CN101357366A - Silicon material cleaning device - Google Patents
Silicon material cleaning device Download PDFInfo
- Publication number
- CN101357366A CN101357366A CNA2008101956958A CN200810195695A CN101357366A CN 101357366 A CN101357366 A CN 101357366A CN A2008101956958 A CNA2008101956958 A CN A2008101956958A CN 200810195695 A CN200810195695 A CN 200810195695A CN 101357366 A CN101357366 A CN 101357366A
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- China
- Prior art keywords
- pipeline
- descaling bath
- pickle
- cleaning device
- pickling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000002210 silicon-based material Substances 0.000 title claims abstract description 28
- 238000004140 cleaning Methods 0.000 title claims abstract description 27
- 239000000463 material Substances 0.000 claims abstract description 15
- 230000007246 mechanism Effects 0.000 claims abstract description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 8
- 235000021110 pickles Nutrition 0.000 claims description 43
- 239000007788 liquid Substances 0.000 claims description 15
- 238000006073 displacement reaction Methods 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 claims description 4
- 239000007921 spray Substances 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 238000005554 pickling Methods 0.000 abstract description 31
- 238000000034 method Methods 0.000 abstract description 11
- 230000008569 process Effects 0.000 abstract description 10
- 239000002253 acid Substances 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 230000000505 pernicious effect Effects 0.000 description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 3
- 230000036541 health Effects 0.000 description 3
- 239000002912 waste gas Substances 0.000 description 3
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 239000002023 wood Substances 0.000 description 2
- MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 description 1
- 239000003643 water by type Substances 0.000 description 1
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- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Abstract
The present invention relates to a silicon material cleaning device, which belongs to the technical field of cleaning devices of material used in electronic and electric parts. The silicon material cleaning device comprises a pickling bath, the upside of which is equipped with a movable cover, and one side near the bottom of the pickling bath is provided with a drainpipe. A material containing roller is arranged in the pickling bath and is provided with a material door. A material containing roller driving mechanism is connected with the material containing roller. A high pickling solution storage vat is arranged above the pickling bath and is communicated with the pickling bath. A low pickling solution storage vat is arranged at one side of the pickling bath and is communicated with the pickling bath. A pickling solution lifting mechanism is communicated with the high pickling solution storage vat and the low pickling solution storage vat. A water inlet pipeline is connected with the upper part of the pickling bath and extends into the pickling bath. An air exchanging mechanism is communicated and connected with the pickling bath in a circular way. Harmful gas can not cause influence on operating workers. The silicon material cleaning device has low labor intensity and high pickling efficiency, so that the exhaust gas in the pickling bath can be replaced before the movable cover is opened, and the exhaust gas produced during the pickling process can be introduced to an exhaust gas treatment device to be disposed.
Description
Technical field
The invention belongs to the cleaning of materials device technique field that electronics, electric components are used, be specifically related to a kind of silicon material cleaning device.
Background technology
At present, to the uncovered descaling bath of the common employing of the surface clean of silicon materials, the container such as the basket that manually the silicon materials piece maybe will be equipped with the silicon materials piece are put into descaling bath, again by the manual silicon materials piece of frequently stirring.Owing in whole acid cleaning process, can produce a large amount of hydrogen fluoride (HF) and nitrogen dioxide (NO
2) wait pernicious gas, therefore adopt suspended hood to carry out air draft, suspended hood is substantially corresponding to the top at the uncovered position of descaling bath, and the aforementioned pernicious gas of being drawn by suspended hood is introduced emission-control equipment and is handled.
There is following shortcoming in above-mentioned disposal options: at first, owing to be the open type pickling, therefore HF and NO in whole process
2Can not thoroughly be absorbed by suspended hood Deng pernicious gas, the part disperse constitutes harm to the workman's of online assignment health in the air of operation field, and the protection of environment is impacted; Secondly, absorb pernicious gas more in order to make suspended hood as much as possible, so the exhaust air rate of suspended hood is bigger, thereby increases intractability and processing cost for follow-up emission-control equipment.
Summary of the invention
Task of the present invention is will provide a kind of and help protecting operator's health, help to protect environment, be of value to the silicon material cleaning device that alleviates exhaust-gas treatment cost and intractability.
Task of the present invention is finished like this, a kind of silicon material cleaning device, and it comprises a descaling bath, the top of this descaling bath is furnished with a removable cover, and the nearly bottom of descaling bath one side is provided with a drainpipe, a charge cylinder, with horizontally-arranged state be located in the described descaling bath, have a material door; One charge drum drive connects with described charge cylinder transmission; The high-order storage tank of one pickle is configured in the top of described descaling bath, and is communicated with descaling bath by first pipeline; One pickle low level storage tank is configured in a side of described descaling bath, and is communicated with descaling bath by second pipeline; One is used for pickle with pickle low level storage tank rises to pickle hoisting mechanism in the high-order storage tank of described pickle, communicates with high-order storage tank of pickle and pickle low level storage tank respectively; One inlet pipeline is bound up on the top of descaling bath and extend in the descaling bath; One air displacement mechanism is with described pickling grooved ring communications and liaison knot.
In a specific embodiment of the present invention, the pipeline of described drainpipe is provided with first valve.
In another specific embodiment of the present invention, described charge cylinder is squirrel-cage cylinder or screen mesh type cylinder, the two ends of the drum shaft of charge cylinder respectively are hubbed on the corresponding wall body of descaling bath and with described charge drum drive by bearing block and connect, and described material door is located at the middle part of the length direction of charge cylinder.
Go back in the specific embodiment of the present invention, described charge drum drive comprises first motor and speed reducer, and first motor and reductor connect, and the final stage power output shaft of reductor connects by shaft coupling and described drum shaft.
In another specific embodiment of the present invention, be equipped with second valve on described first pipeline.
In another specific embodiment of the present invention, described pickle hoisting mechanism comprises second motor, liquid pump and the 3rd, the 4th pipeline, the liquid pump and second motor are matched, one end of the 3rd pipeline and the liquid outlet of liquid pump join, the other end is stretched in the pickle head tank, one end of the 4th pipeline and the inlet of liquid pump join, and the other end extend in the pickle Lower tank.
More of the present invention and in specific embodiment, the end in the descaling bath that described inlet pipeline extend into is arranged at intervals with spray head, and an end that is positioned at outside the descaling bath at water inlet pipe is provided with the 3rd valve.
In of the present invention and then specific embodiment, described second pipeline is provided with the 4th valve.
Of the present invention again more and in specific embodiment, described air displacement mechanism comprises the 5th, the 6th, the 7th, the 8th pipeline, the 3rd motor and blower fan, one end of the 5th pipeline and a client link of the 6th pipeline, the other end of the 5th pipeline continues and communicates at a upper lateral part of descaling bath and with descaling bath, the other end of the 6th pipeline is connected with the air outlet of blower fan, one end of the 7th pipeline communicates with the 6th pipeline connection and with the 6th pipeline, the other end and emission-control equipment connect, one end of the 8th pipeline and the air inlet of blower fan join, the other end is connected to the opposite side top of descaling bath and communicates with descaling bath, the 3rd motor and blower fan are matched, wherein: described the 6th pipeline is provided with the 5th, the 6th valve, described the 7th pipeline is provided with the 7th valve.
In again of the present invention and then specific embodiment, the connecting portion that described the 5th pipeline is connected with the 6th pipeline is between described the 5th, the 6th valve.
The advantage of technical scheme provided by the present invention: be furnished with removable cover on descaling bath, can make the open type pickling in the prior art become closed pickling, the pernicious gas in the acid cleaning process can not constitute influence and useful to environment to the operator; Because the charge cylinder that is driven by the charge drum drive is set in descaling bath, thereby need not by the workman can to alleviate working strength of workers and to improve pickling efficient to being stirred by the pickling workpiece; Air displacement mechanism can make the waste gas in the descaling bath implement displacement before opening removable cover, the waste gas in the acid cleaning process can be caused emission-control equipment again and handle.
Description of drawings
Accompanying drawing is a specific embodiment structure chart of the present invention.
The specific embodiment
For make your auditor particularly the public can be well understood to technical spirit of the present invention and beneficial effect more; the spy reaches embodiment in conjunction with the accompanying drawings the specific embodiment of the present invention is described in detail as follows; but all descriptions to embodiment all do not constitute the restriction to the present invention program, any form but not the variation of essence all should be considered as belonging to disclosed in this invention and by in the rights protection institute restricted portion.
Ask for an interview accompanying drawing, provided the preferred but descaling bath 1 of the cuboid that is not limited to of shape, uncovered position on the top of this descaling bath 1 disposes a removable cover 11, removable cover 11 both can adopt the hinge connected mode to match with descaling bath 11, also can adopt the pluggable mode that is similar to drawer to match with descaling bath 1.In a side of descaling bath 1 is that a drainpipe 12 has been received in the nearly bottom on illustrated right side, and drainpipe 12 is provided with one first valve 121, and promptly under the pickling state, this first valve 121 must be closed under user mode, and removable cover 11 also covers and closes.
In descaling bath 1 with horizontally-arranged state be provided with a charge cylinder 2, specifically: a pair of drum shaft 22 of charge cylinder 2 is respectively passed through a bearing block 221 hub settings on the corresponding wall body of descaling bath 1, be that hub setting is on the left and right wall body by present shown position state, nearly middle part at charge cylinder 2 is provided with material door 21, to be that silicon materials pass through the cavity volume that material door 21 is introduced charge cylinder 2 by the workpiece of pickling, close then, when pickling finishes discharging, then open and taking-up silicon materials in the charge cylinder 2.In the present embodiment, the applicant has adopted the structure of squirrel-cage as charge cylinder 2, if adopt the structure of screen mesh type (also can claim the mesh screen formula), then is fine equally, and so-called screen mesh type structure is meant offers regular or irregular through hole on cylindrical shell.
The height of the high-order storage tank 4 of pickle should be higher than descaling bath 1, and set-up mode both can adopt special-purpose support, also can adopt the block of wood that waters block, and the high-order storage tank 4 of pickle is found a place on support or block of wood.The high-order storage tank 4 of pickle communicates with descaling bath 1 by first pipeline 41.In the time will introducing the pickle in the pickle high position storage tank 4 in the descaling bath 1, as long as second valve 411 on unlatching first pipeline 41.
Pickle low level storage tank 5 both can have been digged pit near descaling bath 1 and watered the shop formation, also container can be imbedded terrace, as long as guarantee that the aspect ratio descaling bath 1 of pickle low level storage tank 5 is low, so that by second pipeline 51 pickle in the descaling bath 1 is introduced in the pickle low level storage tank 5 in the mode of gravity flow, prerequisite is the 4th valve of opening on second pipeline 51 511.
One end of inlet pipeline 7 should connect with water supply line such as running water pipe, the other end with level be stretched over the top of descaling bath 1, and with the interval state be provided with spray head 71.When descaling bath 1 pickling finishes, and pickle is gone into after in pickle low level storage tank 5 by second pipeline 51, under the state of opening the 3rd valve 72, introduce clear water by inlet pipeline 7 descaling bath 1 is cleaned, clean the end back and open first valve 121, thereby finish cleaning descaling bath 1.
As an end of the 5th pipeline 81 of air displacement mechanism 8 and a side of descaling bath 1 is that illustrated left upper portion connects and communicates with descaling bath 1, and the other end of the 5th pipeline 81 is bound up on an end of the 6th pipeline 82 and communicate the air outlet connection of the other end of the 6th pipeline 82 and blower fan 85 with the 6th pipeline 82.To be illustrated left end connect with the 6th pipeline 82 one end of the 7th pipeline 84 and communicate, and the other end is illustrated right-hand member and not shown emission-control equipment connection.One end (left end) of the 8th pipeline 86 joins with descaling bath 1 and communicates, and the other end (right-hand member) connects with the air inlet of blower fan 85, and blower fan 85 and the 3rd motor 83 connect.Seen that by figure the 5th, the 6th, the 8th pipeline 81,82,86 constitutes a loop on descaling bath 1, realization encircles to lead to descaling bath 1 and connects.Wherein: on the 6th pipeline 82, be provided with the 5th, the 6th valve 821,822, and on the 7th pipeline 84, be provided with the 7th valve 841.The connecting portion that the 5th pipeline 81 above-mentioned is connected with the 6th pipeline 82 is between the 5th, the 6th valve 821,822.
The applicant narrates use of the present invention in conjunction with the accompanying drawings, when will be to the silicon materials pickling, opens removable cover 11 earlier, opens material door 21 again, and the silicon materials that are cleaned are packed in the charge cylinder 2, closes material door 21 and closes removable cover 11.Open second valve 411 on first pipeline 41, the pickle in the pickle head tank 4 is introduced in the descaling bath 1, close second valve 411 to the amount that sets, ormal weight can be by being located at the not liquid level gauge of the signal assurance in the drawings on the descaling bath 1.Open charge drum drive 3, i.e. first motor, 31 work make 2 rotations of charge cylinder, and in the process of charge cylinder 2 rotations, the silicon materials in the charge cylinder 2 stir thereupon.In acid cleaning process, 83 work of the 3rd motor, the 6th, the 7th valve 822,841 is opened, and the first, the 3rd, the 4th, the 5th valve 121,72,511,821 is in closed condition.Pickling is opened the 4th valve 511 after finishing, and the pickle in the descaling bath 1 is introduced in the pickle low level storage tank 5 by second pipeline 51, and be promoted in the high-order storage tank 4 of pickle by pickle hoisting mechanism 6.After being drained, the pickle in the descaling bath 1 closes the 4th valve 511.Open the 3rd valve 72, clear water is introduced by inlet pipeline 7 and, descaling bath is cleaned, clean and finish, close the 3rd valve 72, open first valve 121, close first valve 121 after draining water through spray head 71 ejections.Charge drum drive 3 quits work.Open the 5th valve 821, close the 6th valve 82, fresh air introduced in the descaling baths 1 and caused emission-control equipment by the 7th pipeline 84 by the 5th pipeline 81 handle, the 3rd motor 83 is quit work, open removable cover 11 and material door 21, in charge cylinder 2, take out silicon materials, thereby finished the pickling of a process.
In sum, because acid cleaning process carries out waste gas that produces in the acid cleaning process such as HF, NO under the enclosed state
2Cause the emission-control equipment processing Deng by the 7th pipeline 84, therefore both helped ensureing workers'health, help to protect environment again.
Claims (10)
1, a kind of silicon material cleaning device, it is characterized in that it comprises a descaling bath (1), the top of this descaling bath (1) is furnished with a removable cover (11), and the nearly bottom of descaling bath (1) one side is provided with a drainpipe (12), one charge cylinder (2), with horizontally-arranged state be located in the described descaling bath (1), have a material door (21); One charge drum drive (3) connects with described charge cylinder (2) transmission; The high-order storage tank (4) of one pickle is configured in the top of described descaling bath (1), and is communicated with descaling bath (1) by first pipeline (41); One pickle low level storage tank (5) is configured in a side of described descaling bath (1), and is communicated with descaling bath (1) by second pipeline (51); One is used for the pickle of pickle low level storage tank (5) is risen to the interior pickle hoisting mechanism (6) of the high-order storage tank of described pickle (41), communicates with high-order storage tank (4) of pickle and pickle low level storage tank (5) respectively; One inlet pipeline (7) is bound up on the top of descaling bath (1) and extend in the descaling bath (1); One air displacement mechanism (8) is with described descaling bath (1) ring communications and liaison knot.
2, silicon material cleaning device according to claim 1 is characterized in that the pipeline of described drainpipe (12) is provided with first valve (121).
3, silicon material cleaning device according to claim 1, it is characterized in that described charge cylinder (2) is squirrel-cage cylinder or screen mesh type cylinder, the two ends of the drum shaft (22) of charge cylinder (2) respectively are hubbed on the corresponding wall body of descaling bath (1) and with described charge drum drive (3) by bearing block (221) and connect, and described material door (21) is located at the middle part of the length direction of charge cylinder (2).
4, silicon material cleaning device according to claim 3, it is characterized in that described charge drum drive (3) comprises first motor (31) and reductor (32), first motor (31) connects with reductor (32), and the final stage power output shaft (321) of reductor (32) connects by shaft coupling (3211) and described drum shaft (22).
5, silicon material cleaning device according to claim 1 is characterized in that being equipped with on described first pipeline (41) second valve (411).
6, silicon material cleaning device according to claim 1, it is characterized in that described pickle hoisting mechanism (6) comprises second motor (61), liquid pump (62) and the 3rd, the 4th pipeline (63,64), liquid pump (62) is matched with second motor (61), the liquid outlet of one end of the 3rd pipeline (63) and liquid pump (62) joins, the other end is stretched in the pickle head tank (4), the inlet of one end of the 4th pipeline (64) and liquid pump (62) joins, and the other end extend in the pickle Lower tank (5).
7, silicon material cleaning device according to claim 1, it is characterized in that described inlet pipeline (7) the end in the descaling bath that extend into (1) be arranged at intervals with spray head (71), and an end that is positioned at outside the descaling bath (1) at water inlet pipe (7) is provided with the 3rd valve (72).
8, silicon material cleaning device according to claim 1 is characterized in that described second pipeline (51) is provided with the 4th valve (511).
9, silicon material cleaning device according to claim 1, it is characterized in that described air displacement mechanism (8) comprises the 5th, the 6th, the 7th, the 8th pipeline (81,82,84,86), the 3rd motor (83) and blower fan (85), one client link of one end of the 5th pipeline (81) and the 6th pipeline (82), the other end of the 5th pipeline (81) continues and communicates at a upper lateral part of descaling bath (1) and with descaling bath (1), the other end of the 6th pipeline is connected with the air outlet of blower fan (85), one end of the 7th pipeline (84) connects with the 6th pipeline (82) and communicates with the 6th pipeline (82), the other end and emission-control equipment connect, the air inlet of one end of the 8th pipeline (86) and blower fan (85) joins, the other end is connected to the opposite side top of descaling bath (1) and communicates with descaling bath (1), the 3rd motor (83) is matched with blower fan (85), wherein: described the 6th pipeline (82) is provided with the 5th, the 6th valve (821,822), described the 7th pipeline (84) is provided with the 7th valve (841).
10, silicon material cleaning device according to claim 9 is characterized in that the connecting portion that described the 5th pipeline (81) is connected with the 6th pipeline (82) is positioned between described the 5th, the 6th valve (821,822).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2008101956958A CN100569395C (en) | 2008-09-04 | 2008-09-04 | Silicon material cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2008101956958A CN100569395C (en) | 2008-09-04 | 2008-09-04 | Silicon material cleaning device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101357366A true CN101357366A (en) | 2009-02-04 |
| CN100569395C CN100569395C (en) | 2009-12-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2008101956958A Expired - Fee Related CN100569395C (en) | 2008-09-04 | 2008-09-04 | Silicon material cleaning device |
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| Country | Link |
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| CN (1) | CN100569395C (en) |
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| CN102784765A (en) * | 2012-08-30 | 2012-11-21 | 常州捷佳创精密机械有限公司 | Connected groove of silicon material acid plant |
| CN102794288A (en) * | 2012-08-30 | 2012-11-28 | 常州捷佳创精密机械有限公司 | Air draft structure of rinse tank |
| CN103008283A (en) * | 2013-01-07 | 2013-04-03 | 山东高唐杰盛半导体科技有限公司 | Cleaning device for electronic components |
| CN104966585A (en) * | 2015-06-09 | 2015-10-07 | 铜陵华洋特种线材有限责任公司 | Wire softening treatment device for enameled wire |
| CN105537190A (en) * | 2015-12-10 | 2016-05-04 | 重庆润际远东新材料科技有限公司 | Water circulation and nitrogen injection crushing system for silicon powder production |
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| CN102794288A (en) * | 2012-08-30 | 2012-11-28 | 常州捷佳创精密机械有限公司 | Air draft structure of rinse tank |
| CN102784765B (en) * | 2012-08-30 | 2015-06-10 | 常州捷佳创精密机械有限公司 | Connected groove of silicon material acid plant |
| CN102784765A (en) * | 2012-08-30 | 2012-11-21 | 常州捷佳创精密机械有限公司 | Connected groove of silicon material acid plant |
| CN103008283A (en) * | 2013-01-07 | 2013-04-03 | 山东高唐杰盛半导体科技有限公司 | Cleaning device for electronic components |
| CN103008283B (en) * | 2013-01-07 | 2015-08-26 | 山东高唐杰盛半导体科技有限公司 | A kind of electronic devices and components cleaning device |
| CN104966585B (en) * | 2015-06-09 | 2016-10-12 | 铜陵华洋特种线材有限责任公司 | The wire sofening treatment device of enamel-covered wire |
| CN104966585A (en) * | 2015-06-09 | 2015-10-07 | 铜陵华洋特种线材有限责任公司 | Wire softening treatment device for enameled wire |
| CN105537190A (en) * | 2015-12-10 | 2016-05-04 | 重庆润际远东新材料科技有限公司 | Water circulation and nitrogen injection crushing system for silicon powder production |
| CN106012006A (en) * | 2016-07-14 | 2016-10-12 | 晶科能源有限公司 | Accommodating cylinder for accommodating polycrystalline silicon material and polycrystalline silicon material cleaning device |
| CN106563689A (en) * | 2016-11-10 | 2017-04-19 | 东莞市深镀机电工程有限公司 | Solid-liquid separation method for waste film dregs |
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| CN108212831A (en) * | 2017-12-07 | 2018-06-29 | 广德盛源电器有限公司 | A kind of cleaning method of silicon materials |
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| CN108570711A (en) * | 2018-06-05 | 2018-09-25 | 浙江羿阳太阳能科技有限公司 | A kind of polycrystalline silicon material acid dip pickle |
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| CN109604246A (en) * | 2018-12-17 | 2019-04-12 | 象山维治模具有限公司 | Part automatic flushing device |
| CN111822415A (en) * | 2019-04-19 | 2020-10-27 | 江苏中能硅业科技发展有限公司 | Polycrystalline silicon cleaning device and method |
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| CN100569395C (en) | 2009-12-16 |
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