CN101288015A - Micromirror array lens with free surface - Google Patents
Micromirror array lens with free surface Download PDFInfo
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- CN101288015A CN101288015A CNA2006800276068A CN200680027606A CN101288015A CN 101288015 A CN101288015 A CN 101288015A CN A2006800276068 A CNA2006800276068 A CN A2006800276068A CN 200680027606 A CN200680027606 A CN 200680027606A CN 101288015 A CN101288015 A CN 101288015A
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- 238000003384 imaging method Methods 0.000 claims abstract description 109
- 238000013519 translation Methods 0.000 claims abstract description 26
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- 238000004377 microelectronic Methods 0.000 claims abstract description 5
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- 239000000463 material Substances 0.000 claims abstract description 4
- 230000003287 optical effect Effects 0.000 claims description 60
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- 229910052751 metal Inorganic materials 0.000 claims description 17
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- 238000003909 pattern recognition Methods 0.000 claims description 10
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- 239000003989 dielectric material Substances 0.000 claims description 3
- 239000004411 aluminium Substances 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
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- 229910052697 platinum Inorganic materials 0.000 claims description 2
- 239000004332 silver Substances 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000003381 stabilizer Substances 0.000 claims description 2
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/002—Arrays of reflective systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/02—Simple or compound lenses with non-spherical faces
- G02B3/08—Simple or compound lenses with non-spherical faces with discontinuous faces, e.g. Fresnel lens
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Elements Other Than Lenses (AREA)
- Micromachines (AREA)
- Studio Devices (AREA)
Abstract
A micromirror array lens includes a plurality of micromirrors, and reproduces a predetermined free surface by controlling rotation and/or translation of the micromirrors. The micromirror is controlled by control circuitry, upheld by a mechanical structure, and includes a reflective surface. The predetermined free surface of the lens is changed by controlling rotation and/or translation of the micromirrors. The micromirrors are arranged in one or more concentric circles to form the lens. The micromirror has a fan shape, a hexagonal shape, a rectangular shape, a square shape, or a triangle shape. The reflective surface of the micromirror is substantially flat. The control circuitry is constructed under the micromirrors by using semiconductor microelectronics technologies. The micromirrors are actuated by electrostatic and/or electromagnetic force. The reflective surface of the micromirror is made of materials with high reflectivity. The lens is used for an imaging apparatus, video monitoring camera, camcorder, etc.
Description
Technical field
The present invention relates to a kind of micro mirror array camera lens with free face.More specifically, this invention relates to a kind of micro mirror array camera lens with free face, and it has miniaturization and high performance characteristics simultaneously.
Background technology
The sphere camera lens can not converge to parallel rays a bit.Therefore, a plurality of lens group are lumped together with its correction.In these cases, because with the assembling of a plurality of camera lenses, so realizing that one is small-sized and have and have limitation aspect the high-performance of high-aperture lenses.
On the other hand, the aspheric lens with needed free face of convergence of rays to any then can be converged to parallel rays a bit by a single lens if adopt.So can reduce the volume and weight of optical system.Also can realize higher optical property.
For this reason, what a kind of aspheric lens has been used for light beam projector, projection TV, compact disc read-only memory (CD-ROM) searches assembly, digital video disk (DVD) player, laser printer, laser scan unit, etc.
Yet,, make that to have permissible accuracy on the practice be difficult less than 0.1 micron complicated aspheric aspheric lens by the existing machinery performance.In addition, measuring having of being produced is difficult less than the camera lens error of 0.1 micron precision.And on the other hand, the micro mirror array camera lens with free face can form the aspheric lens that has less than 0.1 micron precision.
Summary of the invention
The present invention is devoted to solve these shortcomings of prior art.
An object of the present invention is to provide a kind of micro mirror array camera lens with free face.
Another object of the present invention provides a kind of micro mirror array with free face, and it can have the high performance characteristics of miniaturization and high-aperture lenses simultaneously.
The micro mirror array camera lens comprises a plurality of micro mirrors, and this micro mirror array camera lens reproduces a predetermined free face by the rotation and/or the translation of these micro mirrors of control.
Control these micro mirrors by control circuit.And support these micro mirrors by a physical construction.These micro mirrors comprise a reflecting surface.
By rotation and/or the translation of controlling these micro mirrors, change the predetermined free face of camera lens.
The predetermined free face of this camera lens is fixed.
Determine the rotation amount and the sense of rotation of micro mirror by the gradient of this predetermined free face.
The translation of controlling each micro mirror is to satisfy in-phase conditions.
These all micro mirrors are set on a plane.
These micro mirrors are set forming a camera lens in one or more concentric circless, and these micro mirrors comprise electrode.Activate micro mirror on each concentric circles by one or more electrodes corresponding with concentric circles.Activate micro mirror with identical translation and swing offset by identical electrode.
That micro mirror has is fan-shaped, hexagon, rectangle, square, or leg-of-mutton profile.
The reflecting surface of micro mirror comes down to flat.
Under these micro mirrors, construct control circuit by the employing semiconductor microelectronic technology, and this control circuit comprises at least one conductor layer.
By electrostatic force, electromagnetic force, or electrostatic force and electromagnetic force activate these micro mirrors.
The physical construction and the actuated components that support these micro mirrors are placed under these micro mirrors.
Independent these micro mirrors of control.The reflecting surface of micro mirror has a curvature.The curvature of these micro mirrors of may command.Control the curvature of these micro mirrors by electrothermal forces and/or electrostatic force.
This reflecting surface of micro mirror is made by the material with high reflectance.This reflecting surface of micro mirror is made of metal.This metal comprises silver, aluminium, platinum or gold.Protect this metal by dielectric coating or multilayer dielectric coating.
The reflecting surface of micro mirror is made by metal mixture.Protect this metal mixture by dielectric coating or multilayer dielectric coating.
The reflecting surface of micro mirror is made by multilayer dielectric material.
A spatial light modulation device on this camera lens.This camera lens is the spatial light modulation device, and it compensates the phase error of the light that is caused by the medium between object and the image thereof.
This spatial light modulation device aberration correction.The spatial light modulation device is proofreaied and correct the deviation from the paraxial imagery rule.This spatial light modulation device makes and to depart from the object image-forming of optical axis and need not macroscopic view machinery and move.
Control this camera lens and satisfy in-phase conditions respectively, to obtain a chromatic image with each wavelength to red, green, blue (RGB) wavelength.
Control this camera lens to satisfy the in-phase conditions of a wavelength in a plurality of wavelength, to obtain a chromatic image.
By the lowest common multiple of red, green and blue light wavelength being used as the effective wavelength of phase condition, to satisfy the in-phase conditions of colour imaging.
This camera lens of location makes it rotatable about an axle in an optical system.For example, make it rotatable about X-axis this camera lens location, X-axis is perpendicular to optical axis.If so, the surface curve of this camera lens is about the Y-axis symmetry, and Y-axis is perpendicular to optical axis and X-axis.
This camera lens is applicable to an imaging device.This imaging device has at least a of following function: optical zoom, digital zoom, automatic focus and three-dimensional imaging.
This imaging device is the video monitoring camera.This video monitoring apparatus has at least a of following function: optical zoom, automatic focus, three-dimensional imaging and digital zoom.
This imaging device is a video camera.This video camera has at least a of following function: optical zoom, automatic focus, three-dimensional imaging and digital zoom.
This imaging device can be integrated into the Portable assembly.This imaging device has at least a of following function: optical zoom, automatic focus, three-dimensional imaging and digital zoom.
This imaging device lastrow mobile phone camera.This action phone cameras has at least a of following function: optical zoom, automatic focus, three-dimensional imaging and digital zoom.
This imaging device can be integrated in the TV.This imaging device that is integrated in the TV has at least a of following function: optical zoom, automatic focus, three-dimensional imaging and digital zoom.
This imaging device can be integrated into mobile computer.
This imaging device that is integrated into notes type calculating has at least a of following function: optical zoom, automatic focus, three-dimensional imaging and digital zoom.
This imaging device can be integrated in the computing machine.This imaging device that is integrated in the computing machine has at least a of following function: optical zoom, automatic focus, three-dimensional imaging and digital zoom.
This imaging device can be integrated in the computer monitor.
This imaging device that is integrated in the computer monitor has at least a of following function: optical zoom, automatic focus, three-dimensional imaging and digital zoom.
This imaging device can be integrated among the portable digital assistant (PDA).This imaging device that is integrated among the portable digital assistant (PDA) has at least a of following function: optical zoom, automatic focus, three-dimensional imaging and digital zoom.
This imaging device is used for pattern recognition system.This pattern recognition system can be integrated in the mobile phone.
This imaging device is used for the Motion Recognition system.This Motion Recognition system combination can be gone in the mobile phone.
This imaging device is used for endoscope.
This imaging device is used for three-dimensional display apparatus.
This camera lens is used for two-dimensional projection's display device.This two-dimensional projection's display device can be integrated into portable apparatus.This portable apparatus is a mobile phone.This two-dimensional projection's display device projection one keyboard image.
This camera lens is used for three-dimensional image forming apparatus.This three-dimensional image forming apparatus is used for the three dimensional pattern recognition system.This three dimensional pattern recognition system can be integrated in the mobile phone.This three-dimensional image forming apparatus is used for the three-dimensional motion recognition system.This three-dimensional motion recognition system can be integrated in the mobile phone.This three-dimensional motion recognition system is used for the collision avoidance system of automobile.This three-dimensional motion recognition system is used for three-dimensional endoscope.
This camera lens can be used for apparatus for reading of bar code.
This camera lens can be used for the optical imaging device.
This camera lens can be used for light beam focuses on and scanning system.This light beam focuses on and scanning system can be used for printer.And this light beam focuses on and scanning system can be used for scanner.
This camera lens can be used for optical tracking system.This optical tracking system can be used for 3D mouse.
This camera lens can be used for three-dimension integrally imaging and display system.
This camera lens can be used for the imaging stabilizer arrangement.
Can reduce the volume and the weight of optical system because have the micro mirror array camera lens (MMAL) of free face, and can improve optical property, so this invention can be used for these imaging devices.
When these imaging devices were used for digital camera, these imaging devices had digital zoom functions.
This invention can be used for zoom system, pancreatic system, the three-dimensional imaging assembly, autofocus system, the video monitoring camera, the imaging stabilizator, three-dimensional display apparatus, the two-dimensional imaging optical projection system, the optical imaging assembly, light beam focuses on and scanning system, optical tracking system, and three-dimension integrally imaging and display system, these Apparatus and systems are described in following patent application case respectively: the U.S. patent application case that is entitled as " small and fast zoom system " the 10/806th of application on March 22nd, 2004, No. 299, the U.S. patent application case the 10/822nd that is entitled as " three-dimensional imaging assembly " of application on April 12nd, 2004, No. 414, the U.S. patent application case that is entitled as " high-speed automatic focusing system " the 10/896th of application on July 21st, 2004, No. 141, the U.S. patent application case the 11/076th that is entitled as " video monitoring system that adopts zoom lens " of application on March 10th, 2005, No. 688, the U.S. patent application case the 10/979th that is entitled as " the imaging stabilizator that adopts the micro mirror array camera lens " of application on November 2nd, 2004, No. 612, the U.S. patent application case the 10/778th that is entitled as " three dimensional display that adopts zoom lens " of application on February 13rd, 2004, No. 281, the U.S. patent application case the 10/914th that is entitled as " two-dimensional imaging optical projection system " of application on August 9th, 2004, No. 474, the U.S. patent application case the 10/934th that is entitled as " optical imaging assembly " of application on September 3rd, 2004, No. 133, the U.S. patent application case the 10/979th that is entitled as " adopting the light beam of micro mirror array camera lens to focus on and scanning system " of application on November 2nd, 2004, No. 568, the U.S. patent application case the 10/979th that is entitled as " optical tracking system that adopts zoom lens " of application on November 2nd, 2004, No. 619, and No. the 10/979th, 624, the U.S. patent application case that is entitled as " the three-dimension integrally imaging and the display system that adopt zoom lens " of on November 2nd, 2004 application.
Be applied to these application cases if will have the micro mirror array camera lens (MMAL) of free face, then the present invention removes and has U.S. patent application case the 10/806th, No. 299, the 10/822nd, No. 414, the 10/896th, No. 141, the 11/076th, No. 688, the 10/979th, No. 612, the 10/778th, No. 281, the 10/914th, No. 474, the 10/934th, No. 133, the 10/979th, No. 568, the 10/979th, No. 619 and the 10/979th, outside the advantage of describing in No. 624, also have additional advantage, for example, can reduce the volume and weight of system and can realize higher optical property.
The imaging device that comprises the micro mirror array camera lens (MMAL) with free face can be used for pattern-recognition and Motion Recognition system.This Motion Recognition system combination can be gone into mobile phone and this imaging device can be used for endoscope.
The three-dimensional image forming apparatus that comprises the micro mirror array camera lens (MMAL) with free face can be used for three dimensional pattern recognition system and three-dimensional motion recognition system.Especially, the most practical advantage of these application on higher optical property, high speed and the less device volume.Because higher optical property, high speed and smaller size smaller can be integrated into this three-dimensional motion recognition system in the mobile phone, and can be used for the collision avoidance system of automobile.Same, because higher optical property, high speed and smaller size smaller can be used for these three-dimensional image forming apparatus three-dimensional endoscope.
These imaging devices that comprise the micro mirror array camera lens (MMAL) with free face can be integrated in the Portable assembly, this Portable assembly can have at least a of following function: optical zoom, automatic focus, three-dimensional imaging and digital zoom.
These comprise that the imaging device of the micro mirror array camera lens (MMAL) with free face can be function video monitoring camera, video camera, the mobile phone camera one of at least with optical zoom, automatic focus, three-dimensional imaging and digital zoom.This video camera, video camera can have optical zoom, automatic focus, three-dimensional imaging, digital zoom, smaller size smaller, than the advantage of light weight and superior performance.These imaging devices can be integrated into TV, mobile computer, desktop PC and computer monitor.These devices can have at least a of following function: optical zoom, automatic focus, three-dimensional imaging and digital zoom.Therefore, these devices can have optical zoom, automatic focus, three-dimensional imaging, digital zoom, smaller size smaller, than the advantage of light weight and superior performance.
Two-dimensional projection's display device that these can be comprised the micro mirror array camera lens (MMAL) with free face is integrated in the portable apparatus, its volume and weight can be reduced and higher optical property can be realized, and these devices also have the advantage of describing in No. the 10/914th, 474, the U.S. patent application case.Because these two-dimensional projection's display device have smaller size smaller, lower weight and lower power consumption are so can be integrated into these two-dimensional projection's display device in the portable apparatus for example mobile phone and portable digital assistant (PDA).
Comprise two-dimensional projection's display device of micro mirror array camera lens (MMAL) by these with free face, can be with the keyboard image projecting on screen, for example on table or the wall.In for example mobile phone and portable digital assistant (PDA), the Portable keyboard of projection image is essential.Be the exploitation projected keyboard, the detection that finger moves also is essential.
Light beam focusing and the scanning system that comprises the micro mirror array camera lens (MMAL) with free face can be used for printer, scanner.The high speed of micro mirror array camera lens (MMAL) focuses on and scan function can make system have high resolution printed and scanning.
The optical tracking system that comprises the micro mirror array camera lens (MMAL) with free face can be used for 3D mouse.The high speed 3D monitoring function of the micro mirror array camera lens (MMAL) of free face can be realized the 3D mouse.
Advantage of the present invention is: (1) this micro mirror array camera lens with free face can be realized the superior performance of high-aperture lenses; And (2) this micro mirror array camera lens with free face can realize setting up the compact optical assembly.
Though summarized the present invention briefly, seen through following graphic, detailed description and appended claims and can understand the present invention more fully.
Description of drawings
By graphicly understanding these and other characteristics of the present invention, aspect and advantage better, wherein with reference to appended:
Fig. 1 illustrates the principle of Fresnel camera lens and micro mirror array camera lens;
Fig. 2 illustrates the plane internal view of rotational symmetry micro mirror array camera lens;
Fig. 3 illustrates the how imaging of this micro mirror array camera lens;
Fig. 4 shows the micro mirror of a part of reproducing the rotational symmetry reflecting surface;
Fig. 5 shows aspheric two examples, U type and W type;
Fig. 6 shows bi-focal micro mirror array camera lens;
Fig. 7 shows two rotary freedoms and translation freedoms of micro mirror;
Fig. 8 a shows the zoom cylinder camera lens that comprises the hexagon micro mirror;
Fig. 8 b shows the zoom disc camera lens that comprises the hexagon micro mirror;
Fig. 9 shows the zoom cylinder camera lens that comprises the rectangle micro mirror;
Figure 10 shows the zoom disc camera lens that comprises the triangle micro mirror;
Figure 11 shows the imaging system that adopts the micro mirror array camera lens (MMAL) with free face.
Embodiment
With U.S. patent application case the 10/855th, 287,10/857,714,10/857,280,10/983,353,10/778,281,10/806,299,10/822,414,10/896,141,10/914,474,10/934,133,10/979,568,10/979,619,10/979,624,10/979,612,11/072,296, and is incorporated herein by reference for 11/076, No. 688, as proposing fully at this.
Fig. 1 illustrates the principle of Fresnel camera lens and micro mirror array camera lens 11.Make a desirable camera lens and need two conditions.First condition is the convergence condition, promptly by all light of a point scattering of object should converge to image plane a bit.Second condition is in-phase conditions, i.e. all converging lights should have identical phase place at image plane.For satisfying these desirable camera lens conditions, the surface configuration that forms traditional reflective camera lens 12 makes it can be with by a bit to image plane of all optical convergences of a point scattering of object lens, and can make the equivalent optical path of all converging lights.
Fig. 2 illustrates the plane internal view of rotational symmetry micro mirror array camera lens 21.Micro mirror 22 has and the minute surface identical functions.Therefore, the reflecting surface of micro mirror 22 is made by metal, metal mixture, multilayer dielectric material or other material with high reflectance.Many known little manufacturing processing procedures can make this surface have high reflectance.Having known by actuated components 23 adopts static and/or electromagnetic mode to control each micro mirror 22.In the situation of a rotational symmetry camera lens, micro mirror array camera lens 21 has the polar coordinate array of these micro mirrors 22.It is one fan-shaped to increase specular cross section that each of these micro mirrors 22 has, and it can improve optical efficiency.
These micro mirrors are set to form one or more concentric circless, and then form a rotational symmetry camera lens, and can be by identical electrodes control or by the micro mirror on the identical concentric circles of the independent control of known semiconductor microelectric technique (for example metal-oxide semiconductor (MOS) (MOS) or complementary metal oxide semiconductor (CMOS) (CMOS)).The physical construction and these actuated components 23 that support each reflection micro mirror 22 are placed under these micro mirrors 22, to increase specular cross section.Available known semiconductor microelectric technique (for example metal-oxide semiconductor (MOS) (MOS) or complementary metal oxide semiconductor (CMOS) (CMOS)) substitutes electrical control circuit and operates these micro mirrors.Equally, described in No. the 11/072nd, 296, U.S. patent application case, this control circuit can be made of at least one conductor layer.
These microelectronic circuits are used under micro mirror array, then can be increased specular cross section by removing the essential zone that is used for electronic pads and lead, these electronic padses and lead are used to provide actuating power.
Fig. 3 illustrates how imaging of micro mirror array camera lens 31.By controlling the position of these micro mirrors 34, any scattered light 32,33 is converged to 1 P of image plane.By these micro mirrors 34 of translation, the phase place of any light 32,33 can be adjusted into identical.Required translational displacement is at least half of optical wavelength.Because the ideal form of traditional reflective camera lens 12 has curvature, has curvature so expect each micro mirror 34.If the size of flat micromirror is enough little, comprise that then the aberration of the camera lens of these flat micromirror 34 also becomes enough little.In this case, micro mirror does not need to have curvature.By rotation and the translation of controlling each micro mirror 34, can change the focal distance f of micro mirror array camera lens 31.
By parabolic surface, the parallel rays with zero degree visual angle (or scan angle of scanister) converges to a bit.And the practice optical system needs continuous visual angle (or scan angle) in visual field (or sweep limit).Therefore, required surface is not simply parabola shaped, and it is polynomial function normally.Usually can find the best surface that is used for continuous visual field (or scan angle) by the optics simulation software.As illustrating among Fig. 1, can obtain this best surface by the micro mirror array that adopts Fresnel camera lens principle.
At present, be not used in the best rotation of each micro mirror of searching micro mirror array camera lens (MMAL) and the optics software of translation.Therefore, should calculate the rotation and the translation of each micro mirror by the best aspheric surface function that finds by the optics simulation software.
Fig. 4 shows the micro mirror of a part of reproducing the rotational symmetry reflecting surface.Aspheric surface 41 can be expressed as
z＝f(r)
Wherein z is the curve of aspheric surface 41, and r is the radial component in the cylindrical-coordinate system.
The rotation θ of micro mirror 42 sees through the gradient dz/dr that calculates z and obtains.Because reproduced the gradient on the r direction of P point place aspheric surface 41 by the rotation of micro mirror 42, so have identical direction with the light 44 that reflects by micro mirror by the light 43 of aspheric surface 41 reflections.
If this aspheric surface is not a rotational symmetry, it can be expressed as
z＝f(x，y)
Wherein z is the curve of aspheric surface, and x and y are the plane internal coordinates.
In this case, two rotary freedoms are essential, i.e. the rotation of x direction and y direction.
Because make micro mirror 42 by little manufacturing processing procedure, so in a plane 45, they are arranged as shown in Figure 4.Therefore, the light light path by the aspheric surface reflection is different with the light light path that is reflected by micro mirror 42.This optical path difference is caused that by difference in height Δ z Δ z is the difference in height between aspheric surface and this micro mirror, it can be expressed as
OPD＝2×Δz
Wherein OPD is a light path.
Even the light path of converging light (OPD) is different, also can make the phase matching of two-beam by this light path (OPD) being adjusted into m times of wavelength, because the phase place of light is periodic, wherein m is an integer.
Fig. 5 shows two aspheric examples, U-shaped 51 and W shape 52.As shown in Figure 5, can reproduce them by micro mirror array camera lens 53.
Fig. 6 shows bi-focal micro mirror array camera lens 61.Two aspheric surfaces 62,63 with different focal can be reproduced is a micro mirror array camera lens 61.In a micro mirror array camera lens, also can realize many focal lengths micro mirror array camera lens.
Fig. 7 shows two rotary freedoms and translation freedoms of micro mirror 71.The array that comprises the micro mirror 71 of 72, the 73 and translation freedoms 74 of two rotary freedoms with independent control can form and has any aspheric camera lens.By forming any aspheric surface modulation incident light at random.For realizing this purpose, need incident light to be deflected to any direction by control to two rotary freedoms 72,73.The independent translation 74 that also needs each micro mirror is to satisfy phase condition.
In Fig. 8 a, 8b, 9 and 10, represent the rotation amount and the direction of micro mirror by the length of arrow 82, and by the direction indication curve gradient direction of arrow 82, this curve gradient direction is represented the sense of rotation of micro mirror.Fig. 8 a shows the zoom cylinder camera lens that comprises hexagon micro mirror 81.Fig. 8 b shows the zoom disc camera lens 83 that comprises hexagon micro mirror 81.By the independent of these micro mirrors 81 with two rotary freedoms (DOF) and translation freedoms (DOF) controlled, can change shape, position and the size of zoom disc camera lens 83.In Fig. 8 b and 10, the micro mirror 85 of controlling non-lens assembly makes the light that is reflected by these micro mirrors 85 not influence imaging or focusing.
Though Fig. 8 a to 8b shows hexagon micro mirror 81, fan-shaped, rectangle, square and triangle micro mirror also are adoptable.The array that comprises fan-shaped micro mirror is applicable to the rotational symmetry camera lens.Fig. 9 shows the zoom cylinder camera lens 91 that comprises rectangle micro mirror 92.The array that comprises square or rectangle micro mirror 92 is applicable to that for example the cylinder camera lens 91 about axisymmetric camera lens in the plane.
Activate or have the micro mirror of identical rotation by the independent control of known semiconductor microelectric technique (for example metal-oxide semiconductor (MOS) (MOS) or complementary metal oxide semiconductor (CMOS) (CMOS)) by identical electrodes.
Figure 10 shows the zoom disc camera lens 101 that comprises triangle micro mirror 102.The array that comprises triangle micro mirror 102 is applicable to the camera lens with arbitrary shape and/or size, for example comprises the array of hexagon micro mirror.
Because the translation 74 by independent control micro mirror and rotate 72,73 phase places that can change light is so the micro mirror array camera lens is a kind of adaptive optics parts.The micro mirror array camera lens of adaptive optics need have the two-dimensional array of the micro mirror that can distinguish addressing.For realizing this purpose, the sub-device of these micro mirrors and chip power need be combined.For this reason, it is essential micro mirror and known microelectronic circuit being carried out wafer scale integrates.
Because the phase error of the light that adaptive optics parts recoverable is caused by medium between object and the image thereof, and/or the defective of proofreading and correct the lens system that causes that its image departs from from the paraxial imagery rule, so micro mirror array camera lens recoverable phase error.For example, the translation 74 by adjusting micro mirror and rotate 72,73, the phase error that micro mirror array camera lens recoverable is caused by optical tilt.
The in-phase conditions that satisfied by the micro mirror array camera lens comprise a monochromatic hypothesis.Therefore,, control this micro mirror array camera lens and satisfy in-phase conditions respectively, and imaging system can adopt the monochromatic light of bandpass filter (RGB) wavelength that obtains to have red, green, blue with each wavelength to red, green, blue (RGB) wavelength for obtaining chromatic image.
If with the color photoelectric sensor as the imaging sensor in the imaging system that adopts the micro mirror array camera lens, handle electric signal by using or do not use bandpass filter from red, green and blue (RGB) imaging sensor, can obtain chromatic image, these bandpass filter should be with synchronous to the control of micro mirror array camera lens.For making the ruddiness imaging from the object scattering, control micro mirror array camera lens is to satisfy the in-phase conditions of ruddiness.In the operating process, red, green and blue imaging sensor is measured the intensity from each of red, the green and blue light of object scattering.Wherein, only red light intensity is stored as image data, because only ruddiness imaging veritably.For making each imaging of green or blue light, this micro mirror array camera lens and each imaging sensor with the identical mode of the processing of ruddiness is worked.Therefore, this micro mirror array camera lens is synchronous with red, green and blue imaging sensor.Perhaps, by the lowest common multiple of red, green and blue light wavelength being used as the effective wavelength of phase condition, satisfy the in-phase conditions of chromatic image.In this case, needn't control the micro mirror array camera lens to satisfy each phase condition of red, green and blue light respectively.But should satisfy the phase condition of the lowest common multiple of these wavelength.
For control more simply, only control the phase condition of a kind of light in red to satisfy, the green and blue light of the translation of each micro mirror, or do not control the phase condition of arbitrary other light in red to satisfy, the green and blue light of the translation of each micro mirror.Even because the out of phase error of light makes this micro mirror array camera lens can not satisfy the phase condition of multi-wavelength, this camera lens still can be used as and has low-qualityer zoom lens.
Figure 11 shows the imaging system that adopts the micro mirror array camera lens 110 with free face.Imaging system 111 is to adopt the example of the optical system of the micro mirror array camera lens with free face.As shown in Figure 11, because the micro mirror array camera lens is a reflection lens, thus this micro mirror array camera lens of common sloped position, with the light of deflection directive sensor 114.Because location traditional reflective camera lens 112 makes it perpendicular to optical axis 113, so the surface curve of this camera lens is normally axisymmetric.Yet if positional micromirror array camera lens 110 makes it rotatable about X-axis, the surface curve of this micro mirror array camera lens is only about the Y-axis symmetry.
Should comprise aspheric surface in predetermined free face.
Though illustrated and described the present invention with reference to different embodiments of the invention, but it will be understood by a person skilled in the art that, can make in form, details, composition and the operation the present invention and make change, and can not deviate from spirit of the present invention and the scope that limits by appended claims.
Symbol description
11,31,53 micro mirror array camera lenses
12 traditional reflective camera lenses
21 axial symmetry micro mirror array camera lenses
22,34,42,71 micro mirrors
23 activate parts
32,33 any scattered lights
41 aspheric surfaces
43 light by the aspheric surface reflection
44 light by the micro mirror reflection
45 planes
51 traditional U-shaped reflection lens
52 traditional W shape reflection lens
61 bifocals are apart from the micro mirror array camera lens
62,63 have the aspheric surface of different focal
Two rotary freedoms of 72,73 micro mirrors
A translation freedoms of 74 micro mirrors
81 hexagon micro mirrors
The arrow of the sense of rotation of 82 expression micro mirrors
83 zoom disc camera lenses
The micro mirror of 85 non-lens assemblies
91 comprise the zoom cylinder camera lens of rectangle micro mirror
92 rectangle micro mirrors
101 comprise the disc camera lens of triangle micro mirror
102 triangle micro mirrors
110 have the micro mirror array camera lens of free face
111 adopt the imaging system of the micro mirror array camera lens with free face
112 traditional reflective camera lenses
113 optical axises
114 sensors
Claims (101)
1. a micro mirror array camera lens that comprises a plurality of micro mirrors wherein passes through rotation, the translation of described these micro mirrors of control, or rotation and translation, and described micro mirror array camera lens can reproduce a predetermined free face.
2. camera lens according to claim 1 wherein passes through rotation, the translation of described these micro mirrors of control, or rotation and translation, changes the described predetermined free face of described camera lens.
3. camera lens according to claim 1, the described predetermined free face of wherein said camera lens is fixed.
4. camera lens according to claim 1 is wherein determined the rotation amount and the sense of rotation of described micro mirror by the gradient of described predetermined free face.
5. camera lens according to claim 1, the translation of wherein controlling each described micro mirror is to satisfy in-phase conditions.
6. camera lens according to claim 1 wherein is provided with all described these micro mirrors on a plane.
7. camera lens according to claim 1 wherein is provided with described these micro mirrors in one or more concentric circless, to form described camera lens, wherein said micro mirror comprises one or more electrodes.
8. camera lens according to claim 7 wherein is controlled at the micro mirror of described these concentric circless on each by one or more electrodes corresponding with this concentric circles.
9. camera lens according to claim 1, wherein said micro mirror comprises one or more electrodes, wherein activates described these micro mirrors by described these electrodes.
10. camera lens according to claim 9 wherein activates the micro mirror that these have identical translation and swing offset by these identical electrodes.
11. it is one fan-shaped that camera lens according to claim 1, wherein said micro mirror have.
12. camera lens according to claim 1, wherein said micro mirror has a hexagon.
13. camera lens according to claim 1, wherein said micro mirror has a rectangle.
14. camera lens according to claim 1, wherein said micro mirror has a square.
15. camera lens according to claim 1, wherein said micro mirror has a triangle.
16. camera lens according to claim 1, it further comprises a control circuit, wherein by described these micro mirrors of described control circuit control.
17. camera lens according to claim 16 is wherein by adopting semiconductor microelectronic technology to construct described control circuit under described these micro mirrors.
18. camera lens according to claim 16 is wherein constructed described control circuit under described these micro mirrors, wherein said control circuit comprises at least one conductor layer.
19. camera lens according to claim 1 wherein activates described these micro mirrors by electrostatic force.
20. camera lens according to claim 1 wherein activates described these micro mirrors by electromagnetic force.
21. camera lens according to claim 1 wherein activates described these micro mirrors by electrostatic force and electromagnetic force.
22. camera lens according to claim 1 further comprises a physical construction, wherein supports these micro mirrors by described physical construction.
23. camera lens according to claim 22, the physical construction and the actuating assembly that wherein will support described these micro mirrors place under described these micro mirrors.
24. camera lens according to claim 1, described these micro mirrors of wherein independent control.
25. camera lens according to claim 1, wherein said micro mirror comprises a reflecting surface.
26. camera lens according to claim 25, the described reflecting surface of wherein said micro mirror comes down to flat.
27. camera lens according to claim 25, the described reflecting surface of wherein said micro mirror has a curvature.
28. camera lens according to claim 27, the wherein curvature of described these micro mirrors of may command.
29. camera lens according to claim 27 is wherein by the curvature of described these micro mirrors of electrothermal forces control.
30. camera lens according to claim 27 is wherein by the curvature of described these micro mirrors of electrostatic force control.
31. camera lens according to claim 25, the described reflecting surface of wherein said micro mirror is made by the material with high reflectance.
32. camera lens according to claim 31, the described reflecting surface of wherein said micro mirror is made of metal.
33. camera lens according to claim 32, wherein said metal comprises silver.
34. camera lens according to claim 32, wherein said metal comprises aluminium.
35. camera lens according to claim 32, wherein said metal comprises platinum.
36. camera lens according to claim 32, wherein said metal comprises gold.
37. camera lens according to claim 32 is wherein protected described metal by dielectric coating.
38. camera lens according to claim 32 is wherein protected described metal by the multilayer dielectric coating.
39. camera lens according to claim 25, the described reflecting surface of wherein said micro mirror is made by metal mixture.
40., wherein protect described metal mixture by dielectric coating according to the described camera lens of claim 39.
41., wherein protect described metal mixture by the multilayer dielectric coating according to the described camera lens of claim 39.
42. camera lens according to claim 25, the described reflecting surface of wherein said micro mirror is made by multilayer dielectric material.
43. camera lens according to claim 1, wherein said camera lens comprise a spatial light modulation device.
44. according to the described camera lens of claim 43, described spatial light modulation device compensates the phase error of the light that is caused by the medium between object and the image thereof.
45. according to the described camera lens of claim 43, wherein said spatial light modulation device aberration correction.
46. according to the described camera lens of claim 43, described spatial light modulation device is proofreaied and correct the deviation from the paraxial imagery rule.
47. according to the described camera lens of claim 43, described spatial light modulation device makes and to depart from the object image-forming of optical axis and need not macroscopic view machinery and move.
48. camera lens according to claim 1 is wherein controlled described micro mirror array camera lens and is satisfied in-phase conditions respectively with each wavelength to red, green, blue (RGB) wavelength, to obtain a chromatic image.
49. camera lens according to claim 1 is wherein controlled described camera lens to satisfy the in-phase conditions of a wavelength in a plurality of wavelength, to obtain a chromatic image.
50. camera lens according to claim 1 wherein by the lowest common multiple of red, green and blue light wavelength being used as the effective wavelength of phase condition, is controlled described camera lens to satisfy the in-phase conditions of colour imaging.
51. camera lens according to claim 1, wherein the described camera lens in location makes it rotatable about an axle in an optical system.
52. according to the described camera lens of claim 51, the surface curve of wherein said camera lens is about the Y-axis symmetry.
53. camera lens according to claim 1, wherein said camera lens is applicable to an imaging device.
54. according to the described camera lens of claim 53, wherein said imaging device has an optical zoom function.
55. according to the described camera lens of claim 53, wherein said imaging device has a digital zoom functions.
56. according to the described camera lens of claim 53, wherein said imaging device has an auto-focus function.
57. according to the described camera lens of claim 53, wherein said imaging device has a three-dimensional imaging function.
58. according to the described camera lens of claim 53, wherein said imaging device comprises the video monitoring camera.
59. according to the described camera lens of claim 58, wherein said video monitoring apparatus has the function that comprises optical zoom, automatic focus, three-dimensional imaging and digital zoom.
60. according to the described camera lens of claim 53, wherein said imaging device comprises a video camera.
61. according to the described camera lens of claim 60, wherein said video camera has the function that comprises optical zoom, automatic focus, three-dimensional imaging and digital zoom.
62. according to the described camera lens of claim 53, wherein said imaging device is applicable to a Portable assembly.
63. according to the described camera lens of claim 62, wherein said imaging device has the function that comprises optical zoom, automatic focus, three-dimensional imaging and digital zoom.
64. according to the described camera lens of claim 53, wherein said imaging device comprises a mobile phone camera.
65. according to the described camera lens of claim 64, wherein said mobile phone camera has the function that comprises optical zoom, automatic focus, three-dimensional imaging and digital zoom.
66. according to the described camera lens of claim 53, wherein said imaging device is applicable to TV.
67. according to the described camera lens of claim 66, the imaging device that wherein is integrated into described TV has the function that comprises optical zoom, automatic focus, three-dimensional imaging and digital zoom.
68. according to the described camera lens of claim 53, wherein said imaging device is applicable to mobile computer.
69. according to the described camera lens of claim 68, the imaging device that wherein is integrated into described mobile computer has the function that comprises optical zoom, automatic focus, three-dimensional imaging and digital zoom.
70. according to the described camera lens of claim 53, wherein said imaging device is applicable to a computing machine.
71. according to the described camera lens of claim 70, the imaging device that wherein is integrated into described computing machine has the function of the optical zoom of comprising, automatic focus, three-dimensional imaging and digital zoom.
72. according to the described camera lens of claim 53, wherein this imaging device is applicable to a computer monitor.
73. according to the described camera lens of claim 72, the imaging device that wherein is integrated into described computer monitor has the function that comprises optical zoom, automatic focus, three-dimensional imaging and digital zoom.
74. according to the described camera lens of claim 53, wherein said imaging device is applicable to a portable digital assistant (PDA).
75. according to the described camera lens of claim 74, the imaging device of wherein integrating described portable digital assistant (PDA) has the function that comprises optical zoom, automatic focus, three-dimensional imaging and digital zoom.
76. according to the described camera lens of claim 53, wherein said imaging device is applicable to a pattern recognition system.
77. according to the described camera lens of claim 76, wherein said pattern recognition system is applicable to a mobile phone.
78. according to the described camera lens of claim 53, wherein said imaging device is applicable to a Motion Recognition system.
79. according to the described camera lens of claim 78, wherein said Motion Recognition system is applicable to a mobile phone.
80. according to the described camera lens of claim 53, wherein said imaging device is applicable to an endoscope.
81. camera lens according to claim 1, wherein said camera lens is applicable to a three-dimensional display apparatus.
82. camera lens according to claim 1, wherein said camera lens are applicable to two-dimensional projection's display device.
83. 2 described camera lenses according to Claim 8, wherein said two-dimensional projection display device is applicable to a portable apparatus.
84. 3 described camera lenses according to Claim 8, wherein said portable apparatus comprises a mobile phone.
85. 2 described camera lenses according to Claim 8, wherein said two-dimensional projection display device projection one keyboard image.
86. camera lens according to claim 1, wherein said camera lens is applicable to a three-dimensional image forming apparatus.
87. 6 described camera lenses according to Claim 8, wherein said three-dimensional image forming apparatus is applicable to a three dimensional pattern recognition system.
88. 7 described camera lenses according to Claim 8, wherein said three dimensional pattern recognition system is applicable to a mobile phone.
89. 5 described camera lenses according to Claim 8, wherein said three-dimensional image forming apparatus is applicable to a three-dimensional motion recognition system.
90. 9 described camera lenses according to Claim 8, wherein said three-dimensional motion recognition system is applicable to a mobile phone.
91. 9 described camera lenses according to Claim 8, wherein said three-dimensional motion recognition system is applicable to the collision avoidance system of an automobile.
92. 6 described camera lenses according to Claim 8, wherein said three-dimensional image forming apparatus is applicable to a three-dimensional endoscope.
93. camera lens according to claim 1, wherein said camera lens is applicable to an apparatus for reading of bar code.
94. camera lens according to claim 1, wherein said camera lens are applicable to an optical imaging device.
95. camera lens according to claim 1, wherein said camera lens are applicable to that a light beam focuses on and scanning system.
96. according to the described camera lens of claim 95, wherein said light beam focuses on and scanning system is applicable to a printer.
97. according to the described camera lens of claim 95, wherein said light beam focuses on and scanning system is applicable to the one scan instrument.
98. camera lens according to claim 1, wherein said camera lens is applicable to an optical tracking system.
99. according to the described camera lens of claim 98, wherein said optical tracking system is applicable to 3D mouse.
100. camera lens according to claim 1, wherein said camera lens are applicable to a three-dimension integrally imaging and a display system.
101. camera lens according to claim 1, wherein said camera lens are applicable to an imaging stabilizer arrangement.
Applications Claiming Priority (2)
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| US11/191,886 | 2005-07-28 | ||
| US11/191,886 US7095548B1 (en) | 2005-07-28 | 2005-07-28 | Micromirror array lens with free surface |
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| CN101288015A true CN101288015A (en) | 2008-10-15 |
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| CNA2006800276068A Pending CN101288015A (en) | 2005-07-28 | 2006-07-28 | Micromirror array lens with free surface |
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| US (1) | US7095548B1 (en) |
| JP (1) | JP2009503590A (en) |
| KR (1) | KR20080037059A (en) |
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| CN103631080A (en) * | 2013-12-12 | 2014-03-12 | 北京理工大学 | Periscopic three-dimensional display device based on single projector and reflective scattering screen |
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- 2006-07-28 BR BRPI0614007-6A patent/BRPI0614007A2/en not_active IP Right Cessation
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103631080A (en) * | 2013-12-12 | 2014-03-12 | 北京理工大学 | Periscopic three-dimensional display device based on single projector and reflective scattering screen |
| CN103631080B (en) * | 2013-12-12 | 2017-01-11 | 北京理工大学 | Periscopic three-dimensional display device based on single projector and reflective scattering screen |
Also Published As
| Publication number | Publication date |
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| JP2009503590A (en) | 2009-01-29 |
| TWI311204B (en) | 2009-06-21 |
| CA2616899A1 (en) | 2007-02-01 |
| TW200704961A (en) | 2007-02-01 |
| BRPI0614007A2 (en) | 2012-11-27 |
| WO2007014387A3 (en) | 2007-04-05 |
| KR20080037059A (en) | 2008-04-29 |
| EA200800450A1 (en) | 2008-12-30 |
| MX2008001287A (en) | 2008-03-24 |
| WO2007014387A2 (en) | 2007-02-01 |
| IL189058A0 (en) | 2008-08-07 |
| US7095548B1 (en) | 2006-08-22 |
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