CN101290384A - Integral precise five-axis adjustment device - Google Patents

Integral precise five-axis adjustment device Download PDF

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Publication number
CN101290384A
CN101290384A CNA2008100993682A CN200810099368A CN101290384A CN 101290384 A CN101290384 A CN 101290384A CN A2008100993682 A CNA2008100993682 A CN A2008100993682A CN 200810099368 A CN200810099368 A CN 200810099368A CN 101290384 A CN101290384 A CN 101290384A
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China
Prior art keywords
adjusting
axis
deckle board
main shaft
shaft
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CNA2008100993682A
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CN100568038C (en
Inventor
方林
陈新宏
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Advan Tools Semiconductor (China) Co Ltd
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Advan Tools Semiconductor (China) Co Ltd
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Application filed by Advan Tools Semiconductor (China) Co Ltd filed Critical Advan Tools Semiconductor (China) Co Ltd
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Abstract

The invention relates to an integral precision five-axes adjusting device which applies multi-degree of freedom fine adjustment by optical devices in space, solving the great problem of the prior five-axes adjusting mechanism. The invention comprises a heat sink, which is arranged in a U-shaped fixed mount of light source combination by a principal axis; the bottom of the U-shaped fixed mount of light source combination is connected to the principal axis, of which the bottom is provided with a pair of gears; the screw thread in the middle of the principal axis is connected to a screw thread adjusting sleeve, which is provided with a pair of gears, the lower part of the principal axis is connected to a major base; the major base is a rectangular base and of which the lateral side is provided with an inner frame plate and an outer frame plate. The device can achieve three-axial translation adjustment and two-axial rotation adjustment of the heat sink to the outer frame plate. The adjusting device has the advantages of simple and compact structure, stable and reliable operation.

Description

Integral precise five-axis adjustment device
Technical field
The present invention relates to the accurate adjusting mechanism of the accurate multidimensional of adjusting of the multiple degrees of freedom of optical device in the space.
Background technology
At present, the product category of the accurate adjusting mechanism of the multidimensional of existing precision optics is various both at home and abroad, and by worm drive, gear drive, and line slideway moves the mobile and rotation that realizes a plurality of degree of freedom of precision optics.But, adopting the single shaft adjusting mechanism to install in the known technology and be spliced into five axial adjustment mechanisms, its physical dimension tends to exceed the restriction of product space structure.
Summary of the invention
Big in order to solve above-mentioned five axial adjustment mechanism volumes, can not satisfy and the supporting matching requirements of precision optics, the invention provides a kind of integral precise five-axis adjustment device of compact conformation.
Concrete structural design scheme is as follows:
Integral precise five-axis adjustment device comprise one heat sink 21, described heat sinkly be located in the U-shaped combination of light sources fixed mount 16 by heat sink main shaft 23;
U-shaped combination of light sources fixed mount 16 bottom symcenter by axle sleeve 17 fixedly connected main shaft 2, U-shaped combination of light sources fixed mount 16 bottom outside faces are fixed with Z axle gear wheel 25;
Be arranged with gear on the main shaft 2 and drag and join web joint 13, main shaft 2 middle parts are connecting threaded adjusting cover 26 by threaded engagement, and main basal base 6 is sleeved on main shaft 2 bottoms by Lower shaft sleeve 4; Threaded adjusting is overlapped 26 top fixed covers and is provided with Z axle carrier wheel 27, and the bottom is arranged with annular gland 30, annular gland 30 fixedly connected main basal base 6;
Gear drags joins Z that web joint 13 1 sides are provided with parallel and main shaft 2 by bearing to mobile regulating shaft 3, and Z is provided with pinion wheel 14 with 25 engagements of Z axle gear wheel to the upper end of mobile regulating shaft 3, and its underpart is run through and extended outside the main basal base 6;
Main basal base 6 opposite sides be provided be parallel to main shaft 2 Z to rising-falling tone nodal axisn 33, Z is provided with the mobile pinion wheel 29 of the Z axle that cooperates with Z axle carrier wheel 27 to rising-falling tone nodal axisn 33 upper ends;
Main basal base 6 is the rectangle seat, deckle board 8 and exterior deckle board 9 in its outside is arranged with; Main basal base 6 and interior deckle board 8 corresponding both sides be respectively equipped with X to mobile left slide rail 7 and X to mobile right slide rail 31; Interior deckle board 8 and exterior deckle board 9 corresponding both sides be respectively equipped with Y to mobile left slide rail 45 and Y to mobile right slide rail 42.
X is provided with to drag with gear to the interior deckle board 8 that moves left slide rail 7 outsides and joins the corresponding X of web joint 13 to spiral shell fine adjustment baffle plate 12, correspondence is provided with X to spiral shell fine adjustment shaft bar 10 on the exterior deckle board 9, X is provided with X to threaded adjusting bar 11 to spiral shell fine adjustment shaft bar 10, X to inner corresponding the X of threaded adjusting bar 11 to spiral shell fine adjustment baffle plate 12 lateral surfaces.
Described main basal base 6 is provided with that the y-axis shift corresponding with Z axle carrier wheel 27 is moving regulates push pedal 39, correspondence is provided with the moving support 40 of regulating of y-axis shift on the interior deckle board 8, y-axis shift moves adjusting support 40 and is provided with the moving adjuster bar 41 of y-axis shift, and the inner of the moving adjuster bar 41 of y-axis shift is corresponding with the moving adjusting of y-axis shift push pedal 39.
Both sides, described U-shaped combination of light sources fixed mount 16 1 lateral shelf plate top have Z to regulating tank, and two adjusting pins 35 are fixed at respectively on heat sink 21 sidewalls, and the other end of two adjusting pins 35 lays respectively at regulating tank interior 36; Two Z are being communicated with threaded hole respectively to the regulating tank top, are provided with spring 37 and gland 38 in the threaded hole, and spring 37 is positioned at regulates pin top, is provided with adjusting screw(rod) 20 in another threaded hole, and adjusting screw(rod) 20 lower ends are regulated the pin rod end with another and contacted; U-shaped combination of light sources fixed mount 16 opposite side frame plates are connecting parallel clamping plate outward, corresponding heat sink main shaft 23 places have axis hole on the clamping plate, axis hole top is connecting vertical clamping slot, the clamp cooperation on vertical clamping slot top is provided with horizontal threaded hole and clamping screw, and the overhanging end of heat sink main shaft 23 is positioned at axis hole.
Described Z is provided with Z to turn-knob 1 to the lower end of mobile regulating shaft 3.
Described Z is provided with Z to turn-knob 34 to the lower end of rising-falling tone nodal axisn 33.
Useful technique effect of the present invention is: adopt the combination of worm drive and line slideway to realize the three-dimensional accurate translation adjustment of article carrying platform, adopt the combination of gear drive and sliding bearing, realize the diaxon rotation adjustment of article carrying platform, thereby realize five accurate adjustment of article carrying platform; The present invention is one with five axial adjustment organization's integration, and is reasonable in design.Compare with the adjusting gear that the single shaft platform assembles, not only simple and compact for structure, realized that the compact conformation of this adjusting mechanism, working stability are reliable; And it is convenient to adjust, and can realize continuous fine adjustment, has realized that the fast precise of this mechanism is adjustable.
Description of drawings
Fig. 1 is master's optical axis mapping of the present invention,
Fig. 2 is the backsight axonometric drawing of Fig. 1,
Fig. 3 is a front view of the present invention,
Fig. 4 is the vertical view of Fig. 3,
Fig. 5 is the upward view of Fig. 3,
Fig. 6 is Fig. 3 right view,
Fig. 7 is the A-A cut-open view of Fig. 3,
Fig. 8 is the B-B cut-open view of Fig. 4.
Embodiment
Below in conjunction with accompanying drawing, the present invention is done to describe further by embodiment.
Embodiment:
Referring to Fig. 1-Fig. 8, integral precise five-axis adjustment device comprise one heat sink 21, described heat sinkly be installed in the U-shaped combination of light sources fixed mount 16 by left axle sleeve 19, right axle sleeve 24, heat sink main shaft 23 and bearing cap 22;
U-shaped combination of light sources fixed mount 16 bottom symcenter are being fixedlyed connected main shaft 2 by axle sleeve 17 with circlip 18, U-shaped combination of light sources fixed mount 16 bottom outside faces are fixed with Z axle gear wheel 25;
Be set with gear on the main shaft 2 and drag and join web joint 13, main shaft 2 middle parts are connecting threaded adjusting cover 26 by threaded engagement, and main basal base 6 is sleeved on main shaft 2 bottoms by limited block 5, spacer pin 32 and Lower shaft sleeve 4; Threaded adjusting is overlapped 26 top fixed covers Z axle carrier wheel 27 is housed, and the bottom is set with annular gland 30, annular gland 30 fixedly connected main basal base 6;
Gear drags joins web joint 13 1 sides and the Z of parallel and main shaft 2 is installed to mobile regulating shaft 3 by bearing 44, Bearing housing 43, Z is installed with the pinion wheel 14 that meshes with Z axle gear wheel 25 to the upper end of mobile regulating shaft 3 by circlip 15, its underpart is run through and is extended outside the main basal base 6, and Z is equipped with Z to turn-knob 1 to the lower end of mobile regulating shaft 3.
Main basal base 6 opposite sides are equipped with the Z of parallel and main shaft 2 to rising-falling tone nodal axisn 33, Z is installed with the mobile pinion wheel 29 of the Z axle that cooperates with Z axle carrier wheel 27 to rising-falling tone nodal axisn 33 upper ends by back-up ring 28, and Z is equipped with Z to turn-knob 34 to the lower end of rising-falling tone nodal axisn 33.
Main basal base 6 is the rectangle seat, deckle board 8 and exterior deckle board 9 in its outside is set with; Main basal base 6 and interior deckle board 8 corresponding both sides be separately installed with X to mobile left slide rail 7 and X to mobile right slide rail 31; Interior deckle board 8 and exterior deckle board 9 corresponding both sides be separately installed with Y to mobile left slide rail 45 and Y to mobile right slide rail 42.
X is equipped with to drag with gear on the interior deckle board 8 that moves left slide rail 7 outsides and joins the corresponding X of web joint 13 to spiral shell fine adjustment baffle plate 12, correspondence is equipped with X to spiral shell fine adjustment shaft bar 10 on the exterior deckle board 9, X is threaded on spiral shell fine adjustment shaft bar 10 and X is installed to threaded adjusting bar 11, X to inner corresponding the X of threaded adjusting bar 11 to spiral shell fine adjustment baffle plate 12 lateral surfaces, see Fig. 2 and Fig. 4, with deckle board 8 moving horizontally in realizing with respect to exterior deckle board 9.
Be equipped with on the main basal base 6 that the y-axis shift corresponding with Z axle carrier wheel 27 is moving regulates push pedal 39, correspondence is equipped with the moving support 40 of regulating of y-axis shift on the interior deckle board 8, be threaded on the moving adjusting of the y-axis shift support 40 the moving adjuster bar 41 of y-axis shift is installed, the inner of the moving adjuster bar 41 of y-axis shift is corresponding with the moving adjusting of y-axis shift push pedal 39, see Fig. 2 and Fig. 4, to realize main basal base 6 moving horizontally with respect to interior deckle board 8.
Both sides, U-shaped combination of light sources fixed mount 16 1 lateral shelf plate top have Z and are fixedly installed in respectively on heat sink 21 sidewalls to 36, two adjusting pins 35 of regulating tank, and the other end of two adjusting pins 35 lays respectively in the regulating tank 36; Two Z are being communicated with threaded hole respectively to the regulating tank top, are provided with spring 37 and gland 38 in the threaded hole, and spring 37 is positioned at regulates pin top, is provided with adjusting screw(rod) 20 in another threaded hole, and adjusting screw(rod) 20 lower ends are regulated the pin rod end with another and contacted; U-shaped combination of light sources fixed mount 16 opposite side frame plates are connecting parallel clamping plate outward, corresponding heat sink main shaft 23 places have axis hole on the clamping plate, axis hole top is being communicated with vertical clamping slot, the clamping plate cooperation on vertical clamping slot top is provided with horizontal threaded hole and clamping screw, and the overhanging end of heat sink main shaft 23 is positioned at axis hole.
Heat sink 21 are used to install optical element during use, and can realize efficiently radiates heat.Exterior deckle board 9 is used for linking to each other with this device other parts outward.The purpose of this device promptly is to realize the three translation adjustment and the diaxon rotation adjustment of heat sink 21 relative exterior deckle boards 9.It is adjusted principle and is described as follows:
Heat sink 21 pass through left axle sleeve 19, right axle sleeve 24 realizations around heat sink main shaft 23 rotations, and can realize adjusting around heat sink main shaft 23 rotations by X adjusting screw(rod) 20;
Combination of light sources fixed mount 16 links to each other with main shaft 2 with circlip 18 by axle sleeve 17, the axial restraint that can realize combination of light sources fixed mount 16 relative main shafts 2 with rotate in a circumferential direction; By rotary knob 1, drive pinion wheel 14, rotate thereby drive gear wheel 25, gear wheel 25 is rigidly connected with combination of light sources fixed mount 16, thereby has realized the rotation adjustment of combination of light sources fixed mount 16 relative main shafts 2;
Connect by Lower shaft sleeve 4 between main shaft 2 and the main basal base 6, and by relatively rotating between spacer pin 5 restriction main shafts 2 and the main basal base 6, but can allow relative slip; Threaded adjusting cover 26 constitutes screw pair with main shaft 2, and annular gland 30 has limited moving axially of threaded adjusting cover 26, but can allow the rotation of threaded adjusting cover 26; When rotating Z to turn-knob 34, drive the mobile pinion wheel 29 of Z axle by Z to rising-falling tone nodal axisn 33, the Z axle carrier wheel 27 of engaged transmission is rigidly connected with threaded adjusting cover 26, thereby is converted into the elevating movement of main shaft 2 along axis direction, has realized the lift adjustment of Z direction;
Between main basal base 6 and the interior deckle board 8, be connected with line slideway 7 by line slideway 31, and by the spring pretension; Turn X can promote main basal base 6 and move along line slideway 31 to threaded adjusting bar 11, realizes directions X translation adjustment;
Be connected with line slideway 45 by line slideway 42 between interior deckle board 8 and the exterior deckle board 9 and by the spring pretension; The turn y-axis shift moves adjuster bar 41, and deckle board 8 moves along line slideway 42,45 in can promoting, and realizes the translation adjustment of Y direction.

Claims (6)

1, integral precise five-axis adjustment device is characterized in that: comprise one heat sink (21), described heat sinkly be located in the U-shaped combination of light sources fixed mount (16) by heat sink main shaft (23);
U-shaped combination of light sources fixed mount (16) bottom symcenter by axle sleeve (17) fixedly connected main shaft (2), U-shaped combination of light sources fixed mount (16) bottom outside face is fixed with Z axle gear wheel (25);
Be arranged with gear on the main shaft (2) and drag and join web joint (13), main shaft (2) middle part is connecting threaded adjusting cover (26) by threaded engagement, and main basal base (6) is sleeved on main shaft (2) bottom by Lower shaft sleeve (4); Threaded adjusting cover (26) top fixed cover is provided with Z axle carrier wheel (27), and the bottom is arranged with annular gland (30), annular gland (30) fixedly connected main basal base (6);
Gear drags joins Z that web joint (13) one sides are provided with parallel and main shaft (2) by bearing to mobile regulating shaft (3), and Z is provided with pinion wheel (14) with Z axle gear wheel (25) engagement to the upper end of mobile regulating shaft (3), and its underpart is run through and extended outside the main basal base (6);
Main basal base (6) opposite side be provided be parallel to main shaft (2) Z to rising-falling tone nodal axisn (33), Z is provided with the mobile pinion wheel of Z axle (29) that cooperates with Z axle carrier wheel (27) to rising-falling tone nodal axisn (33) upper end;
Main basal base (6) is the rectangle seat, and its outside is arranged with interior deckle board (8) and exterior deckle board (9); Main basal base (6) and the corresponding both sides of interior deckle board (8) be respectively equipped with X to mobile left slide rail (7) and X to mobile right slide rail (31); Interior deckle board (8) and the corresponding both sides of exterior deckle board (9) be respectively equipped with Y to mobile left slide rail (45) and Y to mobile right slide rail (42).
2, integral precise five-axis adjustment device according to claim 1, it is characterized in that: X is provided with to drag with gear to the interior deckle board (8) that moves left slide rail (7) outside and joins the corresponding X of web joint (13) to spiral shell fine adjustment baffle plate (12), exterior deckle board (9) is gone up correspondence and is provided with X to spiral shell fine adjustment shaft bar (10), X is provided with X to threaded adjusting bar (11) to spiral shell fine adjustment shaft bar (10), X to inner corresponding the X of threaded adjusting bar (11) to spiral shell fine adjustment baffle plate (12) lateral surface.
3, integral precise five-axis adjustment device according to claim 1, it is characterized in that: described main basal base (6) is provided with the moving adjusting of the y-axis shift corresponding with Z axle carrier wheel (27) push pedal (39), interior deckle board (8) is gone up correspondence and is provided with the moving support (40) of regulating of y-axis shift, the moving support (40) of regulating of y-axis shift is provided with the moving adjuster bar (41) of y-axis shift, and it is corresponding that the inner that y-axis shift move adjuster bar (41) and y-axis shift move adjusting push pedal (39).
4, integral precise five-axis adjustment device according to claim 1, it is characterized in that: both sides, described U-shaped combination of light sources fixed mount (16) one lateral shelf plate top have Z to regulating tank, two adjusting pins (35) are fixed at respectively on heat sink (21) sidewall, and the other end of two adjusting pins (35) lays respectively in the regulating tank (36); Two Z are being communicated with threaded hole respectively to the regulating tank top, be provided with spring (37) and gland (38) in the threaded hole, spring (37) is positioned at regulates pin top, is provided with adjusting screw(rod) (20) in another threaded hole, and adjusting screw(rod) (20) lower end is regulated the pin rod end with another and contacted; U-shaped combination of light sources fixed mount 16 opposite side frame plates are connecting parallel clamping plate outward, corresponding heat sink main shaft (23) locates to have axis hole on the clamping plate, axis hole top is connecting vertical clamping slot, the clamp cooperation on vertical clamping slot top is provided with horizontal threaded hole and clamping screw, and the overhanging end of heat sink main shaft (23) is positioned at axis hole.
5, integral precise five-axis adjustment device according to claim 1 is characterized in that: described Z is provided with Z to turn-knob (1) to the lower end of mobile regulating shaft (3).
6, integral precise five-axis adjustment device according to claim 1 is characterized in that: described Z is provided with Z to turn-knob (34) to the lower end of rising-falling tone nodal axisn (33).
CNB2008100993682A 2008-05-06 2008-05-06 Integral precise five-axis adjustment device Expired - Fee Related CN100568038C (en)

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Application Number Priority Date Filing Date Title
CNB2008100993682A CN100568038C (en) 2008-05-06 2008-05-06 Integral precise five-axis adjustment device

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Application Number Priority Date Filing Date Title
CNB2008100993682A CN100568038C (en) 2008-05-06 2008-05-06 Integral precise five-axis adjustment device

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CN101290384A true CN101290384A (en) 2008-10-22
CN100568038C CN100568038C (en) 2009-12-09

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102193161A (en) * 2011-05-31 2011-09-21 哈尔滨工业大学 Five-freedom-degree precise position fixing device for adjustment of lens sets
CN102707403A (en) * 2012-05-23 2012-10-03 北京卓立汉光仪器有限公司 Sunlight simulator and multi-dimensional adjustment mechanism for lamp cup of sunlight simulator
CN104482879A (en) * 2014-12-12 2015-04-01 上海机床厂有限公司 Interferometer fine adjusting mechanism with pneumatic locking function
CN107449946A (en) * 2017-10-11 2017-12-08 江苏盛华电气有限公司 A kind of three-dimensional adjustable moving platform
CN109655992A (en) * 2019-01-23 2019-04-19 中国科学院长春光学精密机械与物理研究所 Positioning device
CN110383132A (en) * 2017-01-29 2019-10-25 纽波特公司 Diffraction grating gimbals
CN111538130A (en) * 2020-05-09 2020-08-14 白城师范学院 Adjusting mechanism and adjusting method of quantum optical module

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102193161A (en) * 2011-05-31 2011-09-21 哈尔滨工业大学 Five-freedom-degree precise position fixing device for adjustment of lens sets
CN102193161B (en) * 2011-05-31 2012-12-05 哈尔滨工业大学 Five-freedom-degree precise position fixing device for adjustment of lens sets
CN102707403A (en) * 2012-05-23 2012-10-03 北京卓立汉光仪器有限公司 Sunlight simulator and multi-dimensional adjustment mechanism for lamp cup of sunlight simulator
CN104482879A (en) * 2014-12-12 2015-04-01 上海机床厂有限公司 Interferometer fine adjusting mechanism with pneumatic locking function
CN104482879B (en) * 2014-12-12 2017-05-24 上海机床厂有限公司 Interferometer fine adjusting mechanism with pneumatic locking function
CN110383132A (en) * 2017-01-29 2019-10-25 纽波特公司 Diffraction grating gimbals
CN107449946A (en) * 2017-10-11 2017-12-08 江苏盛华电气有限公司 A kind of three-dimensional adjustable moving platform
CN109655992A (en) * 2019-01-23 2019-04-19 中国科学院长春光学精密机械与物理研究所 Positioning device
CN111538130A (en) * 2020-05-09 2020-08-14 白城师范学院 Adjusting mechanism and adjusting method of quantum optical module
CN111538130B (en) * 2020-05-09 2022-02-25 白城师范学院 Adjusting mechanism and adjusting method of quantum optical module

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