CN101276708A - 一种静电推拉式单晶硅梁射频微机电系统开关 - Google Patents
一种静电推拉式单晶硅梁射频微机电系统开关 Download PDFInfo
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- CN101276708A CN101276708A CNA2007100648796A CN200710064879A CN101276708A CN 101276708 A CN101276708 A CN 101276708A CN A2007100648796 A CNA2007100648796 A CN A2007100648796A CN 200710064879 A CN200710064879 A CN 200710064879A CN 101276708 A CN101276708 A CN 101276708A
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CN2007100648796A CN101276708B (zh) | 2007-03-28 | 2007-03-28 | 一种静电推拉式单晶硅梁射频微机电系统开关 |
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CN2007100648796A CN101276708B (zh) | 2007-03-28 | 2007-03-28 | 一种静电推拉式单晶硅梁射频微机电系统开关 |
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CN101276708A true CN101276708A (zh) | 2008-10-01 |
CN101276708B CN101276708B (zh) | 2010-08-18 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102486972A (zh) * | 2011-09-01 | 2012-06-06 | 中国科学院上海微系统与信息技术研究所 | 双通道射频mems开关及其制造方法 |
CN103552978A (zh) * | 2013-11-14 | 2014-02-05 | 东南大学 | 一种偏转式助回复型mems悬挂梁结构 |
WO2023201488A1 (zh) * | 2022-04-18 | 2023-10-26 | 京东方科技集团股份有限公司 | 微机电系统开关及通信装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6686820B1 (en) * | 2002-07-11 | 2004-02-03 | Intel Corporation | Microelectromechanical (MEMS) switching apparatus |
KR100485787B1 (ko) * | 2002-08-20 | 2005-04-28 | 삼성전자주식회사 | 마이크로 스위치 |
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2007
- 2007-03-28 CN CN2007100648796A patent/CN101276708B/zh active Active
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102486972A (zh) * | 2011-09-01 | 2012-06-06 | 中国科学院上海微系统与信息技术研究所 | 双通道射频mems开关及其制造方法 |
CN102486972B (zh) * | 2011-09-01 | 2014-10-22 | 中国科学院上海微系统与信息技术研究所 | 双通道射频mems开关及其制造方法 |
CN103552978A (zh) * | 2013-11-14 | 2014-02-05 | 东南大学 | 一种偏转式助回复型mems悬挂梁结构 |
WO2023201488A1 (zh) * | 2022-04-18 | 2023-10-26 | 京东方科技集团股份有限公司 | 微机电系统开关及通信装置 |
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CN101276708B (zh) | 2010-08-18 |
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Owner name: INST OF MICROELECTRONICS, C. A. S Effective date: 20130422 Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHA Free format text: FORMER OWNER: INST OF MICROELECTRONICS, C. A. S Effective date: 20130422 |
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Effective date of registration: 20130422 Address after: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee after: Semiconductor Manufacturing International (Shanghai) Corporation Patentee after: Institute of Microelectronics, Chinese Academy of Sciences Address before: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee before: Institute of Microelectronics, Chinese Academy of Sciences |