CN101329156A - Hydraulic drive type high rigidity micro-displacement apparatus - Google Patents
Hydraulic drive type high rigidity micro-displacement apparatus Download PDFInfo
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- CN101329156A CN101329156A CNA2008101087026A CN200810108702A CN101329156A CN 101329156 A CN101329156 A CN 101329156A CN A2008101087026 A CNA2008101087026 A CN A2008101087026A CN 200810108702 A CN200810108702 A CN 200810108702A CN 101329156 A CN101329156 A CN 101329156A
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Abstract
The invention discloses a hydraulic drive micro displacement device with high rigidity, which is used for ultra-precise processing and measuring, can improve the distinguishability of micro feeding of machine tools and implement ultra-thin cutting, high-precision size processing and online error compensation of ultra-precise machine tools, and has the following structure: a cylinder body with the outer diameter of D, the wall thickness of t and the working length of L is fixed inside a pedestal and fed with high-pressure oil, and the micro deformation of a cylinder body part with a thin wall is used for providing required micro displacement. A precise pressure meter is used for precisely controlling the oil pressure inside the cylinder body, thus obtaining precise micro displacement. The hydraulic micro displacement device has good input-output linearity and high rigidity, can bear bidirectional load, has large stroke and high distinguishability, and can easily satisfy the micro displacement requirement with the working stroke of 20Mu and the distinguishability of 0.01Mu. Furthermore, the micro displacement device has simple structure, low production cost and stable performance, and can realize automatic control.
Description
Technical field
The invention belongs to field of machining, refer in particular to a kind of hydraulic drive type micro-displacement apparatus with high rigidity, be used for ultraprecise processing and measure, can improve the resolution of lathe microfeed, realize ultra-thin cutting, high precision dimensioned and the online error compensation of ultra-precision machine tool.
Background technology
Micro-displacement apparatus is a kind of device that can produce micron, press the micron order displacement, and it is widely used in the precision measurement in Precision Machining.Micro-displacement apparatus roughly has types such as mechanical transmission-type, elastic deformation formula, thermal change form, fluid film deformation type, magnetostriction type, electrostriction formula, marmem by its principle of work.
The outstanding micro-displacement apparatus of a kind of performance should satisfy following performance requirement:
(1) stroke micrometric displacement stroke is big, precision is high, resolution is high.
(2) input and the linearity height of exporting.
(3) moving component friction force is little, stability is high, the repeatable accuracy height.
(4) rigidity height.Dynamic perfromance is good, has high frequency response.
(5) can realize automatic control.
(6) the good cost of anufacturability is low.
But in existing micro-displacement driver, be difficult to satisfy these conditions simultaneously, output that has and input are nonlinear relationships, and the rigidity that has is lower, and antijamming capability is relatively poor, and what have can not bear Tensile or Compressive Loading simultaneously.For this reason, each state all is being devoted to develop a kind of have high output and incoming line sexual intercourse, high rigidity, and antijamming capability is strong, can bear the fine feed apparatus of Tensile or Compressive Loading novel high-performance simultaneously.
Use at present micro-displacement apparatus more widely is the electrostriction ceramics micro-displacement apparatus, and in use also there is problem in it:
(1) the micrometric displacement stroke is little.
(2) input-output is non-linear.
(3) there are hysteresis and creep.
(4) price height.
In order to solve the little problem of electrostriction ceramics micrometric displacement stroke, adopt multi-disc electrostriction ceramics stacked system at present, but this has increased the complicacy of system, reduced the rigidity of system.Because the inherent characteristic of electrostriction ceramics material, input-output is non-linear, the problem of hysteresis and creep can only be revised by the control program of measuring system, and this has increased the manufacturing cost of total system.
Summary of the invention
The purpose of this invention is to provide a kind of hydraulic drive type high rigidity micro-displacement apparatus, the stroke that solves existing micro-displacement apparatus existence is little, rigidity is low, problems such as input-output is non-linear, manufacturing cost height.
A kind of hydraulic drive type high rigidity micro-displacement apparatus is characterized in that: be made up of pedestal, the cylinder block that is full of hydraulic oil, high-pressure pipe connector, cylinder block is installed in the pedestal, is connected with high-pressure pipe connector.
Above-mentioned a kind of hydraulic drive type high rigidity micro-displacement apparatus is characterized in that: the cylinder block material is a middle low carbon steel, modifier treatment.
Above-mentioned a kind of hydraulic drive type high rigidity micro-displacement apparatus is characterized in that: external diameter is D=10～40mm, walled thickness t=1～2.5mm, and the cylinder block active length is L=10～60mm.
Above-mentioned a kind of hydraulic drive type high rigidity micro-displacement apparatus, it is characterized in that: cylinder block is installed in base interior by the support holes and the rear end screw thread of front end with the thin wall cylindrical cylinder body, the tolerance clearance 0.02～0.05mm of the support holes of cylinder block front end and pedestal endoporus.
Above-mentioned a kind of hydraulic drive type high rigidity micro-displacement apparatus is characterized in that: operating oil pressure range P=0～30MP.
Above-mentioned a kind of hydraulic drive type high rigidity micro-displacement apparatus is characterized in that: micrometric displacement total kilometres S and cylinder block active length are ratio S/L≤0.001 of L.
Realize that technical scheme of the present invention is:
An external diameter is D, and wall thickness is t, and active length is that an end of the cylinder block of L is fixed on the pedestal rear end face by being threaded, and the other end is bearing in the pedestal front end by little mesopore.High-pressure oil pipe is connected with the cylinder block rear end, utilizes precision pressure gauge, controls oil pressure in the cylinder block by a pressure regulator valve.Because the effect of oil pressure, active length is that the thin wall cylindrical body region of L will produce axial micro-deformation, and this micro-deformation is exactly its micrometric displacement amount that provides.Change structural parameters D, t, L and the oil pressure of cylinder block, can obtain the required micrometric displacement total kilometres S and the minimum resolution of micrometric displacement.
Hydraulic drive type high rigidity micro-displacement apparatus microdisplacement measuring process is:
(1) the sensitivity coefficient c of demarcation micro-displacement apparatus is elevated to P with oil pressure by 0, utilizes high-precision micro-displacement sensor (as the inductance micro-displacement sensor) to measure the micrometric displacement amount S of cylinder block front end, and the sensitivity coefficient c of this micro-displacement apparatus is S/P so.
(2) determine the change amount Δ P of cylinder block internal oil pressure if the micrometric displacement amount that need provide is Δ S, so as long as oil pressure is increased (or minimizing) Δ P=Δ S/c by pressure regulator valve.
The present invention compares with other fine feed apparatus, has the following advantages:
(1) rigidity height can bear two-way load.High 1～2 order of magnitude of the ratio of rigidity electrostriction ceramics micro-displacement apparatus of micro-displacement apparatus of the present invention or the micro-displacement apparatus of feed screw nut formula, and be not subjected to the restriction of loading direction.
(2) the input-output linear degree is good.The characteristics that the present invention has utilized modified carbon steel to be directly proportional with stressed size in the regime of elastic deformation internal strain, so input-output has the good linearity.
(3) there are not hysteresis and creep.Modified carbon steel is in regime of elastic deformation, and hysteresis and creep are very little, can ignore.
(4) stroke is big, the resolution height.By suitable raising oil pressure, adopt precision pressure gauge, can be easy to satisfy micrometric displacement impulse stroke 20 μ, the requirement of resolution 0.01 μ.
(5) simple in structure, cost is low.
(6)
Description of drawings
Fig. 1 is a fundamental diagram of the present invention
1. hydraulic drive type micro-displacement apparatus 2. precision pressure gauges 3. high-pressure oil pipes 4. pressure regulator valves
5. oil pump
Fig. 2 structural representation of the present invention
6. pedestal 7. cylinder blocks 8. hydraulic oil 9. high-pressure pipe connectors
Embodiment
Specific embodiment is described in detail as follows:
As shown in Figure 2, the correlation function parameter of present embodiment is specific as follows:
The cylinder block material is 45 carbon steels, modifier treatment
The cylinder block external diameter is D=25mm
Cylinder block walled thickness t=1.5mm
The cylinder block active length is L=30mm
Operating oil pressure P=0～30MP
Tolerance clearance 0.02～the 0.03mm of cylinder block front end position and pedestal endoporus
Its course of work is as shown in Figure 1:
Hydraulic oil is by in the high-pressure pipe connector 9 input cylinder blocks 7, and elastic deformation axially takes place under the effect of hydraulic oil the thin-walled of cylinder block 7, makes micro-forward the moving of cylinder block front end realize microfeed.
In order to demarcate the sensitivity coefficient c of micro-displacement apparatus, oil pressure is elevated to 30MPa by 0, the micrometric displacement amount of utilizing high-accuracy micro-displacement sensor (as the inductance micro-displacement sensor) to measure the cylinder block front end is 20 μ m, the sensitivity coefficient c=20 μ of this micro-displacement apparatus/30MPa=0.667 μ m/MPa so, and satisfy micrometric displacement total kilometres S and the cylinder block active length is the requirement of ratio S/L≤0.001 of L.
Provide the micrometric displacement of 2.50 μ m if desired, as long as, the precision pressure meter reading is adjusted to 3.75MPa get final product by pressure regulator valve 4.
For being furnished with the system that resolution is the precision pressure gauge of 0.01MPa, the resolution 0.006 μ m of this micro-displacement apparatus then, promptly resolution is not more than 0.01 μ m.
Claims (6)
1, a kind of hydraulic drive type high rigidity micro-displacement apparatus is characterized in that: be made up of pedestal (6), the cylinder block (7) that is full of hydraulic oil (8), high-pressure pipe connector (9), cylinder block (7) is installed in the pedestal (6), is connected with high-pressure pipe connector (9).
2, the described a kind of hydraulic drive type high rigidity micro-displacement apparatus of claim 1 is characterized in that: cylinder block (7) material is a middle low carbon steel, modifier treatment.
3, the described a kind of hydraulic drive type high rigidity micro-displacement apparatus of claim 1 is characterized in that: cylinder block (7) external diameter is D=10～40mm, walled thickness t=1～2.5mm, and active length is L=10～60mm.
4, the described a kind of hydraulic drive type high rigidity micro-displacement apparatus of claim 1, it is characterized in that: cylinder block (7) is installed in pedestal (6) inside by the support holes and the rear end screw thread of front end, the tolerance clearance 0.02～0.05mm of the support holes of cylinder block (7) front end and pedestal (6) endoporus.
5, the described a kind of hydraulic drive type high rigidity micro-displacement apparatus of claim 1 is characterized in that: operating oil pressure range P=0～30MP.
6, the described a kind of hydraulic drive type high rigidity micro-displacement apparatus of claim 1 is characterized in that: micrometric displacement total kilometres S and cylinder block (7) active length is ratio S/L≤0.001 of L.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2008101087026A CN101329156A (en) | 2008-05-13 | 2008-05-13 | Hydraulic drive type high rigidity micro-displacement apparatus |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2008101087026A CN101329156A (en) | 2008-05-13 | 2008-05-13 | Hydraulic drive type high rigidity micro-displacement apparatus |
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| CN101329156A true CN101329156A (en) | 2008-12-24 |
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| CNA2008101087026A Pending CN101329156A (en) | 2008-05-13 | 2008-05-13 | Hydraulic drive type high rigidity micro-displacement apparatus |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102538722A (en) * | 2011-12-22 | 2012-07-04 | 中国航空工业集团公司北京长城计量测试技术研究所 | Large-plane small-displacement translation driving device based on hydraulic principle |
| US8931956B2 (en) | 2012-10-23 | 2015-01-13 | Industrial Technology Research Institute | Hydrostatic rail guide |
| US9453667B2 (en) | 2012-11-16 | 2016-09-27 | Industrial Technology Research Institute | Heat pump air-conditioning system and method for controlling the same |
| CN114608510A (en) * | 2022-03-29 | 2022-06-10 | 无锡连强智能装备有限公司 | Automatic outer diameter measuring device of lathe with accurate measuring effect |
-
2008
- 2008-05-13 CN CNA2008101087026A patent/CN101329156A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102538722A (en) * | 2011-12-22 | 2012-07-04 | 中国航空工业集团公司北京长城计量测试技术研究所 | Large-plane small-displacement translation driving device based on hydraulic principle |
| US8931956B2 (en) | 2012-10-23 | 2015-01-13 | Industrial Technology Research Institute | Hydrostatic rail guide |
| US9453667B2 (en) | 2012-11-16 | 2016-09-27 | Industrial Technology Research Institute | Heat pump air-conditioning system and method for controlling the same |
| CN114608510A (en) * | 2022-03-29 | 2022-06-10 | 无锡连强智能装备有限公司 | Automatic outer diameter measuring device of lathe with accurate measuring effect |
| CN114608510B (en) * | 2022-03-29 | 2023-11-24 | 无锡连强智能装备有限公司 | Automatic external diameter measuring device of lathe with accurate measurement effect |
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Open date: 20081224 |