CN101358767A - Filter on outlet conduit of wash water for air conditioner box - Google Patents
Filter on outlet conduit of wash water for air conditioner box Download PDFInfo
- Publication number
- CN101358767A CN101358767A CNA2007100445490A CN200710044549A CN101358767A CN 101358767 A CN101358767 A CN 101358767A CN A2007100445490 A CNA2007100445490 A CN A2007100445490A CN 200710044549 A CN200710044549 A CN 200710044549A CN 101358767 A CN101358767 A CN 101358767A
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- filter
- air
- outlet conduit
- conditioning box
- washings
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Abstract
The present invention discloses a filter that is applied to a washing-water outlet pipeline of an air conditioning box. The structure of the prior filter is easy to be blocked. The filter is made of the transparent material. Compared with the prior art, the filter is convenient to examine whether the filter is blocked or not, and is convenient to be maintained, thereby reducing the operation risk, and improving the environmental quality of the wafer manufacturing factory.
Description
Technical field
The present invention relates to the air-conditioning box that semiconductor fabrication factory uses, specifically, relate to the filter on a kind of washings outlet conduit of air-conditioning box.
Background technology
Air-conditioning is being played the part of more and more important role in modern production.Along with progress of science and technology, manufacturing industry has also had higher requirement to the process environments in the processing, and such as dustless factory, dust-free workshop has fully reflected the influence of process environments to the quality of production at the irreplaceability of field of microelectronic fabrication.
Produce in the process of wafer in wafer manufactory, need carry out strict control to airborne suspended particulate number, air molecule pollution thing (AMC), this filters the makers' process environments of wafer with regard to the industrial air-conditioning box of needs.
Existing industrial air-conditioning box has an air washer (air washer), and it has several nozzles.When this air washer of air process, the washings of air washer spray by nozzle, and air is washed, and airborne AMC is taken away, and flow in the recovery pond by outlet conduit then.In order to make full use of resource, recycle the washings in the recovery pond, the filter that can filter AMC is installed on the outlet conduit.
Generally speaking, fixedly a period of time just need clean filter, with the anti-clogging screen pack.If but the AMC concentration of air is higher or forget cleaning, the screen pack of filter is easy to stop up.And screen pack can't see whether stopping up with eyes in pipeline.In case stop up, washings can't flow in the recovery pond, because the washings of air washer recycle, and then cause that the washings flow is not enough, finally cause the air-conditioning box stopping accident.In case the generation stopping accident, airborne air molecule pollution thing such as sulfate ion, ammonia radical ion can not be filtered, and cause the makers' process environments of wafer to be not being met, thereby influence wafer production.
Summary of the invention
The technical problem that the present invention solves provides the filter on a kind of washings outlet conduit of the air-conditioning box of being convenient to safeguard.
For solving the problems of the technologies described above, the invention provides the filter on a kind of washings outlet conduit that is used for air-conditioning box, described air-conditioning box has the air washer that air is washed, and described washings outlet conduit is connected with air washer, and this filter adopts transparent material to make.
Further, this filter is made by pvc material.
Further, this filter comprises the body that is connected with the washings outlet conduit and is installed in filtration members on the body in the inclination mode; Filtration members comprises the screen pack and the fixing end cap of screen pack, and wherein end cap is to be installed on the filtration members with the form that is threaded; The O type circle that seals also is installed between end cap and the filtering bodies.
Compared with prior art, filter of the present invention is to adopt transparent material to make, and is convenient to check whether filter stops up, and maintains easily, thereby reduces operation risk, improves the makers' environmental quality of wafer; The end cap of filtration members is installed with the form that is threaded, and is convenient to change screen pack; O type circle is installed is further sealed screen pack.
Description of drawings
Fig. 1 is to use the part body schematic diagram of the air-conditioning box of filter of the present invention.
Fig. 2 is a structure of filter schematic diagram of the present invention.
The specific embodiment
Be described below in conjunction with the preferred embodiment of accompanying drawing filter of the present invention.
See also Fig. 1, air-conditioning box has the air washer 1 that AMC in the air is removed.After the miscellaneous part of air by air-conditioning box entered air washer 1, air washer 1 took out washings by inlet channel 8 from standby pool 7, by plurality of nozzles provided thereon (not shown) air is carried out jet cleaning.Washings are taken away airborne AMC, enter in the recovery pond 4 by outlet conduit 2.Filter 3 is installed on the outlet conduit 2, and concrete structure as shown in Figure 2.Filter 3 filters out the AMC in the washings, and the washings that flow in the recovery pond 4 can utilize again.This air-conditioning box utilizes pump 5 that recovery pond 4 washed water are drawn up, and enters in the standby pool 7 by recovery channel 6, thereby realizes the recycling of washings.
See also Fig. 2, the filter 3 of present embodiment is to be made by transparent polyvinyl chloride (PVC) material, comprises body 31 that is connected with outlet conduit 2 (see figure 1)s and the filtration members 30 that plays a role in filtering.Body two ends 310 are provided with interface thread, and thread connecting mode and outlet conduit 2 fix.Filtration members 30 is installed on the centre position of body 31 in the mode that tilts, and comprises screen pack 301 and end cap 302.End cap 302 is threadedly connected on the filtration members 30, adopts this structure to be convenient to change screen pack 301.O type circle is also installed in end cap 302 inside in addition, further plays the effect of fixing seal screen pack 301.
Filter of the present invention is to adopt transparent material to make, and is convenient to check whether filter stops up, and maintains easily, thereby reduces operation risk, improves the makers' environmental quality of wafer.In addition, the material of filter is not limited to above-mentioned PVC material, so long as material transparent and that intensity is enough can.
Filter of the present invention is not limited to filtration washing water, can also be used for other processing procedures that semiconductor is made, as filtering cooling water or ultra-pure water.
Claims (5)
1. the filter on the washings outlet conduit that is used for air-conditioning box, described air-conditioning box has the air washer that air is washed, and described washings outlet conduit is connected with air washer, it is characterized in that, and this filter adopts transparent material to make.
2. filter as claimed in claim 1 is characterized in that: this filter is made by pvc material.
3. filter as claimed in claim 1 is characterized in that: this filter comprises the body that is connected with the washings outlet conduit and is installed in filtration members on the body in the inclination mode.
4. filter as claimed in claim 3 is characterized in that: filtration members comprises the screen pack and the fixing end cap of screen pack, and wherein end cap is to be installed on the filtration members with the form that is threaded.
5. filter as claimed in claim 4 is characterized in that: the O type circle that seals also is installed between end cap and the filtering bodies.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007100445490A CN101358767A (en) | 2007-08-03 | 2007-08-03 | Filter on outlet conduit of wash water for air conditioner box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007100445490A CN101358767A (en) | 2007-08-03 | 2007-08-03 | Filter on outlet conduit of wash water for air conditioner box |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101358767A true CN101358767A (en) | 2009-02-04 |
Family
ID=40331289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007100445490A Pending CN101358767A (en) | 2007-08-03 | 2007-08-03 | Filter on outlet conduit of wash water for air conditioner box |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101358767A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103861367A (en) * | 2014-02-24 | 2014-06-18 | 鞍钢集团工程技术有限公司 | Rapidly replaced filter |
-
2007
- 2007-08-03 CN CNA2007100445490A patent/CN101358767A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103861367A (en) * | 2014-02-24 | 2014-06-18 | 鞍钢集团工程技术有限公司 | Rapidly replaced filter |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20090204 |