CN101348898A - Improved vacuum pump system - Google Patents
Improved vacuum pump system Download PDFInfo
- Publication number
- CN101348898A CN101348898A CNA2007100438730A CN200710043873A CN101348898A CN 101348898 A CN101348898 A CN 101348898A CN A2007100438730 A CNA2007100438730 A CN A2007100438730A CN 200710043873 A CN200710043873 A CN 200710043873A CN 101348898 A CN101348898 A CN 101348898A
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- Prior art keywords
- cavity
- valve
- vacuum pump
- pump system
- normally open
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Abstract
The invention provides an improved vacuum pump system, comprising a drying pump, a first cavity and a second cavity which are controlled by the drying pump, a plurality of normally closed pumps allowing outside air to enter the cavities, a first normally open valve and a second normally open valve, wherein the first normally open valve is arranged between the first cavity and an air source of the second cavity; the second normally open valve is arranged between the second cavity and an air source of the first cavity. Compared with the prior art, the vacuum pump system has a method easy to implement, is low in cost, and can effectively prevent the phenomena of air back flow caused by man-made faulty operation or software setting detects.
Description
Technical field
The present invention relates to a kind of vacuum system technology, specifically, relate to a kind of improvement vacuum pump system that can prevent that gas from pouring in down a chimney.
Background technology
In the making of semi-conductor and other precision elements, need certain vacuum environment that it is carried out in a vacuum processing treatment.Present pumped vacuum systems is to use with two mechanical pumps (pump) and a diffusion pump series connection, reaches the vacuum tightness of the sputter of wanting.Use mechanical pump when slightly taking out, when taking out, essence uses diffusion pump, when slightly taking out with the valve closes of diffusion pump, only open the valve (roughing valve) of mechanical pump, when taking out, essence closes the valve valve of mechanical pump earlier, open reverse checkvalve (backing valve) again, open main valve (main valve) at last again, avoid gas backstreaming.
See also Fig. 1, the vacuum pump system of prior art generally includes a dry pump (dry pump) and two and is subjected to the brilliant boat of its control to transmit cavity (Vacuum Cassette Elevator, VCE) 10,30.This two cavity 10,30 comprises a needle valve (needle valve) 11,31 and one segregaion valve (isolation valve) 13,33 respectively. Needle valve 11,31 and segregaion valve 13, the 33 general normal close valves (it can be closed at normal state, opens during ventilation) that adopt.(Clean Dry Air CDA) enters cavity 10,30 by above-mentioned valve to outside clean dry air.
The defective of the prior art is, when first cavity 30 is in vacuum state, and segregaion valve 33 is when opening, if because of the people has opened another the also needle valve 11 or segregaion valve 13 of the cavity under atmospheric condition 10 for mishandle or software are provided with defective, then the gas that can form cavity 30 pours in down a chimney, thereby the ratio of defects of product in the cavity 30 is risen.
Summary of the invention
The object of the present invention is to provide a kind of improved vacuum pump system, it can prevent that gas from pouring in down a chimney.
For achieving the above object, the invention provides a kind of improved vacuum pump system, it comprises a dry pump, is subjected to first cavity and second cavity and some normal close valves of this dry pump control, extraneous gas enters above-mentioned cavity by above-mentioned normal close valve, wherein, this vacuum pump system also comprises one first normally open valve and one second normally open valve, and this first normally open valve is arranged between the source of the gas of first cavity and second cavity, and this second normally open valve is arranged between the source of the gas of second cavity and first cavity.
Compared with prior art, method of the present invention is implemented easily, and cost is comparatively cheap, can prevent from effectively to pour in down a chimney phenomenon because of the people for mishandle or software are provided with the gas that defective causes.
Description of drawings
To the description of the embodiment of the invention, can further understand purpose, specific structural features and the advantage of its invention by following in conjunction with its accompanying drawing.Wherein, accompanying drawing is:
Fig. 1 is the structural representation of prior art vacuum pump system.
Fig. 2 is the structural representation of vacuum pump system of the present invention.
Embodiment
Thinking of the present invention is to prevent that by add specific valve in the structure of existing vacuum pump system gas from pouring in down a chimney phenomenon.
See also Fig. 2, vacuum pump system of the present invention comprises a dry pump and two brilliant boat transmission cavitys 50,70 that are subjected to its control.This two cavity 50,70 comprises a needle valve 51,71 and a segregaion valve 53,73 respectively. Needle valve 51,71 and segregaion valve 53, the 73 general normal close valves that adopt, promptly it can be closed at normal state, opens during ventilation.Outside clean dry air enters cavity 10,30 by above-mentioned valve.
For preventing that vacuum pump system of the present invention adds a normally open valve opposite with the segregaion valve effect 55,75 respectively behind cavity 50,70 because of the people pours in down a chimney for mishandle or software are provided with the gas that defective causes.Wherein, the source of the gas of normally open valve 55 is connected directly to the source of the gas of cavity 70, and the source of the gas of the source of the gas of normally open valve 75 and cavity 50 is connected directly to the source of the gas of cavity 70.
Like this, in use, when first cavity 50 is in vacuum state, and during valve open, if opened another also valve of the cavity under atmospheric condition 70 for mishandle or software are provided with defective because of the people.Because the source of the gas of normally open valve 55 is connected to the source of the gas of cavity 70, and it has at normal state and opens, and the characteristic of closing during ventilation is so normally open valve 55 will be closed by opening to become when the valve open of cavity 70.Thereby stop that the gas from cavity 70 enters cavity 50, prevented that gas from pouring in down a chimney the appearance of phenomenon.
When first cavity 70 is in vacuum state, and during valve open, if, then be to prevent that by normally open valve 75 gas from pouring in down a chimney because of the people has opened another also valve of the cavity under atmospheric condition 50 for mishandle or software are provided with defective, principle and aforementioned similar.
Vacuum pump system of the present invention also is provided with Non-return air valve 81 between the source of the gas of normally open valve 55 and cavity 70, be provided with Non-return air valve 83 between the source of the gas of normally open valve 75 and cavity 50, disturbs with the source of the gas that prevents to occur.
Technical scheme of the present invention is implemented easily, and cost is comparatively cheap, can prevent from effectively to pour in down a chimney phenomenon because of the people for mishandle or software are provided with the gas that defective causes.
Claims (7)
1, a kind of improved vacuum pump system, described vacuum pump system comprises:
One dry pump;
Be subjected to first cavity and second cavity of described dry pump control;
Some normal close valves, extraneous gas enters described cavity by described normal close valve;
It is characterized in that, described vacuum pump system also comprises one first normally open valve and one second normally open valve, described first normally open valve is arranged between the source of the gas of described first cavity and described second cavity, and described second normally open valve is arranged between the source of the gas of described second cavity and described first cavity.
2, improved vacuum pump system as claimed in claim 1 is characterized in that, described normal close valve cuts out at normal state, opens during ventilation.
3, improved vacuum pump system as claimed in claim 1 is characterized in that, described normally open valve is opened at normal state, closes during ventilation.
4, improved vacuum pump system as claimed in claim 1 is characterized in that, described vacuum pump system also comprises the Non-return air valve between some sources of the gas that are arranged at described normally open valve and cavity.
5, improved vacuum pump system as claimed in claim 2 is characterized in that, described normal close valve comprises a needle valve and a segregaion valve.
6, improved vacuum pump system as claimed in claim 1 is characterized in that, described cavity is that brilliant boat transmits cavity.
7, improved vacuum pump system as claimed in claim 1 is characterized in that, described extraneous gas is clean dry air.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007100438730A CN101348898B (en) | 2007-07-17 | 2007-07-17 | Improved vacuum pump system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007100438730A CN101348898B (en) | 2007-07-17 | 2007-07-17 | Improved vacuum pump system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101348898A true CN101348898A (en) | 2009-01-21 |
| CN101348898B CN101348898B (en) | 2011-11-30 |
Family
ID=40267869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007100438730A Expired - Fee Related CN101348898B (en) | 2007-07-17 | 2007-07-17 | Improved vacuum pump system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101348898B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102903655A (en) * | 2012-10-22 | 2013-01-30 | 上海集成电路研发中心有限公司 | Vacuum control system |
| CN107369600A (en) * | 2017-07-31 | 2017-11-21 | 武汉华星光电技术有限公司 | A kind of vacuum board |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1788106B (en) * | 2003-05-13 | 2011-06-08 | 东京毅力科创株式会社 | Treating device using raw material gas and reactive gas |
-
2007
- 2007-07-17 CN CN2007100438730A patent/CN101348898B/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102903655A (en) * | 2012-10-22 | 2013-01-30 | 上海集成电路研发中心有限公司 | Vacuum control system |
| CN102903655B (en) * | 2012-10-22 | 2017-03-15 | 上海集成电路研发中心有限公司 | A kind of vacuum-control(led) system |
| CN107369600A (en) * | 2017-07-31 | 2017-11-21 | 武汉华星光电技术有限公司 | A kind of vacuum board |
| CN107369600B (en) * | 2017-07-31 | 2019-09-27 | 武汉华星光电技术有限公司 | A kind of vacuum board |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101348898B (en) | 2011-11-30 |
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| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111130 Termination date: 20190717 |