning to tested workpiece.
Above-mentioned angular instrument is fixed (as being fixed on the above-mentioned platform), and angular instrument can rotate 2 θ to the angle that requires and how to rotate under the instruction that above-mentioned computing machine sends according to process of measurement; When above-mentioned angular instrument has the θ part, also can rotate θ to the angle that requires and how to rotate.Above-mentioned three-D displacement platform both can have been fixed on the above-mentioned platform, also can be fixed on the rotatable platform of angular instrument θ.
Method and apparatus of the present invention is under the situation of not destroying measured workpiece, Non-Destructive Testing crystalline material (comprising monocrystal material and polycrystalline material) or contain atom and arrange orderly material (as fibre-reinforced compound substance) workpiece inherent vice and defect type (as the space of material internal, be mingled with mutually and crystal orientation etc.) along the one-dimensional space.The present invention has broken through radioscopy (x-ray flaw detector, the theoretical foundation of X ray CT) traditional thinking constraint, the method and apparatus of the X-ray diffraction scanning Non-Destructive Testing of Non-Destructive Testing workpiece inherent vice has been proposed based on the x ray diffractometry theory, overcome existing x-ray flaw detector, X ray CT exists spatial resolution relatively poor but also do not possess being mingled with mutually of Non-Destructive Testing crystalline material (comprising monocrystal material and polycrystalline material) workpiece, the difficult problem of the function of crystallography defectives such as crystal grain distributing homogeneity or crystal orientation difference mainly is applicable to than the crystalline material of low atomic number atomic building or contains atom and arranges the workpiece inherent vice of orderly material and the Non-Destructive Testing of distribution thereof along the one-dimensional space.Utilize this method and based on the device of this method, adopt the X-ray tube radiation of tungsten plate target, for the aluminium workpiece, pick up the workpiece inherent vice and the defect type thereof of millimeters thick but Non-Destructive Testing thickness reaches number, and spatial resolution is better than existing x-ray flaw detector, X ray CT.It is reliable that this method and device detect defective, the spatial resolution height of detection.
Description of drawings
Fig. 1 is the device block diagram of a kind of combination in the device of the present invention (this X-ray diffraction scanning the cannot-harm-detection device block diagram is selecting the X-ray diffraction transmission beam method for use, and energy analyzer cooperates the combining of detector array measured X ray diffraction intensity of the detector of high energy resolution or high energy resolution);
Fig. 2 is incident collimating apparatus of the present invention and the parallel spacing sectional view of accepting collimating apparatus;
Fig. 3 is that the A-A of Fig. 2 is to view;
Fig. 4 is a parallel spacing sectional view of accepting collimator array of the present invention;
Fig. 5 is that the A-A of Fig. 4 is to view;
Fig. 6 is the device block diagram of the combination of the another kind in the device of the present invention (this X-ray diffraction scanning the cannot-harm-detection device block diagram is selecting the X-ray diffraction transmission beam method for use, and the combining of electron linear accelerator, crystal monochromator and count rate meter, detector array measured X ray diffraction intensity);
Fig. 7 is the device block diagram of the combination of the another kind in the device of the present invention (this X-ray diffraction scanning the cannot-harm-detection device block diagram is selecting the X-ray diffraction reflectometry for use, and the combining of X-ray tube, filter plate and count rate meter, detector array measured X ray diffraction intensity);
Fig. 8 is inserted in the thick X-ray diffraction one-dimensional scanning Non-Destructive Testing result who compresses the middle image quality indicator of aluminium powder sample of 25mm, wherein 5 draw points of 5 of test curve corresponding image quality indicators of recessed portion difference.
1 spacingly accepts collimating apparatus or the parallel spacing collimator array, 6 of accepting is the stationary platform of measurement mechanism for printer, 12 for power supply, 13 for computing machine, 11 for multiple tracks energy analyzer, 10 for x-ray source controller, 9 for angular instrument, 8 for detector or detector array, 7 for parallel for three-D displacement platform, 5 for measured workpiece, 4 for incident collimating apparatus, 3 for x-ray source, 2 among Fig. 1.
Among Fig. 61 for x-ray source, 2 for the incident collimating apparatus, 3 for measured workpiece, 4 for the three-D displacement platform, 5 for parallel spacing accept collimating apparatus or parallel spacing accept collimator array, 6 for detector or detector array, 7 for angular instrument, 8 for the x-ray source controller, 10 for computing machine, 11 for printer, 12 for power supply, 13 for the stationary platform of measurement mechanism, 14 for crystal monochromator, 16 be count rate meter.
Among Fig. 71 for x-ray source, 2 for the incident collimating apparatus, 3 for measured workpiece, 4 for the three-D displacement platform, 5 for parallel spacing accept collimating apparatus or parallel spacing accept collimator array, 6 for detector or detector array, 7 for angular instrument, 8 for the x-ray source controller, 10 for computing machine, 11 for printer, 12 for power supply, 13 for the stationary platform of measurement mechanism, 15 for filter plate, 16 be count rate meter.
Embodiment
Embodiment 1: referring to accompanying drawing 1, a kind of X-ray diffraction scanister of Non-Destructive Testing workpiece inherent vice comprises x-ray source 1, incident collimating apparatus 2, three-D displacement platform 4, parallel spacing collimating apparatus 5, detector 6, angular instrument 7, x-ray source controller 8, multiple tracks energy analyzer 9, the computing machine 10 accepted; It is characterized in that: it is angle of diffraction 2 θ that the corresponding probe unit of described detector/detector array 6 is placed its X-ray diffraction wire harness that receives and angle that incides the incident X-rays bundle of measured workpiece HklWherein, angle of diffraction 2 θ HklEqual the angle of diffraction of diffraction peak correspondence of certain crystalline material (hkl) crystal face of measured workpiece, satisfy Bragg equation 2dhklSin θ Hkl= λ, d wherein HklBe (hkl) interplanar distance, λBe the diffracted ray wavelength; For monocrystalline, also satisfy Ewald reciprocal space relation; When adopting the X-ray diffraction reflectometry, x-ray source and detector or detector array are listed in the homonymy of measured workpiece, and when adopting the X-ray diffraction transmission beam method, x-ray source and detector or detector array are listed in the both sides of measured workpiece, move measured workpiece when measurement it is carried out sweep measuring.
In this example, x-ray source 1 and detector 6 be in the both sides of measured workpiece 3, the defective of 25mm of the thick Al alloy parts of Non-Destructive Testing 25mm * 10mm scope section (detector during the measurement is motionless and measured workpiece carries out x, y two dimensional motion according to the step motion mode).
Detector or detector array 6 are 200mm to the distance in diffractometer 7 centers of circle.
Above-mentioned x-ray source 1 is that X-ray tube plate target material is the X-ray production apparatus of tungsten, tube power 3KW, and tube voltage is adjustable continuously at 0～225KV, and tube current is adjustable continuously in tube power 3KW scope.
Above-mentioned incident collimating apparatus 2, the parallel spacing collimating apparatus 5 of accepting process with heavy metals such as tungsten, and its light hole width is 0.12mm (its angle of divergence is 0.3 °), and its light hole height is 3mm.Detector is 150mm to the distance in the diffractometer center of circle.
The shielding of the tungalloy box of the thick 5mm of above-mentioned detector 6 usefulness, tungalloy box are only stayed over against above-mentioned and are parallelly spacingly accepted the window of collimating apparatus 5 light holes and draw aperture back to the electric wire of window.Above-mentioned detector 6 is near above-mentioned parallel spacing acceptance on the 2 θ angle swinging mountings that collimating apparatus 5 is fixed in angular instrument 7, and above-mentioned angular instrument 7 is fixed on the platform 13.Above-mentioned detector 6 is that energy resolution is better than 6% solid probe.The above-mentioned parallel spacing diffracted ray of accepting collimating apparatus 5 shielding scattered x-rays and coming from other position of measured workpiece, the diffracted ray that only allows to come from the tested position of measured workpiece enters above-mentioned detector 6.The electric impulse signal of above-mentioned detector 6 outputs is input to above-mentioned multiple tracks energy analyzer 9, and above-mentioned multiple tracks energy analyzer 9 is counted according to selected parameter (baseline, road wide etc.), and X ray is counted intensity outputs to above-mentioned computing machine 10.
A kind of X-ray diffraction scanning lossless detection method of implementing the workpiece inherent vice of said apparatus, its lossless detection method is: (1) detects the thick Al-alloy parts inherent vice of 25mm, selects the wavelength of X-ray diffraction λ=0.211 dust (the K α characteristic X-ray of tungsten); (2) X-ray tube of selection tungsten target, the focal spot of 5mm * 5mm, tube voltage 200KV, tube current 15mA; (3) detector of selection high energy resolution; (4) cooperate the detector output electric signal with high energy resolution to amplify 200 times main amplifier, choose multiple tracks energy analyzer baseline 700 roads, the K α characteristic X-ray diffracted ray of tungsten is only accepted in wide 30 roads, road; (5) incident collimating apparatus is 0.12mm (its angle of divergence is less than 0.3 °) with the parallel spacing light hole width of accepting collimating apparatus, and its light hole height is 3mm; (6) choose the X-ray diffraction transmission beam method; (7) step-by-step movement scanning, every pacing amount diffracted intensity time is 1 second, sweep parameter: x=0～25mm, Δ x=2.5mm; Y=0～10mm, Δ y=0.2mm; (8) with parallel spacing angle of diffraction 2 θ that collimating apparatus and corresponding detector thereof place Al (111) crystal face that accept 111=5.16 °; (9) the measured workpiece reference position is: x=0mm, y=0mm; Earlier scan x=25mm by step delta x=2.5mm according to x from x=0mm, x can scan x=25mm from x=0mm by step delta x=2.5mm again after y stepped to y=0.2mm again, by that analogy, finish scanning survey, the diffracted intensity and the distribution thereof of aluminium (111) crystal face of each position material of acquisition measured workpiece sweep limit; (10) carry out computings such as absorption intensity correction and geometric correction, obtain aluminium (111) the crystal face diffracted intensity distribution plan of each position material of measured workpiece sweep limit; (11) according to empirical model, obtain spatial form, size, position and the distribution thereof of measured workpiece inherent vice, differentiate the type of each defective.
For the definite snotter thing phase Fe that detects this scope section of Al alloy parts 3Al also places other 3 detectors and the parallel spacing collimating apparatus of accepting thereof respectively and is mingled with phase Fe before detection 3Angle of diffraction 2 θ of Al three strongest ones line diffraction crystal face correspondence H1k1l1, angle of diffraction 2 θ H2k2l2With 2 θ H3k3l3, can also learn snotter Fe from these 3 diffracted intensity distribution plans that obtain after finishing above-mentioned scanning and detecting 3The distribution situation of Al.
Embodiment 2: referring to accompanying drawing 1, the method and apparatus that this example adopts is substantially the same manner as Example 1, different is: the focal spot of tungsten target is 1mm * 1mm, tube voltage 200KV, tube current 2mA, measured workpiece carries out one-dimensional scanning (it is 10 seconds that step-by-step movement scans every pacing amount diffracted intensity time, y=6～33mm, Δ y=0.2mm).
Measured workpiece is to be inserted in the thick image quality indicator that compresses in the middle of the aluminium powder sample of 25mm, and picture element is in respect of 5 draw points that diameter is different, 5 about 5mm of draw point spacing, and wherein, the thinnest draw point diameter is 0.2mm.
Fig. 8 is inserted in the thick X-ray diffraction one-dimensional scanning Non-Destructive Testing result who compresses the middle image quality indicator of aluminium powder sample of 25mm, wherein 5 draw points of 5 of test curve recessed portions (i.e. the minimal value of 5 diffraction counting intensity) corresponding image quality indicator of difference.
Embodiment 3: referring to accompanying drawing 1, the method and apparatus that this example adopts is substantially the same manner as Example 1, and different is: the multiple tracks energy analyzer is changed to the single track energy analyzer, and threshold up and down is set, only accept the K α characteristic X-ray diffracted ray of tungsten.
Embodiment 4: referring to accompanying drawing 1, the method and apparatus that this example adopts is substantially the same manner as Example 1, and different is: the focal spot size of tungsten target is become 1mm * 12mm; Measured workpiece carries out x, y, z three-dimensional motion according to the step motion mode, according to embodiment 1 described first x scanning direction, again carry out the y scanning direction, after carry out the z scanning direction order carry out scanning survey, every pacing amount diffracted intensity time is 0.2 second, the motion sweep parameter is x=0～25mm, Δ x=2.5mm; Y=0～10mm, Δ y=0.2mm; Z=0～25mm, Δ z=0.2mm, collimating apparatus light hole short transverse is the z direction; With parallel spacing (one dimension) parallel spacing collimating apparatus linear array (t=1mm that accepts that collimating apparatus and corresponding detector thereof replace with 4 light holes that accepts, b=2mm) and corresponding (one dimension) detector array with 4 3mm * 3mm probe unit, its h=[nb+ (n-1) t]=11.5mm, each light hole width still is 0.15mm, angle of diffraction 2 θ 111=5.16 °; With (one dimension) of another set of same 4 light holes parallel spacing accept collimator array (t=1mm, b=2.5mm) and corresponding (one dimension) detector array with 4 3mm * 3mm probe unit place angle of diffraction 2 θ 200=5.93 °; Incident collimating apparatus light hole height is 11.5mm, and the light hole width still is 0.15mm, the light hole width 0.15mm of the corresponding incident collimating apparatus of tungsten target focal spot width 1mm, the light hole height 11.5mm of the corresponding incident collimating apparatus of tungsten target focal spot length 12mm; (=t/ Δ z) is inferior in the scanning 5 of the every stepping Δ of z direction z=0.2mm, and then the z direction will scan by stepping (h+t)=12.5mm again, by that analogy.
Detector array is 150mm to the distance in the diffractometer center of circle.
Present embodiment has shortened detection time, and obtains aluminium (111) crystal face and (200) crystal face diffracted intensity distribution plan of inner each the position material of measured workpiece simultaneously, can improve the Non-Destructive Testing precision of defective and the accuracy that defect type is passed judgment on.
Embodiment 5: the method and apparatus that this example adopts is substantially the same manner as Example 2, as shown in Figure 6, just x-ray source is replaced with electron linear accelerator, adopts the X ray monochromatization of crystal monochromator 14 with incident; Energy analyzer is replaced with count rate meter 16; Change the step-scan mode of x into continuous sweep, sweep velocity is 1mm/s, and step-scan mode and the sweep parameter of y, z are constant.
Detector array is 350mm to the distance in the diffractometer center of circle.
The parallel spacing parallel spacing collimator array (t=1mm that accepts that collimating apparatus and corresponding detector thereof replace with 8 light holes that accepts, b=1mm) and corresponding detector array with 8 2mm * 2mm probe unit, focal spot size becomes 1mm * 16mm, and other does not all change.
Embodiment 6: the method and apparatus that this example adopts is substantially the same manner as Example 3, (x-ray source and incident collimating apparatus thereof and parallel spacing collimating apparatus and detector thereof or the parallel spacing homonymy that collimator array and detector array thereof are listed in measured workpiece of accepting accepted) as shown in Figure 7, just x-ray source is replaced with the X-ray tube that the plate target material is a chromium, accept the K α characteristic X-ray diffracted ray of chromium, chromium target focal spot size is 1mm * 16mm, X-ray tube tube voltage 25KV, tube current 50mA adopts the X ray monochromatization of vanadium filter plate 15 with incident.Same parallel spacing of embodiment 3 accepted angle of diffraction 2 θ that collimator array and detector array thereof place Be (101) crystal face 101=82.75 °.
Detector array is 250mm to the distance in the diffractometer center of circle.
Measure the defective and the distribution thereof at the thick beryllium alloy plate of 15mm electron beam welding position, measurement range is the whole thickness of long 20mm axis of a weld left and right sides 10mm.The motion sweep parameter is x=0～10mm, and sweep velocity is 1mm/s; Y=0～10mm, Δ y=0.2mm; Z=0～20mm, Δ z=1mm.

Claims (21)

1, a kind of X-ray diffraction scanning lossless detection method of workpiece inherent vice, it is characterized in that: it is that the X ray that x-ray source sends becomes the tested position that a branch of parallel X-ray incides measured workpiece after the incident collimating apparatus, and detector and the parallel spacing collimating apparatus of accepting thereof, or detector array and the corresponding parallel spacing tested position that collimator array is also aimed at measured workpiece of accepting thereof, and the x-ray diffraction line that send at the tested position of measured workpiece enters parallel spacing collimating apparatus and the corresponding detector thereof accepted, or entering the parallel spacing corresponding probe unit of accepting collimator array and detector array thereof, the X-ray diffraction wire harness that promptly enters the corresponding probe unit of detector/detector array equals angle of diffraction 2 θ with the angle that incides the incident X-rays bundle of measured workpiece HklWherein, angle of diffraction 2 θ HklEqual the angle of diffraction of diffraction peak correspondence of certain crystalline material hkl crystal face of measured workpiece, satisfy Bragg equation 2d HklSin θ Hkl= λ, d wherein HklBe (hkl) interplanar distance, λBe the diffracted ray wavelength; For monocrystalline, also satisfy Ewald reciprocal space relation; Place a three-D displacement platform to move measured workpiece and carry out one-dimensional scanning or two-dimensional scan or 3-D scanning; In the sweep test process, be positioned at angle of diffraction 2 θ HklThe X ray that detects of detector/detector array be to come from the x-ray diffraction line that the material at the tested position of measured workpiece sends, thereby the diffracted intensity and the distribution thereof that record each position material of workpiece; And then the spatial form, size, position and the distribution thereof that record the measured workpiece inherent vice.
2, the X-ray diffraction of workpiece inherent vice as claimed in claim 1 scanning lossless detection method is characterized in that: spatial form, size, position and the distribution thereof that absorption intensity is proofreaied and correct and geometric correction records the measured workpiece inherent vice carried out in the diffracted intensity and the distribution thereof that record; And according to the space that records in advance, be mingled with the defective border family curve of defectives such as phase, crystal homogeneity or crystal difference, differentiate defect type in conjunction with the diffracted intensity distribution plan of measured workpiece.
3, the X-ray diffraction of workpiece inherent vice as claimed in claim 1 or 2 scanning lossless detection method, it is characterized in that: adopt energy analyzer to cooperate the detector or the detector array of high energy resolution, and then under the control of computing machine, workpiece is carried out the X-ray diffraction scanning Non-Destructive Testing of one-dimensional scanning or two-dimensional scan or 3-D scanning, obtain the diffracted intensity distribution plan of inner each the position material of measured workpiece.
4, the X-ray diffraction of workpiece inherent vice as claimed in claim 1 scanning lossless detection method, it is characterized in that: when the inherent vice of measured workpiece certain depth scope being carried out X-ray diffraction scanning Non-Destructive Testing, adopt the X-ray diffraction reflectometry, promptly x-ray source and detector or detector array are listed in the homonymy of measured workpiece; When the inherent vice of measured workpiece whole thickness range being carried out X-ray diffraction scanning Non-Destructive Testing, adopt the X-ray diffraction transmission beam method, promptly x-ray source and detector or detector array are listed in the both sides of measured workpiece.
5, the X-ray diffraction of workpiece inherent vice as claimed in claim 1 scanning lossless detection method is characterized in that: described x-ray source motor synchronizing radiation or electron linear accelerator or X-ray production apparatus X-ray tube.
6, the X-ray diffraction of workpiece inherent vice as claimed in claim 5 scanning lossless detection method, it is characterized in that: when x-ray source is selected from synchrotron radiation or electron linear accelerator, the selection crystal monochromator places before the incident collimating apparatus or places before the detector, the feasible a branch of parallel X-ray that comes out from the incident collimating apparatus is radiated the tested position of measured workpiece, spacingly accept collimating apparatus and corresponding detector thereof with parallel, or the corresponding probe unit of spacing slit array of parallel acceptance and detector array thereof places angle of diffraction 2 θ Hkl, record wavelength and be λX-ray diffraction intensity, mobile measured workpiece carries out the X-ray diffraction scanning Non-Destructive Testing of one-dimensional scanning or two-dimensional scan or 3-D scanning, just can obtain the diffracted intensity distribution plan of inner each the position material of measured workpiece, record spatial form, size, position and the distribution thereof of measured workpiece inherent vice, and the type of differentiating each defective;
Perhaps, adopt the detector or the detector array of energy analyzer cooperation high energy resolution, from comprising wavelength λThe X ray of various wavelength in filter out wavelength and be λX ray, record wavelength and be λX-ray diffraction intensity, and then mobile measured workpiece carries out the X-ray diffraction scanning Non-Destructive Testing of one-dimensional scanning or two-dimensional scan or 3-D scanning under the control of computing machine, obtain the diffracted intensity distribution plan of inner each the position material of measured workpiece, record spatial form, size, position and the distribution thereof of measured workpiece inherent vice, and the type of differentiating each defective.
7, the X-ray diffraction of workpiece inherent vice as claimed in claim 5 scanning lossless detection method is characterized in that: the material of the plate target of described X-ray tube is heavy metal or is cobalt, chromium, copper, molybdenum or silver metal;
When with X-ray tube as x-ray source, promptly the wavelength with the X-ray tube target is λCharacteristic X-ray radiation measured workpiece, adopt corresponding crystal monochromator or filter plate with the X ray monochromatization, the parallel spacing corresponding probe unit of accepting collimating apparatus and corresponding detector/spacing slit array of parallel acceptance and detector array thereof is placed angle of diffraction 2 θ Hkl, record wavelength and be λX-ray diffraction intensity, mobile measured workpiece carries out the X-ray diffraction scanning Non-Destructive Testing of one-dimensional scanning or two-dimensional scan or 3-D scanning, obtain the diffracted intensity distribution plan of inner each the position material of measured workpiece, thereby finish the X-ray diffraction scanning Non-Destructive Testing of measured workpiece inherent vice.
8, the X-ray diffraction of workpiece inherent vice as claimed in claim 7 scanning lossless detection method, it is characterized in that: when the target of X-ray tube is heavy metals tungsten, gold, platinum or rhodium, adopt energy analyzer to cooperate the detector of high energy resolution or detector array to use, from comprising wavelength λThe X ray of various wavelength in filter out wavelength and be λX ray, record angle of diffraction 2 θ HklThe wavelength at place is λX-ray diffraction intensity, mobile measured workpiece carries out the X-ray diffraction scanning Non-Destructive Testing of one-dimensional scanning or two-dimensional scan or 3-D scanning, obtain the diffracted intensity distribution plan of inner each the position material of measured workpiece, thereby finish the X-ray diffraction scanning Non-Destructive Testing of measured workpiece inherent vice.
9, the X-ray diffraction of workpiece inherent vice as claimed in claim 1 scanning lossless detection method, it is characterized in that: with a plurality of detectors and the parallel spacing collimating apparatus of accepting thereof, or a plurality of detector array and corresponding parallel spacing each (h that collimator array places the crystalline solid of measured workpiece respectively that accepts thereof nk nl n) angle of diffraction 2 θ of crystal face correspondence Hnknln, finish the diffracted intensity distribution plans that obtain many reflection measured workpiece inherent vices after the detection simultaneously;
Or with a detector and parallel spacing collimating apparatus or a detector array and the corresponding parallel spacing (h that collimator array places measured workpiece that accepts thereof of accepting thereof 1k 1l 1) angle of diffraction 2 θ of crystal face H1k1l1, finish the diffracted intensity distribution plan that just obtains the 1st reflection measured workpiece inherent vice after the detection; Again with this detector and parallel spacing collimating apparatus or this detector array and the corresponding parallel spacing (h that collimator array places measured workpiece that accepts thereof of accepting thereof 2k 2l 2) angle of diffraction 2 θ of crystal face H2k2l2, finish the diffracted intensity distribution plan that just obtains the 2nd reflection measured workpiece inherent vice after the detection, and the like, the diffracted intensity distribution plans of many reflection measured workpiece inherent vices obtained by the method for such repeated detection.
10, the X-ray diffraction of workpiece inherent vice as claimed in claim 9 scanning lossless detection method, it is characterized in that: determine snotter thing phase and the Non-Destructive Testing that distributes thereof for needs, according to the Hanawalt method that the thing of material phase analysis is retrieved mutually, detect the line (h of three strongest ones of snotter thing phase 1k 1l 1) crystal face, (h 2k 2l 2) crystal face and (h 3k 3l 3) the diffracted intensity distribution plan of crystal face, to record the diffracted intensity distribution plan of measured workpiece inner clamps foreign material thing phase.
As the X-ray diffraction scanning lossless detection method of the described workpiece inherent vice of the arbitrary claim of claim 1-10, it is characterized in that 11, its detection step is:
(1), selects the wavelength of suitable X-ray diffraction according to measured workpiece and condition λ(2) choose x-ray source, and the parameter of x-ray source; (3) choose detector or detector array; (4) choose energy analyzer and parameter thereof, perhaps choose filter plate, perhaps choose crystal monochromator and count rate meter, perhaps choose count rate meter; (5) choose the incident collimating apparatus, and parallel spacing collimating apparatus or the parallel spacing light hole dimensions of accepting collimator array accepted; (6) choose X-ray diffraction reflectometry or X-ray diffraction transmission beam method; (7) clamping measured workpiece is selected tested scope, scan mode and parameter; (8) the parallel spacing corresponding probe unit of accepting collimating apparatus and corresponding detector or spacing slit array of parallel acceptance and detector array thereof is placed angle of diffraction 2 θ Hkl(9) carry out motion in one dimension or two dimensional motion or three-dimensional motion scanning, the diffracted intensity and the distribution thereof of measuring certain crystalline material (hkl) crystal face that obtains each position of measured workpiece, perhaps each (h nk nl n) diffracted intensity and the distribution thereof of crystal face; (10) carry out absorption intensity and proofread and correct and the geometric correction computing, obtain (hkl) crystal face diffracted intensity distribution plan of scope that whole measured workpiece is surveyed, perhaps each (h nk nl n) the diffracted intensity distribution plan of crystal face; (11) according to empirical model, obtain spatial form, size, position and the distribution thereof of measured workpiece inherent vice, differentiate the type of each defective.
12, the X-ray diffraction of workpiece inherent vice as claimed in claim 1 scanning lossless detection method, it is characterized in that: described three-D displacement platform is under the instruction that computing machine sends according to process of measurement, drive the three-D displacement platform, the measured workpiece that drives on it carries out the continuous sweep of x, y, z direction by the continuous motion mode, or carry out the step-scan of x, y, z direction, thereby realize one-dimensional scanning or two-dimensional scan or 3-D scanning to tested workpiece by the step motion mode.
13, a kind of X-ray diffraction of workpiece inherent vice scanning the cannot-harm-detection device, it comprises x-ray source (1), incident collimating apparatus (2), places three-D displacement platform (4), angular instrument (7), the parallel spacing collimating apparatus or parallel spacing collimator array (5), detector or detector array (6), the computing machine (10) accepted accepted of measured workpiece (3), it is characterized in that: it is angle of diffraction 2 θ that the corresponding probe unit of described detector or detector array (6) is placed its X-ray diffraction wire harness that receives and angle that incides the incident X-rays bundle of measured workpiece (3) HklWherein, angle of diffraction 2 θ HklEqual the angle of diffraction of diffraction peak correspondence of certain crystalline material (hkl) crystal face of measured workpiece, satisfy Bragg equation 2d HklSin θ Hkl= λ, d wherein HklFor (hkl) interplanar distance from, λBe the diffracted ray wavelength; For monocrystalline, also satisfy Ewald reciprocal space relation; When adopting the X-ray diffraction reflectometry, x-ray source (1) and detector or detector array (6) are at the homonymy of measured workpiece (3), and when adopting the X-ray diffraction transmission beam method, x-ray source (1) and detector or detector array (6) move measured workpiece (3) it are carried out sweep measuring in the both sides of measured workpiece (3) when measuring.
14, as device as described in the claim 13, it is characterized in that: it also comprises energy analyzer (9); Or count rate meter; Or filter plate and count rate meter; Or crystal monochromator and count rate meter.
15, as device as described in the claim 13, it is characterized in that: described x-ray source (1) is an X-ray tube, or synchrotron radiation or electron linear accelerator; Wherein the material of the plate target of X-ray tube is tungsten, gold, platinum or rhodium heavy metal, or is cobalt, chromium, copper, molybdenum or silver metal.
16, as device as described in the claim 14, it is characterized in that: described energy analyzer (9) accepts to come from the electric impulse signal of detector or detector array (6) output, and energy analyzer (9) according to the parameter of selected energy analyzer to wavelength is λX ray count and obtain diffracted ray counting intensity, and X-ray diffraction counted intensity output to described computing machine (10);
Described filter plate is placed on X ray and incides before the measured workpiece, or before being placed on measured workpiece detector or detector array afterwards, the electric impulse signal of detector or detector array output is imported described count rate meter, and X-ray diffraction is counted intensity outputs to described computing machine;
Described crystal monochromator is placed on X ray and incides before the measured workpiece, or before being placed on measured workpiece detector or detector array afterwards, the electric impulse signal of detector or detector array output is imported described count rate meter, and X-ray diffraction is counted intensity outputs to described computing machine;
When having only count rate meter, the electric impulse signal of detector or detector array output is imported described count rate meter, and will comprise that the counting intensity of X-ray diffraction counting intensity outputs to described computing machine.
17, device as claimed in claim 13 is characterized in that: described parallel spacing collimating apparatus (5) and the described incident collimating apparatus (2) accepted, and its endoporus is that light hole width a is 0.05mm～1mm, its angle of divergence is less than 0.5 °; Its endoporus height is not more than the focal spot length of x-ray source;
The described parallel spacing collimator array (5) of accepting, the width of its n endoporus is identical, and width is 0.05mm～1mm, and its angle of divergence is less than 0.5 °; Its n endoporus height is all identical, and the pore wall thickness that the shielding heavy metal constitutes between adjacent endoporus is t, and each endoporus height is b, and then [nb+ (n-1) t] is not more than the focal spot length of x-ray source;
Described detector or detector array (6) are spacingly accepted collimating apparatus or parallel spacing acceptance can turn to different angles on the 2 θ swinging mountings that collimator array (5) is fixed in angular instrument (7) near parallel;
Described parallel spacing short transverse and angular instrument (7) shaft parallel of accepting the endoporus of collimating apparatus (5) and described incident collimating apparatus (2), described parallel spacing short transverse and angular instrument (7) shaft parallel of accepting each endoporus of collimator array (5);
The length direction center line of the described parallel spacing endoporus of accepting collimating apparatus (5) and described incident collimating apparatus (2) is on plane, diffractometer garden and point to angular instrument (7) shaft axis, the described parallel spacing length direction center line of accepting each endoporus of collimator array (5) is parallel to plane, diffractometer garden, and is symmetrical plane and points to angular instrument (7) shaft axis with plane, diffractometer garden.
18, device as claimed in claim 13, it is characterized in that: described detector or detector array (6) all adopt the heavy metal box that it is shielded, the heavy metal box only leaves in front over against described parallel spacing collimating apparatus or the parallel spacing window of accepting collimator array (5) light hole accepted, and draw aperture at the electric wire that it leaves later, avoid the X ray interferometry of scattering.
19, device as claimed in claim 13, it is characterized in that: described three-D displacement platform (4) is fixed on a platform (13) and goes up or be fixed on the rotatable platform of described angular instrument (7) θ, under the instruction that described computing machine (10) sends according to process of measurement, drive three-D displacement platform (4), the tested workpiece (3) that drives on it carries out the continuous motion mode or the step motion mode of x, y, z direction, thereby realizes one-dimensional scanning or two-dimensional scan or 3-D scanning to tested workpiece.
20, device as claimed in claim 13 is characterized in that: described angular instrument (7) is fixed on the described platform (13), under the instruction that described computing machine (10) sends according to process of measurement, turns to desired angle 2 θ; When described angular instrument (7) has the θ rotating part, turn to desired angle θ.
21, device as claimed in claim 13 is characterized in that: described detector or detector array (6) are 150mm～500mm to the distance in the diffractometer center of circle.
CNA2008102102146A 2008-07-07 2008-08-09 Nondestructive inspection method and device for internal defect of workpieces by x-ray diffraction x scan Pending CN101358938A (en)

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CN110608828A (en) * 2019-09-19 2019-12-24 西安交通大学 Bragg angle measuring method based on monochromatic X-ray diffraction
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